Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Ta 73 N5VV 0.180 0.226 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 1.86556 1.0 10. 1.86473 1.0 20. 1.86008 1.0 30. 1.84992 1.0 40. 1.81650 1.0 45. 1.78968 1.0 50. 1.75284 1.0 60. 1.63922 1.0 70. 1.41970 1.0 75. 1.23461 1.0 80. 0.95865 1.0 81. 0.87136 1.0 82. 0.81107 1.0 83. 0.73088 1.0 84. 0.64416 1.0 85. 0.55118 1.0 86. 0.45407 1.0 87. 0.35368 1.0 88. 0.22815 1.0 89. 0.15574 2.0 0. 2.06443 2.0 10. 2.06194 2.0 20. 2.04993 2.0 30. 2.03000 2.0 40. 2.00575 2.0 45. 1.98862 2.0 50. 1.96121 2.0 60. 1.86992 2.0 70. 1.67930 2.0 75. 1.50448 2.0 80. 1.22087 2.0 81. 1.14411 2.0 82. 1.05865 2.0 83. 0.96402 2.0 84. 0.85861 2.0 85. 0.74179 2.0 86. 0.61488 2.0 87. 0.47860 2.0 88. 0.33559 2.0 89. 0.19325 3.0 0. 2.11396 3.0 10. 2.11325 3.0 20. 2.10393 3.0 30. 2.08503 3.0 40. 2.05833 3.0 45. 2.04043 3.0 50. 2.01019 3.0 60. 1.91829 3.0 70. 1.74674 3.0 75. 1.59300 3.0 80. 1.33467 3.0 81. 1.26209 3.0 82. 1.15410 3.0 83. 1.08497 3.0 84. 0.97661 3.0 85. 0.85310 3.0 86. 0.71534 3.0 87. 0.55913 3.0 88. 0.39175 3.0 89. 0.21915 4.0 0. 2.13176 4.0 10. 2.12685 4.0 20. 2.11891 4.0 30. 2.10521 4.0 40. 2.07435 4.0 45. 2.05110 4.0 50. 2.02192 4.0 60. 1.92941 4.0 70. 1.76767 4.0 75. 1.63422 4.0 80. 1.40401 4.0 81. 1.33660 4.0 82. 1.25916 4.0 83. 1.16790 4.0 84. 1.06026 4.0 85. 0.93580 4.0 86. 0.78995 4.0 87. 0.62188 4.0 88. 0.43812 4.0 89. 0.24257 5.0 0. 2.13536 5.0 10. 2.13382 5.0 20. 2.12609 5.0 30. 2.10689 5.0 40. 2.07614 5.0 45. 2.05059 5.0 50. 2.02109 5.0 60. 1.92876 5.0 70. 1.77994 5.0 75. 1.65707 5.0 80. 1.45249 5.0 81. 1.38981 5.0 82. 1.31528 5.0 83. 1.22893 5.0 84. 1.12409 5.0 85. 1.00118 5.0 86. 0.85247 5.0 87. 0.67893 5.0 88. 0.47886 5.0 89. 0.26251 6.0 0. 2.13943 6.0 10. 2.14113 6.0 20. 2.12522 6.0 30. 2.11197 6.0 40. 2.07528 6.0 45. 2.05075 6.0 50. 2.01727 6.0 60. 1.92529 6.0 70. 1.78390 6.0 75. 1.67402 6.0 80. 1.48772 6.0 81. 1.42795 6.0 82. 1.35958 6.0 83. 1.27834 6.0 84. 1.17712 6.0 85. 1.05578 6.0 86. 0.90718 6.0 87. 0.72615 6.0 88. 0.51595 6.0 89. 0.28222 7.0 0. 2.14206 7.0 10. 2.13966 7.0 20. 2.13067 7.0 30. 2.10644 7.0 40. 2.07024 7.0 45. 2.04325 7.0 50. 2.01492 7.0 60. 1.92133 7.0 70. 1.78440 7.0 75. 1.68304 7.0 80. 1.51187 7.0 81. 1.46049 7.0 82. 1.39602 7.0 83. 1.31803 7.0 84. 1.22105 7.0 85. 1.10262 7.0 86. 0.95477 7.0 87. 0.77029 7.0 88. 0.55030 7.0 89. 0.30074 8.0 0. 2.13740 8.0 10. 2.13457 8.0 20. 2.12424 8.0 30. 2.10133 8.0 40. 2.06777 8.0 45. 2.04155 8.0 50. 2.00775 8.0 60. 1.91868 8.0 70. 1.78679 8.0 75. 1.69019 8.0 80. 1.53416 8.0 81. 1.48315 8.0 82. 1.42432 8.0 83. 1.35161 8.0 84. 1.25947 8.0 85. 1.11685 8.0 86. 0.99702 8.0 87. 0.81040 8.0 88. 0.58246 8.0 89. 0.31832 9.0 0. 2.13981 9.0 10. 2.13294 9.0 20. 