Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Nb 41 M5N23V 0.168 0.202 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 0.3 0. 1.17410 0.3 10. 1.16929 0.3 20. 1.15880 0.3 30. 1.13329 0.3 40. 1.08759 0.3 45. 1.05415 0.3 50. 1.01402 0.3 60. 0.91180 0.3 70. 0.75520 0.3 75. 0.63990 0.3 80. 0.48428 0.3 81. 0.44734 0.3 82. 0.40872 0.3 83. 0.36798 0.3 84. 0.32545 0.3 85. 0.28150 0.3 86. 0.23341 0.3 87. 0.18835 0.3 88. 0.14173 0.3 89. 0.09835 0.8 0. 1.79582 0.8 10. 1.79051 0.8 20. 1.78413 0.8 30. 1.77372 0.8 40. 1.75725 0.8 45. 1.74252 0.8 50. 1.72174 0.8 60. 1.63558 0.8 70. 1.43913 0.8 75. 1.26119 0.8 80. 0.98807 0.8 81. 0.91637 0.8 82. 0.84001 0.8 83. 0.75704 0.8 84. 0.66875 0.8 85. 0.57487 0.8 86. 0.47421 0.8 87. 0.36973 0.8 88. 0.26273 0.8 89. 0.15867 1.0 0. 1.85775 1.0 10. 1.85602 1.0 20. 1.85085 1.0 30. 1.84571 1.0 40. 1.82981 1.0 45. 1.81917 1.0 50. 1.79788 1.0 60. 1.71509 1.0 70. 1.52475 1.0 75. 1.34984 1.0 80. 1.07135 1.0 81. 0.99867 1.0 82. 0.91839 1.0 83. 0.83085 1.0 84. 0.73639 1.0 85. 0.58161 1.0 86. 0.52364 1.0 87. 0.40842 1.0 88. 0.28850 1.0 89. 0.17064 1.4 0. 1.92333 1.4 10. 1.92249 1.4 20. 1.92337 1.4 30. 1.91685 1.4 40. 1.90228 1.4 45. 1.88873 1.4 50. 1.86834 1.4 60. 1.79040 1.4 70. 1.61863 1.4 75. 1.45317 1.4 80. 1.18421 1.4 81. 1.11056 1.4 82. 1.02856 1.4 83. 0.93697 1.4 84. 0.83563 1.4 85. 0.72325 1.4 86. 0.60176 1.4 87. 0.47002 1.4 88. 0.33105 1.4 89. 0.19004 1.8 0. 1.95625 1.8 10. 1.95843 1.8 20. 1.95554 1.8 30. 1.93897 1.8 40. 1.93173 1.8 45. 1.91990 1.8 50. 1.89807 1.8 60. 1.81993 1.8 70. 1.66550 1.8 75. 1.51658 1.8 80. 1.26258 1.8 81. 1.18878 1.8 82. 1.10862 1.8 83. 1.01664 1.8 84. 0.91308 1.8 85. 0.79598 1.8 86. 0.66547 1.8 87. 0.47371 1.8 88. 0.36694 1.8 89. 0.20752 2.0 0. 1.97066 2.0 10. 1.96701 2.0 20. 1.96370 2.0 30. 1.95744 2.0 40. 1.93972 2.0 45. 1.92696 2.0 50. 1.90374 2.0 60. 1.83088 2.0 70. 1.68003 2.0 75. 1.53898 2.0 80. 1.29126 2.0 81. 1.21981 2.0 82. 1.14116 2.0 83. 1.04949 2.0 84. 0.94536 2.0 85. 0.82698 2.0 86. 0.69318 2.0 87. 0.54409 2.0 88. 0.38384 2.0 89. 0.21545 2.5 0. 1.98012 2.5 10. 1.98126 2.5 20. 1.97620 2.5 30. 1.96833 2.5 40. 1.94721 2.5 45. 1.93287 2.5 50. 1.91370 2.5 60. 1.84002 2.5 70. 1.70506 2.5 75. 1.57766 2.5 80. 1.35134 2.5 81. 1.28490 2.5 82. 1.20924 2.5 83. 1.11907 2.5 84. 1.01500 2.5 85. 0.89315 2.5 86. 0.75345 2.5 87. 