P. Guo, H. Miao, S.F. Mao, Y.B. Zou, X. Deng, X.B. Cheng and Z.J. Ding
Linewidth Characterization of a Self-traceable Grating by SEM
J. Phys. D (2024, in press).
P. Guo, H. Miao, Y.B. Zou, S.F. Mao and Z.J. Ding
Application of A Machine Learning Method to Model-Based Library Approach for Critical Dimension Measurements by CD-SEM
Measu. Sci. Technol. 35 (2024) 065002.
P. Guo, S.F. Mao, Y.B. Zou, T.F. Yang, H. Miao and Z.J. Ding
Monte Carlo Simulation Study on Secondary Electron Yield of SiO2
Resu. Phys. 58 (2024) 107472.
M.S.S. Khan, S.F. Mao, Y.B. Zou, Y.G. Li, B. Da and Z.J. Ding
Uncertainty Evaluation of Monte Carlo Simulated Line Scan Profiles of Critical Dimension Scanning Electron Microscope (CD-SEM)
J. Appl. Phys. 133 (2023) 245303.
M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding
An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon
Vacuum 215 (2023) 112257.
H.T. Chen, Y.B. Zou, S.F. Mao, M.S.S. Khan, K. Tőkési and Z.J. Ding
Influence of Energy Loss Function to the Monte Carlo Simulated Electron Backscattering Coefficient
Sci. Rep. 12 (2022) 18201.
M.S.S. Khan, L.H. Yang, X. Deng, S.F. Mao, Y.B. Zou, Y.G. Li, H.M. Li and Z.J. Ding
Critical-Dimension Scanning Electron Microscope Characterization of Smoothly Varying Wave Structures with a Monte Carlo Simulation
J. Phys. D 54 (2021) 445301.
L.H. Yang, A. Hussain, S.F. Mao, B. Da, K. Tőkési and Z.J. Ding
Electron Backscattering Coefficients of Molybdenum and Tungsten Based on the Monte Carlo Simulations
J. Nucl. Mater. 553 (2021) 153042 .
A. Hussain, L.H. Yang, S.F. Mao, B. Da, K. Tőkési and Z.J. Ding
Determination of Backscattering Coefficient of Beryllium by a High Precision Monte Carlo Simulation
Nucl. Mater. Energy 26 (2021) 100862.
B. Da, L.H. Yang, J.W. Liu, Y.G. Li, S.F. Mao and Z.J. Ding
Monte Carlo Simulation Study of Reflection Electron Energy Loss Spectroscopy of a Fe/Si Layered Nanostructure
Surf. Interface Anal. 52 (2020) 742-754.
A. Hussain, L.H. Yang, Y.B. Zou, B. Da, S.F. Mao, H.M. Li and Z.J. Ding
Monte Carlo Simulation Study of Electron Yields from Semiconductor Materials
J. Appl. Phys. 128 (2020) 015305.
A. Hussain, L.H. Yang, Y.B. Zou, S.F. Mao, B. Da, H.M. Li and Z.J. Ding
Theoretical Calculation of Mean Escape Depth of Secondary Electron Emission from Compound Semiconductor Materials
J. Appl. Phys. 127 (2020) 125304.
Mehnaz, L.H. Yang, Y.B. Zou, B. Da, S.F. Mao, H.M. Li, Y.F. Zhao and Z.J. Ding
A Comparative Study on Monte Carlo Simulations of Electron Emission from Liquid Water
Med. Phys. 47 (2020) 759-771.
C. Li, S.F. Mao and Z.J. Ding
Time-dependent Characteristics of Secondary Electron Emission
J. Appl. Phys. 125 (2019) 024902 Editor's Pick.
C. Li, S.F. Mao, Y.B. Zou, Y.G. Li, P. Zhang, H.M. Li and Z.J. Ding
A Monte Carlo Modeling on Charging Effect for Structures with Arbitrary Geometries
J. Phys. D: Appl. Phys. 51 (2018) 165301.
Y. Ming, L. Ye, H.S. Chen, S.F. Mao, H.M. Li and Z.J. Ding
Solitons as Candidates for Energy Carriers in Fermi-Pasta-Ulam Lattices
Phys. Rev. E 97 (2018) 012221.
