Cite as: M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding, An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon.
Vacuum
215 (2023) 112257.
DOI:
10.1016/j.vacuum.2023.112257
Click to expand ELF information
| Si from |
photon energy range (eV) and the corresponding dataset in literature |
| crystal (Palik) |
0.01–1.10 [1,2] |
1.10-3.10 [3] |
3.10-6.00 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
2000-10000 [8] |
| crystal (Yang) |
0.01–200 [9] |
|
|
|
|
200-2000 [7] |
|
| doped (Palik) |
0.01–1.10 [6,10] |
1.10-3.10 [3] |
3.10–60 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
|
- References:
- [1] B. Bendow, H.G. Lipson, S.P. Yukon, Appl. Opt. 16, 2909 (1977).
- [2] H.H. Li, J. Phys. Chem. Ref. Data 9, 561 (1980).
- [3] H.R. Philipp, H.J. Ehrenrich, Phys. Rev. 129, 1550 (1963).
- [4] D.E. Aspnes, J.B. Theeten, J. Electrochem. Soc. 127, 1359 (1980).
- [5] H.R. Philipp, J. App, Phys. 43, 2835 (1972).
- [6] E.D. Palik (Ed.), Handbook of Optical Constants of Solids vols. 1–4, Academic
Press, (1997).
- [7] B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data. Nucl.
Data. Tabl 27, 1 (1982).
- [8] B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data. Nucl. Data. Tabl 54, 181 (1993).
- [9] L.H. Yang, J.M. Gong, A. Sulyok, M. Menyhárd, G. Sáfrán, K. Tőkési, B. Da, Z.J. Ding, Phys. Chem. Chem. Phys. 23, 25335–25346 (2021).
- [10] J. Humlíček, K. Vojtěchovský, Czech. J, Phys. B 38, 1033 (1988).
Calculated IMFPs for Si by the FPA, SMA and LLM with the “crystal (Palik)” ELF
| FPA |
SMA |
LLM |
| Energy (eV) |
IMFP (nm) |
Energy (eV) |
IMFP (nm) |
Energy (eV) |
IMFP (nm) |
| 16.74 |
4.0188 |
16.74 |
4.9107 |
16.19 |
6.4940 |
| 17.49 |
3.3505 |
17.49 |
3.9419 |
16.94 |
4.8064 |
| 18.74 |
2.6285 |
18.74 |
2.9377 |
18.19 |
3.3655 |
| 20.49 |
2.0184 |
20.49 |
2.1466 |
19.94 |
2.3789 |
| 22.74 |
1.5641 |
22.74 |
1.5923 |
22.19 |
1.7453 |
| 25.49 |
1.2344 |
25.49 |
1.2125 |
24.94 |
1.3284 |
| 28.74 |
1.0064 |
28.74 |
0.9589 |
28.19 |
1.0563 |
| 32.49 |
0.8503 |
32.49 |
0.7873 |
31.94 |
0.8783 |
| 36.74 |
0.7360 |
36.74 |
0.6605 |
36.19 |
0.7533 |
| 41.49 |
0.6396 |
41.49 |
0.5562 |
40.94 |
0.6522 |
| 46.74 |
0.5380 |
46.74 |
0.4658 |
46.19 |
0.5495 |
| 52.49 |
0.4409 |
52.49 |
0.4018 |
51.94 |
0.4482 |
| 58.74 |
0.3947 |
58.74 |
0.3746 |
58.19 |
0.3970 |
| 65.49 |
0.3859 |
65.49 |
0.3711 |
64.94 |
0.3862 |
| 72.74 |
0.3922 |
72.74 |
0.3794 |
72.19 |
0.3918 |
| 80.49 |
0.4059 |
80.49 |
0.3942 |
79.94 |
0.4052 |
| 88.74 |
0.4241 |
88.74 |
0.4130 |
88.19 |
0.4232 |
| 97.49 |
0.4454 |
97.49 |
0.4347 |
96.94 |
0.4444 |
| 106.74 |
0.4691 |
106.74 |
0.4585 |
106.19 |
0.4680 |
| 116.49 |
0.4946 |
116.49 |
0.4842 |
115.94 |
0.4936 |
| 126.74 |
0.5218 |
126.74 |
0.5114 |
126.19 |
0.5208 |
| 137.49 |
0.5505 |
137.49 |
0.5399 |
136.94 |
0.5495 |
| 148.74 |
0.5804 |
148.74 |
0.5698 |
148.19 |
0.5795 |
| 160.49 |
0.6116 |
160.49 |
0.6007 |
159.94 |
0.6107 |
| 172.74 |
0.6438 |
172.74 |
0.6327 |
172.19 |
0.6430 |
| 185.49 |
0.6771 |
185.49 |
0.6656 |
184.94 |
0.6763 |
| 198.74 |
0.7114 |
198.74 |
0.6995 |
198.19 |
0.7106 |
| 212.49 |
0.7466 |
212.49 |
0.7342 |
211.94 |
0.7459 |
| 226.74 |