0.54331 2.5 88. 0.42067 2.5 89. 0.23422 3.0 0. 1.98444 3.0 10. 1.98351 3.0 20. 1.97763 3.0 30. 1.97228 3.0 40. 1.95111 3.0 45. 1.93467 3.0 50. 1.91074 3.0 60. 1.84381 3.0 70. 1.71865 3.0 75. 1.60494 3.0 80. 1.39873 3.0 81. 1.33500 3.0 82. 1.26203 3.0 83. 1.17435 3.0 84. 1.07115 3.0 85. 0.95086 3.0 86. 0.80880 3.0 87. 0.64153 3.0 88. 0.45457 3.0 89. 0.25192 3.5 0. 1.98765 3.5 10. 1.98269 3.5 20. 1.97679 3.5 30. 1.96271 3.5 40. 1.94924 3.5 45. 1.93190 3.5 50. 1.91213 3.5 60. 1.84338 3.5 70. 1.72861 3.5 75. 1.62367 3.5 80. 1.43404 3.5 81. 1.37392 3.5 82. 1.30486 3.5 83. 1.22091 3.5 84. 1.12115 3.5 85. 1.00073 3.5 86. 0.85608 3.5 87. 0.68439 3.5 88. 0.48710 3.5 89. 0.26874 3.8 0. 1.98310 3.8 10. 1.98056 3.8 20. 1.97548 3.8 30. 1.96248 3.8 40. 1.94419 3.8 45. 1.93108 3.8 50. 1.91029 3.8 60. 1.84747 3.8 70. 1.72942 3.8 75. 1.63296 3.8 80. 1.45309 3.8 81. 1.39591 3.8 82. 1.32737 3.8 83. 1.24594 3.8 84. 1.14788 3.8 85. 1.02710 3.8 86. 0.88190 3.8 87. 0.70756 3.8 88. 0.50583 3.8 89. 0.27889 4.0 0. 1.98233 4.0 10. 1.98208 4.0 20. 1.97349 4.0 30. 1.96615 4.0 40. 1.94277 4.0 45. 1.92917 4.0 50. 1.90759 4.0 60. 1.84342 4.0 70. 1.73346 4.0 75. 1.63944 4.0 80. 1.46297 4.0 81. 1.40687 4.0 82. 1.34094 4.0 83. 1.26057 4.0 84. 1.16259 4.0 85. 1.04314 4.0 86. 0.89778 4.0 87. 0.72269 4.0 88. 0.51701 4.0 89. 0.28469 4.5 0. 1.97401 4.5 10. 1.97785 4.5 20. 1.97360 4.5 30. 1.96069 4.5 40. 1.94016 4.5 45. 1.92570 4.5 50. 1.90481 4.5 60. 1.84202 4.5 70. 1.73715 4.5 75. 1.65064 4.5 80. 1.48738 4.5 81. 1.43495 4.5 82. 1.37107 4.5 83. 1.29389 4.5 84. 1.19905 4.5 85. 1.08128 4.5 86. 0.93407 4.5 87. 0.75670 4.5 88. 0.54246 4.5 89. 0.29913 5.0 0. 1.97797 5.0 10. 1.97459 5.0 20. 1.96785 5.0 30. 1.95483 5.0 40. 1.93661 5.0 45. 1.91845 5.0 50. 1.90227 5.0 60. 1.83844 5.0 70. 1.74048 5.0 75. 1.65590 5.0 80. 1.50502 5.0 81. 1.45762 5.0 82. 1.39668 5.0 83. 1.32271 5.0 84. 1.23028 5.0 85. 1.11489 5.0 86. 0.96861 5.0 87. 0.78856 5.0 88. 0.56857 5.0 89. 0.31354 5.5 0. 1.96807 5.5 10. 1.96863 5.5 20. 1.96118 5.5 30. 1.95242 5.5 40. 1.93006 5.5 45. 1.91397 5.5 50. 1.89493 5.5 60. 1.83650 5.5 70. 1.73814 5.5 75. 1.66230 5.5 80. 1.52137 5.5 81. 1.47566 5.5 82. 1.41971 5.5 83. 1.34953 5.5 84. 1.25933 5.5 85. 1.14441 5.5 86. 0.97837 5.5 87. 0.81710 5.5 88. 0.59237 5.5 89. 0.32726 6.0 0. 1.96667 6.0 10. 1.96674 6.0 20. 