Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Na 11 KL23L23 0.994 1.072 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 1.2 0. 1.02601 1.2 10. 1.01474 1.2 20. 1.00273 1.2 30. 0.98859 1.2 40. 0.96758 1.2 45. 0.95384 1.2 50. 0.93594 1.2 60. 0.88099 1.2 70. 0.76789 1.2 75. 0.66754 1.2 80. 0.51517 1.2 81. 0.47618 1.2 82. 0.43421 1.2 83. 0.38854 1.2 84. 0.34040 1.2 85. 0.28783 1.2 86. 0.23295 1.2 87. 0.17533 1.2 88. 0.11621 1.2 89. 0.05813 1.6 0. 1.14012 1.6 10. 1.14791 1.6 20. 1.15745 1.6 30. 1.17275 1.6 40. 1.19224 1.6 45. 1.20263 1.6 50. 1.21424 1.6 60. 1.22730 1.6 70. 1.17182 1.6 75. 1.07046 1.6 80. 0.86379 1.6 81. 0.80338 1.6 82. 0.73851 1.6 83. 0.66398 1.6 84. 0.58259 1.6 85. 0.49416 1.6 86. 0.39907 1.6 87. 0.29385 1.6 88. 0.19587 1.6 89. 0.09486 2.0 0. 1.17913 2.0 10. 1.18709 2.0 20. 1.20423 2.0 30. 1.22637 2.0 40. 1.25944 2.0 45. 1.27956 2.0 50. 1.29951 2.0 60. 1.33911 2.0 70. 1.32320 2.0 75. 1.23843 2.0 80. 1.03011 2.0 81. 0.96661 2.0 82. 0.88649 2.0 83. 0.80922 2.0 84. 0.71425 2.0 85. 0.60957 2.0 86. 0.49462 2.0 87. 0.37264 2.0 88. 0.24458 2.0 89. 0.11781 2.5 0. 1.20596 2.5 10. 1.21503 2.5 20. 1.23229 2.5 30. 1.26162 2.5 40. 1.30038 2.5 45. 1.32444 2.5 50. 1.35143 2.5 60. 1.40508 2.5 70. 1.41967 2.5 75. 1.35441 2.5 80. 1.16404 2.5 81. 1.09985 2.5 82. 1.02498 2.5 83. 0.93715 2.5 84. 0.83467 2.5 85. 0.71873 2.5 86. 0.58941 2.5 87. 0.44647 2.5 88. 0.29491 2.5 89. 0.14171 3.0 0. 1.22172 3.0 10. 1.23181 3.0 20. 1.25031 3.0 30. 1.28037 3.0 40. 1.32054 3.0 45. 1.34656 3.0 50. 1.37700 3.0 60. 1.43526 3.0 70. 1.46819 3.0 75. 1.42818 3.0 80. 1.25676 3.0 81. 1.19775 3.0 82. 1.12459 3.0 83. 1.03498 3.0 84. 0.93186 3.0 85. 0.80965 3.0 86. 0.66846 3.0 87. 0.51133 3.0 88. 0.34006 3.0 89. 0.16388 3.5 0. 1.23344 3.5 10. 1.24188 3.5 20. 1.26247 3.5 30. 1.29147 3.5 40. 1.33430 3.5 45. 1.36273 3.5 50. 1.38920 3.5 60. 1.45404 3.5 70. 1.49745 3.5 75. 1.47078 3.5 80. 1.32631 3.5 81. 1.27112 3.5 82. 1.20197 3.5 83. 1.11650 3.5 84. 1.01148 3.5 85. 0.88688 3.5 86. 0.74000 3.5 87. 0.57076 3.5 88. 0.38237 3.5 89. 0.18511 4.0 0. 1.24154 4.0 10. 1.24688 4.0 20. 1.26992 4.0 30. 1.30262 4.0 40. 1.34557 4.0 45. 1.37153 4.0 50. 1.40033 4.0 60. 1.46268 4.0 70. 1.51307 4.0 75. 