0.7827 |
226.74 |
0.7697 |
226.19 |
0.7821 |
| 241.49 |
0.8196 |
241.49 |
0.8060 |
240.94 |
0.8191 |
| 256.74 |
0.8574 |
256.74 |
0.8430 |
256.19 |
0.8569 |
| 272.49 |
0.8959 |
272.49 |
0.8806 |
271.94 |
0.8955 |
| 288.74 |
0.9352 |
288.74 |
0.9188 |
288.19 |
0.9349 |
| 305.49 |
0.9751 |
305.49 |
0.9575 |
304.94 |
0.9749 |
| 322.74 |
1.0153 |
322.74 |
0.9964 |
322.19 |
1.0152 |
| 340.49 |
1.0559 |
340.49 |
1.0356 |
339.94 |
1.0559 |
| 358.74 |
1.0970 |
358.74 |
1.0754 |
358.19 |
1.0971 |
| 377.49 |
1.1387 |
377.49 |
1.1158 |
376.94 |
1.1389 |
| 396.74 |
1.1809 |
396.74 |
1.1568 |
396.19 |
1.1812 |
| 416.49 |
1.2237 |
416.49 |
1.1985 |
415.94 |
1.2242 |
| 436.74 |
1.2672 |
436.74 |
1.2409 |
436.19 |
1.2677 |
| 457.49 |
1.3113 |
457.49 |
1.2840 |
456.94 |
1.3120 |
| 478.74 |
1.3560 |
478.74 |
1.3278 |
478.19 |
1.3568 |
| 500.49 |
1.4014 |
500.49 |
1.3722 |
499.94 |
1.4023 |
| 522.74 |
1.4474 |
522.74 |
1.4174 |
522.19 |
1.4485 |
| 545.49 |
1.4941 |
545.49 |
1.4634 |
544.94 |
1.4954 |
| 568.74 |
1.5415 |
568.74 |
1.5100 |
568.19 |
1.5429 |
| 592.49 |
1.5896 |
592.49 |
1.5573 |
591.94 |
1.5912 |
| 616.74 |
1.6384 |
616.74 |
1.6054 |
616.19 |
1.6401 |
| 641.49 |
1.6879 |
641.49 |
1.6542 |
640.94 |
1.6898 |
| 666.74 |
1.7381 |
666.74 |
1.7038 |
666.19 |
1.7402 |
| 692.49 |
1.7890 |
692.49 |
1.7540 |
691.94 |
1.7913 |
| 718.74 |
1.8406 |
718.74 |
1.8050 |
718.19 |
1.8432 |
| 745.49 |
1.8929 |
745.49 |
1.8567 |
744.94 |
1.8957 |
| 772.74 |
1.9460 |
772.74 |
1.9091 |
772.19 |
1.9490 |
| 800.49 |
1.9997 |
800.49 |
1.9623 |
799.94 |
2.0030 |
| 828.74 |
2.0541 |
828.74 |
2.0161 |
828.19 |
2.0576 |
| 857.49 |
2.1093 |
857.49 |
2.0707 |
856.94 |
2.1131 |
| 886.74 |
2.1651 |
886.74 |
2.1259 |
886.19 |
2.1692 |
| 916.49 |
2.2217 |
916.49 |
2.1819 |
915.94 |
2.2260 |
| 946.74 |
2.2789 |
946.74 |
2.2385 |
946.19 |
2.2836 |
| 977.49 |
2.3368 |
977.49 |
2.2959 |
976.94 |
2.3418 |
| 1008.74 |
2.3955 |
1008.74 |
2.3539 |
1008.19 |
2.4008 |
| 1040.49 |
2.4548 |
1040.49 |
2.4127 |
1039.94 |
2.4604 |
| 1072.74 |
2.5148 |
1072.74 |
2.4721 |
1072.19 |
2.5208 |
| 1105.49 |
2.5755 |
1105.49 |
2.5322 |
1104.94 |
2.5818 |
| 1138.74 |
2.6368 |
1138.74 |
2.5930 |
1138.19 |
2.6436 |
| 1172.49 |
2.6989 |
1172.49 |
2.6545 |
1171.94 |
2.7060 |
| 1206.74 |
2.7616 |
1206.74 |
2.7166 |
1206.19 |
2.7691 |
| 1241.49 |
2.8249 |
1241.49 |
2.7794 |
1240.94 |
2.8329 |
| 1276.74 |
2.8889 |
1276.74 |
2.8428 |
1276.19 |
2.8974 |
| 1312.49 |
2.9536 |
1312.49 |
2.9070 |
1311.94 |
2.9625 |
| 1348.74 |
3.0190 |
1348.74 |
2.9717 |
1348.19 |
3.0283 |
| 1385.49 |
3.0850 |
1385.49 |
3.0372 |
1384.94 |
3.0949 |
| 1422.74 |
3.1517 |
1422.74 |
3.1033 |
1422.19 |
3.1621 |
| 1460.49 |
3.2190 |
1460.49 |
3.1700 |
1459.94 |
3.2299 |
| 1498.74 |
3.2869 |
1498.74 |
3.2374 |
1498.19 |
3.2984 |
| 1537.49 |
3.3555 |
1537.49 |
3.3055 |
1536.94 |
3.3676 |
| 1576.74 |
3.4248 |
1576.74 |
3.3741 |
1576.19 |
3.4374 |
| 1616.49 |
3.4946 |
1616.49 |
3.4434 |
1615.94 |
3.5080 |
| 1656.74 |
3.5652 |
1656.74 |
3.5134 |
1656.19 |
3.5791 |
| 1697.49 |
3.6364 |
1697.49 |
3.5840 |
1696.94 |
3.6510 |
| 1738.74 |
3.7082 |
1738.74 |
3.6552 |
1738.19 |
3.7234 |
| 1780.49 |
3.7806 |
1780.49 |
