Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Nb 41 M5N23V 0.168 0.202 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 0.3 0. 1.22075 0.3 10. 1.18924 0.3 20. 1.15260 0.3 30. 1.10253 0.3 40. 1.03468 0.3 45. 0.99250 0.3 50. 0.94292 0.3 60. 0.81815 0.3 70. 0.63935 0.3 75. 0.52042 0.3 80. 0.37430 0.3 81. 0.34185 0.3 82. 0.30859 0.3 83. 0.27456 0.3 84. 0.23968 0.3 85. 0.20447 0.3 86. 0.16687 0.3 87. 0.13290 0.3 88. 0.09856 0.3 89. 0.06747 0.8 0. 1.77105 0.8 10. 1.78158 0.8 20. 1.78786 0.8 30. 1.78471 0.8 40. 1.76786 0.8 45. 1.74914 0.8 50. 1.72156 0.8 60. 1.61179 0.8 70. 1.36783 0.8 75. 1.15935 0.8 80. 0.86232 0.8 81. 0.78899 0.8 82. 0.71298 0.8 83. 0.63231 0.8 84. 0.54990 0.8 85. 0.46422 0.8 86. 0.37552 0.8 87. 0.28657 0.8 88. 0.19915 0.8 89. 0.11757 1.0 0. 1.82761 1.0 10. 1.84477 1.0 20. 1.85515 1.0 30. 1.86047 1.0 40. 1.84682 1.0 45. 1.83392 1.0 50. 1.80833 1.0 60. 1.70567 1.0 70. 1.47046 1.0 75. 1.26136 1.0 80. 0.95078 1.0 81. 0.87486 1.0 82. 0.79267 1.0 83. 0.70595 1.0 84. 0.61473 1.0 85. 0.48621 1.0 86. 0.41978 1.0 87. 0.32003 1.0 88. 0.22059 1.0 89. 0.12720 1.4 0. 1.89016 1.4 10. 1.90967 1.4 20. 1.92792 1.4 30. 1.93403 1.4 40. 1.92499 1.4 45. 1.91108 1.4 50. 1.88809 1.4 60. 1.79729 1.4 70. 1.58684 1.4 75. 1.38630 1.4 80. 1.07539 1.4 81. 0.99475 1.4 82. 0.90748 1.4 83. 0.81299 1.4 84. 0.71147 1.4 85. 0.60315 1.4 86. 0.49030 1.4 87. 0.37320 1.4 88. 0.25546 1.4 89. 0.14231 1.8 0. 1.92349 1.8 10. 1.94544 1.8 20. 1.96006 1.8 30. 1.95492 1.8 40. 1.95610 1.8 45. 1.94451 1.8 50. 1.92140 1.8 60. 1.83425 1.8 70. 1.64797 1.8 75. 1.46541 1.8 80. 1.16459 1.8 81. 1.08186 1.8 82. 0.99356 1.8 83. 0.89546 1.8 84. 0.78888 1.8 85. 0.67251 1.8 86. 0.54852 1.8 87. 0.38752 1.8 88. 0.28492 1.8 89. 0.15573 2.0 0. 1.93842 2.0 10. 1.95433 2.0 20. 1.96809 2.0 30. 1.97483 2.0 40. 1.96374 2.0 45. 1.95208 2.0 50. 1.92744 2.0 60. 1.84762 2.0 70. 1.66810 2.0 75. 1.49374 2.0 80. 1.19828 2.0 81. 1.11692 2.0 82. 1.02893 2.0 83. 0.93014 2.0 84. 0.82141 2.0 85. 0.70265 2.0 86. 0.57416 2.0 87. 0.43781 2.0 88. 0.29890 2.0 89. 0.16182 2.5 0. 1.94963 2.5 10. 1.96928 2.5 20. 1.98033 2.5 30. 1.98465 2.5 40. 1.97064 2.5 45. 1.95711 2.5 50. 1.93797 2.5 60. 1.86005 2.5 70. 1.70215 2.5 75. 1.54549 2.5 80. 1.26948 2.5 81. 1.19205 2.5 82. 1.10512 2.5 83. 1.00479 2.5 84. 0.89356 2.5 85. 0.76835 2.5 86. 0.63092 2.5 87. 