Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Al 13 LVV 0.068 0.072 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 1.72835 1.0 10. 1.72925 1.0 20. 1.74578 1.0 30. 1.76178 1.0 40. 1.78761 1.0 45. 1.79810 1.0 50. 1.80719 1.0 60. 1.80332 1.0 70. 1.73557 1.0 75. 1.63352 1.0 80. 1.41018 1.0 81. 1.34355 1.0 82. 1.26332 1.0 83. 1.16933 1.0 84. 1.06241 1.0 85. 0.93738 1.0 86. 0.79460 1.0 87. 0.61709 1.0 88. 0.45106 1.0 89. 0.25488 2.0 0. 1.65089 2.0 10. 1.65733 2.0 20. 1.67296 2.0 30. 1.69869 2.0 40. 1.73577 2.0 45. 1.75349 2.0 50. 1.77126 2.0 60. 1.79703 2.0 70. 1.77629 2.0 75. 1.72508 2.0 80. 1.59230 2.0 81. 1.54557 2.0 82. 1.48694 2.0 83. 1.41138 2.0 84. 1.31666 2.0 85. 1.17372 2.0 86. 1.04905 2.0 87. 0.84329 2.0 88. 0.63312 2.0 89. 0.35660 3.0 0. 1.60396 3.0 10. 1.60751 3.0 20. 1.63143 3.0 30. 1.66181 3.0 40. 1.69808 3.0 45. 1.72519 3.0 50. 1.74023 3.0 60. 1.76656 3.0 70. 1.76261 3.0 75. 1.73649 3.0 80. 1.65051 3.0 81. 1.61801 3.0 82. 1.57489 3.0 83. 1.51827 3.0 84. 1.44071 3.0 85. 1.33879 3.0 86. 1.20112 3.0 87. 1.01507 3.0 88. 0.76687 3.0 89. 0.44149 4.0 0. 1.58345 4.0 10. 1.58570 4.0 20. 1.60563 4.0 30. 1.63307 4.0 40. 1.67618 4.0 45. 1.69573 4.0 50. 1.71674 4.0 60. 1.74503 4.0 70. 1.74512 4.0 75. 1.73056 4.0 80. 1.67019 4.0 81. 1.65034 4.0 82. 1.61488 4.0 83. 1.57283 4.0 84. 1.51232 4.0 85. 1.42543 4.0 86. 1.30314 4.0 87. 1.12536 4.0 88. 0.87411 4.0 89. 0.51600 5.0 0. 1.55555 5.0 10. 1.56657 5.0 20. 1.58150 5.0 30. 1.61815 5.0 40. 1.65626 5.0 45. 1.67657 5.0 50. 1.69807 5.0 60. 1.73001 5.0 70. 1.73368 5.0 75. 1.71998 5.0 80. 1.67947 5.0 81. 1.66032 5.0 82. 1.63665 5.0 83. 1.60317 5.0 84. 1.55420 5.0 85. 1.48307 5.0 86. 1.37221 5.0 87. 1.20870 5.0 88. 0.95885 5.0 89. 0.58195 6.0 0. 1.54239 6.0 10. 1.54924 6.0 20. 1.56859 6.0 30. 1.60193 6.0 40. 1.63900 6.0 45. 1.66229 6.0 50. 1.68276 6.0 60. 1.71121 6.0 70. 1.72024 6.0 75. 1.71194 6.0 80. 1.67973 6.0 81. 1.66406 6.0 82. 1.64645 6.0 83. 1.61852 6.0 84. 1.57931 6.0 85. 1.51871 6.0 86. 1.42606 6.0 87. 1.27244 6.0 88. 1.02960 6.0 89. 0.63951 7.0 0. 1.53398 7.0 10. 1.53364 7.0 20. 1.55584 7.0 30. 1.59131 7.0 40. 1.63352 7.0 45. 1.65054 7.0 50. 1.67336 7.0 60. 1.70296 7.0 70. 1.70807 7.0 75. 1.70218 7.0 80. 1.67515 7.0 81. 1.66483 7.0 82. 1.65033 7.0 83. 1.62839 7.0 84. 1.59719 7.0 85. 1.54635 7.0 86. 1.46271 7.0 87. 1.32415 7.0 88. 1.08974 7.0 89. 0.69439 8.0 0. 1.52017 8.0 10. 1.52640 8.0 20. 1.54293 8.0 30. 1.57887 8.0 40. 1.62409 8.0 45. 1.64030 8.0 50. 1.66478 8.0 60. 1.69188 8.0 70. 1.70060 8.0 75. 1.69392 8.0 80. 1.67224 8.0 81. 1.66266 8.0 82. 1.65076 8.0 83. 1.63591 8.0 84. 1.60614 8.0 85. 1.56155 8.0 86. 1.49023 8.0 87. 1.36352 8.0 88. 1.14161 8.0 89. 0.74341 9.0 0. 1.51026 9.0 10. 1.51456 9.0 20. 