Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Na 11 KL23L23 0.994 1.072 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 1.2 0. 1.00753 1.2 10. 1.00671 1.2 20. 1.00522 1.2 30. 1.00217 1.2 40. 0.99305 1.2 45. 0.98568 1.2 50. 0.97531 1.2 60. 0.94377 1.2 70. 0.86960 1.2 75. 0.79302 1.2 80. 0.65726 1.2 81. 0.61871 1.2 82. 0.57560 1.2 83. 0.52624 1.2 84. 0.47199 1.2 85. 0.40963 1.2 86. 0.34097 1.2 87. 0.26478 1.2 88. 0.18151 1.2 89. 0.09416 1.6 0. 1.14691 1.6 10. 1.15039 1.6 20. 1.15627 1.6 30. 1.16875 1.6 40. 1.18725 1.6 45. 1.19830 1.6 50. 1.21246 1.6 60. 1.23829 1.6 70. 1.22348 1.6 75. 1.16107 1.6 80. 1.00017 1.6 81. 0.94721 1.6 82. 0.88828 1.6 83. 0.81665 1.6 84. 0.73431 1.6 85. 0.64023 1.6 86. 0.53341 1.6 87. 0.40452 1.6 88. 0.28177 1.6 89. 0.14247 2.0 0. 1.18874 2.0 10. 1.19077 2.0 20. 1.20267 2.0 30. 1.22018 2.0 40. 1.24942 2.0 45. 1.26851 2.0 50. 1.28863 2.0 60. 1.33369 2.0 70. 1.34837 2.0 75. 1.30219 2.0 80. 1.14971 2.0 81. 1.09732 2.0 82. 1.02527 2.0 83. 0.95790 2.0 84. 0.86738 2.0 85. 0.76194 2.0 86. 0.63879 2.0 87. 0.49967 2.0 88. 0.34227 2.0 89. 0.17313 2.5 0. 1.21514 2.5 10. 1.21866 2.5 20. 1.23080 2.5 30. 1.25511 2.5 40. 1.28934 2.5 45. 1.31182 2.5 50. 1.33763 2.5 60. 1.39150 2.5 70. 1.42641 2.5 75. 1.39439 2.5 80. 1.26334 2.5 81. 1.21341 2.5 82. 1.15219 2.5 83. 1.07667 2.5 84. 0.98414 2.5 85. 0.87265 2.5 86. 0.74030 2.5 87. 0.58393 2.5 88. 0.40420 2.5 89. 0.20522 3.0 0. 1.23002 3.0 10. 1.23514 3.0 20. 1.24894 3.0 30. 1.27430 3.0 40. 1.31010 3.0 45. 1.33436 3.0 50. 1.36334 3.0 60. 1.41920 3.0 70. 1.46373 3.0 75. 1.45081 3.0 80. 1.33813 3.0 81. 1.29465 3.0 82. 1.23745 3.0 83. 1.16350 3.0 84. 1.07417 3.0 85. 0.96164 3.0 86. 0.82229 3.0 87. 0.65635 3.0 88. 0.45907 3.0 89. 0.23511 3.5 0. 1.24098 3.5 10. 1.24486 3.5 20. 1.26124 3.5 30. 1.28609 3.5 40. 1.32476 3.5 45. 1.35145 3.5 50. 1.37616 3.5 60. 1.43743 3.5 70. 1.48655 3.5 75. 1.48095 3.5 80. 1.39098 3.5 81. 1.35215 3.5 82. 1.30034 3.5 83. 1.23274 3.5 84. 1.14488 3.5 85. 1.03432 3.5 86. 0.89456 3.5 87. 0.72086 3.5 88. 0.50957 3.5 89. 0.26336 4.0 0. 1.24839 4.0 10. 1.24956 4.0 20. 1.26884 4.0 30. 1.29762 4.0 40. 1.33684 4.0 45. 1.36101 4.0 50. 1.38818 4.0 60. 1.44640 4.0 70. 1.49879 4.0 75. 