3.7271 |
1779.94 |
3.7966 |
| 1822.74 |
3.8537 |
1822.74 |
3.7996 |
1822.19 |
3.8704 |
| 1865.49 |
3.9274 |
1865.49 |
3.8727 |
1864.94 |
3.9448 |
| 1908.74 |
4.0017 |
1908.74 |
3.9464 |
1908.19 |
4.0199 |
| 1952.49 |
4.0767 |
1952.49 |
4.0208 |
1951.94 |
4.0956 |
| 1996.74 |
4.1522 |
1996.74 |
4.0958 |
1996.19 |
4.1720 |
| 2041.49 |
4.2284 |
2041.49 |
4.1713 |
2040.94 |
4.2490 |
| 2086.74 |
4.3052 |
2086.74 |
4.2476 |
2086.19 |
4.3267 |
| 2132.49 |
4.3826 |
2132.49 |
4.3244 |
2131.94 |
4.4050 |
| 2178.74 |
4.4607 |
2178.74 |
4.4018 |
2178.19 |
4.4840 |
| 2225.49 |
4.5393 |
2225.49 |
4.4799 |
2224.94 |
4.5635 |
| 2272.74 |
4.6186 |
2272.74 |
4.5585 |
2272.19 |
4.6437 |
| 2320.49 |
4.6984 |
2320.49 |
4.6378 |
2319.94 |
4.7245 |
| 2368.74 |
4.7788 |
2368.74 |
4.7176 |
2368.19 |
4.8060 |
| 2417.49 |
4.8599 |
2417.49 |
4.7981 |
2416.94 |
4.8881 |
| 2466.74 |
4.9416 |
2466.74 |
4.8791 |
2466.19 |
4.9708 |
| 2516.49 |
5.0239 |
2516.49 |
4.9608 |
2515.94 |
5.0543 |
| 2566.74 |
5.1067 |
2566.74 |
5.0431 |
2566.19 |
5.1382 |
| 2617.49 |
5.1901 |
2617.49 |
5.1259 |
2616.94 |
5.2228 |
| 2668.74 |
5.2743 |
2668.74 |
5.2094 |
2668.19 |
5.3081 |
| 2720.49 |
5.3588 |
2720.49 |
5.2934 |
2719.94 |
5.3940 |
| 2772.74 |
5.4440 |
2772.74 |
5.3780 |
2772.19 |
5.4805 |
| 2825.49 |
5.5299 |
2825.49 |
5.4631 |
2824.94 |
5.5675 |
| 2878.74 |
5.6163 |
2878.74 |
5.5490 |
2878.19 |
5.6553 |
| 2932.49 |
5.7032 |
2932.49 |
5.6353 |
2931.94 |
5.7436 |
| 2986.74 |
5.7907 |
2986.74 |
5.7222 |
2986.19 |
5.8325 |
| 3041.49 |
5.8789 |
3041.49 |
5.8097 |
3040.94 |
5.9221 |
| 3096.74 |
5.9676 |
3096.74 |
5.8979 |
3096.19 |
6.0123 |
| 3152.49 |
6.0570 |
3152.49 |
5.9866 |
3151.94 |
6.1032 |
| 3208.74 |
6.1469 |
3208.74 |
6.0758 |
3208.19 |
6.1946 |
| 3265.49 |
6.2374 |
3265.49 |
6.1656 |
3264.94 |
6.2867 |
| 3322.74 |
6.3283 |
3322.74 |
6.2560 |
3322.19 |
6.3792 |
| 3380.49 |
6.4198 |
3380.49 |
6.3470 |
3379.94 |
6.4724 |
| 3438.74 |
6.5119 |
3438.74 |
6.4385 |
3438.19 |
6.5662 |
| 3497.49 |
6.6047 |
3497.49 |
6.5305 |
3496.94 |
6.6607 |
| 3556.74 |
6.6980 |
3556.74 |
6.6232 |
3556.19 |
6.7558 |
| 3616.49 |
6.7919 |
3616.49 |
6.7164 |
3615.94 |
6.8515 |
| 3676.74 |
6.8863 |
3676.74 |
6.8102 |
3676.19 |
6.9477 |
| 3737.49 |
6.9812 |
3737.49 |
6.9045 |
3736.94 |
7.0446 |
| 3798.74 |
7.0767 |
3798.74 |
6.9994 |
3798.19 |
7.1421 |
| 3860.49 |
7.1729 |
3860.49 |
7.0949 |
3859.94 |
7.2401 |
| 3922.74 |
7.2696 |
3922.74 |
7.1909 |
3922.19 |
7.3389 |
| 3985.49 |
7.3667 |
3985.49 |
7.2874 |
3984.94 |
7.4381 |
| 4048.74 |
7.4644 |
4048.74 |
7.3845 |
4048.19 |
7.5379 |
| 4112.49 |
7.5628 |
4112.49 |
7.4822 |
4111.94 |
7.6384 |
| 4176.74 |
7.6617 |
4176.74 |
7.5804 |
4176.19 |
7.7395 |
| 4241.49 |
7.7610 |
4241.49 |
7.6791 |
4240.94 |
7.8411 |
| 4306.74 |
7.8609 |
4306.74 |
7.7784 |
4306.19 |
7.9433 |
| 4372.49 |
7.9615 |
4372.49 |
7.8783 |
4371.94 |
8.0463 |
| 4438.74 |
8.0626 |
4438.74 |
7.9787 |
4438.19 |
8.1497 |
| 4505.49 |
8.1640 |
4505.49 |
8.0796 |
4504.94 |
8.2536 |
| 4572.74 |
8.2662 |
4572.74 |
8.1811 |
4572.19 |
8.3584 |
| 4640.49 |
8.3691 |
4640.49 |
8.2832 |
4639.94 |
8.4637 |
| 4708.74 |
8.4721 |
4708.74 |
8.3857 |
4708.19 |
8.5693 |