0.45085 2.5 88. 0.32958 2.5 89. 0.17640 3.0 0. 1.95580 3.0 10. 1.97220 3.0 20. 1.98149 3.0 30. 1.98773 3.0 40. 1.97357 3.0 45. 1.95777 3.0 50. 1.93443 3.0 60. 1.86444 3.0 70. 1.72225 3.0 75. 1.58242 3.0 80. 1.32704 3.0 81. 1.25152 3.0 82. 1.16615 3.0 83. 1.06665 3.0 84. 0.95357 3.0 85. 0.82642 3.0 86. 0.68414 3.0 87. 0.52509 3.0 88. 0.35826 3.0 89. 0.19005 3.5 0. 1.96101 3.5 10. 1.97225 3.5 20. 1.98037 3.5 30. 1.97612 3.5 40. 1.97040 3.5 45. 1.95397 3.5 50. 1.93486 3.5 60. 1.86482 3.5 70. 1.73602 3.5 75. 1.60845 3.5 80. 1.37186 3.5 81. 1.29905 3.5 82. 1.21675 3.5 83. 1.11923 3.5 84. 1.00781 3.5 85. 0.87834 3.5 86. 0.73030 3.5 87. 0.56461 3.5 88. 0.38598 3.5 89. 0.20327 3.8 0. 1.95716 3.8 10. 1.97047 3.8 20. 1.97892 3.8 30. 1.97633 3.8 40. 1.96408 3.8 45. 1.95255 3.8 50. 1.93214 3.8 60. 1.86905 3.8 70. 1.73885 3.8 75. 1.62158 3.8 80. 1.39607 3.8 81. 1.32582 3.8 82. 1.24365 3.8 83. 1.14814 3.8 84. 1.03702 3.8 85. 0.90602 3.8 86. 0.75586 3.8 87. 0.58622 3.8 88. 0.40222 3.8 89. 0.21124 4.0 0. 1.95746 4.0 10. 1.97238 4.0 20. 1.97689 4.0 30. 1.97969 4.0 40. 1.96271 4.0 45. 1.94996 4.0 50. 1.92900 4.0 60. 1.86459 4.0 70. 1.74409 4.0 75. 1.63004 4.0 80. 1.40867 4.0 81. 1.33983 4.0 82. 1.25994 4.0 83. 1.16517 4.0 84. 1.05375 4.0 85. 0.92297 4.0 86. 0.77218 4.0 87. 0.60028 4.0 88. 0.41197 4.0 89. 0.21591 4.5 0. 1.95032 4.5 10. 1.96851 4.5 20. 1.97678 4.5 30. 1.97336 4.5 40. 1.95864 4.5 45. 1.94586 4.5 50. 1.92556 4.5 60. 1.86309 4.5 70. 1.74985 4.5 75. 1.64600 4.5 80. 1.44042 4.5 81. 1.37493 4.5 82. 1.29675 4.5 83. 1.20469 4.5 84. 1.09455 4.5 85. 0.96423 4.5 86. 0.80886 4.5 87. 0.63276 4.5 88. 0.43408 4.5 89. 0.22743 5.0 0. 1.95602 5.0 10. 1.96579 5.0 20. 1.97082 5.0 30. 1.96686 5.0 40. 1.95418 5.0 45. 1.93729 5.0 50. 1.92180 5.0 60. 1.85875 5.0 70. 1.75483 5.0 75. 1.65509 5.0 80. 1.46454 5.0 81. 1.40428 5.0 82. 1.32868 5.0 83. 1.23945 5.0 84. 1.13056 5.0 85. 1.00084 5.0 86. 0.84460 5.0 87. 0.66321 5.0 88. 0.45749 5.0 89. 0.23896 5.5 0. 1.94745 5.5 10. 1.96047 5.5 20. 1.96403 5.5 30. 1.96374 5.5 40. 1.94671 5.5 45. 1.93191 5.5 50. 1.91327 5.5 60. 1.85610 5.5 70. 1.75327 5.5 75. 1.66459 5.5 80. 1.48603 5.5 81. 1.42833 5.5 82. 1.35774 5.5 83. 1.27146 5.5 84. 1.16459 5.5 85. 1.03355 5.5 86. 0.85884 5.5 87. 0.69120 5.5 88. 0.47885 5.5 89. 0.24999 6.0 0. 1.94667 6.0 10. 1.95904 6.0 20. 