Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Sb 51 M5N45N45 0.453 0.528 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 0.7 0. 1.19362 0.7 10. 1.17427 0.7 20. 1.14993 0.7 30. 1.11965 0.7 40. 1.07839 0.7 45. 1.05252 0.7 50. 1.01898 0.7 60. 0.92809 0.7 70. 0.77424 0.7 75. 0.65438 0.7 80. 0.48823 0.7 81. 0.44947 0.7 82. 0.40704 0.7 83. 0.36293 0.7 84. 0.31644 0.7 85. 0.26752 0.7 86. 0.20813 0.7 87. 0.16420 0.7 88. 0.11633 0.7 89. 0.06799 1.0 0. 1.42169 1.0 10. 1.42302 1.0 20. 1.41754 1.0 30. 1.40999 1.0 40. 1.39468 1.0 45. 1.38351 1.0 50. 1.36351 1.0 60. 1.29492 1.0 70. 1.13232 1.0 75. 0.97818 1.0 80. 0.74373 1.0 81. 0.67445 1.0 82. 0.62163 1.0 83. 0.55399 1.0 84. 0.48300 1.0 85. 0.40699 1.0 86. 0.32957 1.0 87. 0.24975 1.0 88. 0.17043 1.0 89. 0.09475 1.4 0. 1.56186 1.4 10. 1.57062 1.4 20. 1.57813 1.4 30. 1.58439 1.4 40. 1.58371 1.4 45. 1.57761 1.4 50. 1.56866 1.4 60. 1.51224 1.4 70. 1.35594 1.4 75. 1.19253 1.4 80. 0.92764 1.4 81. 0.85719 1.4 82. 0.78272 1.4 83. 0.70088 1.4 84. 0.61174 1.4 85. 0.51747 1.4 86. 0.41848 1.4 87. 0.31645 1.4 88. 0.21372 1.4 89. 0.11507 1.8 0. 1.63620 1.8 10. 1.64986 1.8 20. 1.66373 1.8 30. 1.67047 1.8 40. 1.67571 1.8 45. 1.67198 1.8 50. 1.65860 1.8 60. 1.61147 1.8 70. 1.46598 1.8 75. 1.30862 1.8 80. 1.03885 1.8 81. 0.96607 1.8 82. 0.88504 1.8 83. 0.79566 1.8 84. 0.69848 1.8 85. 0.59399 1.8 86. 0.48217 1.8 87. 0.36461 1.8 88. 0.24596 1.8 89. 0.12979 2.0 0. 1.66239 2.0 10. 1.67678 2.0 20. 1.69064 2.0 30. 1.70007 2.0 40. 1.70400 2.0 45. 1.70069 2.0 50. 1.68823 2.0 60. 1.64196 2.0 70. 1.50236 2.0 75. 1.34906 2.0 80. 1.07966 2.0 81. 1.00658 2.0 82. 0.92388 2.0 83. 0.83353 2.0 84. 0.73452 2.0 85. 0.62564 2.0 86. 0.50845 2.0 87. 0.38599 2.0 88. 0.25917 2.0 89. 0.13612 2.2 0. 1.68462 2.2 10. 1.69736 2.2 20. 1.70995 2.2 30. 1.72184 2.2 40. 1.72548 2.2 45. 1.72248 2.2 50. 1.71286 2.2 60. 1.66453 2.2 70. 1.52898 2.2 75. 1.38030 2.2 80. 1.11720 2.2 81. 1.04354 2.2 82. 0.96090 2.2 83. 0.86909 2.2 84. 0.76344 2.2 85. 0.65464 2.2 86. 0.53336 2.2 87. 0.40470 2.2 88. 0.27218 2.2 89. 0.14227 2.4 0. 1.70212 2.4 10. 1.71813 2.4 20. 1.73061 2.4 30. 1.73773 2.4 40. 1.74212 2.4 45. 1.73769 2.4 50. 1.71493 2.4 60. 1.68482 2.4 70. 1.55204 2.4 75. 1.40994 2.4 80. 1.14784 2.4 81. 1.07539 2.4 82. 0.99168 2.4 83. 0.89859 2.4 84. 0.79560 2.4 85. 0.68104 2.4 86. 0.55564 2.4 87. 0.42271 2.4 88. 0.28391 2.4 89. 0.14785 2.6 0. 1.71598 2.6 10. 