Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Mn 25 L3M23V 0.587 0.641 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 1.46575 1.0 10. 1.46164 1.0 20. 1.45166 1.0 30. 1.42991 1.0 40. 1.38876 1.0 45. 1.35929 1.0 50. 1.31624 1.0 60. 1.19210 1.0 70. 0.97497 1.0 75. 0.81171 1.0 80. 0.59438 1.0 81. 0.54429 1.0 82. 0.49112 1.0 83. 0.43495 1.0 84. 0.37720 1.0 85. 0.31771 1.0 86. 0.25714 1.0 87. 0.19555 1.0 88. 0.13524 1.0 89. 0.07832 1.2 0. 1.60395 1.2 10. 1.60157 1.2 20. 1.59401 1.2 30. 1.57837 1.2 40. 1.54394 1.2 45. 1.51626 1.2 50. 1.47581 1.2 60. 1.35256 1.2 70. 1.11146 1.2 75. 0.93850 1.2 80. 0.69155 1.2 81. 0.63372 1.2 82. 0.57214 1.2 83. 0.50742 1.2 84. 0.42449 1.2 85. 0.37024 1.2 86. 0.29879 1.2 87. 0.22679 1.2 88. 0.15504 1.2 89. 0.08785 1.6 0. 1.74244 1.6 10. 1.74296 1.6 20. 1.73762 1.6 30. 1.72718 1.6 40. 1.70233 1.6 45. 1.68342 1.6 50. 1.65299 1.6 60. 1.53793 1.6 70. 1.30395 1.6 75. 1.10487 1.6 80. 0.82938 1.6 81. 0.76228 1.6 82. 0.68995 1.6 83. 0.61458 1.6 84. 0.53134 1.6 85. 0.44970 1.6 86. 0.36218 1.6 87. 0.26491 1.6 88. 0.18576 1.6 89. 0.10170 2.0 0. 1.79538 2.0 10. 1.78575 2.0 20. 1.79225 2.0 30. 1.78721 2.0 40. 1.77244 2.0 45. 1.75691 2.0 50. 1.73197 2.0 60. 1.63301 2.0 70. 1.41388 2.0 75. 1.21838 2.0 80. 0.92886 2.0 81. 0.85612 2.0 82. 0.77756 2.0 83. 0.69474 2.0 84. 0.60649 2.0 85. 0.51208 2.0 86. 0.41383 2.0 87. 0.31261 2.0 88. 0.21125 2.0 89. 0.11331 2.5 0. 1.81940 2.5 10. 1.81951 2.5 20. 1.82228 2.5 30. 1.81552 2.5 40. 1.80944 2.5 45. 1.79708 2.5 50. 1.77891 2.5 60. 1.69648 2.5 70. 1.50065 2.5 75. 1.31585 2.5 80. 1.02348 2.5 81. 0.94895 2.5 82. 0.85484 2.5 83. 0.77698 2.5 84. 0.68060 2.5 85. 0.57732 2.5 86. 0.46784 2.5 87. 0.35398 2.5 88. 0.23803 2.5 89. 0.12583 3.0 0. 1.82287 3.0 10. 1.82068 3.0 20. 1.82616 3.0 30. 1.82439 3.0 40. 1.82057 3.0 45. 1.81081 3.0 50. 1.79607 3.0 60. 1.73202 3.0 70. 1.55526 3.0 75. 1.37791 3.0 80. 1.10076 3.0 81. 1.02453 3.0 82. 0.93986 3.0 83. 0.84746 3.0 84. 0.74606 3.0 85. 0.63594 3.0 86. 0.51734 3.0 87. 0.39146 3.0 88. 0.26355 3.0 89. 0.13742 3.5 0. 1.81973 3.5 10. 1.81972 3.5 20. 1.82289 3.5 30. 1.82402 3.5 40. 1.82519 3.5 45. 1.81937 3.5 50. 1.80735 3.5 60. 1.75119 3.5 70. 1.59968 3.5 75. 