Y.B. Zou, S.F. Mao, B. Da and Z.J. Ding
Surface Sensitivity of Secondary Electrons Emitted from Amorphous Solids: Calculation of Mean Escape Depth by a Monte Carlo Method
J. Appl. Phys. 120 (2016) 235102.
Z. Zheng, B. Da, S.F. Mao and Z.J. Ding
Calculation of Surface Excitation Parameters by a Monte Carlo Method
Chin. J. Chem. Phys. 30 (2017) 83-89.
Y. Sun, H. Xu, B. Da, S.F. Mao and Z.J. Ding
Calculations of Energy-Loss Function for 26 Materials
Chin. J. Chem. Phys. 29 (2016) 663-670.
B. Da, K. Salma, H. Ji, S.F. Mao, G.H. Zhang, X.P. Wang and Z.J. Ding
Surface Excitation Parameter for Rough Surfaces
Appl. Surf. Sci. 356 (2015) 142-149.
Z. Ruan, R.G. Zeng, Y. Ming, M. Zhang, B. Da, S.F. Mao and Z.J. Ding
Quantum Trajectory Monte Carlo Method for Study of Electron-Crystal Interaction in STEM
Phys. Chem. Chem. Phys. 17 (2015) 17628-17637.
P. Zhang, S.F. Mao and Z.J. Ding
Monte Carlo Study of the Effective Electron Beam Shape in Scanning Electron Microscopic Imaging
Eur. Phys. J. Appl. Phys. 69 (2015) 30703.
N. Cao, B. Da, Y. Ming, S.F. Mao, K. Goto and Z.J. Ding
Monte Carlo Simulation of Full Energy Spectrum of Electrons Emitted from Silicon in Auger electron Spectroscopy
Surf. Interface Anal. 47 (2015) 113-119.
B. Da, Z.Y. Li, H.C. Chang, S.F. Mao and Z.J. Ding
A Monte Carlo Study of Reflection Electron Energy Loss Spectroscopy Spectrum of a Carbon Contaminated Surface
J. Appl. Phys. 116 (2014) 124307.
X. Ding, B. Da, J.B. Gong, S.F. Mao, H.M. Li and Z.J. Ding
Quantification of Surface Roughness Effect on Elastically Backscattered Electrons
Surf. Interface Anal. 46 (2014) 489-496.
Z. Ruan, M. Zhang, R.G. Zeng, Y. Ming, B. Da, S.F. Mao and Z.J. Ding
Simulation Study of the Atomic Resolution Secondary Electron Imaging
Surf. Interface Anal. 46 (2014) 1296-1300.
Z. Ruan, P. Zhang, S.F. Mao, H.M. Li and Z.J. Ding
Monte Carlo Study of the Influence of Electron Beam Focusing to SEM Image Sharpness Measurement
e-J. Surf. Sci. Nanotech. 2 (2014) 247-251.
B. Da, Y. Sun, S.F. Mao, Z.M. Zhang, H. Jin, H. Yoshikawa, S. Tanuma and Z.J. Ding
A Reverse Monte Carlo Method for Deriving Optical Constants of Solids from REELS Spectra
J. Appl. Phys. 113 (2013) 214303.
Z. Ruan, S.F. Mao, P. Zhang, H.M. Li and Z.J. Ding
Monte Carlo Simulation of Realistic Beam-Sample Interaction in SEM: Application to Evaluation of Sharpness Measurement Methods
Proc. of SPIE 8729 (2013) 87290J.
