Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Al 13 LVV 0.068 0.072 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 1.70626 1.0 10. 1.72025 1.0 20. 1.74841 1.0 30. 1.77373 1.0 40. 1.80529 1.0 45. 1.81737 1.0 50. 1.82727 1.0 60. 1.82246 1.0 70. 1.73889 1.0 75. 1.61573 1.0 80. 1.35706 1.0 81. 1.28203 1.0 82. 1.19391 1.0 83. 1.09330 1.0 84. 0.98104 1.0 85. 0.85286 1.0 86. 0.71106 1.0 87. 0.54165 1.0 88. 0.38736 1.0 89. 0.21360 2.0 0. 1.63555 2.0 10. 1.65101 2.0 20. 1.67484 2.0 30. 1.70742 2.0 40. 1.74893 2.0 45. 1.76829 2.0 50. 1.78783 2.0 60. 1.81610 2.0 70. 1.79346 2.0 75. 1.73219 2.0 80. 1.57256 2.0 81. 1.51710 2.0 82. 1.44832 2.0 83. 1.36174 2.0 84. 1.25579 2.0 85. 1.10283 2.0 86. 0.96842 2.0 87. 0.76076 2.0 88. 0.55517 2.0 89. 0.30174 3.0 0. 1.59165 3.0 10. 1.60252 3.0 20. 1.63297 3.0 30. 1.66869 3.0 40. 1.70890 3.0 45. 1.73724 3.0 50. 1.75354 3.0 60. 1.78294 3.0 70. 1.78074 3.0 75. 1.75063 3.0 80. 1.64757 3.0 81. 1.60804 3.0 82. 1.55642 3.0 83. 1.48873 3.0 84. 1.39889 3.0 85. 1.28259 3.0 86. 1.13112 3.0 87. 0.93400 3.0 88. 0.68392 3.0 89. 0.37725 4.0 0. 1.57298 4.0 10. 1.58146 4.0 20. 1.60694 4.0 30. 1.63902 4.0 40. 1.68525 4.0 45. 1.70593 4.0 50. 1.72805 4.0 60. 1.75921 4.0 70. 1.76224 4.0 75. 1.74640 4.0 80. 1.67569 4.0 81. 1.65077 4.0 82. 1.60845 4.0 83. 1.55714 4.0 84. 1.48516 4.0 85. 1.38373 4.0 86. 1.24483 4.0 87. 1.05133 4.0 88. 0.79067 4.0 89. 0.44500 5.0 0. 1.54652 5.0 10. 1.56282 5.0 20. 1.58264 5.0 30. 1.62349 5.0 40. 1.66402 5.0 45. 1.68563 5.0 50. 1.70795 5.0 60. 1.74257 5.0 70. 1.74924 5.0 75. 1.73598 5.0 80. 1.68948 5.0 81. 1.66670 5.0 82. 1.63779 5.0 83. 1.59684 5.0 84. 1.53768 5.0 85. 1.45286 5.0 86. 1.32493 5.0 87. 1.14231 5.0 88. 0.87753 5.0 89. 0.50627 6.0 0. 1.53413 6.0 10. 1.54583 6.0 20. 1.56960 6.0 30. 1.60676 6.0 40. 1.64631 6.0 45. 1.67032 6.0 50. 1.69198 6.0 60. 1.72270 6.0 70. 1.73436 6.0 75. 1.72752 6.0 80. 1.69194 6.0 81. 1.67394 6.0 82. 1.65223 6.0 83. 1.61819 6.0 84. 1.57058 6.0 85. 1.49736 6.0 86. 1.38759 6.0 87. 1.21387 6.0 88. 0.95163 6.0 89. 0.56081 7.0 0. 1.52646 7.0 10. 1.53054 7.0 20. 1.55681 7.0 30. 1.59588 7.0 40. 1.64024 7.0 45. 1.65799 7.0 50. 1.68166 7.0 60. 1.71341 7.0 70. 1.72136 7.0 75. 1.71677 7.0 80. 1.68860 7.0 81. 1.67657 7.0 82. 1.65929 7.0 83. 1.63231 7.0 84. 1.59397 7.0 85. 1.53215 7.0 86. 1.43228 7.0 87. 1.27282 7.0 88. 1.01596 7.0 89. 0.61349 8.0 0. 1.51305 8.0 10. 1.52344 8.0 20. 1.54385 8.0 30. 1.58291 8.0 40. 1.63022 8.0 45. 1.64708 8.0 50. 1.67223 8.0 60. 1.70172 8.0 70. 1.71258 8.0 75. 1.70772 8.0 80. 1.68609 8.0 81. 1.67519 8.0 82. 1.66129 8.0 83. 1.64274 8.0 84. 1.60698 8.0 85. 1.55280 8.0 86. 1.46667 8.0 87. 1.31922 8.0 88. 1.07233 8.0 89. 0.66126 9.0 0. 1.50366 9.0 10. 1.51175 9.0 20. 