1.73019 2.6 20. 1.74646 2.6 30. 1.75573 2.6 40. 1.75688 2.6 45. 1.75433 2.6 50. 1.74231 2.6 60. 1.69759 2.6 70. 1.56880 2.6 75. 1.43203 2.6 80. 1.17775 2.6 81. 1.10384 2.6 82. 1.01049 2.6 83. 0.92754 2.6 84. 0.82284 2.6 85. 0.70574 2.6 86. 0.57773 2.6 87. 0.42887 2.6 88. 0.29583 2.6 89. 0.15313 3.0 0. 1.73877 3.0 10. 1.75540 3.0 20. 1.76430 3.0 30. 1.77614 3.0 40. 1.77406 3.0 45. 1.77103 3.0 50. 1.76208 3.0 60. 1.71758 3.0 70. 1.59847 3.0 75. 1.47083 3.0 80. 1.22730 3.0 81. 1.15393 3.0 82. 1.07182 3.0 83. 0.97807 3.0 84. 0.87137 3.0 85. 0.75176 3.0 86. 0.61773 3.0 87. 0.47185 3.0 88. 0.31811 3.0 89. 0.16384 3.5 0. 1.75960 3.5 10. 1.77138 3.5 20. 1.78294 3.5 30. 1.79392 3.5 40. 1.79231 3.5 45. 1.78710 3.5 50. 1.77814 3.5 60. 1.73263 3.5 70. 1.62563 3.5 75. 1.50659 3.5 80. 1.27613 3.5 81. 1.20641 3.5 82. 1.12670 3.5 83. 1.03353 3.5 84. 0.92603 3.5 85. 0.80316 3.5 86. 0.66340 3.5 87. 0.50871 3.5 88. 0.34417 3.5 89. 0.17642 3.8 0. 1.76814 3.8 10. 1.78000 3.8 20. 1.79034 3.8 30. 1.79985 3.8 40. 1.80065 3.8 45. 1.79120 3.8 50. 1.78275 3.8 60. 1.73943 3.8 70. 1.63445 3.8 75. 1.52471 3.8 80. 1.30269 3.8 81. 1.23342 3.8 82. 1.15395 3.8 83. 1.06124 3.8 84. 0.95377 3.8 85. 0.82919 3.8 86. 0.68829 3.8 87. 0.52916 3.8 88. 0.35856 3.8 89. 0.18336 4.0 0. 1.77376 4.0 10. 1.78675 4.0 20. 1.79775 4.0 30. 1.80386 4.0 40. 1.80084 4.0 45. 1.79703 4.0 50. 1.78614 4.0 60. 1.74330 4.0 70. 1.64203 4.0 75. 1.53498 4.0 80. 1.31761 4.0 81. 1.25047 4.0 82. 1.17069 4.0 83. 1.07898 4.0 84. 0.97126 4.0 85. 0.84725 4.0 86. 0.70326 4.0 87. 0.54257 4.0 88. 0.36747 4.0 89. 0.18771 4.5 0. 1.78392 4.5 10. 1.79457 4.5 20. 1.80824 4.5 30. 1.81005 4.5 40. 1.81048 4.5 45. 1.80149 4.5 50. 1.79257 4.5 60. 1.74815 4.5 70. 1.65561 4.5 75. 1.55563 4.5 80. 1.35253 4.5 81. 1.28744 4.5 82. 1.21068 4.5 83. 1.12083 4.5 84. 1.01356 4.5 85. 0.88662 4.5 86. 0.73705 4.5 87. 0.57343 4.5 88. 0.38968 4.5 89. 0.19880 5.0 0. 1.78658 5.0 10. 1.80243 5.0 20. 1.81162 5.0 30. 1.81877 5.0 40. 1.81626 5.0 45. 1.80860 5.0 50. 1.79301 5.0 60. 1.75382 5.0 70. 1.66314 5.0 75. 1.57300 5.0 80. 1.38124 5.0 81. 1.31830 5.0 82. 1.24504 5.0 83. 1.15421 5.0 84. 1.04984 5.0 85. 0.92322 5.0 86. 0.77336 5.0 87. 0.60198 5.0 88. 0.41115 5.0 89. 0.20933 5.5 0. 1.79650 5.5 10. 1.80344 5.5 20. 1.81572 5.5 30. 1.82221 5.5 40. 1.81921 5.5 45. 1.80745 5.5 50. 1.79878 5.5 60. 1.75782 5.5 70. 1.67120 5.5 75. 1.58511 5.5 80. 