1.50078 4.0 80. 1.42841 4.0 81. 1.39430 4.0 82. 1.34938 4.0 83. 1.28499 4.0 84. 1.20353 4.0 85. 1.09529 4.0 86. 0.95413 4.0 87. 0.77595 4.0 88. 0.55547 4.0 89. 0.29000 4.5 0. 1.25268 4.5 10. 1.25735 4.5 20. 1.27384 4.5 30. 1.30163 4.5 40. 1.34135 4.5 45. 1.36623 4.5 50. 1.39464 4.5 60. 1.45449 4.5 70. 1.50598 4.5 75. 1.51376 4.5 80. 1.45652 4.5 81. 1.42663 4.5 82. 1.38488 4.5 83. 1.32738 4.5 84. 1.24938 4.5 85. 1.14687 4.5 86. 1.00792 4.5 87. 0.82839 4.5 88. 0.59783 4.5 89. 0.31548 5.0 0. 1.25571 5.0 10. 1.26234 5.0 20. 1.27904 5.0 30. 1.30798 5.0 40. 1.34802 5.0 45. 1.37370 5.0 50. 1.39950 5.0 60. 1.45768 5.0 70. 1.51047 5.0 75. 1.52122 5.0 80. 1.47697 5.0 81. 1.45280 5.0 82. 1.41136 5.0 83. 1.36267 5.0 84. 1.29084 5.0 85. 1.19160 5.0 86. 1.05546 5.0 87. 0.87443 5.0 88. 0.63172 5.0 89. 0.33941 5.5 0. 1.26002 5.5 10. 1.26597 5.5 20. 1.28294 5.5 30. 1.31121 5.5 40. 1.35362 5.5 45. 1.37636 5.5 50. 1.40415 5.5 60. 1.45966 5.5 70. 1.51177 5.5 75. 1.52384 5.5 80. 1.49294 5.5 81. 1.47107 5.5 82. 1.43770 5.5 83. 1.38996 5.5 84. 1.32479 5.5 85. 1.22787 5.5 86. 1.09739 5.5 87. 0.91602 5.5 88. 0.67471 5.5 89. 0.36301 6.0 0. 1.26271 6.0 10. 1.26820 6.0 20. 1.28712 6.0 30. 1.31611 6.0 40. 1.35545 6.0 45. 1.38152 6.0 50. 1.40664 6.0 60. 1.46003 6.0 70. 1.51292 6.0 75. 1.53014 6.0 80. 1.50433 6.0 81. 1.48635 6.0 82. 1.45621 6.0 83. 1.41508 6.0 84. 1.34873 6.0 85. 1.26269 6.0 86. 1.13461 6.0 87. 0.95496 6.0 88. 0.70923 6.0 89. 0.38566 6.5 0. 1.26406 6.5 10. 1.27184 6.5 20. 1.28880 6.5 30. 1.31814 6.5 40. 1.35910 6.5 45. 1.38435 6.5 50. 1.40867 6.5 60. 1.46315 6.5 70. 1.51538 6.5 75. 1.53138 6.5 80. 1.51498 6.5 81. 1.49688 6.5 82. 1.47183 6.5 83. 1.43351 6.5 84. 1.37605 6.5 85. 1.29185 6.5 86. 1.16732 6.5 87. 0.99240 6.5 88. 0.74360 6.5 89. 0.40759 7.0 0. 1.26757 7.0 10. 1.27171 7.0 20. 1.28854 7.0 30. 1.31951 7.0 40. 1.36391 7.0 45. 1.38481 7.0 50. 1.41111 7.0 60. 1.46599 7.0 70. 1.51313 7.0 75. 1.53104 7.0 80. 1.51961 7.0 81. 1.50504 7.0 82. 1.48396 7.0 83. 1.44789 7.0 84. 1.39645 7.0 85. 1.31693 7.0 86. 1.19832 7.0 87. 1.02441 7.0 88. 0.77442 7.0 89. 0.42883 7.4 0. 1.26749 7.4 10. 1.27299 7.4 20. 1.29074 7.4 30. 1.32410 7.4 40. 1.36292 7.4 45. 1.38661 7.4 50. 