1.49863 4.0 80. 1.37807 4.0 81. 1.32692 4.0 82. 1.26439 4.0 83. 1.18058 4.0 84. 1.07952 4.0 85. 0.95390 4.0 86. 0.80123 4.0 87. 0.62292 4.0 88. 0.42163 4.0 89. 0.20518 4.5 0. 1.24640 4.5 10. 1.25488 4.5 20. 1.27486 4.5 30. 1.30610 4.5 40. 1.34938 4.5 45. 1.37579 4.5 50. 1.40571 4.5 60. 1.46996 4.5 70. 1.52207 4.5 75. 1.51813 4.5 80. 1.41710 4.5 81. 1.37161 4.5 82. 1.31160 4.5 83. 1.23411 4.5 84. 1.13500 4.5 85. 1.01209 4.5 86. 0.85735 4.5 87. 0.67338 4.5 88. 0.45871 4.5 89. 0.22465 5.0 0. 1.24992 5.0 10. 1.26010 5.0 20. 1.27994 5.0 30. 1.31216 5.0 40. 1.35534 5.0 45. 1.38243 5.0 50. 1.40980 5.0 60. 1.47190 5.0 70. 1.52786 5.0 75. 1.52984 5.0 80. 1.44706 5.0 81. 1.40866 5.0 82. 1.34898 5.0 83. 1.28017 5.0 84. 1.18558 5.0 85. 1.06407 5.0 86. 0.90879 5.0 87. 0.71892 5.0 88. 0.49016 5.0 89. 0.24316 5.5 0. 1.25484 5.5 10. 1.26391 5.5 20. 1.28383 5.5 30. 1.31489 5.5 40. 1.36026 5.5 45. 1.38451 5.5 50. 1.41378 5.5 60. 1.47343 5.5 70. 1.52917 5.5 75. 1.53582 5.5 80. 1.47140 5.5 81. 1.43579 5.5 82. 1.38551 5.5 83. 1.31718 5.5 84. 1.22885 5.5 85. 1.10772 5.5 86. 0.95556 5.5 87. 0.76117 5.5 88. 0.52753 5.5 89. 0.26155 6.0 0. 1.25780 6.0 10. 1.26639 6.0 20. 1.28795 6.0 30. 1.31977 6.0 40. 1.36156 6.0 45. 1.38908 6.0 50. 1.41560 6.0 60. 1.47295 6.0 70. 1.53071 6.0 75. 1.54437 6.0 80. 1.48923 6.0 81. 1.45875 6.0 82. 1.41288 6.0 83. 1.35163 6.0 84. 1.26174 6.0 85. 1.14976 6.0 86. 0.99744 6.0 87. 0.80134 6.0 88. 0.55921 6.0 89. 0.27955 6.5 0. 1.25947 6.5 10. 1.27003 6.5 20. 1.28954 6.5 30. 1.32142 6.5 40. 1.36481 6.5 45. 1.39148 6.5 50. 1.41691 6.5 60. 1.47523 6.5 70. 1.53257 6.5 75. 1.54668 6.5 80. 1.50575 6.5 81. 1.47636 6.5 82. 1.43559 6.5 83. 1.37822 6.5 84. 1.29753 6.5 85. 1.18612 6.5 86. 1.03556 6.5 87. 0.84028 6.5 88. 0.59132 6.5 89. 0.29700 7.0 0. 1.26338 7.0 10. 1.27002 7.0 20. 1.28924 7.0 30. 1.32253 7.0 40. 1.36945 7.0 45. 1.39138 7.0 50. 1.41876 7.0 60. 1.47736 7.0 70. 1.52990 7.0 75. 1.54753 7.0 80. 1.51511 7.0 81. 1.48984 7.0 82. 1.45476 7.0 83. 1.40020 7.0 84. 1.32563 7.0 85. 1.21891 7.0 86. 1.07195 7.0 87. 0.87457 7.0 88. 0.62058 7.0 89. 0.31411 7.4 0. 1.26323 7.4 10. 1.27137 7.4 20. 1.29139 7.4 30. 1.32714 7.4 40. 1.36811 7.4 45. 1.39262 7.4 50. 