Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Sb 51 M5N45N45 0.453 0.528 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 0.7 0. 1.16380 0.7 10. 1.16144 0.7 20. 1.15379 0.7 30. 1.14009 0.7 40. 1.11524 0.7 45. 1.09765 0.7 50. 1.07332 0.7 60. 1.00808 0.7 70. 0.88880 0.7 75. 0.78438 0.7 80. 0.62114 0.7 81. 0.57988 0.7 82. 0.53317 0.7 83. 0.48310 0.7 84. 0.42850 0.7 85. 0.36874 0.7 86. 0.29133 0.7 87. 0.23553 0.7 88. 0.17031 0.7 89. 0.10165 1.0 0. 1.42383 1.0 10. 1.42307 1.0 20. 1.41675 1.0 30. 1.41079 1.0 40. 1.40102 1.0 45. 1.39468 1.0 50. 1.38205 1.0 60. 1.33787 1.0 70. 1.22070 1.0 75. 1.09612 1.0 80. 0.88389 1.0 81. 0.81314 1.0 82. 0.76182 1.0 83. 0.69058 1.0 84. 0.61342 1.0 85. 0.52754 1.0 86. 0.43625 1.0 87. 0.33840 1.0 88. 0.23661 1.0 89. 0.13493 1.4 0. 1.57892 1.4 10. 1.57675 1.4 20. 1.57537 1.4 30. 1.57584 1.4 40. 1.57481 1.4 45. 1.57070 1.4 50. 1.56588 1.4 60. 1.52695 1.4 70. 1.41366 1.4 75. 1.28582 1.4 80. 1.05773 1.4 81. 0.99242 1.4 82. 0.92119 1.4 83. 0.83989 1.4 84. 0.74793 1.4 85. 0.64665 1.4 86. 0.53566 1.4 87. 0.41588 1.4 88. 0.28880 1.4 89. 0.16021 1.8 0. 1.65810 1.8 10. 1.65798 1.8 20. 1.66047 1.8 30. 1.65883 1.8 40. 1.66093 1.8 45. 1.65733 1.8 50. 1.64658 1.8 60. 1.61159 1.8 70. 1.50349 1.8 75. 1.38239 1.8 80. 1.15813 1.8 81. 1.09321 1.8 82. 1.01826 1.8 83. 0.93292 1.8 84. 0.83626 1.8 85. 0.72766 1.8 86. 0.60637 1.8 87. 0.47174 1.8 88. 0.32825 1.8 89. 0.17925 2.0 0. 1.68544 2.0 10. 1.68533 2.0 20. 1.68717 2.0 30. 1.68768 2.0 40. 1.68745 2.0 45. 1.68413 2.0 50. 1.67391 2.0 60. 1.63754 2.0 70. 1.53254 2.0 75. 1.41519 2.0 80. 1.19357 2.0 81. 1.12927 2.0 82. 1.05449 2.0 83. 0.96936 2.0 84. 0.87260 2.0 85. 0.76099 2.0 86. 0.63510 2.0 87. 0.49651 2.0 88. 0.34453 2.0 89. 0.18748 2.2 0. 1.70776 2.2 10. 1.70635 2.2 20. 1.70646 2.2 30. 1.70906 2.2 40. 1.70827 2.2 45. 1.70497 2.2 50. 1.69639 2.2 60. 1.65691 2.2 70. 1.55378 2.2 75. 1.43955 2.2 80. 1.22661 2.2 81. 1.16251 2.2 82. 1.08843 2.2 83. 1.00331 2.2 84. 0.90139 2.2 85. 0.79130 2.2 86. 0.66226 2.2 87. 0.51811 2.2 88. 0.36056 2.2 89. 0.19551 2.4 0. 1.72566 2.4 10. 1.72709 2.4 20. 1.72708 2.4 30. 1.72465 2.4 40. 1.72413 2.4 45. 1.71934 2.4 50. 1.69636 2.4 60. 1.67451 2.4 70. 1.57121 2.4 75. 1.46348 2.4 80. 1.25206 2.4 81. 1.19024 2.4 82. 1.11647 2.4 83. 1.03086 2.4 84. 0.93278 2.4 85. 0.81827 2.4 86. 0.68648 2.4 87. 0.53888 2.4 88. 0.37480 2.4 89. 0.20288 2.6 0. 1.73967 2.6 10. 