Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Pt 78 M_5N67N67 1.960 2.122 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 2.3 0. 1.12745 2.3 10. 1.12385 2.3 20. 1.11210 2.3 30. 1.08823 2.3 40. 1.04667 2.3 45. 1.01776 2.3 50. 0.98005 2.3 60. 0.88395 2.3 70. 0.73279 2.3 75. 0.61855 2.3 80. 0.46501 2.3 81. 0.42769 2.3 82. 0.38805 2.3 83. 0.34714 2.3 84. 0.30390 2.3 85. 0.25769 2.3 86. 0.20967 2.3 87. 0.16063 2.3 88. 0.11126 2.3 89. 0.06435 2.4 0. 1.23973 2.4 10. 1.23649 2.4 20. 1.22409 2.4 30. 1.19856 2.4 40. 1.16022 2.4 45. 1.12984 2.4 50. 1.09192 2.4 60. 0.99182 2.4 70. 0.82455 2.4 75. 0.69575 2.4 80. 0.52181 2.4 81. 0.48007 2.4 82. 0.43597 2.4 83. 0.38900 2.4 84. 0.32485 2.4 85. 0.28752 2.4 86. 0.23332 2.4 87. 0.17815 2.4 88. 0.12270 2.4 89. 0.07027 2.8 0. 1.50383 2.8 10. 1.49858 2.8 20. 1.48636 2.8 30. 1.46296 2.8 40. 1.42432 2.8 45. 1.39732 2.8 50. 1.35940 2.8 60. 1.24523 2.8 70. 1.04183 2.8 75. 0.87988 2.8 80. 0.65742 2.8 81. 0.60511 2.8 82. 0.54814 2.8 83. 0.48551 2.8 84. 0.41859 2.8 85. 0.35877 2.8 86. 0.28943 2.8 87. 0.21913 2.8 88. 0.14958 2.8 89. 0.08352 3.0 0. 1.58871 3.0 10. 1.58346 3.0 20. 1.56998 3.0 30. 1.54656 3.0 40. 1.51044 3.0 45. 1.47994 3.0 50. 1.44284 3.0 60. 1.32548 3.0 70. 1.11124 3.0 75. 0.94087 3.0 80. 0.70381 3.0 81. 0.64667 3.0 82. 0.58664 3.0 83. 0.52245 3.0 84. 0.45454 3.0 85. 0.38295 3.0 86. 0.30936 3.0 87. 0.23376 3.0 88. 0.15905 3.0 89. 0.08709 3.2 0. 1.65337 3.2 10. 1.65012 3.2 20. 1.63528 3.2 30. 1.61444 3.2 40. 1.57849 3.2 45. 1.54766 3.2 50. 1.51103 3.2 60. 1.39196 3.2 70. 1.17001 3.2 75. 0.99023 3.2 80. 0.74240 3.2 81. 0.67712 3.2 82. 0.61836 3.2 83. 0.55082 3.2 84. 0.47931 3.2 85. 0.40410 3.2 86. 0.32628 3.2 87. 0.24656 3.2 88. 0.16670 3.2 89. 0.09185 3.6 0. 1.75546 3.6 10. 1.74626 3.6 20. 1.73568 3.6 30. 1.71550 3.6 40. 1.67778 3.6 45. 1.65246 3.6 50. 1.61406 3.6 60. 1.49292 3.6 70. 1.25921 3.6 75. 1.07127 3.6 80. 0.80599 3.6 81. 0.74095 3.6 82. 0.67182 3.6 83. 0.59918 3.6 84. 0.52166 3.6 85. 0.42402 3.6 86. 0.35460 3.6 87. 0.26769 3.6 88. 0.18054 3.6 89. 0.09803 4.0 0. 1.82412 4.0 10. 1.81982 4.0 20. 1.80666 4.0 30. 1.78831 4.0 40. 1.75389 4.0 45. 1.72463 4.0 50. 1.69089 4.0 60. 1.56171 4.0 70. 1.32721 4.0 75. 