1.41392 7.4 60. 1.46476 7.4 70. 1.51344 7.4 75. 1.53012 7.4 80. 1.52455 7.4 81. 1.51124 7.4 82. 1.49203 7.4 83. 1.45831 7.4 84. 1.40700 7.4 85. 1.33508 7.4 86. 1.21989 7.4 87. 1.04909 7.4 88. 0.79840 7.4 89. 0.44576 7.8 0. 1.26785 7.8 10. 1.27475 7.8 20. 1.29138 7.8 30. 1.32353 7.8 40. 1.36575 7.8 45. 1.38855 7.8 50. 1.41441 7.8 60. 1.46559 7.8 70. 1.51404 7.8 75. 1.53208 7.8 80. 1.52860 7.8 81. 1.51508 7.8 82. 1.49721 7.8 83. 1.46818 7.8 84. 1.42245 7.8 85. 1.35108 7.8 86. 1.24039 7.8 87. 1.07175 7.8 88. 0.82217 7.8 89. 0.46269 8.0 0. 1.26826 8.0 10. 1.27405 8.0 20. 1.29191 8.0 30. 1.32403 8.0 40. 1.36697 8.0 45. 1.38838 8.0 50. 1.41514 8.0 60. 1.46704 8.0 70. 1.51070 8.0 75. 1.53211 8.0 80. 1.52623 8.0 81. 1.51746 8.0 82. 1.50323 8.0 83. 1.47325 8.0 84. 1.42697 8.0 85. 1.35794 8.0 86. 1.24850 8.0 87. 1.08379 8.0 88. 0.82519 8.0 89. 0.47059 8.2 0. 1.26828 8.2 10. 1.27314 8.2 20. 1.29270 8.2 30. 1.32497 8.2 40. 1.36524 8.2 45. 1.38783 8.2 50. 1.41473 8.2 60. 1.46582 8.2 70. 1.51266 8.2 75. 1.53006 8.2 80. 1.52836 8.2 81. 1.51792 8.2 82. 1.50521 8.2 83. 1.47641 8.2 84. 1.43214 8.2 85. 1.36501 8.2 86. 1.25790 8.2 87. 1.09436 8.2 88. 0.84387 8.2 89. 0.47862 8.5 0. 1.26859 8.5 10. 1.27544 8.5 20. 1.29272 8.5 30. 1.32582 8.5 40. 1.36691 8.5 45. 1.39053 8.5 50. 1.41761 8.5 60. 1.46796 8.5 70. 1.51286 8.5 75. 1.53181 8.5 80. 1.53133 8.5 81. 1.52416 8.5 82. 1.50916 8.5 83. 1.48286 8.5 84. 1.44184 8.5 85. 1.37530 8.5 86. 1.27054 8.5 87. 1.10991 8.5 88. 0.86015 8.5 89. 0.49085 9.0 0. 1.26844 9.0 10. 1.27482 9.0 20. 1.29442 9.0 30. 1.32565 9.0 40. 1.36830 9.0 45. 1.39116 9.0 50. 1.41660 9.0 60. 1.46437 9.0 70. 1.51251 9.0 75. 1.53093 9.0 80. 1.53333 9.0 81. 1.52594 9.0 82. 1.51314 9.0 83. 1.49062 9.0 84. 1.45091 9.0 85. 1.38665 9.0 86. 1.29139 9.0 87. 1.13261 9.0 88. 0.88398 9.0 89. 0.50925 9.5 0. 1.26975 9.5 10. 1.27673 9.5 20. 1.29645 9.5 30. 1.32607 9.5 40. 1.36849 9.5 45. 1.39282 9.5 50. 1.41818 9.5 60. 1.46908 9.5 70. 1.51163 9.5 75. 1.52955 9.5 80. 1.53446 9.5 81. 1.52725 9.5 82. 1.51669 9.5 83. 1.49637 9.5 84. 1.46286 9.5 85. 1.40491 9.5 86. 1.30986 9.5 87. 1.14516 9.5 88. 0.90739 9.5 89. 0.52626 10.0 0. 1.27052 10.0 10. 1.27817 10.0 20. 1.29542 10.0 30. 1.32800 10.0 40. 