Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Pt 78 M_5N67N67 1.960 2.122 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 2.3 0. 1.17959 2.3 10. 1.14594 2.3 20. 1.10506 2.3 30. 1.05324 2.3 40. 0.98647 2.3 45. 0.94669 2.3 50. 0.89869 2.3 60. 0.77685 2.3 70. 0.60124 2.3 75. 0.48312 2.3 80. 0.34078 2.3 81. 0.30853 2.3 82. 0.27543 2.3 83. 0.24249 2.3 84. 0.20869 2.3 85. 0.17373 2.3 86. 0.13872 2.3 87. 0.10428 2.3 88. 0.07078 2.3 89. 0.04016 2.4 0. 1.27877 2.4 10. 1.25367 2.4 20. 1.21921 2.4 30. 1.17078 2.4 40. 1.10947 2.4 45. 1.06783 2.4 50. 1.01779 2.4 60. 0.88877 2.4 70. 0.69148 2.4 75. 0.55569 2.4 80. 0.39101 2.4 81. 0.35437 2.4 82. 0.31663 2.4 83. 0.27789 2.4 84. 0.23016 2.4 85. 0.19815 2.4 86. 0.15780 2.4 87. 0.11815 2.4 88. 0.07977 2.4 89. 0.04477 2.8 0. 1.51095 2.8 10. 1.50355 2.8 20. 1.48632 2.8 30. 1.45319 2.8 40. 1.39823 2.8 45. 1.36046 2.8 50. 1.30972 2.8 60. 1.16041 2.8 70. 0.91410 2.8 75. 0.73718 2.8 80. 0.51685 2.8 81. 0.46851 2.8 82. 0.41769 2.8 83. 0.36352 2.8 84. 0.30846 2.8 85. 0.25905 2.8 86. 0.20484 2.8 87. 0.15194 2.8 88. 0.10155 2.8 89. 0.05553 3.0 0. 1.58486 3.0 10. 1.58423 3.0 20. 1.57133 3.0 30. 1.54270 3.0 40. 1.49319 3.0 45. 1.45269 3.0 50. 1.40255 3.0 60. 1.24927 3.0 70. 0.98864 3.0 75. 0.79967 3.0 80. 0.56130 3.0 81. 0.50798 3.0 82. 0.45331 3.0 83. 0.39685 3.0 84. 0.33901 3.0 85. 0.28010 3.0 86. 0.22182 3.0 87. 0.16408 3.0 88. 0.10933 3.0 89. 0.05865 3.2 0. 1.64170 3.2 10. 1.64755 3.2 20. 1.63775 3.2 30. 1.61535 3.2 40. 1.56858 3.2 45. 1.52824 3.2 50. 1.47882 3.2 60. 1.32362 3.2 70. 1.05228 3.2 75. 0.85117 3.2 80. 0.59903 3.2 81. 0.53816 3.2 82. 0.48334 3.2 83. 0.42305 3.2 84. 0.36138 3.2 85. 0.29870 3.2 86. 0.23629 3.2 87. 0.17479 3.2 88. 0.11556 3.2 89. 0.06231 3.6 0. 1.73163 3.6 10. 1.73890 3.6 20. 1.73956 3.6 30. 1.72365 3.6 40. 1.67934 3.6 45. 1.64513 3.6 50. 1.59522 3.6 60. 1.43784 3.6 70. 1.15094 3.6 75. 0.93707 3.6 80. 0.66201 3.6 81. 0.59883 3.6 82. 0.53384 3.6 83. 0.46781 3.6 84. 0.39954 3.6 85. 0.32140 3.6 86. 0.26059 3.6 87. 0.19239 3.6 88. 0.12675 3.6 89. 0.06728 4.0 0. 1.79186 4.0 10. 1.80899 4.0 20. 1.81169 4.0 30. 1.80126 4.0 40. 1.76325 4.0 45. 1.72679 4.0 50. 1.68221 4.0 60. 1.51760 4.0 70. 1.22804 4.0 75. 