1.13375 4.0 80. 0.85649 4.0 81. 0.78788 4.0 82. 0.71553 4.0 83. 0.63929 4.0 84. 0.55491 4.0 85. 0.46996 4.0 86. 0.37892 4.0 87. 0.28508 4.0 88. 0.19210 4.0 89. 0.10343 4.4 0. 1.87438 4.4 10. 1.86956 4.4 20. 1.86263 4.4 30. 1.83994 4.4 40. 1.80796 4.4 45. 1.78165 4.4 50. 1.74276 4.4 60. 1.62011 4.4 70. 1.38077 4.4 75. 1.18393 4.4 80. 0.89994 4.4 81. 0.82929 4.4 82. 0.75382 4.4 83. 0.67306 4.4 84. 0.58742 4.4 85. 0.49572 4.4 86. 0.40010 4.4 87. 0.30152 4.4 88. 0.20242 4.4 89. 0.10810 4.8 0. 1.91541 4.8 10. 1.91378 4.8 20. 1.90232 4.8 30. 1.88284 4.8 40. 1.85088 4.8 45. 1.82166 4.8 50. 1.78839 4.8 60. 1.66313 4.8 70. 1.42460 4.8 75. 1.22635 4.8 80. 0.93419 4.8 81. 0.86413 4.8 82. 0.77928 4.8 83. 0.70370 4.8 84. 0.61475 4.8 85. 0.52039 4.8 86. 0.41994 4.8 87. 0.31634 4.8 88. 0.21180 4.8 89. 0.11223 5.0 0. 1.92976 5.0 10. 1.92708 5.0 20. 1.91614 5.0 30. 1.89717 5.0 40. 1.86694 5.0 45. 1.84005 5.0 50. 1.80164 5.0 60. 1.67809 5.0 70. 1.44447 5.0 75. 1.24455 5.0 80. 0.95439 5.0 81. 0.88214 5.0 82. 0.80314 5.0 83. 0.71853 5.0 84. 0.62802 5.0 85. 0.53132 5.0 86. 0.42924 5.0 87. 0.32327 5.0 88. 0.21658 5.0 89. 0.11422 5.2 0. 1.94565 5.2 10. 1.94112 5.2 20. 1.93294 5.2 30. 1.91365 5.2 40. 1.88121 5.2 45. 1.85423 5.2 50. 1.81731 5.2 60. 1.69626 5.2 70. 1.46177 5.2 75. 1.26195 5.2 80. 0.97029 5.2 81. 0.89662 5.2 82. 0.80889 5.2 83. 0.73246 5.2 84. 0.63955 5.2 85. 0.54252 5.2 86. 0.43801 5.2 87. 0.33041 5.2 88. 0.22066 5.2 89. 0.11635 5.6 0. 1.96819 5.6 10. 1.96628 5.6 20. 1.95685 5.6 30. 1.94023 5.6 40. 1.90457 5.6 45. 1.88058 5.6 50. 1.83925 5.6 60. 1.72521 5.6 70. 1.49277 5.6 75. 1.29528 5.6 80. 1.00047 5.6 81. 0.92616 5.6 82. 0.84505 5.6 83. 0.75744 5.6 84. 0.66331 5.6 85. 0.56259 5.6 86. 0.45580 5.6 87. 0.34336 5.6 88. 0.22934 5.6 89. 0.12002 6.0 0. 1.98639 6.0 10. 1.98517 6.0 20. 1.97518 6.0 30. 1.95582 6.0 40. 1.92570 6.0 45. 1.90309 6.0 50. 1.86402 6.0 60. 1.74541 6.0 70. 1.52106 6.0 75. 1.32280 6.0 80. 1.02731 6.0 81. 0.95309 6.0 82. 0.87166 6.0 83. 0.78101 6.0 84. 0.68539 6.0 85. 0.58204 6.0 86. 0.47122 6.0 87. 0.35573 6.0 88. 0.23798 6.0 89. 0.12390 6.5 0. 2.00602 6.5 10. 2.00571 6.5 20. 1.99379 6.5 30. 1.97927 6.5 40. 1.94329 6.5 45. 1.92359 6.5 50. 