1.96277 6.0 30. 1.96107 6.0 40. 1.94256 6.0 45. 1.93143 6.0 50. 1.91022 6.0 60. 1.85118 6.0 70. 1.75115 6.0 75. 1.67197 6.0 80. 1.50407 6.0 81. 1.44311 6.0 82. 1.38139 6.0 83. 1.29771 6.0 84. 1.19377 6.0 85. 1.06593 6.0 86. 0.90859 6.0 87. 0.71877 6.0 88. 0.50002 6.0 89. 0.26075 6.5 0. 1.94279 6.5 10. 1.95860 6.5 20. 1.95810 6.5 30. 1.96040 6.5 40. 1.94047 6.5 45. 1.92415 6.5 50. 1.90603 6.5 60. 1.84783 6.5 70. 1.75494 6.5 75. 1.67660 6.5 80. 1.52055 6.5 81. 1.46835 6.5 82. 1.40269 6.5 83. 1.32259 6.5 84. 1.22178 6.5 85. 1.09412 6.5 86. 0.93772 6.5 87. 0.74483 6.5 88. 0.48760 6.5 89. 0.27091 7.0 0. 1.93977 7.0 10. 1.95299 7.0 20. 1.95771 7.0 30. 1.95353 7.0 40. 1.93666 7.0 45. 1.92237 7.0 50. 1.90150 7.0 60. 1.84718 7.0 70. 1.75309 7.0 75. 1.67992 7.0 80. 1.53444 7.0 81. 1.48387 7.0 82. 1.42286 7.0 83. 1.34498 7.0 84. 1.24620 7.0 85. 1.12072 7.0 86. 0.96386 7.0 87. 0.76893 7.0 88. 0.53948 7.0 89. 0.28145 7.5 0. 1.93548 7.5 10. 1.94814 7.5 20. 1.95406 7.5 30. 1.94700 7.5 40. 1.93141 7.5 45. 1.91881 7.5 50. 1.89775 7.5 60. 1.83913 7.5 70. 1.75019 7.5 75. 1.68160 7.5 80. 1.52836 7.5 81. 1.49997 7.5 82. 1.43838 7.5 83. 1.36418 7.5 84. 1.26758 7.5 85. 1.14586 7.5 86. 0.98898 7.5 87. 0.79445 7.5 88. 0.55766 7.5 89. 0.29159 8.0 0. 1.93792 8.0 10. 1.94552 8.0 20. 1.94873 8.0 30. 1.94746 8.0 40. 1.92709 8.0 45. 1.91236 8.0 50. 1.89495 8.0 60. 1.83733 8.0 70. 1.75167 8.0 75. 1.68520 8.0 80. 1.55673 8.0 81. 1.51063 8.0 82. 1.45457 8.0 83. 1.38158 8.0 84. 1.28884 8.0 85. 1.16755 8.0 86. 1.01255 8.0 87. 0.81576 8.0 88. 0.57605 8.0 89. 0.30186 8.5 0. 1.93230 8.5 10. 1.93508 8.5 20. 1.94755 8.5 30. 1.94010 8.5 40. 1.92668 8.5 45. 1.91259 8.5 50. 1.89234 8.5 60. 1.83542 8.5 70. 1.74759 8.5 75. 1.68559 8.5 80. 1.56396 8.5 81. 1.52043 8.5 82. 1.47017 8.5 83. 1.39914 8.5 84. 1.30760 8.5 85. 1.19026 8.5 86. 1.03571 8.5 87. 0.83802 8.5 88. 0.59396 8.5 89. 0.31185 9.0 0. 1.93260 9.0 10. 1.93920 9.0 20. 1.94267 9.0 30. 1.93912 9.0 40. 1.92259 9.0 45. 1.90698 9.0 50. 1.88544 9.0 60. 1.82904 9.0 70. 1.74612 9.0 75. 1.68807 9.0 80. 1.57030 9.0 81. 1.53213 9.0 82. 1.48026 9.0 83. 1.41316 9.0 84. 1.32526 9.0 85. 1.20887 9.0 86. 1.05720 9.0 87. 0.83870 9.0 88. 0.61044 9.0 89. 0.32165 9.5 0. 1.93088 9.5 10. 1.93889 9.5 20. 1.94361 9.5 30. 1.93625 9.5 40. 1.91783 9.5 45. 1.90382 9.5 50. 1.88561 9.5 60. 1.82900 9.5 70. 