| 4777.49 |
8.5758 |
4777.49 |
8.4887 |
4776.94 |
8.6757 |
| 4846.74 |
8.6801 |
4846.74 |
8.5922 |
4846.19 |
8.7827 |
| 4916.49 |
8.7847 |
4916.49 |
8.6964 |
4915.94 |
8.8901 |
| 4986.74 |
8.8902 |
4986.74 |
8.8011 |
4986.19 |
8.9984 |
| 5057.49 |
8.9962 |
5057.49 |
8.9063 |
5056.94 |
9.1072 |
| 5128.74 |
9.1024 |
5128.74 |
9.0121 |
5128.19 |
9.2164 |
| 5200.49 |
9.2095 |
5200.49 |
9.1182 |
5199.94 |
9.3265 |
| 5272.74 |
9.3167 |
5272.74 |
9.2249 |
5272.19 |
9.4367 |
| 5345.49 |
9.4247 |
5345.49 |
9.3323 |
5344.94 |
9.5478 |
| 5418.74 |
9.5335 |
5418.74 |
9.4402 |
5418.19 |
9.6597 |
| 5492.49 |
9.6423 |
5492.49 |
9.5485 |
5491.94 |
9.7717 |
| 5566.74 |
9.7519 |
5566.74 |
9.6572 |
5566.19 |
9.8846 |
| 5641.49 |
9.8617 |
5641.49 |
9.7666 |
5640.94 |
9.9977 |
| 5716.74 |
9.9723 |
5716.74 |
9.8765 |
5716.19 |
10.1120 |
| 5792.49 |
10.0840 |
5792.49 |
9.9870 |
5791.94 |
10.2270 |
| 5868.74 |
10.1950 |
5868.74 |
10.0980 |
5868.19 |
10.3410 |
| 5945.49 |
10.3070 |
5945.49 |
10.2090 |
5944.94 |
10.4570 |
| 6022.74 |
10.4200 |
6022.74 |
10.3210 |
6022.19 |
10.5730 |
| 6100.49 |
10.5330 |
6100.49 |
10.4340 |
6099.94 |
10.6900 |
| 6178.74 |
10.6470 |
6178.74 |
10.5470 |
6178.19 |
10.8080 |
| 6257.49 |
10.7610 |
6257.49 |
10.6600 |
6256.94 |
10.9260 |
| 6336.74 |
10.8750 |
6336.74 |
10.7740 |
6336.19 |
11.0440 |
| 6416.49 |
10.9910 |
6416.49 |
10.8890 |
6415.94 |
11.1630 |
| 6496.74 |
11.1060 |
6496.74 |
11.0030 |
6496.19 |
11.2830 |
| 6577.49 |
11.2220 |
6577.49 |
11.1190 |
6576.94 |
11.4030 |
| 6658.74 |
11.3390 |
6658.74 |
11.2350 |
6658.19 |
11.5240 |
| 6740.49 |
11.4560 |
6740.49 |
11.3510 |
6739.94 |
11.6450 |
| 6822.74 |
11.5740 |
6822.74 |
11.4680 |
6822.19 |
11.7680 |
| 6905.49 |
11.6920 |
6905.49 |
11.5860 |
6904.94 |
11.8900 |
| 6988.74 |
11.8110 |
6988.74 |
11.7040 |
6988.19 |
12.0130 |
| 7072.49 |
11.9300 |
7072.49 |
11.8220 |
7071.94 |
12.1370 |
| 7156.74 |
12.0500 |
7156.74 |
11.9410 |
7156.19 |
12.2610 |
| 7241.49 |
12.1690 |
7241.49 |
12.0600 |
7240.94 |
12.3860 |
| 7326.74 |
12.2900 |
7326.74 |
12.1800 |
7326.19 |
12.5110 |
| 7412.49 |
12.4110 |
7412.49 |
12.3010 |
7411.94 |
12.6370 |
| 7498.74 |
12.5330 |
7498.74 |
12.4210 |
7498.19 |
12.7640 |
| 7585.49 |
12.6550 |
7585.49 |
12.5430 |
7584.94 |
12.8910 |
| 7672.74 |
12.7780 |
7672.74 |
12.6650 |
7672.19 |
13.0190 |
| 7760.49 |
12.9000 |
7760.49 |
12.7870 |
7759.94 |
13.1460 |
| 7848.74 |
13.0240 |
7848.74 |
12.9100 |
7848.19 |
13.2760 |
| 7937.49 |
13.1480 |
7937.49 |
13.0330 |
7936.94 |
13.4040 |
| 8026.74 |
13.2730 |
8026.74 |
13.1570 |
8026.19 |
13.5350 |
| 8116.49 |
13.3970 |
8116.49 |
13.2810 |
8115.94 |
13.6650 |
| 8206.74 |
13.5230 |
8206.74 |
13.4060 |
8206.19 |
13.7960 |
| 8297.49 |
13.6480 |
8297.49 |
13.5310 |
8296.94 |
13.9270 |
| 8388.74 |
13.7750 |
8388.74 |
13.6570 |
8388.19 |
14.0590 |
| 8480.49 |
13.9010 |
8480.49 |
13.7830 |
8479.94 |
14.1920 |
| 8572.74 |
14.0290 |
8572.74 |
13.9090 |
8572.19 |
14.3250 |
| 8665.49 |
14.1570 |
8665.49 |
14.0360 |
8664.94 |
14.4590 |
| 8758.74 |
14.2850 |
8758.74 |
14.1640 |
8758.19 |
14.5930 |
| 8852.49 |
14.4140 |
8852.49 |
14.2920 |
8851.94 |
14.7280 |
| 8946.74 |
14.5420 |
8946.74 |