1.88568 6.5 60. 1.76827 6.5 70. 1.54804 6.5 75. 1.35400 6.5 80. 1.04514 6.5 81. 0.98289 6.5 82. 0.89975 6.5 83. 0.80961 6.5 84. 0.71124 6.5 85. 0.60537 6.5 86. 0.49084 6.5 87. 0.37027 6.5 88. 0.24771 6.5 89. 0.12817 7.0 0. 2.02055 7.0 10. 2.01807 7.0 20. 2.00789 7.0 30. 1.99065 7.0 40. 1.95944 7.0 45. 1.93600 7.0 50. 1.90201 7.0 60. 1.78848 7.0 70. 1.56947 7.0 75. 1.38051 7.0 80. 1.08716 7.0 81. 1.01068 7.0 82. 0.92655 7.0 83. 0.83540 7.0 84. 0.73418 7.0 85. 0.62646 7.0 86. 0.50903 7.0 87. 0.38498 7.0 88. 0.25674 7.0 89. 0.13244 7.5 0. 2.03358 7.5 10. 2.02602 7.5 20. 2.01989 7.5 30. 2.00081 7.5 40. 1.96886 7.5 45. 1.94532 7.5 50. 1.91203 7.5 60. 1.80443 7.5 70. 1.59097 7.5 75. 1.40389 7.5 80. 1.11270 7.5 81. 1.03702 7.5 82. 0.95160 7.5 83. 0.85908 7.5 84. 0.75767 7.5 85. 0.64656 7.5 86. 0.52596 7.5 87. 0.39836 7.5 88. 0.26573 7.5 89. 0.13683 8.0 0. 2.04137 8.0 10. 2.03682 8.0 20. 2.02624 8.0 30. 2.01183 8.0 40. 1.97928 8.0 45. 1.95491 8.0 50. 1.92031 8.0 60. 1.81396 8.0 70. 1.60787 8.0 75. 1.42626 8.0 80. 1.13775 8.0 81. 1.05993 8.0 82. 0.97470 8.0 83. 0.88168 8.0 84. 0.77882 8.0 85. 0.66477 8.0 86. 0.54271 8.0 87. 0.41158 8.0 88. 0.27468 8.0 89. 0.14073 8.5 0. 2.04879 8.5 10. 2.04465 8.5 20. 2.03403 8.5 30. 2.01494 8.5 40. 1.98203 8.5 45. 1.96183 8.5 50. 1.92920 8.5 60. 1.82412 8.5 70. 1.62331 8.5 75. 1.44446 8.5 80. 1.15955 8.5 81. 1.08281 8.5 82. 0.99865 8.5 83. 0.90308 8.5 84. 0.79839 8.5 85. 0.68488 8.5 86. 0.55975 8.5 87. 0.42447 8.5 88. 0.28378 8.5 89. 0.14490 9.0 0. 2.05230 9.0 10. 2.05093 9.0 20. 2.04248 9.0 30. 2.01901 9.0 40. 1.98759 9.0 45. 1.96333 9.0 50. 1.93547 9.0 60. 1.83192 9.0 70. 1.63617 9.0 75. 1.46249 9.0 80. 1.18019 9.0 81. 1.10550 9.0 82. 1.01942 9.0 83. 0.92438 9.0 84. 0.81903 9.0 85. 0.70100 9.0 86. 0.57487 9.0 87. 0.43653 9.0 88. 0.29205 9.0 89. 0.14880 9.5 0. 2.06054 9.5 10. 2.05621 9.5 20. 2.04521 9.5 30. 2.02423 9.5 40. 1.99415 9.5 45. 1.96649 9.5 50. 1.93715 9.5 60. 1.83771 9.5 70. 1.64837 9.5 75. 1.47974 9.5 80. 1.20027 9.5 81. 1.12098 9.5 82. 1.03897 9.5 83. 0.94303 9.5 84. 0.83662 9.5 85. 0.71926 9.5 86. 0.58891 9.5 87. 0.44849 9.5 88. 0.29985 9.5 89. 0.15250 10.0 0. 2.06297 10.0 10. 2.05820 10.0 20. 2.04882 10.0 30. 2.02798 10.0 40. 