1.73934 2.6 20. 1.74295 2.6 30. 1.74243 2.6 40. 1.73832 2.6 45. 1.73507 2.6 50. 1.72390 2.6 60. 1.68532 2.6 70. 1.58357 2.6 75. 1.48007 2.6 80. 1.27755 2.6 81. 1.21513 2.6 82. 1.13083 2.6 83. 1.05806 2.6 84. 0.95932 2.6 85. 0.84364 2.6 86. 0.71027 2.6 87. 0.54275 2.6 88. 0.38933 2.6 89. 0.20981 3.0 0. 1.76215 3.0 10. 1.76438 3.0 20. 1.76094 3.0 30. 1.76287 3.0 40. 1.75545 3.0 45. 1.75151 3.0 50. 1.74267 3.0 60. 1.70271 3.0 70. 1.60666 3.0 75. 1.50924 3.0 80. 1.31844 3.0 81. 1.25707 3.0 82. 1.18700 3.0 83. 1.10420 3.0 84. 1.00571 3.0 85. 0.88975 3.0 86. 0.75288 3.0 87. 0.59454 3.0 88. 0.41658 3.0 89. 0.22394 3.5 0. 1.78212 3.5 10. 1.78004 3.5 20. 1.77967 3.5 30. 1.78098 3.5 40. 1.77361 3.5 45. 1.76766 3.5 50. 1.75838 3.5 60. 1.71597 3.5 70. 1.62743 3.5 75. 1.53596 3.5 80. 1.35735 3.5 81. 1.30100 3.5 82. 1.23450 3.5 83. 1.15369 3.5 84. 1.05685 3.5 85. 0.94084 3.5 86. 0.80081 3.5 87. 0.63591 3.5 88. 0.44786 3.5 89. 0.24043 3.8 0. 1.78989 3.8 10. 1.78841 3.8 20. 1.78715 3.8 30. 1.78747 3.8 40. 1.78236 3.8 45. 1.77214 3.8 50. 1.76353 3.8 60. 1.72178 3.8 70. 1.63337 3.8 75. 1.54950 3.8 80. 1.37885 3.8 81. 1.32287 3.8 82. 1.25730 3.8 83. 1.17797 3.8 84. 1.08256 3.8 85. 0.96581 3.8 86. 0.82647 3.8 87. 0.65856 3.8 88. 0.46511 3.8 89. 0.24943 4.0 0. 1.79508 4.0 10. 1.79504 4.0 20. 1.79458 4.0 30. 1.79150 4.0 40. 1.78289 4.0 45. 1.77800 4.0 50. 1.76708 4.0 60. 1.72536 4.0 70. 1.63925 4.0 75. 1.55718 4.0 80. 1.39042 4.0 81. 1.33662 4.0 82. 1.27118 4.0 83. 1.19343 4.0 84. 1.09842 4.0 85. 0.98339 4.0 86. 0.84182 4.0 87. 0.67320 4.0 88. 0.47554 4.0 89. 0.25507 4.5 0. 1.80459 4.5 10. 1.80255 4.5 20. 1.80524 4.5 30. 1.79847 4.5 40. 1.79310 4.5 45. 1.78288 4.5 50. 1.77380 4.5 60. 1.72966 4.5 70. 1.64927 4.5 75. 1.57180 4.5 80. 1.41756 4.5 81. 1.36644 4.5 82. 1.30441 4.5 83. 1.22973 4.5 84. 1.13677 4.5 85. 1.02077 4.5 86. 0.87656 4.5 87. 0.70645 4.5 88. 0.50172 4.5 89. 0.26947 5.0 0. 1.80630 5.0 10. 1.81001 5.0 20. 1.80879 5.0 30. 1.80747 5.0 40. 1.79950 5.0 45. 1.79087 5.0 50. 1.77451 5.0 60. 1.73550 5.0 70. 1.65437 5.0 75. 1.58388 5.0 80. 1.43925 5.0 81. 1.39045 5.0 82. 1.33281 5.0 83. 1.25762 5.0 84. 1.16892 5.0 85. 1.05512 5.0 86. 0.91192 5.0 87. 0.73724 5.0 88. 0.52681 5.0 89. 0.28304 5.5 0. 1.81538 5.5 10. 1.81073 5.5 20. 1.81305 5.5 30. 1.81131 5.5 40. 1.80314 5.5 45. 1.79049 5.5 50. 1.78090 5.5 60. 1.73968 5.5 70. 1.66071 5.5 75. 1.59226 5.5 80. 