Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Ta 73 N5VV 0.180 0.226 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 1.84257 1.0 10. 1.85643 1.0 20. 1.86345 1.0 30. 1.85951 1.0 40. 1.82457 1.0 45. 1.79310 1.0 50. 1.74929 1.0 60. 1.61049 1.0 70. 1.34369 1.0 75. 1.13065 1.0 80. 0.83556 1.0 81. 0.74999 1.0 82. 0.68914 1.0 83. 0.61249 1.0 84. 0.53171 1.0 85. 0.44785 1.0 86. 0.36269 1.0 87. 0.27759 1.0 88. 0.17852 1.0 89. 0.11795 2.0 0. 2.02864 2.0 10. 2.04773 2.0 20. 2.05482 2.0 30. 2.04843 2.0 40. 2.03027 2.0 45. 2.01217 2.0 50. 1.98208 2.0 60. 1.87748 2.0 70. 1.64897 2.0 75. 1.43921 2.0 80. 1.11501 2.0 81. 1.03143 2.0 82. 0.94047 2.0 83. 0.84308 2.0 84. 0.73785 2.0 85. 0.62527 2.0 86. 0.50751 2.0 87. 0.38613 2.0 88. 0.26424 2.0 89. 0.14837 3.0 0. 2.07808 3.0 10. 2.09898 3.0 20. 2.10864 3.0 30. 2.10381 3.0 40. 2.08366 3.0 45. 2.06660 3.0 50. 2.03514 3.0 60. 1.93676 3.0 70. 1.73728 3.0 75. 1.55177 3.0 80. 1.24631 3.0 81. 1.16380 3.0 82. 1.05026 3.0 83. 0.96996 3.0 84. 0.85688 3.0 85. 0.73273 3.0 86. 0.60000 3.0 87. 0.45669 3.0 88. 0.31091 3.0 89. 0.16861 4.0 0. 2.09810 4.0 10. 2.11360 4.0 20. 2.12320 4.0 30. 2.12249 4.0 40. 2.09833 4.0 45. 2.07627 4.0 50. 2.04668 4.0 60. 1.95074 4.0 70. 1.76903 4.0 75. 1.60820 4.0 80. 1.33018 4.0 81. 1.25128 4.0 82. 1.16197 4.0 83. 1.06016 4.0 84. 0.94425 4.0 85. 0.81512 4.0 86. 0.67071 4.0 87. 0.51211 4.0 88. 0.34984 4.0 89. 0.18699 5.0 0. 2.10510 5.0 10. 2.12193 5.0 20. 2.12997 5.0 30. 2.12286 5.0 40. 2.09834 5.0 45. 2.07414 5.0 50. 2.04521 5.0 60. 1.95053 5.0 70. 1.78703 5.0 75. 1.64127 5.0 80. 1.39073 5.0 81. 1.31563 5.0 82. 1.22809 5.0 83. 1.12908 5.0 84. 1.01292 5.0 85. 0.88211 5.0 86. 0.73130 5.0 87. 0.56488 5.0 88. 0.38463 5.0 89. 0.20277 6.0 0. 2.11210 6.0 10. 2.12999 6.0 20. 2.12880 6.0 30. 2.12651 6.0 40. 2.09617 6.0 45. 2.07248 6.0 50. 2.03977 6.0 60. 1.94698 6.0 70. 1.79472 6.0 75. 1.66562 6.0 80. 1.43558 6.0 81. 1.36360 6.0 82. 1.28176 6.0 83. 1.18594 6.0 84. 1.07157 6.0 85. 0.93926 6.0 86. 0.78538 6.0 87. 0.60840 6.0 88. 0.41673 6.0 89. 0.21846 7.0 0. 2.11673 7.0 10. 2.12953 7.0 20. 2.13395 7.0 30. 2.12012 7.0 40. 2.08983 7.0 45. 2.06376 7.0 50. 2.03645 7.0 60. 1.94255 7.0 70. 1.79766 7.0 75. 1.68000 7.0 80. 1.46871 7.0 81. 1.40479 7.0 82. 1.32631 7.0 83. 1.23339 7.0 84. 1.12175 7.0 85. 0.98968 7.0 86. 0.83357 7.0 87. 0.65041 7.0 88. 0.44674 7.0 89. 0.23331 8.0 0. 2.11375 8.0 10. 2.12504 8.0 20. 2.12725 8.0 30. 2.11405 8.0 40. 2.08608 8.0 45. 2.06094 8.0 50. 2.02760 8.0 60. 1.93981 8.0 70. 1.80144 8.0 75. 1.69124 8.0 80. 1.49835 8.0 81. 1.43441 8.0 82. 1.36248 8.0 83. 1.27404 8.0 84. 1.16578 8.0 85. 1.01251 8.0 86. 0.87729 8.0 87. 0.68903 8.0 88. 0.47536 8.0 89. 0.24754 9.0 0. 2.11798 9.0 10. 2.12409 9.0 20. 