1.96008 6.0 30. 1.95014 6.0 40. 1.92706 6.0 45. 1.91449 6.0 50. 1.89229 6.0 60. 1.83202 6.0 70. 1.73524 6.0 75. 1.66725 6.0 80. 1.53424 6.0 81. 1.48732 6.0 82. 1.43785 6.0 83. 1.37045 6.0 84. 1.28395 6.0 85. 1.17322 6.0 86. 1.02969 6.0 87. 0.84535 6.0 88. 0.61588 6.0 89. 0.34049 6.5 0. 1.96108 6.5 10. 1.96607 6.5 20. 1.95558 6.5 30. 1.95016 6.5 40. 1.92559 6.5 45. 1.90838 6.5 50. 1.88896 6.5 60. 1.82922 6.5 70. 1.73838 6.5 75. 1.67020 6.5 80. 1.54635 6.5 81. 1.50572 6.5 82. 1.45367 6.5 83. 1.39055 6.5 84. 1.30720 6.5 85. 1.19811 6.5 86. 1.05680 6.5 87. 0.87145 6.5 88. 0.58578 6.5 89. 0.35301 7.0 0. 1.95769 7.0 10. 1.95989 7.0 20. 1.95532 7.0 30. 1.94358 7.0 40. 1.92244 7.0 45. 1.90698 7.0 50. 1.88516 7.0 60. 1.82895 7.0 70. 1.73649 7.0 75. 1.67172 7.0 80. 1.55581 7.0 81. 1.51699 7.0 82. 1.46941 7.0 83. 1.40782 7.0 84. 1.32719 7.0 85. 1.22095 7.0 86. 1.08088 7.0 87. 0.89514 7.0 88. 0.65883 7.0 89. 0.36580 7.5 0. 1.95250 7.5 10. 1.95484 7.5 20. 1.95176 7.5 30. 1.93776 7.5 40. 1.91750 7.5 45. 1.90433 7.5 50. 1.88217 7.5 60. 1.82155 7.5 70. 1.73347 7.5 75. 1.67177 7.5 80. 1.54865 7.5 81. 1.52867 7.5 82. 1.48063 7.5 83. 1.42262 7.5 84. 1.34423 7.5 85. 1.24259 7.5 86. 1.10389 7.5 87. 0.92051 7.5 88. 0.67845 7.5 89. 0.37805 8.0 0. 1.95428 8.0 10. 1.95191 8.0 20. 1.94653 8.0 30. 1.93853 8.0 40. 1.91410 8.0 45. 1.89848 8.0 50. 1.87964 8.0 60. 1.82029 8.0 70. 1.73470 8.0 75. 1.67420 8.0 80. 1.57156 8.0 81. 1.53606 8.0 82. 1.49259 8.0 83. 1.43572 8.0 84. 1.36152 8.0 85. 1.26075 8.0 86. 1.12493 8.0 87. 0.94112 8.0 88. 0.69817 8.0 89. 0.39044 8.5 0. 1.94795 8.5 10. 1.94015 8.5 20. 1.94544 8.5 30. 1.93158 8.5 40. 1.91380 8.5 45. 1.89896 8.5 50. 1.87800 8.5 60. 1.81885 8.5 70. 1.73052 8.5 75. 1.67376 8.5 80. 1.57605 8.5 81. 1.54256 8.5 82. 1.50479 8.5 83. 1.44940 8.5 84. 1.37652 8.5 85. 1.27951 8.5 86. 1.14572 8.5 87. 0.96256 8.5 88. 0.71711 8.5 89. 0.40253 9.0 0. 1.94770 9.0 10. 1.94503 9.0 20. 1.94071 9.0 30. 1.93084 9.0 40. 1.91055 9.0 45. 1.89390 9.0 50. 1.87160 9.0 60. 1.81316 9.0 70. 1.72952 9.0 75. 1.67531 9.0 80. 1.57952 9.0 81. 1.55117 9.0 82. 1.51142 9.0 83. 1.45978 9.0 84. 1.39004 9.0 85. 1.29501 9.0 86. 1.16447 9.0 87. 0.95711 9.0 88. 0.73435 9.0 89. 0.41418 9.5 0. 1.94538 9.5 10. 1.94469 9.5 20. 1.94168 9.5 30. 1.92846 9.5 40. 1.90616 9.5 45. 1.89146 9.5 50. 1.87184 9.5 60. 1.81323 9.5 70. 