1.00453 4.0 80. 0.71240 4.0 81. 0.64493 4.0 82. 0.57572 4.0 83. 0.50537 4.0 84. 0.42961 4.0 85. 0.35669 4.0 86. 0.28139 4.0 87. 0.20683 4.0 88. 0.13600 4.0 89. 0.07149 4.4 0. 1.83714 4.4 10. 1.85629 4.4 20. 1.86830 4.4 30. 1.85651 4.4 40. 1.82352 4.4 45. 1.79099 4.4 50. 1.74190 4.4 60. 1.58611 4.4 70. 1.28971 4.4 75. 1.06000 4.4 80. 0.75622 4.4 81. 0.68591 4.4 82. 0.61281 4.4 83. 0.53718 4.4 84. 0.45926 4.4 85. 0.37935 4.4 86. 0.29936 4.4 87. 0.22022 4.4 88. 0.14425 4.4 89. 0.07509 4.8 0. 1.87447 4.8 10. 1.89900 4.8 20. 1.90835 4.8 30. 1.90180 4.8 40. 1.87084 4.8 45. 1.83600 4.8 50. 1.79382 4.8 60. 1.63696 4.8 70. 1.34082 4.8 75. 1.10728 4.8 80. 0.79113 4.8 81. 0.72053 4.8 82. 0.63925 4.8 83. 0.56585 4.8 84. 0.48421 4.8 85. 0.40110 4.8 86. 0.31620 4.8 87. 0.23237 4.8 88. 0.15156 4.8 89. 0.07823 5.0 0. 1.88776 5.0 10. 1.91166 5.0 20. 1.92232 5.0 30. 1.91677 5.0 40. 1.88846 5.0 45. 1.85700 5.0 50. 1.80957 5.0 60. 1.65504 5.0 70. 1.36423 5.0 75. 1.12796 5.0 80. 0.81176 5.0 81. 0.73817 5.0 82. 0.66041 5.0 83. 0.57966 5.0 84. 0.49639 5.0 85. 0.41063 5.0 86. 0.32394 5.0 87. 0.23803 5.0 88. 0.15532 5.0 89. 0.07973 5.2 0. 1.90233 5.2 10. 1.92523 5.2 20. 1.93930 5.2 30. 1.93421 5.2 40. 1.90407 5.2 45. 1.87275 5.2 50. 1.82775 5.2 60. 1.67694 5.2 70. 1.38452 5.2 75. 1.14784 5.2 80. 0.82830 5.2 81. 0.75325 5.2 82. 0.66860 5.2 83. 0.59269 5.2 84. 0.50690 5.2 85. 0.42059 5.2 86. 0.33130 5.2 87. 0.24382 5.2 88. 0.15848 5.2 89. 0.08131 5.6 0. 1.92340 5.6 10. 1.94963 5.6 20. 1.96326 5.6 30. 1.96198 5.6 40. 1.93025 5.6 45. 1.90224 5.6 50. 1.85287 5.6 60. 1.71175 5.6 70. 1.42221 5.6 75. 1.18548 5.6 80. 0.85945 5.6 81. 0.78278 5.6 82. 0.70155 5.6 83. 0.61658 5.6 84. 0.52866 5.6 85. 0.43810 5.6 86. 0.34638 5.6 87. 0.25423 5.6 88. 0.16518 5.6 89. 0.08400 6.0 0. 1.94111 6.0 10. 1.96831 6.0 20. 1.98169 6.0 30. 1.97820 6.0 40. 1.95288 6.0 45. 1.92713 6.0 50. 1.88133 6.0 60. 1.73662 6.0 70. 1.45597 6.0 75. 1.21724 6.0 80. 0.88766 6.0 81. 0.81003 6.0 82. 0.72742 6.0 83. 0.63895 6.0 84. 0.54896 6.0 85. 0.45515 6.0 86. 0.35944 6.0 87. 0.26418 6.0 88. 0.17179 6.0 89. 0.08688 6.5 0. 1.96076 6.5 10. 1.98838 6.5 20. 2.00022 6.5 30. 2.00247 6.5 40. 1.97190 6.5 45. 1.95003 6.5 50. 