Cite as: M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding, An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon.
Vacuum
215 (2023) 112257.
DOI:
10.1016/j.vacuum.2023.112257
Click to expand ELF information
| Si from |
photon energy range (eV) and the corresponding dataset in literature |
| crystal (Palik) |
0.01–1.10 [1,2] |
1.10-3.10 [3] |
3.10-6.00 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
2000-10000 [8] |
| crystal (Yang) |
0.01–200 [9] |
|
|
|
|
200-2000 [7] |
|
| doped (Palik) |
0.01–1.10 [6,10] |
1.10-3.10 [3] |
3.10–60 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
|
- References:
- [1] B. Bendow, H.G. Lipson, S.P. Yukon, Appl. Opt. 16, 2909 (1977).
- [2] H.H. Li, J. Phys. Chem. Ref. Data 9, 561 (1980).
- [3] H.R. Philipp, H.J. Ehrenrich, Phys. Rev. 129, 1550 (1963).
- [4] D.E. Aspnes, J.B. Theeten, J. Electrochem. Soc. 127, 1359 (1980).
- [5] H.R. Philipp, J. App, Phys. 43, 2835 (1972).
- [6] E.D. Palik (Ed.), Handbook of Optical Constants of Solids vols. 1–4, Academic
Press, (1997).
- [7] B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data. Nucl.
Data. Tabl 27, 1 (1982).
- [8] B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data. Nucl. Data. Tabl 54, 181 (1993).
- [9] L.H. Yang, J.M. Gong, A. Sulyok, M. Menyhárd, G. Sáfrán, K. Tőkési, B. Da, Z.J. Ding, Phys. Chem. Chem. Phys. 23, 25335–25346 (2021).
- [10] J. Humlíček, K. Vojtěchovský, Czech. J, Phys. B 38, 1033 (1988).
TEY of Si
| Energy (keV) |
Yield |
Error |
| 0.010 |
0.24809 |
0.06942 |
| 0.015 |
0.30758 |
0.08179 |
| 0.020 |
0.37450 |
0.09326 |
| 0.025 |
0.43699 |
0.10091 |
| 0.030 |
0.49096 |
0.11214 |
| 0.035 |
0.54866 |
0.11473 |
| 0.040 |
0.59906 |
0.12110 |
| 0.045 |
0.64512 |
0.12643 |
| 0.050 |
0.68676 |
0.13126 |
| 0.060 |
0.75737 |
0.13928 |
| 0.070 |
0.81104 |
0.14490 |
| 0.080 |
0.85169 |
0.15054 |
| 0.090 |
0.88170 |
0.15319 |
| 0.100 |
0.90390 |
0.15717 |
| 0.125 |
0.93352 |
0.16527 |
| 0.150 |
0.93844 |
0.17130 |
| 0.175 |
0.93017 |
0.17483 |
| 0.200 |
0.91576 |
0.17593 |
| 0.250 |
0.87717 |
0.17328 |
| 0.300 |
0.83430 |
0.16651 |
| 0.350 |
0.79359 |
0.15820 |
| 0.400 |
0.75615 |
0.14986 |
| 0.450 |
0.72216 |
0.14164 |
| 0.500 |
0.69130 |
0.13387 |
| 0.600 |
0.63908 |
0.12105 |
| 0.700 |
0.59491 |
0.10853 |
| 0.800 |
0.55847 |
0.09840 |
| 0.900 |
0.52673 |
0.08924 |
| 1.000 |
0.50602 |
0.08500 |
| 1.500 |
0.41201 |
0.05922 |
| 2.000 |
0.36395 |
0.04551 |
| 2.500 |
0.33205 |
0.03772 |
| 3.000 |
0.30928 |
0.03168 |
| 3.500 |
0.29227 |
0.02760 |
| 4.000 |
0.27909 |
0.02457 |
| 4.500 |
0.26853 |
0.02209 |
| 5.000 |
0.25977 |
0.02022 |
| 6.000 |
0.24630 |
0.01731 |
| 7.000 |
0.23668 |
0.01531 |
| 8.000 |
0.22811 |
0.01374 |
| 9.000 |
0.22120 |
0.01252 |
| 10.000 |
0.21531 |
0.01151 |