1.72913 9.5 75. 1.67379 9.5 80. 1.58674 9.5 81. 1.55838 9.5 82. 1.51890 9.5 83. 1.46899 9.5 84. 1.40146 9.5 85. 1.30987 9.5 86. 1.18181 9.5 87. 1.00213 9.5 88. 0.75328 9.5 89. 0.42599 10.0 0. 1.94358 10.0 10. 1.94221 10.0 20. 1.93518 10.0 30. 1.92544 10.0 40. 1.90363 10.0 45. 1.88928 10.0 50. 1.86978 10.0 60. 1.81080 10.0 70. 1.72615 10.0 75. 1.67616 10.0 80. 1.58964 10.0 81. 1.56176 10.0 82. 1.52669 10.0 83. 1.47935 10.0 84. 1.41421 10.0 85. 1.32445 10.0 86. 1.19671 10.0 87. 1.01885 10.0 88. 0.76886 10.0 89. 0.43520 11.0 0. 1.94134 11.0 10. 1.93748 11.0 20. 1.93060 11.0 30. 1.91909 11.0 40. 1.90130 11.0 45. 1.88371 11.0 50. 1.86665 11.0 60. 1.80694 11.0 70. 1.72572 11.0 75. 1.67346 11.0 80. 1.59573 11.0 81. 1.57141 11.0 82. 1.53807 11.0 83. 1.49370 11.0 84. 1.43370 11.0 85. 1.34917 11.0 86. 1.22655 11.0 87. 1.05052 11.0 88. 0.79826 11.0 89. 0.45626 12.0 0. 1.93400 12.0 10. 1.93567 12.0 20. 1.92865 12.0 30. 1.91870 12.0 40. 1.90015 12.0 45. 1.87871 12.0 50. 1.86177 12.0 60. 1.80541 12.0 70. 1.72376 12.0 75. 1.67497 12.0 80. 1.60179 12.0 81. 1.55379 12.0 82. 1.54755 12.0 83. 1.50755 12.0 84. 1.45192 12.0 85. 1.37286 12.0 86. 1.25343 12.0 87. 1.08139 12.0 88. 0.82705 12.0 89. 0.47390 13.0 0. 1.93055 13.0 10. 1.93023 13.0 20. 1.92509 13.0 30. 1.91376 13.0 40. 1.89092 13.0 45. 1.87729 13.0 50. 1.85663 13.0 60. 1.79976 13.0 70. 1.71930 13.0 75. 1.67279 13.0 80. 1.60439 13.0 81. 1.58388 13.0 82. 1.55798 13.0 83. 1.52132 13.0 84. 1.46759 13.0 85. 1.38932 13.0 86. 1.23181 13.0 87. 1.10765 13.0 88. 0.85366 13.0 89. 0.49264 14.0 0. 1.93063 14.0 10. 1.92691 14.0 20. 1.92214 14.0 30. 1.91071 14.0 40. 1.88658 14.0 45. 1.87307 14.0 50. 1.85171 14.0 60. 1.79511 14.0 70. 1.71888 14.0 75. 1.67074 14.0 80. 1.60848 14.0 81. 1.58833 14.0 82. 1.56309 14.0 83. 1.52791 14.0 84. 1.47863 14.0 85. 1.40726 14.0 86. 1.29771 14.0 87. 1.13148 14.0 88. 0.87855 14.0 89. 0.51031 15.0 0. 1.92410 15.0 10. 1.92189 15.0 20. 1.92089 15.0 30. 1.90705 15.0 40. 1.88933 15.0 45. 1.87198 15.0 50. 1.84950 15.0 60. 1.79542 15.0 70. 1.71836 15.0 75. 1.66993 15.0 80. 1.61086 15.0 81. 1.58996 15.0 82. 1.56708 15.0 83. 1.53635 15.0 84. 1.49028 15.0 85. 1.42124 15.0 86. 1.31770 15.0 87. 1.15392 15.0 88. 0.90129 15.0 89. 0.52798 16.0 0. 1.92737 16.0 10. 1.92309 16.0 20. 1.91572 16.0 30. 1.90363 16.0 40. 1.88283 16.0 45. 1.86983 16.0 50. 