2.12207 9.0 30. 2.09818 9.0 40. 2.06201 9.0 45. 2.03695 9.0 50. 2.00507 9.0 60. 1.91415 9.0 70. 1.78609 9.0 75. 1.69597 9.0 80. 1.55066 9.0 81. 1.50336 9.0 82. 1.44770 9.0 83. 1.37855 9.0 84. 1.29144 9.0 85. 1.17771 9.0 86. 1.03409 9.0 87. 0.84709 9.0 88. 0.61271 9.0 89. 0.33568 10.0 0. 2.13969 10.0 10. 2.13334 10.0 20. 2.11739 10.0 30. 2.09738 10.0 40. 2.05914 10.0 45. 2.03133 10.0 50. 1.99682 10.0 60. 1.90743 10.0 70. 1.78564 10.0 75. 1.69958 10.0 80. 1.56338 10.0 81. 1.51581 10.0 82. 1.46865 10.0 83. 1.38054 10.0 84. 1.31740 10.0 85. 1.20843 10.0 86. 1.06624 10.0 87. 0.87997 10.0 88. 0.63937 10.0 89. 0.35036 12.0 0. 2.13450 12.0 10. 2.13107 12.0 20. 2.11352 12.0 30. 2.09162 12.0 40. 2.04925 12.0 45. 2.02237 12.0 50. 1.98995 12.0 60. 1.90276 12.0 70. 1.78126 12.0 75. 1.70290 12.0 80. 1.58435 12.0 81. 1.54601 12.0 82. 1.49894 12.0 83. 1.44067 12.0 84. 1.36545 12.0 85. 1.26078 12.0 86. 1.12313 12.0 87. 0.93547 12.0 88. 0.68725 12.0 89. 0.37818 15.0 0. 2.12603 15.0 10. 2.12020 15.0 20. 2.11255 15.0 30. 2.08434 15.0 40. 2.03972 15.0 45. 2.01224 15.0 50. 1.97857 15.0 60. 1.88942 15.0 70. 1.77350 15.0 75. 1.70353 15.0 80. 1.60372 15.0 81. 1.57325 15.0 82. 1.53306 15.0 83. 1.48157 15.0 84. 1.41431 15.0 85. 1.32018 15.0 86. 1.19019 15.0 87. 1.00760 15.0 88. 0.75151 15.0 89. 0.41712 18.0 0. 2.11976 18.0 10. 2.11567 18.0 20. 2.09922 18.0 30. 2.07393 18.0 40. 2.02787 18.0 45. 2.00326 18.0 50. 1.96715 18.0 60. 1.87988 18.0 70. 1.76631 18.0 75. 1.70112 18.0 80. 1.61467 18.0 81. 1.58719 18.0 82. 1.54695 18.0 83. 1.51031 18.0 84. 1.45067 18.0 85. 1.36794 18.0 86. 1.24449 18.0 87. 1.06528 18.0 88. 0.80602 18.0 89. 0.45252 20.0 0. 2.11917 20.0 10. 2.11087 20.0 20. 2.09692 20.0 30. 2.06504 20.0 40. 2.02387 20.0 45. 1.99536 20.0 50. 1.96152 20.0 60. 1.87031 20.0 70. 1.76529 20.0 75. 1.70088 20.0 80. 1.61876 20.0 81. 1.59537 20.0 82. 1.56554 20.0 83. 1.52482 20.0 84. 1.47061 20.0 85. 1.39201 20.0 86. 1.27427 20.0 87. 1.09916 20.0 88. 0.83856 20.0 89. 0.47436 25.0 0. 2.11072 25.0 10. 2.10533 25.0 20. 2.08865 25.0 30. 2.06014 25.0 40. 2.01126 25.0 45. 1.98585 25.0 50. 1.95082 25.0 60. 1.86504 25.0 70. 1.75394 25.0 75. 1.69238 25.0 80. 1.62629 25.0 81. 1.60624 25.0 82. 1.58185 25.0 83. 1.54798 25.0 84. 1.50487 25.0 85. 1.43871 25.0 86. 1.33447 25.0 87. 1.17153 25.0 88. 0.91086 25.0 89. 0.52509 30.0 0. 2.10503 30.0 10. 2.09724 30.0 20. 2.08254 30.0 30. 2.05421 30.0 40. 2.00311 30.0 45. 1.97306 30.0 50. 1.93732 30.0 60. 1.85279 30.0 70. 1.74560 30.0 75. 1.68684 30.0 80. 1.62351 30.0 81. 1.60990 30.0 82. 1.58924 30.0 83. 1.56341 30.0 84. 1.52585 30.0 85. 1.46914 30.0 86. 1.37764 30.0 87. 1.22522 30.0 88. 0.97066 30.0 89. 0.57071 ____________________________________________________