J.W. Zhang,
Z.P. Wang and Z.M. Zhang
Chapter 3. Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam
《Recent Advances in Nanofabrication Techniques and Applications》
(Ed. B. Cui, InTech-Open Access Publisher, 2011) p51-68.