1.44161 3.5 80. 1.16430 3.5 81. 1.08266 3.5 82. 1.00254 3.5 83. 0.90829 3.5 84. 0.80319 3.5 85. 0.68690 3.5 86. 0.56161 3.5 87. 0.42686 3.5 88. 0.26889 3.5 89. 0.14883 3.8 0. 1.81625 3.8 10. 1.81527 3.8 20. 1.82136 3.8 30. 1.82026 3.8 40. 1.81986 3.8 45. 1.81914 3.8 50. 1.81049 3.8 60. 1.75892 3.8 70. 1.61406 3.8 75. 1.46698 3.8 80. 1.19734 3.8 81. 1.11784 3.8 82. 1.03699 3.8 83. 0.94075 3.8 84. 0.83441 3.8 85. 0.71638 3.8 86. 0.58715 3.8 87. 0.44782 3.8 88. 0.30126 3.8 89. 0.15551 4.0 0. 1.81360 4.0 10. 1.81385 4.0 20. 1.81642 4.0 30. 1.82044 4.0 40. 1.81622 4.0 45. 1.81860 4.0 50. 1.80893 4.0 60. 1.76271 4.0 70. 1.62903 4.0 75. 1.48361 4.0 80. 1.21708 4.0 81. 1.14269 4.0 82. 1.05703 4.0 83. 0.96075 4.0 84. 0.85487 4.0 85. 0.73482 4.0 86. 0.60314 4.0 87. 0.46003 4.0 88. 0.30964 4.0 89. 0.15933 4.5 0. 1.80214 4.5 10. 1.80908 4.5 20. 1.81399 4.5 30. 1.81443 4.5 40. 1.81749 4.5 45. 1.81553 4.5 50. 1.80998 4.5 60. 1.76854 4.5 70. 1.65087 4.5 75. 1.51852 4.5 80. 1.26509 4.5 81. 1.18994 4.5 82. 1.10534 4.5 83. 1.00860 4.5 84. 0.90035 4.5 85. 0.77730 4.5 86. 0.63985 4.5 87. 0.49011 4.5 88. 0.33082 4.5 89. 0.16945 5.0 0. 1.79756 5.0 10. 1.79759 5.0 20. 1.80429 5.0 30. 1.80921 5.0 40. 1.81201 5.0 45. 1.81138 5.0 50. 1.80254 5.0 60. 1.76946 5.0 70. 1.66769 5.0 75. 1.54490 5.0 80. 1.30375 5.0 81. 1.23067 5.0 82. 1.14234 5.0 83. 1.05285 5.0 84. 0.94260 5.0 85. 0.81702 5.0 86. 0.67550 5.0 87. 0.51938 5.0 88. 0.35116 5.0 89. 0.17937 5.5 0. 1.78746 5.5 10. 1.79505 5.5 20. 1.79779 5.5 30. 1.80273 5.5 40. 1.80634 5.5 45. 1.80619 5.5 50. 1.80167 5.5 60. 1.77003 5.5 70. 1.67988 5.5 75. 1.56730 5.5 80. 1.33882 5.5 81. 1.26652 5.5 82. 1.18664 5.5 83. 1.09138 5.5 84. 0.98023 5.5 85. 0.85415 5.5 86. 0.70921 5.5 87. 0.54761 5.5 88. 0.37040 5.5 89. 0.18872 6.0 0. 1.78511 6.0 10. 1.78623 6.0 20. 1.79365 6.0 30. 1.79692 6.0 40. 1.80164 6.0 45. 1.80331 6.0 50. 1.79684 6.0 60. 1.77159 6.0 70. 1.68549 6.0 75. 1.58586 6.0 80. 1.36981 6.0 81. 1.30130 6.0 82. 1.21998 6.0 83. 1.12632 6.0 84. 1.01653 6.0 85. 0.88831 6.0 86. 0.74028 6.0 87. 0.57362 6.0 88. 0.38939 6.0 89. 0.19799 6.5 0. 1.77484 6.5 10. 1.77991 6.5 20. 1.78426 6.5 30. 1.79187 6.5 40. 1.79771 6.5 45. 1.79419 6.5 50. 1.79262 6.5 60. 