M.S.S. Khan, S.F. Mao, Y.B. Zou, Y.G. Li, B. Da and Z.J. Ding
Uncertainty Evaluation of Monte Carlo Simulated Line Scan Profiles of Critical Dimension Scanning Electron Microscope (CD-SEM)
J. Appl. Phys. 133 (2023) 245303.
M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding
An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon
Vacuum 215 (2023) 112257.
J.M. Gong, M.S.S. Khan, B. Da, H. Yoshikawa, S. Tanuma and Z.J. Ding
A Theoretical Characterization Method for Non-spherical Core-Shell Nanoparticles by XPS
Phys. Chem. Chem. Phys. (2023, in press).
H.T. Chen, Y.B. Zou, S.F. Mao, M.S.S. Khan, K. Tőkési and Z.J. Ding
Influence of Energy Loss Function to the Monte Carlo Simulated Electron Backscattering Coefficient
Sci. Rep. 12 (2022) 18201.
M.S.S. Khan, L.H. Yang, X. Deng, S.F. Mao, Y.B. Zou, Y.G. Li, H.M. Li and Z.J. Ding
Critical-Dimension Scanning Electron Microscope Characterization of Smoothly Varying Wave Structures with a Monte Carlo Simulation
J. Phys. D 54 (2021) 445301.
M.S.S. Khan, Y.B. Zou, C. Li and Z.J. Ding
Monte Carlo Simulation of Secondary Electron Emission from Wave-Type Structure
《中国科学技术大学学报》，2019年49卷第1期79-86页.
Y.B. Zou, M.S.S. Khan, H.M. Li, Y.G. Li, W. Li, S.T. Gao, L.S. Liu and Z.J. Ding
Use of Model-Based Library in Critical Dimension Measurement by CD-SEM
Measurement 123 (2018) 150-162.