The database of backscattering factor for quantitative analysis by Auger electron spectroscopy(AES)
Material	Al
Auger Transition	KL23L23
Backscattering Factor	for emission angle of Auger electrons
	for tilt angle of CMA axis
	for special CMA with coaxial electron gun
	for tilt angle of CHA entrance lens axis
	for special CHA the entrance lens axis of which is 60 deg away from the electron beam

Material		Al
Auger Transition		LVV
Backscattering Factor		for emission angle of Auger electrons
		for tilt angle of CMA axis
		for special CMA with coaxial electron gun
		for tilt angle of CHA entrance lens axis
		for special CHA the entrance lens axis of which is 60 deg away from the electron beam
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