1.53844 9.0 30. 1.57029 9.0 40. 1.61138 9.0 45. 1.63406 9.0 50. 1.65417 9.0 60. 1.68675 9.0 70. 1.69260 9.0 75. 1.68887 9.0 80. 1.66658 9.0 81. 1.65903 9.0 82. 1.64922 9.0 83. 1.63423 9.0 84. 1.61148 9.0 85. 1.57472 9.0 86. 1.50840 9.0 87. 1.39678 9.0 88. 1.18579 9.0 89. 0.78866 10.0 0. 1.49949 10.0 10. 1.51023 10.0 20. 1.53264 10.0 30. 1.56368 10.0 40. 1.60186 10.0 45. 1.62801 10.0 50. 1.64382 10.0 60. 1.67668 10.0 70. 1.68632 10.0 75. 1.67799 10.0 80. 1.66431 10.0 81. 1.65721 10.0 82. 1.64891 10.0 83. 1.63722 10.0 84. 1.61615 10.0 85. 1.58289 10.0 86. 1.52460 10.0 87. 1.42256 10.0 88. 1.22088 10.0 89. 0.82652 12.0 0. 1.48717 12.0 10. 1.49542 12.0 20. 1.51392 12.0 30. 1.55092 12.0 40. 1.59168 12.0 45. 1.61256 12.0 50. 1.63207 12.0 60. 1.66849 12.0 70. 1.67368 12.0 75. 1.67272 12.0 80. 1.65493 12.0 81. 1.64771 12.0 82. 1.64338 12.0 83. 1.63440 12.0 84. 1.62062 12.0 85. 1.59584 12.0 86. 1.54928 12.0 87. 1.46200 12.0 88. 1.27935 12.0 89. 0.89414 15.0 0. 1.47122 15.0 10. 1.47578 15.0 20. 1.49734 15.0 30. 1.53180 15.0 40. 1.57181 15.0 45. 1.59702 15.0 50. 1.62027 15.0 60. 1.64940 15.0 70. 1.66260 15.0 75. 1.65621 15.0 80. 1.64418 15.0 81. 1.63900 15.0 82. 1.63213 15.0 83. 1.62710 15.0 84. 1.61477 15.0 85. 1.60110 15.0 86. 1.56829 15.0 87. 1.49893 15.0 88. 1.34405 15.0 89. 0.97845 18.0 0. 1.45590 18.0 10. 1.46054 18.0 20. 1.48213 18.0 30. 1.51792 18.0 40. 1.56256 18.0 45. 1.58552 18.0 50. 1.60585 18.0 60. 1.64188 18.0 70. 1.65185 18.0 75. 1.64541 18.0 80. 1.63540 18.0 81. 1.63047 18.0 82. 1.62674 18.0 83. 1.61909 18.0 84. 1.61380 18.0 85. 1.59993 18.0 86. 1.57513 18.0 87. 1.52469 18.0 88. 1.38567 18.0 89. 1.04484 20.0 0. 1.44858 20.0 10. 1.45550 20.0 20. 1.47316 20.0 30. 1.51456 20.0 40. 1.55772 20.0 45. 1.57994 20.0 50. 1.60059 20.0 60. 1.63658 20.0 70. 1.64683 20.0 75. 1.64138 20.0 80. 1.62953 20.0 81. 1.62457 20.0 82. 1.62112 20.0 83. 1.61724 20.0 84. 1.60786 20.0 85. 1.60018 20.0 86. 1.58049 20.0 87. 1.53141 20.0 88. 1.41219 20.0 89. 1.08182 25.0 0. 1.43094 25.0 10. 1.43758 25.0 20. 1.45679 25.0 30. 1.49539 25.0 40. 1.53644 25.0 45. 1.56473 25.0 50. 1.58476 25.0 60. 1.62474 25.0 70. 1.63527 25.0 75. 1.62900 25.0 80. 1.61558 25.0 81. 1.61273 25.0 82. 1.61056 25.0 83. 1.60659 25.0 84. 1.60173 25.0 85. 1.59375 25.0 86. 1.58078 25.0 87. 1.54741 25.0 88. 1.45183 25.0 89. 1.15820 30.0 0. 1.41747 30.0 10. 1.42550 30.0 20. 1.44710 30.0 30. 1.48083 30.0 40. 1.53064 30.0 45. 1.55057 30.0 50. 1.57677 30.0 60. 1.61535 30.0 70. 1.62550 30.0 75. 1.62022 30.0 80. 1.60744 30.0 81. 1.60700 30.0 82. 1.60262 30.0 83. 1.59931 30.0 84. 1.59177 30.0 85. 1.58755 30.0 86. 1.57816 30.0 87. 1.55334 30.0 88. 1.47531 30.0 89. 1.21572 ____________________________________________________