1.40545 5.5 81. 1.34693 5.5 82. 1.27479 5.5 83. 1.18730 5.5 84. 1.08271 5.5 85. 0.95634 5.5 86. 0.80566 5.5 87. 0.62823 5.5 88. 0.43034 5.5 89. 0.21919 6.0 0. 1.80245 6.0 10. 1.80971 6.0 20. 1.81977 6.0 30. 1.82118 6.0 40. 1.81694 6.0 45. 1.81060 6.0 50. 1.80075 6.0 60. 1.75753 6.0 70. 1.67587 6.0 75. 1.59575 6.0 80. 1.42484 6.0 81. 1.37003 6.0 82. 1.30114 6.0 83. 1.21664 6.0 84. 1.11205 6.0 85. 0.98796 6.0 86. 0.83503 6.0 87. 0.65513 6.0 88. 0.44960 6.0 89. 0.22905 6.5 0. 1.80606 6.5 10. 1.81528 6.5 20. 1.82367 6.5 30. 1.82615 6.5 40. 1.82068 6.5 45. 1.81180 6.5 50. 1.80082 6.5 60. 1.75931 6.5 70. 1.67759 6.5 75. 1.60484 6.5 80. 1.44486 6.5 81. 1.38576 6.5 82. 1.32363 6.5 83. 1.24305 6.5 84. 1.14068 6.5 85. 1.01582 6.5 86. 0.86252 6.5 87. 0.67910 6.5 88. 0.46819 6.5 89. 0.23867 7.0 0. 1.81037 7.0 10. 1.82072 7.0 20. 1.82772 7.0 30. 1.83065 7.0 40. 1.82168 7.0 45. 1.81347 7.0 50. 1.79928 7.0 60. 1.75661 7.0 70. 1.68364 7.0 75. 1.61169 7.0 80. 1.46207 7.0 81. 1.41028 7.0 82. 1.34427 7.0 83. 1.26538 7.0 84. 1.16497 7.0 85. 1.03060 7.0 86. 0.88852 7.0 87. 0.70287 7.0 88. 0.48616 7.0 89. 0.24852 7.5 0. 1.81113 7.5 10. 1.82024 7.5 20. 1.82672 7.5 30. 1.82962 7.5 40. 1.82103 7.5 45. 1.81264 7.5 50. 1.80151 7.5 60. 1.75964 7.5 70. 1.68528 7.5 75. 1.61662 7.5 80. 1.47532 7.5 81. 1.42759 7.5 82. 1.36315 7.5 83. 1.28707 7.5 84. 1.18878 7.5 85. 1.06506 7.5 86. 0.91354 7.5 87. 0.72513 7.5 88. 0.50358 7.5 89. 0.25752 8.0 0. 1.81103 8.0 10. 1.82072 8.0 20. 1.82684 8.0 30. 1.82972 8.0 40. 1.82277 8.0 45. 1.81172 8.0 50. 1.80047 8.0 60. 1.75985 8.0 70. 1.68548 8.0 75. 1.62400 8.0 80. 1.48792 8.0 81. 1.44030 8.0 82. 1.38026 8.0 83. 1.30714 8.0 84. 1.21046 8.0 85. 1.09008 8.0 86. 0.93653 8.0 87. 0.74720 8.0 88. 0.52067 8.0 89. 0.26610 8.5 0. 1.81061 8.5 10. 1.82004 8.5 20. 1.82985 8.5 30. 1.83056 8.5 40. 1.82217 8.5 45. 1.81496 8.5 50. 1.80297 8.5 60. 1.75993 8.5 70. 1.68662 8.5 75. 1.62617 8.5 80. 1.49715 8.5 81. 1.45197 8.5 82. 1.39653 8.5 83. 1.32344 8.5 84. 1.22948 8.5 85. 1.11092 8.5 86. 0.95835 8.5 87. 0.76743 8.5 88. 0.53689 8.5 89. 0.27553 9.0 0. 1.81446 9.0 10. 1.82261 9.0 20. 1.83152 9.0 30. 1.82896 9.0 40. 1.82377 9.0 45. 1.81484 9.0 50. 1.79982 9.0 60. 1.75632 9.0 70. 1.68781 9.0 75. 1.62838 9.0 80. 1.50844 9.0 81. 1.46459 9.0 82. 1.41042 9.0 83. 1.33942 9.0 84. 1.24810 9.0 85. 1.13140 9.0 86. 0.97917 9.0 87. 0.78743 9.0 88. 0.55242 9.0 89. 0.28403 9.5 0. 