The database of backscattering factor    

 for quantitative analysis by Auger electron spectroscopy(AES)

Material  

Ta              

Auger Transition

M5N67N67

 

    Backscattering Factor    

for emission angle of Auger electrons 

for tilt angle of CMA axis

for special  CMA  with coaxial electron gun 

for tilt angle of CHA entrance lens axis

for special  CHA  the entrance lens axis of which is 60 deg away from  the electron beam 

 

Material  

Ta              

Auger Transition

NVV

 

    Backscattering Factor    

for emission angle of Auger electrons 

for tilt angle of CMA axis

for special  CMA  with coaxial electron gun 

for tilt angle of CHA entrance lens axis

for special  CHA  the entrance lens axis of which is 60 deg away from  the electron beam 

 

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