14.4200 |
8946.19 |
14.8630 |
| 9041.49 |
14.6720 |
9041.49 |
14.5490 |
9040.94 |
15.0000 |
| 9136.74 |
14.8020 |
9136.74 |
14.6790 |
9136.19 |
15.1360 |
| 9232.49 |
14.9330 |
9232.49 |
14.8090 |
9231.94 |
15.2730 |
| 9328.74 |
15.0640 |
9328.74 |
14.9390 |
9328.19 |
15.4110 |
| 9425.49 |
15.1950 |
9425.49 |
15.0700 |
9424.94 |
15.5490 |
| 9522.74 |
15.3270 |
9522.74 |
15.2010 |
9522.19 |
15.6880 |
| 9620.49 |
15.4590 |
9620.49 |
15.3330 |
9619.94 |
15.8270 |
| 9718.74 |
15.5920 |
9718.74 |
15.4640 |
9718.19 |
15.9670 |
| 9817.49 |
15.7250 |
9817.49 |
15.5970 |
9816.94 |
16.1070 |
| 9916.74 |
15.8590 |
9916.74 |
15.7300 |
9916.19 |
16.2480 |
| 10016.49 |
15.9940 |
10016.49 |
15.8640 |
10015.94 |
16.3900 |
Calculated IMFPs for Si by the FPA with three different ELFs
| Crystal (Palik) |
Crystal (Yang) |
Doped (Palik) |
| Energy (eV) |
IMFP (nm) |
Energy (eV) |
IMFP (nm) |
Energy (eV) |
IMFP (nm) |
| 16.74 |
4.0188 |
17.30 |
2.9577 |
17.30 |
2.9442 |
| 17.49 |
3.3505 |
18.05 |
2.5329 |
18.05 |
2.6094 |
| 18.74 |
2.6285 |
19.30 |
2.0482 |
19.30 |
2.1823 |
| 20.49 |
2.0184 |
21.05 |
1.6256 |
21.05 |
1.7685 |
| 22.74 |
1.5641 |
23.30 |
1.2970 |
23.30 |
1.4226 |
| 25.49 |
1.2344 |
26.05 |
1.0501 |
26.05 |
1.1537 |
| 28.74 |
1.0064 |
29.30 |
0.8719 |
29.30 |
0.9594 |
| 32.49 |
0.8503 |
33.05 |
0.7446 |
33.05 |
0.8213 |
| 36.74 |
0.7360 |
37.30 |
0.6491 |
37.30 |
0.7163 |
| 41.49 |
0.6396 |
42.05 |
0.5704 |
42.05 |
0.6242 |
| 46.74 |
0.5380 |
47.30 |
0.4906 |
47.30 |
0.5242 |
| 52.49 |
0.4409 |
53.05 |
0.4160 |
53.05 |
0.4325 |
| 58.74 |
0.3947 |
59.30 |
0.3855 |
59.30 |
0.3917 |
| 65.49 |
0.3859 |
66.05 |
0.3826 |
66.05 |
0.3849 |
| 72.74 |
0.3922 |
73.30 |
0.3918 |
73.30 |
0.3920 |
| 80.49 |
0.4059 |
81.05 |
0.4071 |
81.05 |
0.4061 |
| 88.74 |
0.4241 |
89.30 |
0.4264 |
89.30 |
0.4245 |
| 97.49 |
0.4454 |
98.05 |
0.4485 |
98.05 |
0.4459 |
| 106.74 |
0.4691 |
107.30 |
0.4730 |
107.30 |
0.4696 |
| 116.49 |
0.4946 |
117.05 |
0.4992 |
117.05 |
0.4951 |
| 126.74 |
0.5218 |
127.30 |
0.5271 |
127.30 |
0.5223 |
| 137.49 |
0.5505 |
138.05 |
0.5563 |
138.05 |
0.5509 |
| 148.74 |
0.5804 |
149.30 |
0.5869 |
149.30 |
0.5808 |
| 160.49 |
0.6116 |
161.05 |
0.6186 |
161.05 |
0.6119 |
| 172.74 |
0.6438 |
173.30 |
0.6515 |
173.30 |
0.6441 |
| 185.49 |
0.6771 |
186.05 |
0.6854 |
186.05 |
0.6774 |
| 198.74 |
0.7114 |
199.30 |
0.7202 |
199.30 |
0.7116 |
| 212.49 |
0.7466 |
213.05 |
0.7560 |
213.05 |
0.7467 |
| 226.74 |
0.7827 |
227.30 |
0.7927 |
227.30 |
0.7828 |
| 241.49 |
0.8196 |
242.05 |
0.8303 |
242.05 |
0.8196 |
| 256.74 |
0.8574 |
257.30 |
0.8687 |
257.30 |
0.8573 |
| 272.49 |
0.8959 |
273.05 |
0.9078 |
273.05 |
0.8958 |
| 288.74 |
0.9352 |
289.30 |
0.9478 |
289.30 |
0.9350 |
| 305.49 |
0.9751 |
306.05 |
0.9884 |
306.05 |
0.9749 |
| 322.74 |
1.0153 |
323.30 |
1.0293 |
323.30 |
1.0150 |
| 340.49 |
1.0559 |
341.05 |
1.0705 |
341.05 |
1.0555 |
| 358.74 |
1.0970 |
359.30 |
1.1123 |
359.30 |
1.0966 |
| 377.49 |
1.1387 |
378.05 |
1.1546 |
378.05 |
1.1382 |
| 396.74 |
1.1809 |
397.30 |
1.1975 |
397.30 |
1.1803 |
| 416.49 |
1.2237 |
417.05 |
1.2411 |
417.05 |
1.2231 |
| 436.74 |
1.2672 |
437.30 |
1.2852 |
437.30 |
1.2665 |
