Cite as: M.S.S. Khan, S.F. Mao, Y.B. Zou, D.B. Lu, B. Da, Y.G. Li and Z.J. Ding, An Extensive Theoretical Quantification of Secondary Electron Emission from Silicon.
Vacuum
215 (2023) 112257.
DOI:
10.1016/j.vacuum.2023.112257
Click to expand ELF information
| Si from |
photon energy range (eV) and the corresponding dataset in literature |
| crystal (Palik) |
0.01–1.10 [1,2] |
1.10-3.10 [3] |
3.10-6.00 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
2000-10000 [8] |
| crystal (Yang) |
0.01–200 [9] |
|
|
|
|
200-2000 [7] |
|
| doped (Palik) |
0.01–1.10 [6,10] |
1.10-3.10 [3] |
3.10–60 [4] |
6.00–20.0 [5] |
20.0–100 [6] |
100-2000 [7] |
|
- References:
- [1] B. Bendow, H.G. Lipson, S.P. Yukon, Appl. Opt. 16, 2909 (1977).
- [2] H.H. Li, J. Phys. Chem. Ref. Data 9, 561 (1980).
- [3] H.R. Philipp, H.J. Ehrenrich, Phys. Rev. 129, 1550 (1963).
- [4] D.E. Aspnes, J.B. Theeten, J. Electrochem. Soc. 127, 1359 (1980).
- [5] H.R. Philipp, J. App, Phys. 43, 2835 (1972).
- [6] E.D. Palik (Ed.), Handbook of Optical Constants of Solids vols. 1–4, Academic
Press, (1997).
- [7] B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data. Nucl.
Data. Tabl 27, 1 (1982).
- [8] B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data. Nucl. Data. Tabl 54, 181 (1993).
- [9] L.H. Yang, J.M. Gong, A. Sulyok, M. Menyhárd, G. Sáfrán, K. Tőkési, B. Da, Z.J. Ding, Phys. Chem. Chem. Phys. 23, 25335–25346 (2021).
- [10] J. Humlíček, K. Vojtěchovský, Czech. J, Phys. B 38, 1033 (1988).
BSC of Si
| Energy (eV) |
Yield |
error |
| 50 |
0.012304 |
0.032739 |
| 60 |
0.094510 |
0.019865 |
| 70 |
0.118341 |
0.017239 |
| 80 |
0.139494 |
0.014169 |
| 90 |
0.156415 |
0.012008 |
| 100 |
0.171122 |
0.010687 |
| 125 |
0.198896 |
0.009336 |
| 150 |
0.217838 |
0.009028 |
| 175 |
0.231391 |
0.008814 |
| 200 |
0.241785 |
0.008634 |
| 250 |
0.255079 |
0.008196 |
| 300 |
0.262049 |
0.007798 |
| 350 |
0.265258 |
0.007422 |
| 400 |
0.266190 |
0.007184 |
| 450 |
0.265893 |
0.006903 |
| 500 |
0.264744 |
0.006651 |
| 600 |
0.261314 |
0.006343 |
| 700 |
0.257254 |
0.006064 |
| 800 |
0.253194 |
0.005871 |
| 900 |
0.249273 |
0.005649 |
| 1000 |
0.245832 |
0.005557 |
| 1500 |
0.230757 |
0.005307 |
| 2000 |
0.221165 |
0.004641 |
| 2500 |
0.213982 |
0.004659 |
| 3000 |
0.208696 |
0.004245 |
| 3500 |
0.204319 |
0.004070 |
| 4000 |
0.200679 |
0.003931 |
| 4500 |
0.197708 |
0.003823 |
| 5000 |
0.195047 |
0.003760 |
| 6000 |
0.190915 |
0.003668 |
| 7000 |
0.188025 |
0.003618 |
| 8000 |
0.184725 |
0.003579 |
| 9000 |
0.181944 |
0.003578 |
| 10000 |
0.179457 |
0.003581 |