1.76998 6.5 70. 1.69220 6.5 75. 1.60105 6.5 80. 1.39589 6.5 81. 1.32930 6.5 82. 1.25152 6.5 83. 1.15857 6.5 84. 1.05024 6.5 85. 0.91687 6.5 86. 0.77042 6.5 87. 0.59931 6.5 88. 0.40793 6.5 89. 0.20773 7.0 0. 1.77342 7.0 10. 1.77369 7.0 20. 1.77886 7.0 30. 1.79162 7.0 40. 1.79347 7.0 45. 1.79460 7.0 50. 1.78630 7.0 60. 1.76553 7.0 70. 1.69870 7.0 75. 1.61203 7.0 80. 1.41409 7.0 81. 1.35597 7.0 82. 1.28038 7.0 83. 1.18931 7.0 84. 1.06193 7.0 85. 0.95181 7.0 86. 0.79904 7.0 87. 0.62279 7.0 88. 0.42575 7.0 89. 0.21666 7.5 0. 1.77022 7.5 10. 1.76862 7.5 20. 1.77614 7.5 30. 1.78238 7.5 40. 1.79166 7.5 45. 1.78711 7.5 50. 1.78550 7.5 60. 1.76333 7.5 70. 1.70008 7.5 75. 1.62270 7.5 80. 1.44042 7.5 81. 1.37894 7.5 82. 1.30462 7.5 83. 1.21694 7.5 84. 1.10884 7.5 85. 0.97827 7.5 86. 0.82571 7.5 87. 0.64715 7.5 88. 0.44377 7.5 89. 0.22578 8.0 0. 1.76333 8.0 10. 1.76621 8.0 20. 1.77248 8.0 30. 1.77700 8.0 40. 1.78488 8.0 45. 1.78365 8.0 50. 1.77893 8.0 60. 1.76017 8.0 70. 1.70591 8.0 75. 1.62878 8.0 80. 1.45934 8.0 81. 1.40072 8.0 82. 1.32899 8.0 83. 1.24069 8.0 84. 1.13494 8.0 85. 1.00585 8.0 86. 0.85314 8.0 87. 0.66965 8.0 88. 0.46043 8.0 89. 0.23465 8.5 0. 1.75880 8.5 10. 1.75909 8.5 20. 1.77200 8.5 30. 1.77441 8.5 40. 1.77959 8.5 45. 1.78082 8.5 50. 1.77481 8.5 60. 1.75921 8.5 70. 1.70335 8.5 75. 1.63783 8.5 80. 1.47347 8.5 81. 1.41933 8.5 82. 1.35002 8.5 83. 1.26356 8.5 84. 1.15993 8.5 85. 1.03156 8.5 86. 0.87687 8.5 87. 0.69203 8.5 88. 0.47700 8.5 89. 0.24379 9.0 0. 1.75168 9.0 10. 1.75669 9.0 20. 1.76385 9.0 30. 1.76812 9.0 40. 1.77522 9.0 45. 1.77461 9.0 50. 1.77295 9.0 60. 1.75467 9.0 70. 1.70329 9.0 75. 1.64326 9.0 80. 1.48887 9.0 81. 1.43577 9.0 82. 1.36944 9.0 83. 1.28545 9.0 84. 1.18202 9.0 85. 1.05560 9.0 86. 0.90071 9.0 87. 0.71376 9.0 88. 0.49362 9.0 89. 0.25201 9.5 0. 1.75003 9.5 10. 1.75429 9.5 20. 1.75895 9.5 30. 1.76729 9.5 40. 1.76944 9.5 45. 1.77363 9.5 50. 1.76990 9.5 60. 1.75131 9.5 70. 1.70258 9.5 75. 1.64806 9.5 80. 1.50436 9.5 81. 1.45166 9.5 82. 1.38735 9.5 83. 1.30669 9.5 84. 1.20369 9.5 85. 1.07780 9.5 86. 0.92277 9.5 87. 0.73368 9.5 88. 0.50954 9.5 89. 0.26025 10.0 0. 1.74409 10.0 10. 1.75131 10.0 20. 1.75574 10.0 30. 1.76267 10.0 40. 