1.90604 6.5 60. 1.76421 6.5 70. 1.48915 6.5 75. 1.25368 6.5 80. 0.91270 6.5 81. 0.84054 6.5 82. 0.75508 6.5 83. 0.66632 6.5 84. 0.57271 6.5 85. 0.47601 6.5 86. 0.37592 6.5 87. 0.27588 6.5 88. 0.17928 6.5 89. 0.08998 7.0 0. 1.97517 7.0 10. 2.00110 7.0 20. 2.01430 7.0 30. 2.01370 7.0 40. 1.98919 7.0 45. 1.96384 7.0 50. 1.92451 7.0 60. 1.78896 7.0 70. 1.51681 7.0 75. 1.28524 7.0 80. 0.95089 7.0 81. 0.86909 7.0 82. 0.78229 7.0 83. 0.69106 7.0 84. 0.59382 7.0 85. 0.49460 7.0 86. 0.39138 7.0 87. 0.28771 7.0 88. 0.18617 7.0 89. 0.09307 7.5 0. 1.98843 7.5 10. 2.00932 7.5 20. 2.02625 7.5 30. 2.02401 7.5 40. 1.99885 7.5 45. 1.97401 7.5 50. 1.93639 7.5 60. 1.80838 7.5 70. 1.54301 7.5 75. 1.31316 7.5 80. 0.97802 7.5 81. 0.89666 7.5 82. 0.80767 7.5 83. 0.71397 7.5 84. 0.61578 7.5 85. 0.51267 7.5 86. 0.40582 7.5 87. 0.29847 7.5 88. 0.19286 7.5 89. 0.09621 8.0 0. 1.99768 8.0 10. 2.02015 8.0 20. 2.03243 8.0 30. 2.03507 8.0 40. 2.00998 8.0 45. 1.98434 8.0 50. 1.94600 8.0 60. 1.82141 8.0 70. 1.56483 8.0 75. 1.33994 8.0 80. 1.00514 8.0 81. 0.92081 8.0 82. 0.83102 8.0 83. 0.73613 8.0 84. 0.63568 8.0 85. 0.52870 8.0 86. 0.42013 8.0 87. 0.30928 8.0 88. 0.19981 8.0 89. 0.09899 8.5 0. 2.00546 8.5 10. 2.02805 8.5 20. 2.04015 8.5 30. 2.03781 8.5 40. 2.01252 8.5 45. 1.99200 8.5 50. 1.95590 8.5 60. 1.83433 8.5 70. 1.58485 8.5 75. 1.36255 8.5 80. 1.02931 8.5 81. 0.94511 8.5 82. 0.85522 8.5 83. 0.75748 8.5 84. 0.65429 8.5 85. 0.54714 8.5 86. 0.43459 8.5 87. 0.31971 8.5 88. 0.20680 8.5 89. 0.10199 9.0 0. 2.01003 9.0 10. 2.03460 9.0 20. 2.04850 9.0 30. 2.04146 9.0 40. 2.01799 9.0 45. 1.99380 9.0 50. 1.96258 9.0 60. 1.84396 9.0 70. 1.60196 9.0 75. 1.38472 9.0 80. 1.05177 9.0 81. 0.96893 9.0 82. 0.87680 9.0 83. 0.77820 9.0 84. 0.67366 9.0 85. 0.56189 9.0 86. 0.44773 9.0 87. 0.32949 9.0 88. 0.21311 9.0 89. 0.10478 9.5 0. 2.01921 9.5 10. 2.04018 9.5 20. 2.05106 9.5 30. 2.04645 9.5 40. 2.02453 9.5 45. 1.99676 9.5 50. 1.96475 9.5 60. 1.85143 9.5 70. 1.61788 9.5 75. 1.40584 9.5 80. 1.07432 9.5 81. 0.98582 9.5 82. 0.89731 9.5 83. 0.79740 9.5 84. 0.69079 9.5 85. 0.57846 9.5 86. 0.45999 9.5 87. 0.33924 9.5 88. 0.21914 9.5 89. 0.10748 10.0 0. 2.02242 10.0 10. 2.04263 10.0 20. 2.05448 10.0 30. 2.05011 10.0 40. 