| 457.49 |
1.3113 |
458.05 |
1.3300 |
458.05 |
1.3105 |
| 478.74 |
1.3560 |
479.30 |
1.3754 |
479.30 |
1.3552 |
| 500.49 |
1.4014 |
501.05 |
1.4215 |
501.05 |
1.4005 |
| 522.74 |
1.4474 |
523.30 |
1.4682 |
523.30 |
1.4465 |
| 545.49 |
1.4941 |
546.05 |
1.5157 |
546.05 |
1.4931 |
| 568.74 |
1.5415 |
569.30 |
1.5638 |
569.30 |
1.5404 |
| 592.49 |
1.5896 |
593.05 |
1.6127 |
593.05 |
1.5885 |
| 616.74 |
1.6384 |
617.30 |
1.6622 |
617.30 |
1.6372 |
| 641.49 |
1.6879 |
642.05 |
1.7125 |
642.05 |
1.6867 |
| 666.74 |
1.7381 |
667.30 |
1.7635 |
667.30 |
1.7368 |
| 692.49 |
1.7890 |
693.05 |
1.8153 |
693.05 |
1.7876 |
| 718.74 |
1.8406 |
719.30 |
1.8677 |
719.30 |
1.8392 |
| 745.49 |
1.8929 |
746.05 |
1.9209 |
746.05 |
1.8914 |
| 772.74 |
1.9460 |
773.30 |
1.9748 |
773.30 |
1.9444 |
| 800.49 |
1.9997 |
801.05 |
2.0294 |
801.05 |
1.9981 |
| 828.74 |
2.0541 |
829.30 |
2.0847 |
829.30 |
2.0525 |
| 857.49 |
2.1093 |
858.05 |
2.1407 |
858.05 |
2.1076 |
| 886.74 |
2.1651 |
887.30 |
2.1974 |
887.30 |
2.1633 |
| 916.49 |
2.2217 |
917.05 |
2.2549 |
917.05 |
2.2198 |
| 946.74 |
2.2789 |
947.30 |
2.3130 |
947.30 |
2.2770 |
| 977.49 |
2.3368 |
978.05 |
2.3718 |
978.05 |
2.3348 |
| 1008.74 |
2.3955 |
1009.30 |
2.4314 |
1009.30 |
2.3934 |
| 1040.49 |
2.4548 |
1041.05 |
2.4916 |
1041.05 |
2.4526 |
| 1072.74 |
2.5148 |
1073.30 |
2.5525 |
1073.30 |
2.5125 |
| 1105.49 |
2.5755 |
1106.05 |
2.6141 |
1106.05 |
2.5732 |
| 1138.74 |
2.6368 |
1139.30 |
2.6764 |
1139.30 |
2.6344 |
| 1172.49 |
2.6989 |
1173.05 |
2.7394 |
1173.05 |
2.6964 |
| 1206.74 |
2.7616 |
1207.30 |
2.8031 |
1207.30 |
2.7590 |
| 1241.49 |
2.8249 |
1242.05 |
2.8674 |
1242.05 |
2.8223 |
| 1276.74 |
2.8889 |
1277.30 |
2.9324 |
1277.30 |
2.8863 |
| 1312.49 |
2.9536 |
1313.05 |
2.9981 |
1313.05 |
2.9509 |
| 1348.74 |
3.0190 |
1349.30 |
3.0644 |
1349.30 |
3.0162 |
| 1385.49 |
3.0850 |
1386.05 |
3.1314 |
1386.05 |
3.0821 |
| 1422.74 |
3.1517 |
1423.30 |
3.1991 |
1423.30 |
3.1487 |
| 1460.49 |
3.2190 |
1461.05 |
3.2674 |
1461.05 |
3.2159 |
| 1498.74 |
3.2869 |
1499.30 |
3.3364 |
1499.30 |
3.2838 |
| 1537.49 |
3.3555 |
1538.05 |
3.4061 |
1538.05 |
3.3523 |
| 1576.74 |
3.4248 |
1577.30 |
3.4764 |
1577.30 |
3.4215 |
| 1616.49 |
3.4946 |
1617.05 |
3.5473 |
1617.05 |
3.4913 |
| 1656.74 |
3.5652 |
1657.30 |
3.6189 |
1657.30 |
3.5618 |
| 1697.49 |
3.6364 |
1698.05 |
3.6912 |
1698.05 |
3.6329 |
| 1738.74 |
3.7082 |
1739.30 |
3.7641 |
1739.30 |
3.7046 |
| 1780.49 |
3.7806 |
1781.05 |
3.8376 |
1781.05 |
3.7770 |
| 1822.74 |
3.8537 |
1823.30 |
3.9118 |
1823.30 |
3.8499 |
| 1865.49 |
3.9274 |
1866.05 |
3.9866 |
1866.05 |
3.9235 |
| 1908.74 |
4.0017 |
1909.30 |
4.0621 |
1909.30 |
3.9978 |
| 1952.49 |
4.0767 |
1953.05 |
4.1382 |
1953.05 |
4.0727 |
| 1996.74 |
4.1522 |
1997.30 |
4.2149 |
1997.30 |
4.1481 |
| 2041.49 |
4.2284 |
2042.05 |
4.2922 |
2042.05 |
4.2242 |
| 2086.74 |
4.3052 |
2087.30 |
4.3702 |
2087.30 |
4.3009 |
| 2132.49 |
4.3826 |
2133.05 |
4.4488 |
2133.05 |
4.3783 |
| 2178.74 |
4.4607 |
2179.30 |
4.5281 |
2179.30 |
4.4562 |
| 2225.49 |
4.5393 |
2226.05 |
4.6079 |
2226.05 |
4.5347 |
| 2272.74 |
4.6186 |
2273.30 |
4.6884 |
2273.30 |
4.6140 |
| 2320.49 |
4.6984 |
2321.05 |
4.7694 |