1.45713 5.5 81. 1.41264 5.5 82. 1.35592 5.5 83. 1.28525 5.5 84. 1.19718 5.5 85. 1.08541 5.5 86. 0.94408 5.5 87. 0.76512 5.5 88. 0.54892 5.5 89. 0.29563 6.0 0. 1.82076 6.0 10. 1.81678 6.0 20. 1.81713 6.0 30. 1.81085 6.0 40. 1.80144 6.0 45. 1.79407 6.0 50. 1.78375 6.0 60. 1.73933 6.0 70. 1.66401 6.0 75. 1.59933 6.0 80. 1.47089 6.0 81. 1.43024 6.0 82. 1.37652 6.0 83. 1.30896 6.0 84. 1.22229 6.0 85. 1.11428 6.0 86. 0.97217 6.0 87. 0.79320 6.0 88. 0.57088 6.0 89. 0.30824 6.5 0. 1.82342 6.5 10. 1.82190 6.5 20. 1.82114 6.5 30. 1.81615 6.5 40. 1.80589 6.5 45. 1.79606 6.5 50. 1.78430 6.5 60. 1.74169 6.5 70. 1.66481 6.5 75. 1.60552 6.5 80. 1.48576 6.5 81. 1.44182 6.5 82. 1.39383 6.5 83. 1.33073 6.5 84. 1.24663 6.5 85. 1.13933 6.5 86. 0.99872 6.5 87. 0.81783 6.5 88. 0.59193 6.5 89. 0.32033 7.0 0. 1.82701 7.0 10. 1.82723 7.0 20. 1.82535 7.0 30. 1.82114 7.0 40. 1.80751 7.0 45. 1.79826 7.0 50. 1.78352 7.0 60. 1.73946 7.0 70. 1.66997 7.0 75. 1.61019 7.0 80. 1.49820 7.0 81. 1.45959 7.0 82. 1.40925 7.0 83. 1.34808 7.0 84. 1.26662 7.0 85. 1.15002 7.0 86. 1.02300 7.0 87. 0.84228 7.0 88. 0.61231 7.0 89. 0.33275 7.5 0. 1.82666 7.5 10. 1.82647 7.5 20. 1.82445 7.5 30. 1.82062 7.5 40. 1.80760 7.5 45. 1.79800 7.5 50. 1.78603 7.5 60. 1.74279 7.5 70. 1.67093 7.5 75. 1.61312 7.5 80. 1.50742 7.5 81. 1.47252 7.5 82. 1.42305 7.5 83. 1.36497 7.5 84. 1.28606 7.5 85. 1.18185 7.5 86. 1.04670 7.5 87. 0.86488 7.5 88. 0.63173 7.5 89. 0.34412 8.0 0. 1.82633 8.0 10. 1.82668 8.0 20. 1.82460 8.0 30. 1.82107 8.0 40. 1.80968 8.0 45. 1.79780 8.0 50. 1.78573 8.0 60. 1.74306 8.0 70. 1.67078 8.0 75. 1.61864 8.0 80. 1.51598 8.0 81. 1.48087 8.0 82. 1.43578 8.0 83. 1.38072 8.0 84. 1.30356 8.0 85. 1.20355 8.0 86. 1.06764 8.0 87. 0.88714 8.0 88. 0.65057 8.0 89. 0.35488 8.5 0. 1.82533 8.5 10. 1.82578 8.5 20. 1.82774 8.5 30. 1.82207 8.5 40. 1.80959 8.5 45. 1.80128 8.5 50. 1.78843 8.5 60. 1.74386 8.5 70. 1.67117 8.5 75. 1.61932 8.5 80. 1.52186 8.5 81. 1.48858 8.5 82. 1.44791 8.5 83. 1.39222 8.5 84. 1.31854 8.5 85. 1.22080 8.5 86. 1.08759 8.5 87. 0.90697 8.5 88. 0.66840 8.5 89. 0.36663 9.0 0. 1.82872 9.0 10. 1.82807 9.0 20. 1.82947 9.0 30. 1.82069 9.0 40. 1.81176 9.0 45. 1.80165 9.0 50. 1.78581 9.0 60. 1.74040 9.0 70. 1.67240 9.0 75. 1.62044 9.0 80. 1.52979 9.0 81. 1.49773 9.0 82. 1.45786 9.0 83. 1.40442 9.0 84. 1.33327 9.0 85. 1.23814 9.0 86. 1.10613 9.0 87. 0.92700 9.0 88. 0.68546 9.0 89. 0.37707 9.5 0. 