1.37175 10.0 45. 1.39391 10.0 50. 1.41871 10.0 60. 1.46841 10.0 70. 1.51097 10.0 75. 1.52860 10.0 80. 1.53359 10.0 81. 1.52829 10.0 82. 1.52202 10.0 83. 1.50208 10.0 84. 1.47286 10.0 85. 1.41552 10.0 86. 1.32556 10.0 87. 1.17577 10.0 88. 0.92908 10.0 89. 0.54340 11.0 0. 1.26953 11.0 10. 1.27617 11.0 20. 1.29781 11.0 30. 1.32879 11.0 40. 1.37017 11.0 45. 1.39484 11.0 50. 1.41987 11.0 60. 1.46800 11.0 70. 1.50859 11.0 75. 1.52793 11.0 80. 1.53682 11.0 81. 1.53334 11.0 82. 1.52621 11.0 83. 1.51097 11.0 84. 1.48438 11.0 85. 1.43767 11.0 86. 1.35444 11.0 87. 1.21190 11.0 88. 0.96816 11.0 89. 0.57696 12.0 0. 1.27078 12.0 10. 1.27746 12.0 20. 1.29849 12.0 30. 1.32842 12.0 40. 1.37288 12.0 45. 1.39654 12.0 50. 1.42092 12.0 60. 1.46688 12.0 70. 1.50837 12.0 75. 1.52549 12.0 80. 1.53679 12.0 81. 1.53617 12.0 82. 1.52906 12.0 83. 1.51749 12.0 84. 1.49638 12.0 85. 1.45542 12.0 86. 1.37864 12.0 87. 1.24384 12.0 88. 1.00572 12.0 89. 0.60767 13.0 0. 1.27079 13.0 10. 1.27709 13.0 20. 1.29636 13.0 30. 1.33134 13.0 40. 1.37514 13.0 45. 1.39632 13.0 50. 1.42091 13.0 60. 1.47003 13.0 70. 1.50733 13.0 75. 1.52482 13.0 80. 1.53595 13.0 81. 1.53536 13.0 82. 1.53282 13.0 83. 1.52330 13.0 84. 1.50310 13.0 85. 1.46738 13.0 86. 1.39736 13.0 87. 1.27008 13.0 88. 1.03990 13.0 89. 0.63687 14.0 0. 1.27112 14.0 10. 1.27636 14.0 20. 1.29976 14.0 30. 1.32964 14.0 40. 1.37447 14.0 45. 1.39815 14.0 50. 1.42153 14.0 60. 1.46879 14.0 70. 1.50580 14.0 75. 1.52399 14.0 80. 1.53497 14.0 81. 1.53578 14.0 82. 1.53416 14.0 83. 1.52639 14.0 84. 1.51095 14.0 85. 1.47816 14.0 86. 1.41588 14.0 87. 1.29599 14.0 88. 1.07140 14.0 89. 0.66495 15.0 0. 1.26976 15.0 10. 1.27809 15.0 20. 1.29836 15.0 30. 1.32917 15.0 40. 1.37471 15.0 45. 1.39840 15.0 50. 1.42241 15.0 60. 1.47107 15.0 70. 1.50485 15.0 75. 1.52081 15.0 80. 1.53403 15.0 81. 1.53359 15.0 82. 1.53279 15.0 83. 1.52689 15.0 84. 1.51429 15.0 85. 1.48794 15.0 86. 1.43148 15.0 87. 1.31747 15.0 88. 1.09877 15.0 89. 0.69144 16.0 0. 1.26995 16.0 10. 1.27941 16.0 20. 1.29704 16.0 30. 1.33158 16.0 40. 1.37496 16.0 45. 1.39894 16.0 50. 1.42413 16.0 60. 1.47228 16.0 70. 1.50652 16.0 75. 1.52023 16.0 80. 1.53221 16.0 81. 1.53363 16.0 82. 1.53157 16.0 83. 