Cite as: M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding, An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon.
Vacuum
215 (2023) 112257.
DOI:
10.1016/j.vacuum.2023.112257
Click to expand ELF information
| Si from |
photon energy range (eV) and the corresponding dataset in literature |
| crystal (Palik) |
0.01–1.10 [1,2] |
1.10-3.10 [3] |
3.10-6.00 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
2000-10000 [8] |
| crystal (Yang) |
0.01–200 [9] |
|
|
|
|
200-2000 [7] |
|
| doped (Palik) |
0.01–1.10 [6,10] |
1.10-3.10 [3] |
3.10–60 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
|
- References:
- [1] B. Bendow, H.G. Lipson, S.P. Yukon, Appl. Opt. 16, 2909 (1977).
- [2] H.H. Li, J. Phys. Chem. Ref. Data 9, 561 (1980).
- [3] H.R. Philipp, H.J. Ehrenrich, Phys. Rev. 129, 1550 (1963).
- [4] D.E. Aspnes, J.B. Theeten, J. Electrochem. Soc. 127, 1359 (1980).
- [5] H.R. Philipp, J. App, Phys. 43, 2835 (1972).
- [6] E.D. Palik (Ed.), Handbook of Optical Constants of Solids vols. 1–4, Academic
Press, (1997).
- [7] B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data. Nucl.
Data. Tabl 27, 1 (1982).
- [8] B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data. Nucl. Data. Tabl 54, 181 (1993).
- [9] L.H. Yang, J.M. Gong, A. Sulyok, M. Menyhárd, G. Sáfrán, K. Tőkési, B. Da, Z.J. Ding, Phys. Chem. Chem. Phys. 23, 25335–25346 (2021).
- [10] J. Humlíček, K. Vojtěchovský, Czech. J, Phys. B 38, 1033 (1988).
SEY of Si
| Energy (keV) |
Yield |
Error |
| 0.010 |
0.24800 |
0.06900 |
| 0.015 |
0.30800 |
0.08200 |
| 0.020 |
0.37500 |
0.09300 |
| 0.025 |
0.43700 |
0.10100 |
| 0.030 |
0.49100 |
0.11200 |
| 0.035 |
0.54900 |
0.11500 |
| 0.040 |
0.59900 |
0.12100 |
| 0.045 |
0.64500 |
0.12600 |
| 0.050 |
0.67400 |
0.13000 |
| 0.060 |
0.66300 |
0.12700 |
| 0.070 |
0.69300 |
0.13600 |
| 0.080 |
0.71200 |
0.14400 |
| 0.090 |
0.72500 |
0.14800 |
| 0.100 |
0.73300 |
0.15400 |
| 0.125 |
0.73500 |
0.16400 |
| 0.150 |
0.72100 |
0.17000 |
| 0.175 |
0.69900 |
0.17400 |
| 0.200 |
0.67400 |
0.17600 |
| 0.250 |
0.62200 |
0.17300 |
| 0.300 |
0.57200 |
0.16700 |
| 0.350 |
0.52800 |
0.15800 |
| 0.400 |
0.49000 |
0.15000 |
| 0.450 |
0.45600 |
0.14200 |
| 0.500 |
0.42700 |
0.13400 |
| 0.600 |
0.37800 |
0.12100 |
| 0.700 |
0.33800 |
0.10900 |
| 0.800 |
0.30500 |
0.09900 |
| 0.900 |
0.27700 |
0.08900 |
| 1.000 |
0.26000 |
0.08500 |
| 1.500 |
0.18100 |
0.05900 |
| 2.000 |
0.14300 |
0.04600 |
| 2.500 |
0.11800 |
0.03800 |
| 3.000 |
0.10100 |
0.03200 |
| 3.500 |
0.08800 |
0.02800 |
| 4.000 |
0.07800 |
0.02500 |
| 4.500 |
0.07100 |
0.02200 |
| 5.000 |
0.06500 |
0.02000 |
| 6.000 |
0.05500 |
0.01700 |
| 7.000 |
0.04900 |
0.01500 |
| 8.000 |
0.04300 |
0.01300 |
| 9.000 |
0.03900 |
0.01200 |
| 10.000 |
0.03600 |
0.01100 |