1.76791 10.0 45. 1.76969 10.0 50. 1.76497 10.0 60. 1.74669 10.0 70. 1.70386 10.0 75. 1.64967 10.0 80. 1.51398 10.0 81. 1.46563 10.0 82. 1.40447 10.0 83. 1.32415 10.0 84. 1.22478 10.0 85. 1.09900 10.0 86. 0.94406 10.0 87. 0.75294 10.0 88. 0.52442 10.0 89. 0.26820 11.0 0. 1.73933 11.0 10. 1.74125 11.0 20. 1.74835 11.0 30. 1.76054 11.0 40. 1.76306 11.0 45. 1.76264 11.0 50. 1.76096 11.0 60. 1.74351 11.0 70. 1.70121 11.0 75. 1.65579 11.0 80. 1.53533 11.0 81. 1.49075 11.0 82. 1.43332 11.0 83. 1.35619 11.0 84. 1.26141 11.0 85. 1.13952 11.0 86. 0.98301 11.0 87. 0.78798 11.0 88. 0.55351 11.0 89. 0.28416 12.0 0. 1.73682 12.0 10. 1.73643 12.0 20. 1.74446 12.0 30. 1.75259 12.0 40. 1.75685 12.0 45. 1.75686 12.0 50. 1.75239 12.0 60. 1.73787 12.0 70. 1.69978 12.0 75. 1.65756 12.0 80. 1.55353 12.0 81. 1.50925 12.0 82. 1.45140 12.0 83. 1.38521 12.0 84. 1.29278 12.0 85. 1.17382 12.0 86. 1.02033 12.0 87. 0.82321 12.0 88. 0.58210 12.0 89. 0.29959 13.0 0. 1.72861 13.0 10. 1.73136 13.0 20. 1.73712 13.0 30. 1.74780 13.0 40. 1.75410 13.0 45. 1.75332 13.0 50. 1.75074 13.0 60. 1.73060 13.0 70. 1.69816 13.0 75. 1.66015 13.0 80. 1.56666 13.0 81. 1.52635 13.0 82. 1.47703 13.0 83. 1.41007 13.0 84. 1.32099 13.0 85. 1.20661 13.0 86. 1.05354 13.0 87. 0.85555 13.0 88. 0.60724 13.0 89. 0.31449 14.0 0. 1.72809 14.0 10. 1.72946 14.0 20. 1.73458 14.0 30. 1.74311 14.0 40. 1.75137 14.0 45. 1.74617 14.0 50. 1.74788 14.0 60. 1.72762 14.0 70. 1.69245 14.0 75. 1.66299 14.0 80. 1.57710 14.0 81. 1.54149 14.0 82. 1.49425 14.0 83. 1.43030 14.0 84. 1.34859 14.0 85. 1.23451 14.0 86. 1.08433 14.0 87. 0.88661 14.0 88. 0.63236 14.0 89. 0.31428 15.0 0. 1.72119 15.0 10. 1.72225 15.0 20. 1.72806 15.0 30. 1.73776 15.0 40. 1.74581 15.0 45. 1.74374 15.0 50. 1.73850 15.0 60. 1.72315 15.0 70. 1.68959 15.0 75. 1.66137 15.0 80. 1.58380 15.0 81. 1.55137 15.0 82. 1.50886 15.0 83. 1.45167 15.0 84. 1.36921 15.0 85. 1.26131 15.0 86. 1.11328 15.0 87. 0.91592 15.0 88. 0.65644 15.0 89. 0.34316 16.0 0. 1.71891 16.0 10. 1.72294 16.0 20. 1.72380 16.0 30. 1.73361 16.0 40. 1.74017 16.0 45. 1.74080 16.0 50. 1.73653 16.0 60. 1.71742 16.0 70. 1.68493 16.0 75. 1.66010 16.0 80. 1.59255 16.0 81. 1.56314 16.0 82. 1.52154 16.0 83. 