2321.05 |
4.6937 |
| 2368.74 |
4.7788 |
2369.30 |
4.8511 |
2369.30 |
4.7741 |
| 2417.49 |
4.8599 |
2418.05 |
4.9334 |
2418.05 |
4.8550 |
| 2466.74 |
4.9416 |
2467.30 |
5.0163 |
2467.30 |
4.9366 |
| 2516.49 |
5.0239 |
2517.05 |
5.0999 |
2517.05 |
5.0188 |
| 2566.74 |
5.1067 |
2567.30 |
5.1840 |
2567.30 |
5.1016 |
| 2617.49 |
5.1901 |
2618.05 |
5.2688 |
2618.05 |
5.1849 |
| 2668.74 |
5.2743 |
2669.30 |
5.3542 |
2669.30 |
5.2689 |
| 2720.49 |
5.3588 |
2721.05 |
5.4400 |
2721.05 |
5.3534 |
| 2772.74 |
5.4440 |
2773.30 |
5.5266 |
2773.30 |
5.4385 |
| 2825.49 |
5.5299 |
2826.05 |
5.6137 |
2826.05 |
5.5242 |
| 2878.74 |
5.6163 |
2879.30 |
5.7015 |
2879.30 |
5.6106 |
| 2932.49 |
5.7032 |
2933.05 |
5.7898 |
2933.05 |
5.6974 |
| 2986.74 |
5.7907 |
2987.30 |
5.8787 |
2987.30 |
5.7848 |
| 3041.49 |
5.8789 |
3042.05 |
5.9682 |
3042.05 |
5.8729 |
| 3096.74 |
5.9676 |
3097.30 |
6.0583 |
3097.30 |
5.9615 |
| 3152.49 |
6.0570 |
3153.05 |
6.1490 |
3153.05 |
6.0508 |
| 3208.74 |
6.1469 |
3209.30 |
6.2403 |
3209.30 |
6.1406 |
| 3265.49 |
6.2374 |
3266.05 |
6.3321 |
3266.05 |
6.2310 |
| 3322.74 |
6.3283 |
3323.30 |
6.4245 |
3323.30 |
6.3218 |
| 3380.49 |
6.4198 |
3381.05 |
6.5175 |
3381.05 |
6.4132 |
| 3438.74 |
6.5119 |
3439.30 |
6.6110 |
3439.30 |
6.5052 |
| 3497.49 |
6.6047 |
3498.05 |
6.7052 |
3498.05 |
6.5979 |
| 3556.74 |
6.6980 |
3557.30 |
6.8000 |
3557.30 |
6.6911 |
| 3616.49 |
6.7919 |
3617.05 |
6.8953 |
3617.05 |
6.7849 |
| 3676.74 |
6.8863 |
3677.30 |
6.9912 |
3677.30 |
6.8792 |
| 3737.49 |
6.9812 |
3738.05 |
7.0876 |
3738.05 |
6.9740 |
| 3798.74 |
7.0767 |
3799.30 |
7.1846 |
3799.30 |
7.0694 |
| 3860.49 |
7.1729 |
3861.05 |
7.2823 |
3861.05 |
7.1655 |
| 3922.74 |
7.2696 |
3923.30 |
7.3804 |
3923.30 |
7.2621 |
| 3985.49 |
7.3667 |
3986.05 |
7.4791 |
3986.05 |
7.3591 |
| 4048.74 |
7.4644 |
4049.30 |
7.5784 |
4049.30 |
7.4567 |
| 4112.49 |
7.5628 |
4113.05 |
7.6782 |
4113.05 |
7.5549 |
| 4176.74 |
7.6617 |
4177.30 |
7.7786 |
4177.30 |
7.6537 |
| 4241.49 |
7.7610 |
4242.05 |
7.8795 |
4242.05 |
7.7530 |
| 4306.74 |
7.8609 |
4307.30 |
7.9811 |
4307.30 |
7.8527 |
| 4372.49 |
7.9615 |
4373.05 |
8.0831 |
4373.05 |
7.9533 |
| 4438.74 |
8.0626 |
4439.30 |
8.1857 |
4439.30 |
8.0542 |
| 4505.49 |
8.1640 |
4506.05 |
8.2889 |
4506.05 |
8.1555 |
| 4572.74 |
8.2662 |
4573.30 |
8.3927 |
4573.30 |
8.2577 |
| 4640.49 |
8.3691 |
4641.05 |
8.4971 |
4641.05 |
8.3604 |
| 4708.74 |
8.4721 |
4709.30 |
8.6019 |
4709.30 |
8.4633 |
| 4777.49 |
8.5758 |
4778.05 |
8.7072 |
4778.05 |
8.5669 |
| 4846.74 |
8.6801 |
4847.30 |
8.8130 |
4847.30 |
8.6711 |
| 4916.49 |
8.7847 |
4917.05 |
8.9194 |
4917.05 |
8.7756 |
| 4986.74 |
8.8902 |
4987.30 |
9.0265 |
4987.30 |
8.8810 |
| 5057.49 |
8.9962 |
5058.05 |
9.1340 |
5058.05 |
8.9868 |
| 5128.74 |
9.1024 |
5129.30 |
9.2421 |
5129.30 |
9.0930 |
| 5200.49 |
9.2095 |
5201.05 |
9.3507 |
5201.05 |
9.2000 |
| 5272.74 |
9.3167 |
5273.30 |
9.4597 |
5273.30 |
9.3070 |
| 5345.49 |
9.4247 |
5346.05 |
9.5694 |
5346.05 |
9.4149 |
| 5418.74 |
9.5335 |
5419.30 |
9.6797 |
5419.30 |
9.5236 |
| 5492.49 |
9.6423 |
5493.05 |
9.7905 |
5493.05 |
9.6322 |
| 5566.74 |
9.7519 |
5567.30 |
9.9017 |
5567.30 |
9.7418 |