1.42130 7.4 60. 1.47584 7.4 70. 1.52995 7.4 75. 1.54671 7.4 80. 1.52293 7.4 81. 1.50009 7.4 82. 1.46717 7.4 83. 1.41625 7.4 84. 1.34236 7.4 85. 1.24271 7.4 86. 1.09810 7.4 87. 0.90186 7.4 88. 0.64372 7.4 89. 0.32794 7.8 0. 1.26375 7.8 10. 1.27316 7.8 20. 1.29202 7.8 30. 1.32624 7.8 40. 1.37092 7.8 45. 1.39432 7.8 50. 1.42122 7.8 60. 1.47576 7.8 70. 1.53003 7.8 75. 1.54943 7.8 80. 1.52995 7.8 81. 1.50770 7.8 82. 1.47698 7.8 83. 1.43133 7.8 84. 1.36313 7.8 85. 1.26476 7.8 86. 1.12296 7.8 87. 0.92689 7.8 88. 0.66672 7.8 89. 0.34166 8.0 0. 1.26441 8.0 10. 1.27258 8.0 20. 1.29256 8.0 30. 1.32676 8.0 40. 1.37163 8.0 45. 1.39416 8.0 50. 1.42216 8.0 60. 1.47730 8.0 70. 1.52646 8.0 75. 1.54903 8.0 80. 1.52897 8.0 81. 1.51152 8.0 82. 1.48497 8.0 83. 1.43840 8.0 84. 1.37057 8.0 85. 1.27366 8.0 86. 1.13386 8.0 87. 0.93989 8.0 88. 0.67245 8.0 89. 0.34825 8.2 0. 1.26464 8.2 10. 1.27177 8.2 20. 1.29333 8.2 30. 1.32766 8.2 40. 1.36997 8.2 45. 1.39349 8.2 50. 1.42119 8.2 60. 1.47568 8.2 70. 1.52830 8.2 75. 1.54715 8.2 80. 1.53230 8.2 81. 1.51308 8.2 82. 1.48905 8.2 83. 1.44379 8.2 84. 1.37818 8.2 85. 1.28392 8.2 86. 1.14542 8.2 87. 0.95205 8.2 88. 0.68841 8.2 89. 0.35490 8.5 0. 1.26483 8.5 10. 1.27401 8.5 20. 1.29331 8.5 30. 1.32834 8.5 40. 1.37166 8.5 45. 1.39602 8.5 50. 1.42401 8.5 60. 1.47734 8.5 70. 1.52803 8.5 75. 1.54968 8.5 80. 1.53678 8.5 81. 1.52134 8.5 82. 1.49533 8.5 83. 1.45384 8.5 84. 1.39124 8.5 85. 1.29795 8.5 86. 1.16146 8.5 87. 0.96971 8.5 88. 0.70435 8.5 89. 0.36509 9.0 0. 1.26509 9.0 10. 1.27347 9.0 20. 1.29496 9.0 30. 1.32829 9.0 40. 1.37270 9.0 45. 1.39641 9.0 50. 1.42254 9.0 60. 1.47361 9.0 70. 1.52707 9.0 75. 1.54797 9.0 80. 1.54063 9.0 81. 1.52654 9.0 82. 1.50356 9.0 83. 1.46613 9.0 84. 1.40627 9.0 85. 1.31639 9.0 86. 1.18743 9.0 87. 0.99589 9.0 88. 0.72830 9.0 89. 0.38046 9.5 0. 1.26638 9.5 10. 1.27535 9.5 20. 1.29696 9.5 30. 1.32828 9.5 40. 1.37267 9.5 45. 1.39774 9.5 50. 1.42402 9.5 60. 1.47775 9.5 70. 1.52563 9.5 75. 1.54659 9.5 80. 1.54412 9.5 81. 1.53039 9.5 82. 1.51026 9.5 83. 1.47645 9.5 84. 1.42349 9.5 85. 1.33920 9.5 86. 1.21062 9.5 87. 1.01542 9.5 88. 0.75197 9.5 89. 0.39493 10.0 0. 1.26728 10.0 10. 1.27686 10.0 20. 1.29590 10.0 30. 1.33028 10.0 40. 