1.83057 9.5 10. 1.83335 9.5 20. 1.82868 9.5 30. 1.82395 9.5 40. 1.81021 9.5 45. 1.80199 9.5 50. 1.78697 9.5 60. 1.74107 9.5 70. 1.67042 9.5 75. 1.62301 9.5 80. 1.53579 9.5 81. 1.50592 9.5 82. 1.46681 9.5 83. 1.41522 9.5 84. 1.34762 9.5 85. 1.24947 9.5 86. 1.12326 9.5 87. 0.94508 9.5 88. 0.70195 9.5 89. 0.38829 10.0 0. 1.83162 10.0 10. 1.82969 10.0 20. 1.83336 10.0 30. 1.81961 10.0 40. 1.81268 10.0 45. 1.80010 10.0 50. 1.78813 10.0 60. 1.74012 10.0 70. 1.67124 10.0 75. 1.62367 10.0 80. 1.54019 10.0 81. 1.51086 10.0 82. 1.47408 10.0 83. 1.42620 10.0 84. 1.35898 10.0 85. 1.25648 10.0 86. 1.14029 10.0 87. 0.96276 10.0 88. 0.71687 10.0 89. 0.39769 11.0 0. 1.83132 11.0 10. 1.83157 11.0 20. 1.82783 11.0 30. 1.82469 11.0 40. 1.81054 11.0 45. 1.80343 11.0 50. 1.78680 11.0 60. 1.74079 11.0 70. 1.67213 11.0 75. 1.62604 11.0 80. 1.54836 11.0 81. 1.52312 11.0 82. 1.49064 11.0 83. 1.44345 11.0 84. 1.38069 11.0 85. 1.29362 11.0 86. 1.16979 11.0 87. 0.99363 11.0 88. 0.74644 11.0 89. 0.41594 12.0 0. 1.83465 12.0 10. 1.83099 12.0 20. 1.83227 12.0 30. 1.82715 12.0 40. 1.81233 12.0 45. 1.80204 12.0 50. 1.78371 12.0 60. 1.73838 12.0 70. 1.67025 12.0 75. 1.62561 12.0 80. 1.55466 12.0 81. 1.53244 12.0 82. 1.50185 12.0 83. 1.45777 12.0 84. 1.39921 12.0 85. 1.31601 12.0 86. 1.19651 12.0 87. 1.02196 12.0 88. 0.77329 12.0 89. 0.43350 13.0 0. 1.83329 13.0 10. 1.83230 13.0 20. 1.83367 13.0 30. 1.82534 13.0 40. 1.81096 13.0 45. 1.80492 13.0 50. 1.78432 13.0 60. 1.73861 13.0 70. 1.67068 13.0 75. 1.62741 13.0 80. 1.56154 13.0 81. 1.53923 13.0 82. 1.51015 13.0 83. 1.47141 13.0 84. 1.41536 13.0 85. 1.33731 13.0 86. 1.22033 13.0 87. 1.04944 13.0 88. 0.79876 13.0 89. 0.45063 14.0 0. 1.83347 14.0 10. 1.83538 14.0 20. 1.83191 14.0 30. 1.82363 14.0 40. 1.81339 14.0 45. 1.79868 14.0 50. 1.78410 14.0 60. 1.73710 14.0 70. 1.66738 14.0 75. 1.62627 14.0 80. 1.56566 14.0 81. 1.54430 14.0 82. 1.51766 14.0 83. 1.48231 14.0 84. 1.43113 14.0 85. 1.35356 14.0 86. 1.24234 14.0 87. 1.07317 14.0 88. 0.82221 14.0 89. 0.46679 15.0 0. 1.83686 15.0 10. 1.83108 15.0 20. 1.83243 15.0 30. 1.82651 15.0 40. 1.81146 15.0 45. 1.80003 15.0 50. 1.78153 15.0 60. 1.73512 15.0 70. 1.67016 15.0 75. 1.62630 15.0 80. 1.56882 15.0 81. 1.55093 15.0 82. 1.52562 15.0 83. 1.49126 15.0 84. 1.44344 15.0 85. 1.36987 15.0 86. 1.26294 15.0 87. 1.09706 15.0 88. 0.84518 15.0 89. 0.48224 16.0 0. 1.83689 16.0 10. 1.83287 16.0 20. 