2.02489 10.0 45. 2.00279 10.0 50. 1.97082 10.0 60. 1.85762 10.0 70. 1.63126 10.0 75. 1.42440 10.0 80. 1.09372 10.0 81. 1.00832 10.0 82. 0.91550 10.0 83. 0.81534 10.0 84. 0.70807 10.0 85. 0.59214 10.0 86. 0.47274 10.0 87. 0.34847 10.0 88. 0.22478 10.0 89. 0.10987 11.0 0. 2.02647 11.0 10. 2.04842 11.0 20. 2.06087 11.0 30. 2.05565 11.0 40. 2.02934 11.0 45. 2.00600 11.0 50. 1.97342 11.0 60. 1.86890 11.0 70. 1.65513 11.0 75. 1.45507 11.0 80. 1.13150 11.0 81. 1.04542 11.0 82. 0.95204 11.0 83. 0.84981 11.0 84. 0.73969 11.0 85. 0.62069 11.0 86. 0.49588 11.0 87. 0.36616 11.0 88. 0.23652 11.0 89. 0.11486 12.0 0. 2.03263 12.0 10. 2.05414 12.0 20. 2.05959 12.0 30. 2.05262 12.0 40. 2.02983 12.0 45. 2.00629 12.0 50. 1.97398 12.0 60. 1.87654 12.0 70. 1.67484 12.0 75. 1.48359 12.0 80. 1.16562 12.0 81. 1.07913 12.0 82. 0.98510 12.0 83. 0.88162 12.0 84. 0.76973 12.0 85. 0.64725 12.0 86. 0.51844 12.0 87. 0.38316 12.0 88. 0.24590 12.0 89. 0.11959 13.0 0. 2.03656 13.0 10. 2.05604 13.0 20. 2.06356 13.0 30. 2.05678 13.0 40. 2.03021 13.0 45. 2.00835 13.0 50. 1.97653 13.0 60. 1.88347 13.0 70. 1.69090 13.0 75. 1.50799 13.0 80. 1.19722 13.0 81. 1.11230 13.0 82. 1.01812 13.0 83. 0.91256 13.0 84. 0.79749 13.0 85. 0.67324 13.0 86. 0.53988 13.0 87. 0.39976 13.0 88. 0.25871 13.0 89. 0.12437 14.0 0. 2.04089 14.0 10. 2.05936 14.0 20. 2.06294 14.0 30. 2.05428 14.0 40. 2.02725 14.0 45. 2.00542 14.0 50. 1.97434 14.0 60. 1.88619 14.0 70. 1.70391 14.0 75. 1.53015 14.0 80. 1.22435 14.0 81. 1.14026 14.0 82. 1.04643 14.0 83. 0.94108 14.0 84. 0.82418 14.0 85. 0.69680 14.0 86. 0.56074 14.0 87. 0.41524 14.0 88. 0.26859 14.0 89. 0.12891 15.0 0. 2.04279 15.0 10. 2.06084 15.0 20. 2.06502 15.0 30. 2.05580 15.0 40. 2.02822 15.0 45. 2.00521 15.0 50. 1.97395 15.0 60. 1.88537 15.0 70. 1.71537 15.0 75. 1.54850 15.0 80. 1.25168 15.0 81. 1.16785 15.0 82. 1.07331 15.0 83. 0.96744 15.0 84. 0.84266 15.0 85. 0.72121 15.0 86. 0.57969 15.0 87. 0.43116 15.0 88. 0.27872 15.0 89. 0.13364 16.0 0. 2.05086 16.0 10. 2.06035 16.0 20. 2.06526 16.0 30. 2.05485 16.0 40. 2.02528 16.0 45. 2.00423 16.0 50. 1.97526 16.0 60. 1.88755 16.0 70. 1.72421 16.0 75. 1.56643 16.0 80. 1.27536 16.0 81. 1.19314 16.0 82. 1.09788 16.0 83. 