P. Zhang, Z.M. Zhang, S.F. Mao and Z.J. Ding
Monte Carlo Study of the Influence of Electron Beam Focusing to SEM Linewidth Measurement
Proc. of SPIE 8729 (2013) 87290K.
Z.M. Zhang, T. Tang, S.F. Mao and Z.J. Ding
Monte Carlo Simulation of X-ray Photoemission Electron Microscopic Image
Proc. of SPIE 8729 (2013) 87290L.
B. Da, Y. Sun, S.F. Mao and Z.J. Ding
Systematic Calculation of the Surface Excitation Parameters for 22 Materials
Surf. Interface Anal. 45 (2013) 773-780.
B. Da, S. F. Mao, Y. Sun and Z.J. Ding
A New Analytical Method in Surface Electron Spectroscopy: Reverse Monte Carlo Method
e-J. Surf. Sci. Nanotech. 10 (2012) 441-446.
B. Da, S.F. Mao, G.H. Zhang, X.P. Wang and Z.J. Ding
Monte Carlo Modeling of Surface Excitation in Reflection Electron Energy Loss Spectroscopy Spectrum for Rough Surfaces
J. Appl. Phys. 112 (2012) 034310.
S.F. Mao, X. Sun, X.W. Fang, B. Da and Z.J. Ding
A Monte Carlo Study of Spin Polarization of Secondary Electrons
Surf. Interface Anal. 44 (2012) 703-708.
B. Da, S.F. Mao, G.H. Zhang, X.P. Wang and Z.J. Ding
Influence of Surface Roughness on Elastically Backscattered Electrons
Surf. Interface Anal. 44 (2012) 647-652.
P. Zhang, H.Y. Wang, Y.G. Li, S.F. Mao and Z.J. Ding
Monte Carlo Simulation of Secondary Electron Images for Real Sample Structures in Scanning Electron Microscopy
Scanning 34 (2012) 145-150.
B. Da, S.F. Mao and Z.J. Ding
Validity of the Semi-classical Approach for Calculation of the Surface Excitation Parameter
J. Phys.: Condens. Matter 23 (2011) 395003.
S.F. Mao and Z.J. Ding
A Monte Carlo Simulation Study on the Image Resolution in Scanning Electron Microscopy
Surf. Interface Anal. 42 (2010) 1096-1099.
Z.J. Ding, Y.G. Li, R.G. Zeng, S.F. Mao, P. Zhang and Z.M. Zhang
Depth Distribution Functions of Secondary Electron Production and Emission
J. Surf. Anal. 15 (2009) 249-253.
S.F. Mao and Z.J. Ding
Monte Carlo Simulation of Dopant Contrast in SEM Image
J. Nanosci. Nanotechnol. 9 (2009) 1644-1646.
S.F. Mao, Y.G. Li, R.G. Zeng and Z.J. Ding
Electron Inelastic Scattering and Secondary Electron Emission Calculated without the Single-Pole Approximation
J. Appl. Phys. 104 (2008) 114907.
R.G. Zeng, Z.J. Ding, Y.G. Li and S.F. Mao
A Calculation of Backscattering Factor Database for Quantitative Analysis by Auger Electron Spectroscopy
J. Appl. Phys. 104 (2008) 114909.
Y.G. Li, Z.M. Zhang, S.F. Mao and Z.J. Ding
Monte Carlo Simulation Study of Quasi-Elastic Electron Scattering from an Overlayer/Substrate System
J. Phys.: Condens. Matter 20 (2008) 355005.
Y.G. Li, S.F. Mao, H.M. Li, S.M. Xiao and Z.J. Ding
Monte Carlo Simulation Study of Scanning Electron Microscopy Images of Rough Surfaces
J. Appl. Phys. 104 (2008) 064901.
S.F. Mao, Z.M. Zhang, K. Tokesi, A. Csik, J. Toth, R.J. Bereczky and Z.J. Ding
XPS Study of Nano Thin Films on Substrate
Surf. Interface Anal. 40 (2008) 728-730.