1.83358 16.0 30. 1.82982 16.0 40. 1.81354 16.0 45. 1.80024 16.0 50. 1.78423 16.0 60. 1.73531 16.0 70. 1.66746 16.0 75. 1.62759 16.0 80. 1.57210 16.0 81. 1.55454 16.0 82. 1.53194 16.0 83. 1.49952 16.0 84. 1.45477 16.0 85. 1.38629 16.0 86. 1.28076 16.0 87. 1.11822 16.0 88. 0.86592 16.0 89. 0.49786 17.0 0. 1.83456 17.0 10. 1.83528 17.0 20. 1.83273 17.0 30. 1.82551 17.0 40. 1.81363 17.0 45. 1.79954 17.0 50. 1.78262 17.0 60. 1.73550 17.0 70. 1.66680 17.0 75. 1.62761 17.0 80. 1.57427 17.0 81. 1.55971 17.0 82. 1.53476 17.0 83. 1.50520 17.0 84. 1.46272 17.0 85. 1.39775 17.0 86. 1.29670 17.0 87. 1.13712 17.0 88. 0.88734 17.0 89. 0.51307 18.0 0. 1.83356 18.0 10. 1.83654 18.0 20. 1.83513 18.0 30. 1.82490 18.0 40. 1.81338 18.0 45. 1.79859 18.0 50. 1.78229 18.0 60. 1.73410 18.0 70. 1.66854 18.0 75. 1.62669 18.0 80. 1.57590 18.0 81. 1.56116 18.0 82. 1.54019 18.0 83. 1.51353 18.0 84. 1.47355 18.0 85. 1.41048 18.0 86. 1.31148 18.0 87. 1.15589 18.0 88. 0.90588 18.0 89. 0.52701 19.0 0. 1.83365 19.0 10. 1.83611 19.0 20. 1.83569 19.0 30. 1.82341 19.0 40. 1.81141 19.0 45. 1.79784 19.0 50. 1.78042 19.0 60. 1.73417 19.0 70. 1.66523 19.0 75. 1.62711 19.0 80. 1.57635 19.0 81. 1.56154 19.0 82. 1.54321 19.0 83. 1.51735 19.0 84. 1.48035 19.0 85. 1.40962 19.0 86. 1.32742 19.0 87. 1.17275 19.0 88. 0.92474 19.0 89. 0.54065 20.0 0. 1.83427 20.0 10. 1.83360 20.0 20. 1.83333 20.0 30. 1.82740 20.0 40. 1.80997 20.0 45. 1.79721 20.0 50. 1.78015 20.0 60. 1.73246 20.0 70. 1.66472 20.0 75. 1.62468 20.0 80. 1.57640 20.0 81. 1.56455 20.0 82. 1.54770 20.0 83. 1.52285 20.0 84. 1.48723 20.0 85. 1.42819 20.0 86. 1.33935 20.0 87. 1.18948 20.0 88. 0.94127 20.0 89. 0.55454 25.0 0. 1.83628 25.0 10. 1.83502 25.0 20. 1.83398 25.0 30. 1.82538 25.0 40. 1.80786 25.0 45. 1.79657 25.0 50. 1.77628 25.0 60. 1.72598 25.0 70. 1.66241 25.0 75. 1.62325 25.0 80. 1.58160 25.0 81. 1.57122 25.0 82. 1.55713 25.0 83. 1.53891 25.0 84. 1.51195 25.0 85. 1.46753 25.0 86. 1.38988 25.0 87. 1.25613 25.0 88. 1.01935 25.0 89. 0.61699 30.0 0. 1.83686 30.0 10. 1.83598 30.0 20. 1.83019 30.0 30. 1.82293 30.0 40. 1.80776 30.0 45. 1.79239 30.0 50. 1.77298 30.0 60. 1.72539 30.0 70. 1.65580 30.0 75. 1.61917 30.0 80. 1.58243 30.0 81. 1.57187 30.0 82. 1.56184 30.0 83. 1.54505 30.0 84. 1.52556 30.0 85. 1.48753 30.0 86. 1.42403 30.0 87. 1.30638 30.0 88. 1.06755 30.0 89. 0.67195 ____________________________________________________