0.99276 16.0 84. 0.87354 16.0 85. 0.74323 16.0 86. 0.59867 16.0 87. 0.44626 16.0 88. 0.28851 16.0 89. 0.13773 17.0 0. 2.04597 17.0 10. 2.05953 17.0 20. 2.06545 17.0 30. 2.05233 17.0 40. 2.02228 17.0 45. 1.99956 17.0 50. 1.96873 17.0 60. 1.88589 17.0 70. 1.73228 17.0 75. 1.57894 17.0 80. 1.29777 17.0 81. 1.21666 17.0 82. 1.12307 17.0 83. 1.01641 17.0 84. 0.89632 17.0 85. 0.75746 17.0 86. 0.61710 17.0 87. 0.46118 17.0 88. 0.29824 17.0 89. 0.14236 18.0 0. 2.05029 18.0 10. 2.06212 18.0 20. 2.06181 18.0 30. 2.04906 18.0 40. 2.02144 18.0 45. 2.00112 18.0 50. 1.96952 18.0 60. 1.88663 18.0 70. 1.73880 18.0 75. 1.59298 18.0 80. 1.31888 18.0 81. 1.23891 18.0 82. 1.14568 18.0 83. 1.03888 18.0 84. 0.91888 18.0 85. 0.78459 18.0 86. 0.63503 18.0 87. 0.47471 18.0 88. 0.30791 18.0 89. 0.14648 19.0 0. 2.04912 19.0 10. 2.06110 19.0 20. 2.06328 19.0 30. 2.04709 19.0 40. 2.01711 19.0 45. 1.99899 19.0 50. 1.96443 19.0 60. 1.88377 19.0 70. 1.74207 19.0 75. 1.60387 19.0 80. 1.33720 19.0 81. 1.25808 19.0 82. 1.16473 19.0 83. 1.06016 19.0 84. 0.94053 19.0 85. 0.80313 19.0 86. 0.65325 19.0 87. 0.48891 19.0 88. 0.31708 19.0 89. 0.15074 20.0 0. 2.05100 20.0 10. 2.06238 20.0 20. 2.06335 20.0 30. 2.04805 20.0 40. 2.01766 20.0 45. 1.99182 20.0 50. 1.96366 20.0 60. 1.88419 20.0 70. 1.74949 20.0 75. 1.61510 20.0 80. 1.35684 20.0 81. 1.27771 20.0 82. 1.18671 20.0 83. 1.08055 20.0 84. 0.96018 20.0 85. 0.82340 20.0 86. 0.66870 20.0 87. 0.50234 20.0 88. 0.32590 20.0 89. 0.15516 25.0 0. 2.05850 25.0 10. 2.06396 25.0 20. 2.06225 25.0 30. 2.04653 25.0 40. 2.00894 25.0 45. 1.98190 25.0 50. 1.95231 25.0 60. 1.87574 25.0 70. 1.76060 25.0 75. 1.65203 25.0 80. 1.42892 25.0 81. 1.35922 25.0 82. 1.27201 25.0 83. 1.17033 25.0 84. 1.04925 25.0 85. 0.90860 25.0 86. 0.74614 25.0 87. 0.56482 25.0 88. 0.36892 25.0 89. 0.17479 30.0 0. 2.05925 30.0 10. 2.06343 30.0 20. 2.05812 30.0 30. 2.03647 30.0 40. 1.99827 30.0 45. 1.97458 30.0 50. 1.94167 30.0 60. 1.86601 30.0 70. 1.76187 30.0 75. 1.67516 30.0 80. 1.48365 30.0 81. 1.41735 30.0 82. 1.33764 30.0 83. 1.23988 30.0 84. 1.12310 30.0 85. 0.98094 30.0 86. 0.81339 30.0 87. 0.62055 30.0 88. 0.40880 30.0 89. 0.19315 ____________________________________________________