1.37567 10.0 45. 1.39849 10.0 50. 1.42436 10.0 60. 1.47645 10.0 70. 1.52437 10.0 75. 1.54559 10.0 80. 1.54457 10.0 81. 1.53363 10.0 82. 1.51870 10.0 83. 1.48571 10.0 84. 1.43788 10.0 85. 1.35494 10.0 86. 1.23201 10.0 87. 1.04604 10.0 88. 0.77443 10.0 89. 0.40955 11.0 0. 1.26647 11.0 10. 1.27501 11.0 20. 1.29831 11.0 30. 1.33085 11.0 40. 1.37393 11.0 45. 1.39910 11.0 50. 1.42484 11.0 60. 1.47535 11.0 70. 1.52142 11.0 75. 1.54427 11.0 80. 1.54957 11.0 81. 1.54231 11.0 82. 1.52782 11.0 83. 1.50166 11.0 84. 1.45791 11.0 85. 1.38633 11.0 86. 1.27039 11.0 87. 1.08935 11.0 88. 0.81580 11.0 89. 0.43882 12.0 0. 1.26821 12.0 10. 1.27643 12.0 20. 1.29889 12.0 30. 1.33028 12.0 40. 1.37601 12.0 45. 1.40039 12.0 50. 1.42551 12.0 60. 1.47359 12.0 70. 1.52014 12.0 75. 1.54096 12.0 80. 1.55168 12.0 81. 1.54747 12.0 82. 1.53476 12.0 83. 1.51302 12.0 84. 1.47665 12.0 85. 1.41282 12.0 86. 1.30340 12.0 87. 1.12862 12.0 88. 0.85576 12.0 89. 0.46581 13.0 0. 1.26813 13.0 10. 1.27616 13.0 20. 1.29679 13.0 30. 1.33314 13.0 40. 1.37829 13.0 45. 1.39988 13.0 50. 1.42521 13.0 60. 1.47617 13.0 70. 1.51820 13.0 75. 1.53961 13.0 80. 1.55155 13.0 81. 1.54820 13.0 82. 1.54125 13.0 83. 1.52326 13.0 84. 1.48925 13.0 85. 1.43180 13.0 86. 1.33012 13.0 87. 1.16224 13.0 88. 0.89299 13.0 89. 0.49183 14.0 0. 1.26871 14.0 10. 1.27540 14.0 20. 1.30015 14.0 30. 1.33139 14.0 40. 1.37733 14.0 45. 1.40145 14.0 50. 1.42548 14.0 60. 1.47455 14.0 70. 1.51610 14.0 75. 1.53821 14.0 80. 1.55094 14.0 81. 1.55027 14.0 82. 1.54465 14.0 83. 1.52992 14.0 84. 1.50202 14.0 85. 1.44915 14.0 86. 1.35618 14.0 87. 1.19498 14.0 88. 0.92771 14.0 89. 0.51739 15.0 0. 1.26749 15.0 10. 1.27720 15.0 20. 1.29872 15.0 30. 1.33077 15.0 40. 1.37731 15.0 45. 1.40180 15.0 50. 1.42610 15.0 60. 1.47650 15.0 70. 1.51428 15.0 75. 1.53423 15.0 80. 1.55048 15.0 81. 1.54871 15.0 82. 1.54506 15.0 83. 1.53352 15.0 84. 1.50969 15.0 85. 1.46498 15.0 86. 1.37872 15.0 87. 1.22277 15.0 88. 0.95912 15.0 89. 0.54170 16.0 0. 1.26773 16.0 10. 1.27856 16.0 20. 1.29738 16.0 30. 1.33304 16.0 40. 1.37758 16.0 45. 1.40195 16.0 50. 1.42762 16.0 60. 1.47737 16.0 70. 1.51554 16.0 75. 1.53266 16.0 80. 1.54827 16.0 81. 1.54956 16.0 82. 1.54457 16.0 83. 