Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Re 75 M5N45N45 1.418 1.883 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 1.9 0. 0.79402 1.9 10. 0.79004 1.9 20. 0.78072 1.9 30. 0.76019 1.9 40. 0.72477 1.9 45. 0.69770 1.9 50. 0.66616 1.9 60. 0.59221 1.9 70. 0.48873 1.9 75. 0.41525 1.9 80. 0.31794 1.9 81. 0.29388 1.9 82. 0.26897 1.9 83. 0.24264 1.9 84. 0.21429 1.9 85. 0.18411 1.9 86. 0.15188 1.9 87. 0.11957 1.9 88. 0.08579 1.9 89. 0.05280 2.0 0. 1.04023 2.0 10. 1.03707 2.0 20. 1.02666 2.0 30. 1.00509 2.0 40. 0.97041 2.0 45. 0.94484 2.0 50. 0.91361 2.0 60. 0.83188 2.0 70. 0.70139 2.0 75. 0.60038 2.0 80. 0.46144 2.0 81. 0.42837 2.0 82. 0.39165 2.0 83. 0.35189 2.0 84. 0.31022 2.0 85. 0.26530 2.0 86. 0.21857 2.0 87. 0.16962 2.0 88. 0.12003 2.0 89. 0.07209 2.3 0. 1.34163 2.3 10. 1.34003 2.3 20. 1.32696 2.3 30. 1.30921 2.3 40. 1.28298 2.3 45. 1.26010 2.3 50. 1.23183 2.3 60. 1.14462 2.3 70. 0.98089 2.3 75. 0.84528 2.3 80. 0.64886 2.3 81. 0.58110 2.3 82. 0.54767 2.3 83. 0.49161 2.3 84. 0.43127 2.3 85. 0.36700 2.3 86. 0.29998 2.3 87. 0.23019 2.3 88. 0.16014 2.3 89. 0.09325 2.6 0. 1.49636 2.6 10. 1.49282 2.6 20. 1.48446 2.6 30. 1.46820 2.6 40. 1.44245 2.6 45. 1.42222 2.6 50. 1.39432 2.6 60. 1.30481 2.6 70. 1.12578 2.6 75. 0.97378 2.6 80. 0.74809 2.6 81. 0.69150 2.6 82. 0.63028 2.6 83. 0.56493 2.6 84. 0.49497 2.6 85. 0.42153 2.6 86. 0.34342 2.6 87. 0.26230 2.6 88. 0.18126 2.6 89. 0.10362 3.0 0. 1.62816 3.0 10. 1.62585 3.0 20. 1.61591 3.0 30. 1.60172 3.0 40. 1.58008 3.0 45. 1.55899 3.0 50. 1.53171 3.0 60. 1.44141 3.0 70. 1.25211 3.0 75. 1.08459 3.0 80. 0.83681 3.0 81. 0.77421 3.0 82. 0.70682 3.0 83. 0.63454 3.0 84. 0.55656 3.0 85. 0.47291 3.0 86. 0.38467 3.0 87. 0.29343 3.0 88. 0.20128 3.0 89. 0.11321 3.3 0. 1.69682 3.3 10. 1.69383 3.3 20. 1.68603 3.3 30. 1.67315 3.3 40. 1.64876 3.3 45. 1.63143 3.3 50. 1.60452 3.3 60. 1.51095 3.3 70. 1.31136 3.3 75. 1.14652 3.3 80. 0.88795 3.3 81. 0.82320 3.3 82. 0.75080 3.3 83. 0.67438 3.3 84. 0.59203 3.3 85. 0.50390 3.3 86. 0.40995 3.3 87. 0.31269 3.3 88. 0.21410 3.3 89. 0.11908 3.6 0. 1.74756 3.6 10. 1.74393 3.6 20. 1.73991 3.6 30. 1.72478 3.6 40. 1.70372 3.6 45. 1.68672 3.6 50. 1.66001 3.6 60. 1.56704 3.6 70. 1.37055 3.6 75. 1.19654 3.6 80. 0.92986 3.6 81. 0.86198 3.6 82. 0.78086 3.6 83. 0.70917 3.6 84. 0.62343 3.6 85. 0.53073 3.6 86. 0.43200 3.6 87. 0.32932 3.6 88. 0.22497 3.6 89. 0.12408 4.0 0. 1.79986 4.0 10. 