| 5641.49 |
9.8617 |
5642.05 |
10.0130 |
5642.05 |
9.8514 |
| 5716.74 |
9.9723 |
5717.30 |
10.1260 |
5717.30 |
9.9619 |
| 5792.49 |
10.0840 |
5793.05 |
10.2390 |
5793.05 |
10.0730 |
| 5868.74 |
10.1950 |
5869.30 |
10.3520 |
5869.30 |
10.1840 |
| 5945.49 |
10.3070 |
5946.05 |
10.4660 |
5946.05 |
10.2970 |
| 6022.74 |
10.4200 |
6023.30 |
10.5800 |
6023.30 |
10.4090 |
| 6100.49 |
10.5330 |
6101.05 |
10.6950 |
6101.05 |
10.5220 |
| 6178.74 |
10.6470 |
6179.30 |
10.8110 |
6179.30 |
10.6350 |
| 6257.49 |
10.7610 |
6258.05 |
10.9260 |
6258.05 |
10.7490 |
| 6336.74 |
10.8750 |
6337.30 |
11.0430 |
6337.30 |
10.8640 |
| 6416.49 |
10.9910 |
6417.05 |
11.1600 |
6417.05 |
10.9790 |
| 6496.74 |
11.1060 |
6497.30 |
11.2770 |
6497.30 |
11.0950 |
| 6577.49 |
11.2220 |
6578.05 |
11.3950 |
6578.05 |
11.2110 |
| 6658.74 |
11.3390 |
6659.30 |
11.5140 |
6659.30 |
11.3280 |
| 6740.49 |
11.4560 |
6741.05 |
11.6330 |
6741.05 |
11.4440 |
| 6822.74 |
11.5740 |
6823.30 |
11.7520 |
6823.30 |
11.5620 |
| 6905.49 |
11.6920 |
6906.05 |
11.8730 |
6906.05 |
11.6800 |
| 6988.74 |
11.8110 |
6989.30 |
11.9930 |
6989.30 |
11.7980 |
| 7072.49 |
11.9300 |
7073.05 |
12.1140 |
7073.05 |
11.9170 |
| 7156.74 |
12.0500 |
7157.30 |
12.2360 |
7157.30 |
12.0370 |
| 7241.49 |
12.1690 |
7242.05 |
12.3570 |
7242.05 |
12.1570 |
| 7326.74 |
12.2900 |
7327.30 |
12.4800 |
7327.30 |
12.2770 |
| 7412.49 |
12.4110 |
7413.05 |
12.6030 |
7413.05 |
12.3980 |
| 7498.74 |
12.5330 |
7499.30 |
12.7260 |
7499.30 |
12.5200 |
| 7585.49 |
12.6550 |
7586.05 |
12.8510 |
7586.05 |
12.6420 |
| 7672.74 |
12.7780 |
7673.30 |
12.9750 |
7673.30 |
12.7640 |
| 7760.49 |
12.9000 |
7761.05 |
13.1000 |
7761.05 |
12.8870 |
| 7848.74 |
13.0240 |
7849.30 |
13.2260 |
7849.30 |
13.0110 |
| 7937.49 |
13.1480 |
7938.05 |
13.3510 |
7938.05 |
13.1340 |
| 8026.74 |
13.2730 |
8027.30 |
13.4780 |
8027.30 |
13.2590 |
| 8116.49 |
13.3970 |
8117.05 |
13.6050 |
8117.05 |
13.3830 |
| 8206.74 |
13.5230 |
8207.30 |
13.7320 |
8207.30 |
13.5090 |
| 8297.49 |
13.6480 |
8298.05 |
13.8600 |
8298.05 |
13.6340 |
| 8388.74 |
13.7750 |
8389.30 |
13.9880 |
8389.30 |
13.7610 |
| 8480.49 |
13.9010 |
8481.05 |
14.1170 |
8481.05 |
13.8870 |
| 8572.74 |
14.0290 |
8573.30 |
14.2460 |
8573.30 |
14.0140 |
| 8665.49 |
14.1570 |
8666.05 |
14.3760 |
8666.05 |
14.1420 |
| 8758.74 |
14.2850 |
8759.30 |
14.5060 |
8759.30 |
14.2700 |
| 8852.49 |
14.4140 |
8853.05 |
14.6370 |
8853.05 |
14.3990 |
| 8946.74 |
14.5420 |
8947.30 |
14.7680 |
8947.30 |
14.5270 |
| 9041.49 |
14.6720 |
9042.05 |
14.9000 |
9042.05 |
14.6570 |
| 9136.74 |
14.8020 |
9137.30 |
15.0320 |
9137.30 |
14.7860 |
| 9232.49 |
14.9330 |
9233.05 |
15.1650 |
9233.05 |
14.9170 |
| 9328.74 |
15.0640 |
9329.30 |
15.2970 |
9329.30 |
15.0480 |
| 9425.49 |
15.1950 |
9426.05 |
15.4310 |
9426.05 |
15.1790 |
| 9522.74 |
15.3270 |
9523.30 |
15.5650 |
9523.30 |
15.3110 |
| 9620.49 |
15.4590 |
9621.05 |
15.7000 |
9621.05 |
15.4430 |
| 9718.74 |
15.5920 |
9719.30 |
15.8340 |
9719.30 |
15.5760 |
| 9817.49 |
15.7250 |
9818.05 |
15.9700 |
9818.05 |
15.7090 |
| 9916.74 |
15.8590 |
9917.30 |
16.1050 |
9917.30 |
15.8420 |
| 10016.49 |
15.9940 |
10017.05 |
16.2420 |
10017.05 |
15.9770 |