1.46851 16.0 84. 1.39197 16.0 85. 1.28654 16.0 86. 1.13916 16.0 87. 0.94131 16.0 88. 0.67993 16.0 89. 0.35715 17.0 0. 1.71552 17.0 10. 1.71898 17.0 20. 1.72532 17.0 30. 1.73039 17.0 40. 1.73822 17.0 45. 1.73512 17.0 50. 1.73169 17.0 60. 1.71422 17.0 70. 1.68332 17.0 75. 1.65933 17.0 80. 1.59793 17.0 81. 1.56994 17.0 82. 1.53415 17.0 83. 1.48162 17.0 84. 1.40862 17.0 85. 1.30593 17.0 86. 1.16385 17.0 87. 0.96776 17.0 88. 0.70213 17.0 89. 0.37090 18.0 0. 1.71335 18.0 10. 1.71156 18.0 20. 1.72057 18.0 30. 1.72636 18.0 40. 1.73232 18.0 45. 1.73336 18.0 50. 1.72826 18.0 60. 1.71342 18.0 70. 1.68024 18.0 75. 1.65758 18.0 80. 1.60301 18.0 81. 1.57674 18.0 82. 1.54376 18.0 83. 1.49510 18.0 84. 1.42629 18.0 85. 1.32766 18.0 86. 1.18770 18.0 87. 0.99168 18.0 88. 0.72452 18.0 89. 0.38459 19.0 0. 1.70727 19.0 10. 1.71275 19.0 20. 1.71820 19.0 30. 1.72447 19.0 40. 1.72821 19.0 45. 1.72896 19.0 50. 1.72584 19.0 60. 1.70747 19.0 70. 1.67820 19.0 75. 1.65325 19.0 80. 1.60354 19.0 81. 1.58226 19.0 82. 1.55039 19.0 83. 1.50556 19.0 84. 1.44088 19.0 85. 1.34494 19.0 86. 1.20958 19.0 87. 1.01459 19.0 88. 0.74527 19.0 89. 0.39692 20.0 0. 1.70305 20.0 10. 1.71004 20.0 20. 1.71530 20.0 30. 1.72140 20.0 40. 1.72826 20.0 45. 1.72636 20.0 50. 1.72352 20.0 60. 1.70560 20.0 70. 1.67627 20.0 75. 1.65498 20.0 80. 1.60807 20.0 81. 1.58725 20.0 82. 1.55730 20.0 83. 1.51626 20.0 84. 1.45414 20.0 85. 1.36205 20.0 86. 1.22904 20.0 87. 1.02106 20.0 88. 0.76557 20.0 89. 0.41000 25.0 0. 1.69103 25.0 10. 1.69397 25.0 20. 1.70169 25.0 30. 1.70873 25.0 40. 1.71383 25.0 45. 1.71445 25.0 50. 1.71016 25.0 60. 1.69229 25.0 70. 1.66074 25.0 75. 1.64371 25.0 80. 1.61479 25.0 81. 1.59943 25.0 82. 1.58155 25.0 83. 1.54940 25.0 84. 1.50160 25.0 85. 1.42937 25.0 86. 1.31184 25.0 87. 1.13044 25.0 88. 0.85657 25.0 89. 0.47049 30.0 0. 1.68366 30.0 10. 1.68654 30.0 20. 1.69399 30.0 30. 1.70206 30.0 40. 1.70615 30.0 45. 1.70601 30.0 50. 1.70132 30.0 60. 1.68503 30.0 70. 1.65274 30.0 75. 1.63570 30.0 80. 1.61258 30.0 81. 1.60505 30.0 82. 1.59188 30.0 83. 1.56747 30.0 84. 1.53343 30.0 85. 1.47134 30.0 86. 1.37223 30.0 87. 1.20333 30.0 88. 0.93505 30.0 89. 0.52670 ____________________________________________________