学术论文

P. Guo, H. Miao, S.F. Mao, Y.B. Zou, X. Deng, X.B. Cheng and Z.J. Ding
Linewidth Characterization of a Self-traceable Grating by SEM
J. Phys. D (2024, in press).

P. Guo, H. Miao, Y.B. Zou, S.F. Mao and Z.J. Ding
Application of A Machine Learning Method to Model-Based Library Approach for Critical Dimension Measurements by CD-SEM
Measu. Sci. Technol. 35 (2024) 065002.

P. Guo, S.F. Mao, Y.B. Zou, T.F. Yang, H. Miao and Z.J. Ding
Monte Carlo Simulation Study on Secondary Electron Yield of SiO2
Resu. Phys. 58 (2024) 107472.

郭鹏、缪泓、邹艳波、丁泽军
基于模型数据库对半导体线宽关键尺寸的蒙特卡罗模拟
《现代应用物理》,2020年11卷第1期010207页.