1.53931 9.0 30. 1.57418 9.0 40. 1.61729 9.0 45. 1.64040 9.0 50. 1.66137 9.0 60. 1.69595 9.0 70. 1.70409 9.0 75. 1.70197 9.0 80. 1.68021 9.0 81. 1.67193 9.0 82. 1.66089 9.0 83. 1.64223 9.0 84. 1.61523 9.0 85. 1.56997 9.0 86. 1.49064 9.0 87. 1.35861 9.0 88. 1.12121 9.0 89. 0.70619 10.0 0. 1.49334 10.0 10. 1.50762 10.0 20. 1.53347 10.0 30. 1.56727 10.0 40. 1.60750 10.0 45. 1.63413 10.0 50. 1.65063 10.0 60. 1.68528 10.0 70. 1.69721 10.0 75. 1.69068 10.0 80. 1.67790 10.0 81. 1.67039 10.0 82. 1.66109 10.0 83. 1.64710 10.0 84. 1.62198 10.0 85. 1.58194 10.0 86. 1.51141 10.0 87. 1.38948 10.0 88. 1.16079 10.0 89. 0.74439 12.0 0. 1.48122 12.0 10. 1.49304 12.0 20. 1.51468 12.0 30. 1.55432 12.0 40. 1.59666 12.0 45. 1.61801 12.0 50. 1.63840 12.0 60. 1.67632 12.0 70. 1.68355 12.0 75. 1.68407 12.0 80. 1.66785 12.0 81. 1.66080 12.0 82. 1.65592 12.0 83. 1.64580 12.0 84. 1.62936 12.0 85. 1.59920 12.0 86. 1.54285 12.0 87. 1.43736 12.0 88. 1.22726 12.0 89. 0.81341 15.0 0. 1.46590 15.0 10. 1.47369 15.0 20. 1.49803 15.0 30. 1.53479 15.0 40. 1.57629 15.0 45. 1.60199 15.0 50. 1.62575 15.0 60. 1.65625 15.0 70. 1.67119 15.0 75. 1.66614 15.0 80. 1.65609 15.0 81. 1.65134 15.0 82. 1.64476 15.0 83. 1.63910 15.0 84. 1.62550 15.0 85. 1.60881 15.0 86. 1.56834 15.0 87. 1.48392 15.0 88. 1.30268 15.0 89. 0.90198 18.0 0. 1.45114 18.0 10. 1.45854 18.0 20. 1.48278 18.0 30. 1.52073 18.0 40. 1.56663 18.0 45. 1.59030 18.0 50. 1.61106 18.0 60. 1.64787 18.0 70. 1.65935 18.0 75. 1.65341 18.0 80. 1.64638 18.0 81. 1.64206 18.0 82. 1.63849 18.0 83. 1.63097 18.0 84. 1.62538 18.0 85. 1.60919 18.0 86. 1.57962 18.0 87. 1.51677 18.0 88. 1.35142 18.0 89. 0.97324 20.0 0. 1.44416 20.0 10. 1.45355 20.0 20. 1.47372 20.0 30. 1.51728 20.0 40. 1.56155 20.0 45. 1.58432 20.0 50. 1.60550 20.0 60. 1.64232 20.0 70. 1.65405 20.0 75. 1.64966 20.0 80. 1.63991 20.0 81. 1.63556 20.0 82. 1.63245 20.0 83. 1.62898 20.0 84. 1.61933 20.0 85. 1.61031 20.0 86. 1.58665 20.0 87. 1.52698 20.0 88. 1.38430 20.0 89. 1.01397 25.0 0. 1.42681 25.0 10. 1.43575 25.0 20. 1.45733 25.0 30. 1.49775 25.0 40. 1.53980 25.0 45. 1.56876 25.0 50. 1.58912 25.0 60. 1.63007 25.0 70. 1.64187 25.0 75. 1.63638 25.0 80. 1.62467 25.0 81. 1.62220 25.0 82. 1.62057 25.0 83. 1.61736 25.0 84. 1.61249 25.0 85. 1.60457 25.0 86. 1.58914 25.0 87. 1.54845 25.0 88. 1.43360 25.0 89. 1.09907 30.0 0. 1.41367 30.0 10. 1.42407 30.0 20. 1.44762 30.0 30. 1.48290 30.0 40. 1.53411 30.0 45. 1.55436 30.0 50. 1.58071 30.0 60. 1.62014 30.0 70. 1.63130 30.0 75. 1.62652 30.0 80. 1.61545 30.0 81. 1.61566 30.0 82. 1.61161 30.0 83. 1.60917 30.0 84. 1.60222 30.0 85. 1.59826 30.0 86. 1.58770 30.0 87. 1.55785 30.0 88. 1.46419 30.0 89. 1.16440 ____________________________________________________