1.79821 4.0 20. 1.79107 4.0 30. 1.78193 4.0 40. 1.75896 4.0 45. 1.74202 4.0 50. 1.71458 4.0 60. 1.62128 4.0 70. 1.42603 4.0 75. 1.25029 4.0 80. 0.97861 4.0 81. 0.90882 4.0 82. 0.83254 4.0 83. 0.74896 4.0 84. 0.65969 4.0 85. 0.56237 4.0 86. 0.45832 4.0 87. 0.34907 4.0 88. 0.23767 4.0 89. 0.13006 4.3 0. 1.83084 4.3 10. 1.83332 4.3 20. 1.82399 4.3 30. 1.81172 4.3 40. 1.79071 4.3 45. 1.77349 4.3 50. 1.74572 4.3 60. 1.65620 4.3 70. 1.45955 4.3 75. 1.28372 4.3 80. 1.00967 4.3 81. 0.93869 4.3 82. 0.85923 4.3 83. 0.77707 4.3 84. 0.68337 4.3 85. 0.58376 4.3 86. 0.47635 4.3 87. 0.36261 4.3 88. 0.24679 4.3 89. 0.13393 4.6 0. 1.85449 4.6 10. 1.85438 4.6 20. 1.84918 4.6 30. 1.83659 4.6 40. 1.81613 4.6 45. 1.79786 4.6 50. 1.77305 4.6 60. 1.68175 4.6 70. 1.48660 4.6 75. 1.31111 4.6 80. 1.03734 4.6 81. 0.96522 4.6 82. 0.88743 4.6 83. 0.80086 4.6 84. 0.70536 4.6 85. 0.60248 4.6 86. 0.49306 4.6 87. 0.37493 4.6 88. 0.25373 4.6 89. 0.13770 5.0 0. 1.88351 5.0 10. 1.88283 5.0 20. 1.87510 5.0 30. 1.86434 5.0 40. 1.84439 5.0 45. 1.82623 5.0 50. 1.80290 5.0 60. 1.70891 5.0 70. 1.52097 5.0 75. 1.34513 5.0 80. 1.07085 5.0 81. 0.99817 5.0 82. 0.91840 5.0 83. 0.82990 5.0 84. 0.73332 5.0 85. 0.60933 5.0 86. 0.51316 5.0 87. 0.39175 5.0 88. 0.26593 5.0 89. 0.14282 5.3 0. 1.90177 5.3 10. 1.90063 5.3 20. 1.89776 5.3 30. 1.88377 5.3 40. 1.85879 5.3 45. 1.84392 5.3 50. 1.81927 5.3 60. 1.72682 5.3 70. 1.53992 5.3 75. 1.36844 5.3 80. 1.09519 5.3 81. 1.02111 5.3 82. 0.94076 5.3 83. 0.85046 5.3 84. 0.73686 5.3 85. 0.64504 5.3 86. 0.52787 5.3 87. 0.40308 5.3 88. 0.27310 5.3 89. 0.14609 5.6 0. 1.91417 5.6 10. 1.91230 5.6 20. 1.90785 5.6 30. 1.89780 5.6 40. 1.87581 5.6 45. 1.85637 5.6 50. 1.82799 5.6 60. 1.74133 5.6 70. 1.54746 5.6 75. 1.38859 5.6 80. 1.11655 5.6 81. 1.04330 5.6 82. 0.96033 5.6 83. 0.87091 5.6 84. 0.76516 5.6 85. 0.66150 5.6 86. 0.54226 5.6 87. 0.41422 5.6 88. 0.28101 5.6 89. 0.14949 6.0 0. 1.92983 6.0 10. 1.92884 6.0 20. 1.92086 6.0 30. 1.91059 6.0 40. 1.88973 6.0 45. 1.87157 6.0 50. 1.84782 6.0 60. 1.75927 6.0 70. 1.57944 6.0 75. 1.41182 6.0 80. 1.14133 6.0 81. 1.06820 6.0 82. 0.98621 6.0 83. 0.89503 6.0 84. 0.79403 6.0 85. 0.68279 6.0 86. 0.56004 6.0 87. 0.42804 6.0 88. 0.29050 6.0 89. 0.15411 6.3 0. 1.94099 6.3 10. 1.93826 6.3 20. 1.93489 6.3 30. 1.92131 6.3 40. 1.89748 6.3 45. 1.88100 6.3 50. 1.85673 6.3 60. 1.76663 6.3 70. 1.59199 6.3 75. 1.42799 6.3 80. 