1.85019 16.0 60. 1.79027 16.0 70. 1.71125 16.0 75. 1.66875 16.0 80. 1.61257 16.0 81. 1.59361 16.0 82. 1.57214 16.0 83. 1.54222 16.0 84. 1.50139 16.0 85. 1.43470 16.0 86. 1.33465 16.0 87. 1.17512 16.0 88. 0.92371 16.0 89. 0.54388 17.0 0. 1.91837 17.0 10. 1.92092 17.0 20. 1.90965 17.0 30. 1.90039 17.0 40. 1.88493 17.0 45. 1.86495 17.0 50. 1.84616 17.0 60. 1.78981 17.0 70. 1.71103 17.0 75. 1.66923 17.0 80. 1.61212 17.0 81. 1.59761 17.0 82. 1.57592 17.0 83. 1.54793 17.0 84. 1.50722 17.0 85. 1.44586 17.0 86. 1.35249 17.0 87. 1.19506 17.0 88. 0.94363 17.0 89. 0.55952 18.0 0. 1.91975 18.0 10. 1.91581 18.0 20. 1.91094 18.0 30. 1.89770 18.0 40. 1.88020 18.0 45. 1.86114 18.0 50. 1.84075 18.0 60. 1.78671 18.0 70. 1.70861 18.0 75. 1.66488 18.0 80. 1.61321 18.0 81. 1.59861 18.0 82. 1.58121 18.0 83. 1.55304 18.0 84. 1.51535 18.0 85. 1.45925 18.0 86. 1.36464 18.0 87. 1.21409 18.0 88. 0.96400 18.0 89. 0.57555 19.0 0. 1.91689 19.0 10. 1.91262 19.0 20. 1.90937 19.0 30. 1.89642 19.0 40. 1.87600 19.0 45. 1.86030 19.0 50. 1.84156 19.0 60. 1.78378 19.0 70. 1.70618 19.0 75. 1.66233 19.0 80. 1.61277 19.0 81. 1.59974 19.0 82. 1.58145 19.0 83. 1.55936 19.0 84. 1.52358 19.0 85. 1.46642 19.0 86. 1.37875 19.0 87. 1.23110 19.0 88. 0.98325 19.0 89. 0.58916 20.0 0. 1.91200 20.0 10. 1.91181 20.0 20. 1.90440 20.0 30. 1.89066 20.0 40. 1.87412 20.0 45. 1.85838 20.0 50. 1.83689 20.0 60. 1.78027 20.0 70. 1.70608 20.0 75. 1.66347 20.0 80. 1.61317 20.0 81. 1.60128 20.0 82. 1.58288 20.0 83. 1.55824 20.0 84. 1.52709 20.0 85. 1.47630 20.0 86. 1.38995 20.0 87. 1.24494 20.0 88. 1.00047 20.0 89. 0.56178 25.0 0. 1.90337 25.0 10. 1.89608 25.0 20. 1.89236 25.0 30. 1.88873 25.0 40. 1.86342 25.0 45. 1.84781 25.0 50. 1.82955 25.0 60. 1.77049 25.0 70. 1.69548 25.0 75. 1.65338 25.0 80. 1.61209 25.0 81. 1.60105 25.0 82. 1.58875 25.0 83. 1.57067 25.0 84. 1.54671 25.0 85. 1.50536 25.0 86. 1.43450 25.0 87. 1.30976 25.0 88. 1.07878 25.0 89. 0.66997 30.0 0. 1.89143 30.0 10. 1.89210 30.0 20. 1.88493 30.0 30. 1.87464 30.0 40. 1.85523 30.0 45. 1.83848 30.0 50. 1.81981 30.0 60. 1.76404 30.0 70. 1.69047 30.0 75. 1.64939 30.0 80. 1.60705 30.0 81. 1.59662 30.0 82. 1.58779 30.0 83. 1.57635 30.0 84. 1.55786 30.0 85. 1.52314 30.0 86. 1.46603 30.0 87. 1.35767 30.0 88. 1.14308 30.0 89. 0.72952 ____________________________________________________