1.99448 10.0 45. 1.97218 10.0 50. 1.94246 10.0 60. 1.84238 10.0 70. 1.65860 10.0 75. 1.49465 10.0 80. 1.21763 10.0 81. 1.14163 10.0 82. 1.05644 10.0 83. 0.96117 10.0 84. 0.85484 10.0 85. 0.73432 10.0 86. 0.60374 10.0 87. 0.45967 10.0 88. 0.30729 10.0 89. 0.15588 11.0 0. 2.06505 11.0 10. 2.06337 11.0 20. 2.05545 11.0 30. 2.03437 11.0 40. 1.99980 11.0 45. 1.97597 11.0 50. 1.94501 11.0 60. 1.85077 11.0 70. 1.67576 11.0 75. 1.51832 11.0 80. 1.25100 11.0 81. 1.17550 11.0 82. 1.09143 11.0 83. 0.99539 11.0 84. 0.88722 11.0 85. 0.76483 11.0 86. 0.63009 11.0 87. 0.48100 11.0 88. 0.32232 11.0 89. 0.16273 12.0 0. 2.06971 12.0 10. 2.06839 12.0 20. 2.05436 12.0 30. 2.03228 12.0 40. 2.00085 12.0 45. 1.97685 12.0 50. 1.94556 12.0 60. 1.85667 12.0 70. 1.69039 12.0 75. 1.54043 12.0 80. 1.28050 12.0 81. 1.20607 12.0 82. 1.12174 12.0 83. 1.02594 12.0 84. 0.91789 12.0 85. 0.79350 12.0 86. 0.65553 12.0 87. 0.50142 12.0 88. 0.33413 12.0 89. 0.16926 13.0 0. 2.07189 13.0 10. 2.06974 13.0 20. 2.05860 13.0 30. 2.03728 13.0 40. 2.00256 13.0 45. 1.97928 13.0 50. 1.94842 13.0 60. 1.86225 13.0 70. 1.70196 13.0 75. 1.55928 13.0 80. 1.30796 13.0 81. 1.23547 13.0 82. 1.15250 13.0 83. 1.05569 13.0 84. 0.94599 13.0 85. 0.82095 13.0 86. 0.67943 13.0 87. 0.52131 13.0 88. 0.35073 13.0 89. 0.17587 14.0 0. 2.07515 14.0 10. 2.07244 14.0 20. 2.05821 14.0 30. 2.03564 14.0 40. 2.00021 14.0 45. 1.97723 14.0 50. 1.94666 14.0 60. 1.86386 14.0 70. 1.71121 14.0 75. 1.57566 14.0 80. 1.33055 14.0 81. 1.25957 14.0 82. 1.17817 14.0 83. 1.08268 14.0 84. 0.97217 14.0 85. 0.84557 14.0 86. 0.70278 14.0 87. 0.53939 14.0 88. 0.36331 14.0 89. 0.18205 15.0 0. 2.07528 15.0 10. 2.07347 15.0 20. 2.06048 15.0 30. 2.03758 15.0 40. 2.00211 15.0 45. 1.97808 15.0 50. 1.94660 15.0 60. 1.86229 15.0 70. 1.71875 15.0 75. 1.58873 15.0 80. 1.35360 15.0 81. 1.28379 15.0 82. 1.20216 15.0 83. 1.10764 15.0 84. 0.98798 15.0 85. 0.87091 15.0 86. 0.72355 15.0 87. 0.55842 15.0 88. 0.37602 15.0 89. 0.18851 16.0 0. 2.08233 16.0 10. 2.07255 16.0 20. 2.06092 16.0 30. 2.03743 16.0 40. 2.00031 16.0 45. 1.97754 16.0 50. 1.94873 16.0 60. 1.86373 16.0 70. 1.72456 16.0 75. 1.60258 16.0 80. 1.37298 16.0 81. 1.30485 16.0 82. 1.22374 16.0 83. 