1.15891 6.3 81. 1.08623 6.3 82. 1.00339 6.3 83. 0.91010 6.3 84. 0.81035 6.3 85. 0.69773 6.3 86. 0.57321 6.3 87. 0.43844 6.3 88. 0.29738 6.3 89. 0.15743 6.6 0. 1.94890 6.6 10. 1.94523 6.6 20. 1.94113 6.6 30. 1.92764 6.6 40. 1.90605 6.6 45. 1.88784 6.6 50. 1.86424 6.6 60. 1.77724 6.6 70. 1.60469 6.6 75. 1.44171 6.6 80. 1.17597 6.6 81. 1.10112 6.6 82. 1.02112 6.6 83. 0.92857 6.6 84. 0.82586 6.6 85. 0.71105 6.6 86. 0.58571 6.6 87. 0.44893 6.6 88. 0.30438 6.6 89. 0.16077 7.0 0. 1.95544 7.0 10. 1.95364 7.0 20. 1.94874 7.0 30. 1.93977 7.0 40. 1.91478 7.0 45. 1.89825 7.0 50. 1.87107 7.0 60. 1.78430 7.0 70. 1.61747 7.0 75. 1.46039 7.0 80. 1.19718 7.0 81. 1.12398 7.0 82. 1.04239 7.0 83. 0.94976 7.0 84. 0.84574 7.0 85. 0.73029 7.0 86. 0.60200 7.0 87. 0.46136 7.0 88. 0.31323 7.0 89. 0.16455 7.3 0. 1.96780 7.3 10. 1.96313 7.3 20. 1.95764 7.3 30. 1.94393 7.3 40. 1.92080 7.3 45. 1.90305 7.3 50. 1.87792 7.3 60. 1.79305 7.3 70. 1.62637 7.3 75. 1.47305 7.3 80. 1.21140 7.3 81. 1.13813 7.3 82. 1.05593 7.3 83. 0.96460 7.3 84. 0.86017 7.3 85. 0.74267 7.3 86. 0.61413 7.3 87. 0.47090 7.3 88. 0.31981 7.3 89. 0.16733 7.6 0. 1.96991 7.6 10. 1.96886 7.6 20. 1.95795 7.6 30. 1.94993 7.6 40. 1.92488 7.6 45. 1.90732 7.6 50. 1.88132 7.6 60. 1.79904 7.6 70. 1.63459 7.6 75. 1.48382 7.6 80. 1.22649 7.6 81. 1.15327 7.6 82. 1.07145 7.6 83. 0.97837 7.6 84. 0.87481 7.6 85. 0.75727 7.6 86. 0.62488 7.6 87. 0.48079 7.6 88. 0.32612 7.6 89. 0.17065 8.0 0. 1.97743 8.0 10. 1.97454 8.0 20. 1.96826 8.0 30. 1.95740 8.0 40. 1.93014 8.0 45. 1.91185 8.0 50. 1.88497 8.0 60. 1.80242 8.0 70. 1.64539 8.0 75. 1.49781 8.0 80. 1.24363 8.0 81. 1.17069 8.0 82. 1.09059 8.0 83. 0.99657 8.0 84. 0.89108 8.0 85. 0.77299 8.0 86. 0.64019 8.0 87. 0.49312 8.0 88. 0.33447 8.0 89. 0.17488 8.5 0. 1.98453 8.5 10. 1.98002 8.5 20. 1.97556 8.5 30. 1.95800 8.5 40. 1.93652 8.5 45. 1.91359 8.5 50. 1.89209 8.5 60. 1.80916 8.5 70. 1.65646 8.5 75. 1.51238 8.5 80. 1.26302 8.5 81. 1.19219 8.5 82. 1.11102 8.5 83. 1.01904 8.5 84. 0.91277 8.5 85. 0.79303 8.5 86. 0.65801 8.5 87. 0.50665 8.5 88. 0.34460 8.5 89. 0.17961 9.0 0. 1.99091 9.0 10. 1.98797 9.0 20. 1.97922 9.0 30. 1.96473 9.0 40. 1.93744 9.0 45. 1.91717 9.0 50. 1.89290 9.0 60. 1.81483 9.0 70. 1.66438 9.0 75. 1.52511 9.0 80. 1.28066 9.0 81. 1.21255 9.0 82. 1.13011 9.0 83. 1.03907 9.0 84. 0.93219 9.0 85. 0.81249 9.0 86. 0.67430 9.0 87. 0.52152 9.0 88. 0.35492 9.0 89. 0.18440 9.5 0. 