1.74576 9.5 75. 1.68694 9.5 80. 1.57986 9.5 81. 1.54214 9.5 82. 1.49115 9.5 83. 1.42624 9.5 84. 1.34014 9.5 85. 1.22744 9.5 86. 1.07724 9.5 87. 0.87970 9.5 88. 0.62859 9.5 89. 0.33154 10.0 0. 1.92955 10.0 10. 1.93668 10.0 20. 1.93705 10.0 30. 1.93306 10.0 40. 1.91473 10.0 45. 1.90162 10.0 50. 1.88289 10.0 60. 1.82619 10.0 70. 1.74263 10.0 75. 1.68980 10.0 80. 1.58432 10.0 81. 1.54800 10.0 82. 1.50162 10.0 83. 1.44008 10.0 84. 1.35651 10.0 85. 1.24527 10.0 86. 1.09446 10.0 87. 0.89735 10.0 88. 0.64357 10.0 89. 0.33945 11.0 0. 1.92804 11.0 10. 1.93236 11.0 20. 1.93239 11.0 30. 1.92600 11.0 40. 1.91167 11.0 45. 1.89501 11.0 50. 1.87884 11.0 60. 1.82121 11.0 70. 1.74225 11.0 75. 1.68776 11.0 80. 1.59432 11.0 81. 1.56219 11.0 82. 1.51832 11.0 83. 1.46008 11.0 84. 1.38214 11.0 85. 1.27564 11.0 86. 1.12922 11.0 87. 0.93134 11.0 88. 0.67229 11.0 89. 0.35732 12.0 0. 1.92129 12.0 10. 1.93085 12.0 20. 1.93032 12.0 30. 1.92543 12.0 40. 1.91021 12.0 45. 1.88944 12.0 50. 1.87323 12.0 60. 1.81902 12.0 70. 1.73964 12.0 75. 1.68985 12.0 80. 1.60320 12.0 81. 1.54930 12.0 82. 1.53211 12.0 83. 1.47899 12.0 84. 1.40567 12.0 85. 1.30504 12.0 86. 1.16075 12.0 87. 0.96497 12.0 88. 0.70056 12.0 89. 0.37276 13.0 0. 1.91871 13.0 10. 1.92554 13.0 20. 1.92668 13.0 30. 1.92019 13.0 40. 1.90042 13.0 45. 1.88748 13.0 50. 1.86757 13.0 60. 1.81254 13.0 70. 1.73467 13.0 75. 1.68774 13.0 80. 1.60806 13.0 81. 1.58131 13.0 82. 1.54641 13.0 83. 1.49727 13.0 84. 1.42664 13.0 85. 1.32702 13.0 86. 1.15782 13.0 87. 0.99400 13.0 88. 0.72700 13.0 89. 0.38880 14.0 0. 1.91952 14.0 10. 1.92252 14.0 20. 1.92364 14.0 30. 1.91684 14.0 40. 1.89539 14.0 45. 1.88270 14.0 50. 1.86207 14.0 60. 1.80728 14.0 70. 1.73424 14.0 75. 1.68586 14.0 80. 1.61402 14.0 81. 1.58874 14.0 82. 1.55504 14.0 83. 1.50775 14.0 84. 1.44270 14.0 85. 1.34957 14.0 86. 1.21387 14.0 87. 1.02078 14.0 88. 0.75241 14.0 89. 0.40438 15.0 0. 1.91336 15.0 10. 1.91767 15.0 20. 1.92230 15.0 30. 1.91287 15.0 40. 1.89788 15.0 45. 1.88114 15.0 50. 1.85935 15.0 60. 1.80739 15.0 70. 1.73298 15.0 75. 1.68488 15.0 80. 1.61814 15.0 81. 1.59198 15.0 82. 1.56154 15.0 83. 1.52005 15.0 84. 1.45828 15.0 85. 1.36823 15.0 86. 1.23804 15.0 87. 1.04624 15.0 88. 0.77554 15.0 89. 0.41986 16.0 0. 1.91717 16.0 10. 1.91905 16.0 20. 1.91707 16.0 30. 1.90928 16.0 40. 1.89100 16.0 45. 1.87873 16.0 50. 