1.13085 16.0 84. 1.02030 16.0 85. 0.89338 16.0 86. 0.74412 16.0 87. 0.57590 16.0 88. 0.38823 16.0 89. 0.19416 17.0 0. 2.07644 17.0 10. 2.07116 17.0 20. 2.06124 17.0 30. 2.03593 17.0 40. 1.99799 17.0 45. 1.97388 17.0 50. 1.94289 17.0 60. 1.86210 17.0 70. 1.72991 17.0 75. 1.61042 17.0 80. 1.39111 17.0 81. 1.32494 17.0 82. 1.24594 17.0 83. 1.15227 17.0 84. 1.04231 17.0 85. 0.90589 17.0 86. 0.76422 17.0 87. 0.59326 17.0 88. 0.40055 17.0 89. 0.20040 18.0 0. 2.07935 18.0 10. 2.07313 18.0 20. 2.05779 18.0 30. 2.03314 18.0 40. 1.99775 18.0 45. 1.97636 18.0 50. 1.94400 18.0 60. 1.86266 18.0 70. 1.73409 18.0 75. 1.62070 18.0 80. 1.40785 18.0 81. 1.34346 18.0 82. 1.26517 18.0 83. 1.17269 18.0 84. 1.06383 18.0 85. 0.93543 18.0 86. 0.78320 18.0 87. 0.60880 18.0 88. 0.41241 18.0 89. 0.20598 19.0 0. 2.07716 19.0 10. 2.07184 19.0 20. 2.05947 19.0 30. 2.03161 19.0 40. 1.99450 19.0 45. 1.97489 19.0 50. 1.93948 19.0 60. 1.86000 19.0 70. 1.73564 19.0 75. 1.62838 19.0 80. 1.42231 19.0 81. 1.35913 19.0 82. 1.28135 19.0 83. 1.19151 19.0 84. 1.08417 19.0 85. 0.95365 19.0 86. 0.80284 19.0 87. 0.62527 19.0 88. 0.42379 19.0 89. 0.21176 20.0 0. 2.07783 20.0 10. 2.07288 20.0 20. 2.05958 20.0 30. 2.03301 20.0 40. 1.99572 20.0 45. 1.96880 20.0 50. 1.93942 20.0 60. 1.86039 20.0 70. 1.74059 20.0 75. 1.63580 20.0 80. 1.43825 20.0 81. 1.37471 20.0 82. 1.30019 20.0 83. 1.20984 20.0 84. 1.10246 20.0 85. 0.97384 20.0 86. 0.81904 20.0 87. 0.64009 20.0 88. 0.43479 20.0 89. 0.21765 25.0 0. 2.08060 25.0 10. 2.07276 25.0 20. 2.05907 25.0 30. 2.03384 25.0 40. 1.99021 25.0 45. 1.96170 25.0 50. 1.93106 25.0 60. 1.85281 25.0 70. 1.74584 25.0 75. 1.65909 25.0 80. 1.49271 25.0 81. 1.43879 25.0 82. 1.37046 25.0 83. 1.28698 25.0 84. 1.18320 25.0 85. 1.05588 25.0 86. 0.89889 25.0 87. 0.70981 25.0 88. 0.48734 25.0 89. 0.24395 30.0 0. 2.07946 30.0 10. 2.07118 30.0 20. 2.05527 30.0 30. 2.02560 30.0 40. 1.98200 30.0 45. 1.95669 30.0 50. 1.92290 30.0 60. 1.84473 30.0 70. 1.74420 30.0 75. 1.67359 30.0 80. 1.53211 30.0 81. 1.48242 30.0 82. 1.42171 30.0 83. 1.34379 30.0 84. 1.24765 30.0 85. 1.12309 30.0 86. 0.96630 30.0 87. 0.77054 30.0 88. 0.53486 30.0 89. 0.26851 ____________________________________________________