1.99348 9.5 10. 1.99303 9.5 20. 1.98481 9.5 30. 1.96914 9.5 40. 1.94355 9.5 45. 1.92443 9.5 50. 1.89945 9.5 60. 1.81937 9.5 70. 1.67213 9.5 75. 1.53904 9.5 80. 1.30043 9.5 81. 1.23040 9.5 82. 1.14929 9.5 83. 1.05784 9.5 84. 0.95132 9.5 85. 0.82934 9.5 86. 0.69125 9.5 87. 0.53426 9.5 88. 0.36419 9.5 89. 0.18891 10.0 0. 2.00066 10.0 10. 1.99489 10.0 20. 1.98652 10.0 30. 1.97179 10.0 40. 1.94168 10.0 45. 1.92472 10.0 50. 1.89847 10.0 60. 1.82410 10.0 70. 1.67983 10.0 75. 1.54845 10.0 80. 1.31604 10.0 81. 1.24782 10.0 82. 1.16767 10.0 83. 1.07525 10.0 84. 0.96960 10.0 85. 0.84696 10.0 86. 0.70571 10.0 87. 0.54680 10.0 88. 0.37324 10.0 89. 0.19339 11.0 0. 2.00548 11.0 10. 2.00117 11.0 20. 1.99151 11.0 30. 1.97482 11.0 40. 1.94435 11.0 45. 1.92900 11.0 50. 1.90375 11.0 60. 1.82852 11.0 70. 1.69125 11.0 75. 1.56892 11.0 80. 1.34409 11.0 81. 1.27741 11.0 82. 1.19815 11.0 83. 1.10980 11.0 84. 1.00216 11.0 85. 0.87870 11.0 86. 0.73569 11.0 87. 0.57146 11.0 88. 0.39054 11.0 89. 0.20173 12.0 0. 2.00637 12.0 10. 2.00727 12.0 20. 1.99386 12.0 30. 1.98015 12.0 40. 1.95092 12.0 45. 1.92734 12.0 50. 1.90456 12.0 60. 1.83079 12.0 70. 1.69958 12.0 75. 1.58549 12.0 80. 1.37074 12.0 81. 1.30753 12.0 82. 1.22849 12.0 83. 1.13862 12.0 84. 1.02936 12.0 85. 0.90849 12.0 86. 0.76266 12.0 87. 0.59536 12.0 88. 0.40706 12.0 89. 0.20975 13.0 0. 2.01096 13.0 10. 2.00945 13.0 20. 1.99976 13.0 30. 1.98173 13.0 40. 1.95201 13.0 45. 1.92873 13.0 50. 1.90461 13.0 60. 1.83147 13.0 70. 1.70744 13.0 75. 1.60005 13.0 80. 1.38405 13.0 81. 1.33015 13.0 82. 1.25530 13.0 83. 1.16623 13.0 84. 1.06118 13.0 85. 0.93603 13.0 86. 0.78773 13.0 87. 0.61720 13.0 88. 0.42333 13.0 89. 0.21757 14.0 0. 2.01455 14.0 10. 2.01236 14.0 20. 2.00176 14.0 30. 1.98459 14.0 40. 1.95076 14.0 45. 1.92751 14.0 50. 1.90455 14.0 60. 1.83245 14.0 70. 1.71320 14.0 75. 1.60315 14.0 80. 1.41480 14.0 81. 1.35262 14.0 82. 1.27930 14.0 83. 1.19248 14.0 84. 1.08843 14.0 85. 0.96187 14.0 86. 0.81213 14.0 87. 0.63749 14.0 88. 0.43834 14.0 89. 0.22522 15.0 0. 2.01796 15.0 10. 2.01400 15.0 20. 2.00408 15.0 30. 1.98332 15.0 40. 1.95130 15.0 45. 1.92781 15.0 50. 1.90507 15.0 60. 1.83254 15.0 70. 1.71203 15.0 75. 1.62061 15.0 80. 1.43313 15.0 81. 1.37240 15.0 82. 1.30079 15.0 83. 1.21581 15.0 84. 1.11082 15.0 85. 0.96418 15.0 86. 0.83605 15.0 87. 0.65819 15.0 88. 0.45342 15.0 89. 0.23272 16.0 0. 2.01961 16.0 10. 2.01597 16.0 20. 