1.81705 9.5 10. 1.82805 9.5 20. 1.83067 9.5 30. 1.83178 9.5 40. 1.82163 9.5 45. 1.81443 9.5 50. 1.80037 9.5 60. 1.75632 9.5 70. 1.68592 9.5 75. 1.63227 9.5 80. 1.51692 9.5 81. 1.47598 9.5 82. 1.42261 9.5 83. 1.35404 9.5 84. 1.26600 9.5 85. 1.14517 9.5 86. 0.99847 9.5 87. 0.80626 9.5 88. 0.56786 9.5 89. 0.29308 10.0 0. 1.81812 10.0 10. 1.82463 10.0 20. 1.83525 10.0 30. 1.82734 10.0 40. 1.82412 10.0 45. 1.81233 10.0 50. 1.80116 10.0 60. 1.75509 10.0 70. 1.68659 10.0 75. 1.63365 10.0 80. 1.52425 10.0 81. 1.48403 10.0 82. 1.43356 10.0 83. 1.36889 10.0 84. 1.28122 10.0 85. 1.15620 10.0 86. 1.01751 10.0 87. 0.82458 10.0 88. 0.58170 10.0 89. 0.30088 11.0 0. 1.81860 11.0 10. 1.82665 11.0 20. 1.82966 11.0 30. 1.83167 11.0 40. 1.82078 11.0 45. 1.81470 11.0 50. 1.79905 11.0 60. 1.75489 11.0 70. 1.68732 11.0 75. 1.63734 11.0 80. 1.53769 11.0 81. 1.50191 11.0 82. 1.45600 11.0 83. 1.39256 11.0 84. 1.30970 11.0 85. 1.19915 11.0 86. 1.05133 11.0 87. 0.85697 11.0 88. 0.60956 11.0 89. 0.31575 12.0 0. 1.82309 12.0 10. 1.82644 12.0 20. 1.83394 12.0 30. 1.83372 12.0 40. 1.82221 12.0 45. 1.81277 12.0 50. 1.79529 12.0 60. 1.75213 12.0 70. 1.68562 12.0 75. 1.63791 12.0 80. 1.54729 12.0 81. 1.51567 12.0 82. 1.47292 12.0 83. 1.41241 12.0 84. 1.33385 12.0 85. 1.22699 12.0 86. 1.08252 12.0 87. 0.88715 12.0 88. 0.63528 12.0 89. 0.33035 13.0 0. 1.82209 13.0 10. 1.82803 13.0 20. 1.83531 13.0 30. 1.83164 13.0 40. 1.82027 13.0 45. 1.81507 13.0 50. 1.79527 13.0 60. 1.75172 13.0 70. 1.68568 13.0 75. 1.64085 13.0 80. 1.55738 13.0 81. 1.52629 13.0 82. 1.48576 13.0 83. 1.43185 13.0 84. 1.35564 13.0 85. 1.25386 13.0 86. 1.11027 13.0 87. 0.91637 13.0 88. 0.65964 13.0 89. 0.34473 14.0 0. 1.82350 14.0 10. 1.83122 14.0 20. 1.83343 14.0 30. 1.82977 14.0 40. 1.82221 14.0 45. 1.80831 14.0 50. 1.79438 14.0 60. 1.74959 14.0 70. 1.68234 14.0 75. 1.64010 14.0 80. 1.56415 14.0 81. 1.53511 14.0 82. 1.49749 14.0 83. 1.44728 14.0 84. 1.37698 14.0 85. 1.27486 14.0 86. 1.13654 14.0 87. 0.94242 14.0 88. 0.68266 14.0 89. 0.35837 15.0 0. 1.82667 15.0 10. 1.82730 15.0 20. 1.83383 15.0 30. 1.83202 15.0 40. 1.82004 15.0 45. 1.80925 15.0 50. 1.79149 15.0 60. 1.74711 15.0 70. 1.68486 15.0 75. 1.64012 15.0 80. 1.56996 15.0 81. 1.54480 15.0 82. 1.50927 15.0 83. 1.46054 15.0 84. 1.39400 15.0 85. 1.29647 15.0 86. 1.16154 15.0 87. 0.96866 15.0 88. 0.70534 15.0 89. 0.37151 16.0 0. 1.82722 16.0 10. 1.82921 16.0 20. 