1.85978 16.0 60. 1.80167 16.0 70. 1.72554 16.0 75. 1.68402 16.0 80. 1.62119 16.0 81. 1.59774 16.0 82. 1.56924 16.0 83. 1.52923 16.0 84. 1.47333 16.0 85. 1.38608 16.0 86. 1.25940 16.0 87. 1.07038 16.0 88. 0.79856 16.0 89. 0.43400 17.0 0. 1.90877 17.0 10. 1.91700 17.0 20. 1.91093 17.0 30. 1.90559 17.0 40. 1.89258 17.0 45. 1.87326 17.0 50. 1.85517 17.0 60. 1.80059 17.0 70. 1.72458 17.0 75. 1.68418 17.0 80. 1.62199 17.0 81. 1.60360 17.0 82. 1.57557 17.0 83. 1.53754 17.0 84. 1.48278 17.0 85. 1.40115 17.0 86. 1.28122 17.0 87. 1.09358 17.0 88. 0.81917 17.0 89. 0.44807 18.0 0. 1.91053 18.0 10. 1.91218 18.0 20. 1.91217 18.0 30. 1.90282 18.0 40. 1.88765 18.0 45. 1.86891 18.0 50. 1.84933 18.0 60. 1.79687 18.0 70. 1.72196 18.0 75. 1.67959 18.0 80. 1.62393 18.0 81. 1.60556 18.0 82. 1.58236 18.0 83. 1.54510 18.0 84. 1.49435 18.0 85. 1.41838 18.0 86. 1.29749 18.0 87. 1.11542 18.0 88. 0.84067 18.0 89. 0.46245 19.0 0. 1.90797 19.0 10. 1.90911 19.0 20. 1.91065 19.0 30. 1.90134 19.0 40. 1.88316 19.0 45. 1.86825 19.0 50. 1.85013 19.0 60. 1.79417 19.0 70. 1.71927 19.0 75. 1.67682 19.0 80. 1.62420 19.0 81. 1.60804 19.0 82. 1.58435 19.0 83. 1.55397 19.0 84. 1.50519 19.0 85. 1.42918 19.0 86. 1.31504 19.0 87. 1.13532 19.0 88. 0.86068 19.0 89. 0.47487 20.0 0. 1.90352 20.0 10. 1.90832 20.0 20. 1.90559 20.0 30. 1.89523 20.0 40. 1.88101 20.0 45. 1.86556 20.0 50. 1.84502 20.0 60. 1.79005 20.0 70. 1.71868 20.0 75. 1.67814 20.0 80. 1.62502 20.0 81. 1.61026 20.0 82. 1.58714 20.0 83. 1.55465 20.0 84. 1.51129 20.0 85. 1.44206 20.0 86. 1.32972 20.0 87. 1.15248 20.0 88. 0.87939 20.0 89. 0.46146 25.0 0. 1.89591 25.0 10. 1.89312 25.0 20. 1.89329 25.0 30. 1.89271 25.0 40. 1.86928 25.0 45. 1.85417 25.0 50. 1.83652 25.0 60. 1.77860 25.0 70. 1.70649 25.0 75. 1.66673 25.0 80. 1.62581 25.0 81. 1.61352 25.0 82. 1.59842 25.0 83. 1.57471 25.0 84. 1.54125 25.0 85. 1.48481 25.0 86. 1.39021 25.0 87. 1.23174 25.0 88. 0.96454 25.0 89. 0.54962 30.0 0. 1.88470 30.0 10. 1.88958 30.0 20. 1.88575 30.0 30. 1.87820 30.0 40. 1.86040 30.0 45. 1.84409 30.0 50. 1.82579 30.0 60. 1.77139 30.0 70. 1.69989 30.0 75. 1.66161 30.0 80. 1.62101 30.0 81. 1.61002 30.0 82. 1.59916 30.0 83. 1.58473 30.0 84. 1.55917 30.0 85. 1.51190 30.0 86. 1.43350 30.0 87. 1.29217 30.0 88. 1.03672 30.0 89. 0.60645 ____________________________________________________