1.53789 16.0 84. 1.51672 16.0 85. 1.47585 16.0 86. 1.39684 16.0 87. 1.24873 16.0 88. 0.98887 16.0 89. 0.56592 17.0 0. 1.26861 17.0 10. 1.27539 17.0 20. 1.29946 17.0 30. 1.33258 17.0 40. 1.37850 17.0 45. 1.40364 17.0 50. 1.42646 17.0 60. 1.47435 17.0 70. 1.51295 17.0 75. 1.53064 17.0 80. 1.54904 17.0 81. 1.54777 17.0 82. 1.54620 17.0 83. 1.53919 17.0 84. 1.52261 17.0 85. 1.48634 17.0 86. 1.41378 17.0 87. 1.27165 17.0 88. 1.01624 17.0 89. 0.58864 18.0 0. 1.26666 18.0 10. 1.27414 18.0 20. 1.29944 18.0 30. 1.33302 18.0 40. 1.37793 18.0 45. 1.40090 18.0 50. 1.42815 18.0 60. 1.47253 18.0 70. 1.51223 18.0 75. 1.52883 18.0 80. 1.54559 18.0 81. 1.54569 18.0 82. 1.54478 18.0 83. 1.54199 18.0 84. 1.52678 18.0 85. 1.49454 18.0 86. 1.42555 18.0 87. 1.29389 18.0 88. 1.04360 18.0 89. 0.61071 19.0 0. 1.26862 19.0 10. 1.27592 19.0 20. 1.29798 19.0 30. 1.33525 19.0 40. 1.37848 19.0 45. 1.40290 19.0 50. 1.42828 19.0 60. 1.47278 19.0 70. 1.51061 19.0 75. 1.52797 19.0 80. 1.54386 19.0 81. 1.54607 19.0 82. 1.54543 19.0 83. 1.54236 19.0 84. 1.53157 19.0 85. 1.50286 19.0 86. 1.43877 19.0 87. 1.31110 19.0 88. 1.06657 19.0 89. 0.63367 20.0 0. 1.26763 20.0 10. 1.27394 20.0 20. 1.29962 20.0 30. 1.33150 20.0 40. 1.37836 20.0 45. 1.40114 20.0 50. 1.42571 20.0 60. 1.47456 20.0 70. 1.51136 20.0 75. 1.52740 20.0 80. 1.54244 20.0 81. 1.54436 20.0 82. 1.54861 20.0 83. 1.54440 20.0 84. 1.53402 20.0 85. 1.50681 20.0 86. 1.45000 20.0 87. 1.33063 20.0 88. 1.09061 20.0 89. 0.65301 25.0 0. 1.26300 25.0 10. 1.27265 25.0 20. 1.29572 25.0 30. 1.33146 25.0 40. 1.37692 25.0 45. 1.40178 25.0 50. 1.42393 25.0 60. 1.47332 25.0 70. 1.50705 25.0 75. 1.52001 25.0 80. 1.53538 25.0 81. 1.53557 25.0 82. 1.54068 25.0 83. 1.53990 25.0 84. 1.53855 25.0 85. 1.52337 25.0 86. 1.48763 25.0 87. 1.39390 25.0 88. 1.18571 25.0 89. 0.74732 30.0 0. 1.25928 30.0 10. 1.27085 30.0 20. 1.29226 30.0 30. 1.33131 30.0 40. 1.37807 30.0 45. 1.40277 30.0 50. 1.42766 30.0 60. 1.47262 30.0 70. 1.50428 30.0 75. 1.51595 30.0 80. 1.52754 30.0 81. 1.52969 30.0 82. 1.53098 30.0 83. 1.53764 30.0 84. 1.53685 30.0 85. 1.53130 30.0 86. 1.50554 30.0 87. 1.43584 30.0 88. 1.25549 30.0 89. 0.82936 ____________________________________________________