2.00577 16.0 30. 1.98438 16.0 40. 1.95043 16.0 45. 1.93188 16.0 50. 1.90305 16.0 60. 1.83202 16.0 70. 1.72002 16.0 75. 1.62651 16.0 80. 1.44940 16.0 81. 1.38992 16.0 82. 1.31980 16.0 83. 1.23695 16.0 84. 1.13388 16.0 85. 1.00791 16.0 86. 0.85766 16.0 87. 0.67676 16.0 88. 0.46733 16.0 89. 0.23991 17.0 0. 2.01978 17.0 10. 2.01631 17.0 20. 2.00382 17.0 30. 1.98303 17.0 40. 1.95128 17.0 45. 1.92961 17.0 50. 1.90031 17.0 60. 1.83080 17.0 70. 1.72313 17.0 75. 1.63514 17.0 80. 1.46279 17.0 81. 1.40619 17.0 82. 1.33899 17.0 83. 1.25652 17.0 84. 1.15373 17.0 85. 1.03120 17.0 86. 0.87863 17.0 87. 0.69493 17.0 88. 0.48186 17.0 89. 0.24703 18.0 0. 2.02429 18.0 10. 2.02162 18.0 20. 2.00346 18.0 30. 1.98349 18.0 40. 1.94973 18.0 45. 1.92741 18.0 50. 1.90210 18.0 60. 1.83103 18.0 70. 1.72620 18.0 75. 1.64123 18.0 80. 1.47610 18.0 81. 1.42283 18.0 82. 1.33803 18.0 83. 1.27429 18.0 84. 1.17534 18.0 85. 1.05203 18.0 86. 0.89812 18.0 87. 0.71406 18.0 88. 0.49494 18.0 89. 0.25432 19.0 0. 2.02138 19.0 10. 2.02028 19.0 20. 2.00946 19.0 30. 1.98598 19.0 40. 1.95183 19.0 45. 1.92711 19.0 50. 1.89958 19.0 60. 1.83070 19.0 70. 1.72688 19.0 75. 1.64813 19.0 80. 1.48923 19.0 81. 1.43548 19.0 82. 1.37204 19.0 83. 1.29203 19.0 84. 1.19220 19.0 85. 1.07137 19.0 86. 0.90579 19.0 87. 0.73039 19.0 88. 0.49271 19.0 89. 0.26100 20.0 0. 2.02037 20.0 10. 2.01867 20.0 20. 2.00632 20.0 30. 1.98502 20.0 40. 1.94908 20.0 45. 1.92613 20.0 50. 1.89654 20.0 60. 1.82543 20.0 70. 1.72750 20.0 75. 1.64913 20.0 80. 1.49938 20.0 81. 1.44802 20.0 82. 1.38580 20.0 83. 1.30732 20.0 84. 1.21069 20.0 85. 1.08845 20.0 86. 0.92413 20.0 87. 0.74694 20.0 88. 0.52130 20.0 89. 0.26806 25.0 0. 2.02476 25.0 10. 2.02104 25.0 20. 2.01100 25.0 30. 1.98582 25.0 40. 1.94607 25.0 45. 1.92278 25.0 50. 1.89281 25.0 60. 1.82009 25.0 70. 1.72806 25.0 75. 1.66338 25.0 80. 1.53830 25.0 81. 1.49715 25.0 82. 1.44378 25.0 83. 1.37465 25.0 84. 1.28342 25.0 85. 1.16713 25.0 86. 1.01639 25.0 87. 0.82340 25.0 88. 0.58074 25.0 89. 0.29957 30.0 0. 2.02642 30.0 10. 2.01852 30.0 20. 2.00692 30.0 30. 1.98290 30.0 40. 1.94243 30.0 45. 1.91808 30.0 50. 1.88524 30.0 60. 1.81514 30.0 70. 1.72458 30.0 75. 1.66814 30.0 80. 1.56689 30.0 81. 1.53048 30.0 82. 1.48296 30.0 83. 1.42277 30.0 84. 1.34013 30.0 85. 1.22848 30.0 86. 1.08169 30.0 87. 0.88612 30.0 88. 0.63345 30.0 89. 0.32911 ____________________________________________________