M.S.S. Khan, S.F. Mao, Y.B. Zou, Y.G. Li, B. Da and Z.J. Ding
Uncertainty Evaluation of Monte Carlo Simulated Line Scan Profiles of Critical Dimension Scanning Electron Microscope (CD-SEM)
J. Appl. Phys. 133 (2023) 245303.
M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding
An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon
Vacuum 215 (2023) 112257.
M.S.S. Khan, L.H. Yang, X. Deng, S.F. Mao, Y.B. Zou, Y.G. Li, H.M. Li and Z.J. Ding
Critical-Dimension Scanning Electron Microscope Characterization of Smoothly Varying Wave Structures with a Monte Carlo Simulation
J. Phys. D 54 (2021) 445301.
B. Da, L.H. Yang, J.W. Liu, Y.G. Li, S.F. Mao and Z.J. Ding
Monte Carlo Simulation Study of Reflection Electron Energy Loss Spectroscopy of a Fe/Si Layered Nanostructure
Surf. Interface Anal. 52 (2020) 742-754.
Z.J. Ding, Y.B. Zou, Y.G. Li and H.M. Li
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
ISO 21466:2019.
Y.B. Zou, M.S.S. Khan, H.M. Li, Y.G. Li, W. Li, S.T. Gao, L.S. Liu and Z.J. Ding
Use of Model-Based Library in Critical Dimension Measurement by CD-SEM
Measurement 123 (2018) 150-162.
C. Li, S.F. Mao, Y.B. Zou, Y.G. Li, P. Zhang, H.M. Li and Z.J. Ding
A Monte Carlo Modeling on Charging Effect for Structures with Arbitrary Geometries
J. Phys. D: Appl. Phys. 51 (2018) 165301.
Y.G. Li, Y. Yang, M.P. Short, Z.J. Ding, Z. Zeng & J. Li
IM3D: A Parallel Monte Carlo Code for Efficient Simulations of Primary Radiation Displacements and Damage in 3D Geometry
Sci. Rep. 5 (2015) 18130.
丁泽军、张增明、曾荣光、毛世峰、李永刚、梅红萍
表面化学分析 俄歇电子能谱 强度标的重复性和一致性
国家标准，GB/T 29558-2013 (2013.07.19发布，2014.03.01实施).
Y.G. Li, P. Zhang and Z.J. Ding
Monte Carlo Simulation of CD-SEM Images for Linewidth and Critical Dimension Metrology
Scanning 35 (2013) 127-139.
P. Zhang, H.Y. Wang, Y.G. Li, S.F. Mao and Z.J. Ding
Monte Carlo Simulation of Secondary Electron Images for Real Sample Structures in Scanning Electron Microscopy
Scanning 34 (2012) 145-150.
Y.G. Li, S.F. Mao and Z.J. Ding
Chapter 11. Monte Carlo Simulation of SEM and SAM Images
《Applications of Monte Carlo Method in Science and Technology》(Ed. S. Mark and S. Mordechai, InTech-Open Access Publisher, 2011) p231-296.
Z.J. Ding, Z.M. Zhang, S.F. Mao, B. Da, R.G. Zeng, P. Zhang, H.P. Mei, Y.G. Li and H.M. Li
Theoretical Study of Electron Interaction with Solid Surface for Application to Surface Electron Spectroscopy and Microscopy
18th International Vacuum Congress--IVC-18, China (Beijing), Aug. 23-27, 2010 (invited).
丁泽军、李永钢
利用CDSEM进行线宽测量的Monte Carlo模拟研究
第七届海峡两岸电子显微学研讨会, Aug. 28-30, 2009，花莲，口头报告.
W.J. Liu, C.K. Xu, Y.G. Li, Z.J. Ding, K.Z. Xu and X.J. Chen
Simulation Study of Auger Electron Emission Features in Tip–Sample Electric Field Region for Scanning Probe Electron Energy Spectrometer
Jpn. J. Appl. Phys. 48 (2009) 122301.
Y.G. Li, Z.J. Ding and Z.M. Zhang
Monte Carlo Simulation Study of Scanning Auger Electron Images
J. Appl. Phys. 106 (2009) 024316.
Z.J. Ding, Y.G. Li, S.F. Mao, H.M. Li and Z.M. Zhang
Monte Carlo Simulation Study on CD-SEM Image for Linewidth Measurement
5th Sino-German Symp. Micro- & Nano- Produc., Measure. & Appl., China (Shanghai-Wuzhen), Sep. 25-30, 2009 (invited).
Z.J. Ding, Y.G. Li, R.G. Zeng, S.F. Mao, P. Zhang and Z.M. Zhang
Depth Distribution Functions of Secondary Electron Production and Emission
International Workshop for Surface Analysis and Standardization'09, Japan (Okinawa), March 15-18, 2009 (invited).
J. Surf. Anal. 15 (2009) 249-253.
Y.G. Li, Z.J. Ding, Z.M. Zhang and K. Tokesi
Monte Carlo Calculation of Electron Rutherford Backscattering Spectra and High-Energy Reflection Electron Energy Loss Spectra
Nucl. Inst. Meth. Phys. Res. B 267 (2009) 215-220.
Y.G. Li, S.F. Mao, H.M. Li, S.M. Xiao and Z.J. Ding
Monte Carlo Simulation Study of Scanning Electron Microscopy Images of Rough Surfaces
J. Appl. Phys. 104 (2008) 064901.
Y.G. Li, Z.M. Zhang, S.F. Mao and Z.J. Ding
Monte Carlo Simulation Study of Quasi-Elastic Electron Scattering from an Overlayer/Substrate System
J. Phys.: Condens. Matter 20 (2008) 355005.
S.F. Mao, Y.G. Li, R.G. Zeng and Z.J. Ding
Electron Inelastic Scattering and Secondary Electron Emission Calculated without the Single-Pole Approximation
J. Appl. Phys. 104 (2008) 114907.
R.G. Zeng, Z.J. Ding, Y.G. Li and S.F. Mao
A Calculation of Backscattering Factor Database for Quantitative Analysis by Auger Electron Spectroscopy
J. Appl. Phys. 104 (2008) 114909.
Z.J. Ding, W.S. Tan and Y.G. Li
Improved Calculation of the Backscattering Factor for Quantitative Analysis by Auger Electron Spectroscopy
J. Appl. Phys. 99 (2006) 084903.