1.52948 16.0 84. 1.51729 16.0 85. 1.49459 16.0 86. 1.44355 16.0 87. 1.33658 16.0 88. 1.12472 16.0 89. 0.71725 17.0 0. 1.27067 17.0 10. 1.27621 17.0 20. 1.29913 17.0 30. 1.33107 17.0 40. 1.37599 17.0 45. 1.40077 17.0 50. 1.42322 17.0 60. 1.46949 17.0 70. 1.50456 17.0 75. 1.51835 17.0 80. 1.53242 17.0 81. 1.53164 17.0 82. 1.53160 17.0 83. 1.52919 17.0 84. 1.52110 17.0 85. 1.50067 17.0 86. 1.45458 17.0 87. 1.35371 17.0 88. 1.14814 17.0 89. 0.74103 18.0 0. 1.26867 18.0 10. 1.27485 18.0 20. 1.29913 18.0 30. 1.33173 18.0 40. 1.37574 18.0 45. 1.39811 18.0 50. 1.42508 18.0 60. 1.46791 18.0 70. 1.50407 18.0 75. 1.51710 18.0 80. 1.52949 18.0 81. 1.52950 18.0 82. 1.52984 18.0 83. 1.53017 18.0 84. 1.52246 18.0 85. 1.50447 18.0 86. 1.46082 18.0 87. 1.37003 18.0 88. 1.17090 18.0 89. 0.76417 19.0 0. 1.27057 19.0 10. 1.27661 19.0 20. 1.29768 19.0 30. 1.33388 19.0 40. 1.37631 19.0 45. 1.40027 19.0 50. 1.42543 19.0 60. 1.46869 19.0 70. 1.50318 19.0 75. 1.51674 19.0 80. 1.52812 19.0 81. 1.52974 19.0 82. 1.52974 19.0 83. 1.52983 19.0 84. 1.52530 19.0 85. 1.50947 19.0 86. 1.46935 19.0 87. 1.38136 19.0 88. 1.18941 19.0 89. 0.78797 20.0 0. 1.26938 20.0 10. 1.27470 20.0 20. 1.29930 20.0 30. 1.33021 20.0 40. 1.37625 20.0 45. 1.39901 20.0 50. 1.42290 20.0 60. 1.47056 20.0 70. 1.50408 20.0 75. 1.51680 20.0 80. 1.52676 20.0 81. 1.52827 20.0 82. 1.53243 20.0 83. 1.53093 20.0 84. 1.52583 20.0 85. 1.51068 20.0 86. 1.47625 20.0 87. 1.39594 20.0 88. 1.20964 20.0 89. 0.80746 25.0 0. 1.26476 25.0 10. 1.27326 25.0 20. 1.29547 25.0 30. 1.33061 25.0 40. 1.37533 25.0 45. 1.39969 25.0 50. 1.42183 25.0 60. 1.46994 25.0 70. 1.50116 25.0 75. 1.51169 25.0 80. 1.52162 25.0 81. 1.52056 25.0 82. 1.52465 25.0 83. 1.52457 25.0 84. 1.52526 25.0 85. 1.51725 25.0 86. 1.49765 25.0 87. 1.43740 25.0 88. 1.28437 25.0 89. 0.90022 30.0 0. 1.26033 30.0 10. 1.27132 30.0 20. 1.29207 30.0 30. 1.33048 30.0 40. 1.37679 30.0 45. 1.40106 30.0 50. 1.42572 30.0 60. 1.46976 30.0 70. 1.49949 30.0 75. 1.50867 30.0 80. 1.51523 30.0 81. 1.51621 30.0 82. 1.51683 30.0 83. 1.52200 30.0 84. 1.52249 30.0 85. 1.52009 30.0 86. 1.50588 30.0 87. 1.46335 30.0 88. 1.33538 30.0 89. 0.97718 ____________________________________________________