2.12491 9.0 30. 2.10992 9.0 40. 2.07896 9.0 45. 2.05522 9.0 50. 2.02405 9.0 60. 1.93423 9.0 70. 1.80184 9.0 75. 1.70002 9.0 80. 1.52114 9.0 81. 1.46212 9.0 82. 1.39268 9.0 83. 1.30808 9.0 84. 1.20356 9.0 85. 1.07331 9.0 86. 0.91630 9.0 87. 0.72493 9.0 88. 0.50254 9.0 89. 0.26169 10.0 0. 2.11890 10.0 10. 2.12507 10.0 20. 2.12006 10.0 30. 2.10860 10.0 40. 2.07519 10.0 45. 2.04855 10.0 50. 2.01501 10.0 60. 1.92690 10.0 70. 1.80196 10.0 75. 1.70623 10.0 80. 1.53886 10.0 81. 1.47815 10.0 82. 1.41971 10.0 83. 1.31713 10.0 84. 1.23497 10.0 85. 1.10818 10.0 86. 0.95056 10.0 87. 0.75735 10.0 88. 0.52674 10.0 89. 0.27375 12.0 0. 2.11566 12.0 10. 2.12359 12.0 20. 2.11595 12.0 30. 2.10173 12.0 40. 2.06404 12.0 45. 2.03783 12.0 50. 2.00651 12.0 60. 1.92083 12.0 70. 1.79836 12.0 75. 1.71318 12.0 80. 1.56887 12.0 81. 1.52016 12.0 82. 1.45977 12.0 83. 1.38604 12.0 84. 1.29270 12.0 85. 1.16863 12.0 86. 1.01255 12.0 87. 0.81353 12.0 88. 0.57113 12.0 89. 0.29691 15.0 0. 2.11009 15.0 10. 2.11381 15.0 20. 2.11470 15.0 30. 2.09320 15.0 40. 2.05247 15.0 45. 2.02581 15.0 50. 1.99299 15.0 60. 1.90567 15.0 70. 1.79023 15.0 75. 1.71657 15.0 80. 1.59717 15.0 81. 1.55785 15.0 82. 1.50665 15.0 83. 1.44047 15.0 84. 1.35509 15.0 85. 1.23971 15.0 86. 1.08748 15.0 87. 0.88777 15.0 88. 0.63160 15.0 89. 0.32954 18.0 0. 2.10538 18.0 10. 2.10998 18.0 20. 2.10107 18.0 30. 2.08147 18.0 40. 2.03923 18.0 45. 2.01539 18.0 50. 1.97995 18.0 60. 1.89477 18.0 70. 1.78247 18.0 75. 1.71521 18.0 80. 1.61425 18.0 81. 1.57957 18.0 82. 1.52711 18.0 83. 1.47950 18.0 84. 1.40251 18.0 85. 1.29792 18.0 86. 1.14996 18.0 87. 0.94931 18.0 88. 0.68425 18.0 89. 0.35995 20.0 0. 2.10541 20.0 10. 2.10548 20.0 20. 2.09868 20.0 30. 2.07224 20.0 40. 2.03424 20.0 45. 2.00645 20.0 50. 1.97330 20.0 60. 1.88415 20.0 70. 1.78075 20.0 75. 1.71565 20.0 80. 1.62155 20.0 81. 1.59196 20.0 82. 1.55262 20.0 83. 1.49960 20.0 84. 1.42851 20.0 85. 1.32823 20.0 86. 1.18557 20.0 87. 0.98646 20.0 88. 0.71630 20.0 89. 0.37879 25.0 0. 2.09934 25.0 10. 2.10075 25.0 20. 2.09017 25.0 30. 2.06643 25.0 40. 2.02023 25.0 45. 1.99551 25.0 50. 1.96110 25.0 60. 1.87679 25.0 70. 1.76835 25.0 75. 1.70717 25.0 80. 1.63431 25.0 81. 1.60968 25.0 82. 1.57824 25.0 83. 1.53381 25.0 84. 1.47555 25.0 85. 1.38891 25.0 86. 1.25804 25.0 87. 1.06673 25.0 88. 0.78867 25.0 89. 0.42315 30.0 0. 2.09503 30.0 10. 2.09318 30.0 20. 2.08382 30.0 30. 2.05975 30.0 40. 2.01098 30.0 45. 1.98158 30.0 50. 1.94660 30.0 60. 1.86349 30.0 70. 1.75887 30.0 75. 1.70131 30.0 80. 1.63429 30.0 81. 1.61733 30.0 82. 1.59146 30.0 83. 1.55689 30.0 84. 1.50673 30.0 85. 1.43074 30.0 86. 1.31283 30.0 87. 1.12925 30.0 88. 0.85042 30.0 89. 0.46367 ____________________________________________________