1.83491 16.0 30. 1.83525 16.0 40. 1.82162 16.0 45. 1.80887 16.0 50. 1.79392 16.0 60. 1.74651 16.0 70. 1.68175 16.0 75. 1.64187 16.0 80. 1.57509 16.0 81. 1.55065 16.0 82. 1.51883 16.0 83. 1.47287 16.0 84. 1.40996 16.0 85. 1.31716 16.0 86. 1.18338 16.0 87. 0.99243 16.0 88. 0.72596 16.0 89. 0.38482 17.0 0. 1.82511 17.0 10. 1.83174 17.0 20. 1.83406 17.0 30. 1.83061 17.0 40. 1.82111 17.0 45. 1.80767 17.0 50. 1.79195 17.0 60. 1.74684 17.0 70. 1.68097 17.0 75. 1.64167 17.0 80. 1.57902 17.0 81. 1.55819 17.0 82. 1.52430 17.0 83. 1.48217 17.0 84. 1.42218 17.0 85. 1.33341 17.0 86. 1.20342 17.0 87. 1.01372 17.0 88. 0.74737 17.0 89. 0.39791 18.0 0. 1.82442 18.0 10. 1.83314 18.0 20. 1.83640 18.0 30. 1.82980 18.0 40. 1.82080 18.0 45. 1.80639 18.0 50. 1.79109 18.0 60. 1.74447 18.0 70. 1.68193 18.0 75. 1.64106 18.0 80. 1.58191 18.0 81. 1.56179 18.0 82. 1.53245 18.0 83. 1.49389 18.0 84. 1.43617 18.0 85. 1.35014 18.0 86. 1.22192 18.0 87. 1.03514 18.0 88. 0.76602 18.0 89. 0.41000 19.0 0. 1.82502 19.0 10. 1.83283 19.0 20. 1.83691 19.0 30. 1.82817 19.0 40. 1.81859 19.0 45. 1.80553 19.0 50. 1.78877 19.0 60. 1.74454 19.0 70. 1.67872 19.0 75. 1.64179 19.0 80. 1.58274 19.0 81. 1.56396 19.0 82. 1.53826 19.0 83. 1.50091 19.0 84. 1.44670 19.0 85. 1.35315 19.0 86. 1.24173 19.0 87. 1.05443 19.0 88. 0.78528 19.0 89. 0.42189 20.0 0. 1.82613 20.0 10. 1.83046 20.0 20. 1.83446 20.0 30. 1.83211 20.0 40. 1.81686 20.0 45. 1.80472 20.0 50. 1.78786 20.0 60. 1.74215 20.0 70. 1.67773 20.0 75. 1.63886 20.0 80. 1.58513 20.0 81. 1.56835 20.0 82. 1.54444 20.0 83. 1.50882 20.0 84. 1.45707 20.0 85. 1.37565 20.0 86. 1.25706 20.0 87. 1.07406 20.0 88. 0.80276 20.0 89. 0.43400 25.0 0. 1.82945 25.0 10. 1.83229 25.0 20. 1.83495 25.0 30. 1.82924 25.0 40. 1.81354 25.0 45. 1.80274 25.0 50. 1.78300 25.0 60. 1.73458 25.0 70. 1.67386 25.0 75. 1.63697 25.0 80. 1.59341 25.0 81. 1.58020 25.0 82. 1.56151 25.0 83. 1.53469 25.0 84. 1.49534 25.0 85. 1.43084 25.0 86. 1.32437 25.0 87. 1.15430 25.0 88. 0.88475 25.0 89. 0.48948 30.0 0. 1.83059 30.0 10. 1.83365 30.0 20. 1.83103 30.0 30. 1.82633 30.0 40. 1.81302 30.0 45. 1.79798 30.0 50. 1.77897 30.0 60. 1.73231 30.0 70. 1.66611 30.0 75. 1.63192 30.0 80. 1.59577 30.0 81. 1.58365 30.0 82. 1.57006 30.0 83. 1.54767 30.0 84. 1.51753 30.0 85. 1.46266 30.0 86. 1.37248 30.0 87. 1.21703 30.0 88. 0.94152 30.0 89. 0.53980 ____________________________________________________