Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Mn 25 L3M23V 0.587 0.641 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 1.0 0. 1.47248 1.0 10. 1.46663 1.0 20. 1.45157 1.0 30. 1.41952 1.0 40. 1.36120 1.0 45. 1.32070 1.0 50. 1.26468 1.0 60. 1.10619 1.0 70. 0.85191 1.0 75. 0.67817 1.0 80. 0.46851 1.0 81. 0.42352 1.0 82. 0.37691 1.0 83. 0.32881 1.0 84. 0.28081 1.0 85. 0.23273 1.0 86. 0.18534 1.0 87. 0.13859 1.0 88. 0.09421 1.0 89. 0.05365 1.2 0. 1.59080 1.2 10. 1.59809 1.2 20. 1.59668 1.2 30. 1.58042 1.2 40. 1.53555 1.2 45. 1.49829 1.2 50. 1.44522 1.2 60. 1.28620 1.2 70. 1.00017 1.2 75. 0.80776 1.2 80. 0.56124 1.2 81. 0.50729 1.2 82. 0.45139 1.2 83. 0.39428 1.2 84. 0.32702 1.2 85. 0.27821 1.2 86. 0.22068 1.2 87. 0.16449 1.2 88. 0.11031 1.2 89. 0.06139 1.6 0. 1.70996 1.6 10. 1.73140 1.6 20. 1.74241 1.6 30. 1.74156 1.6 40. 1.71510 1.6 45. 1.68991 1.6 50. 1.64936 1.6 60. 1.50106 1.6 70. 1.21228 1.6 75. 0.98448 1.6 80. 0.69634 1.6 81. 0.63095 1.6 82. 0.56220 1.6 83. 0.49235 1.6 84. 0.41818 1.6 85. 0.34763 1.6 86. 0.27444 1.6 87. 0.19794 1.6 88. 0.13501 1.6 89. 0.07235 2.0 0. 1.75788 2.0 10. 1.77087 2.0 20. 1.79744 2.0 30. 1.80593 2.0 40. 1.79425 2.0 45. 1.77499 2.0 50. 1.74261 2.0 60. 1.61520 2.0 70. 1.34003 2.0 75. 1.10943 2.0 80. 0.79616 2.0 81. 0.72269 2.0 82. 0.64581 2.0 83. 0.56703 2.0 84. 0.48559 2.0 85. 0.40185 2.0 86. 0.31798 2.0 87. 0.23484 2.0 88. 0.15494 2.0 89. 0.08114 2.5 0. 1.78080 2.5 10. 1.80453 2.5 20. 1.82765 2.5 30. 1.83583 2.5 40. 1.83565 2.5 45. 1.82149 2.5 50. 1.79872 2.5 60. 1.69385 2.5 70. 1.44419 2.5 75. 1.21957 2.5 80. 0.89351 2.5 81. 0.81570 2.5 82. 0.72347 2.5 83. 0.64447 2.5 84. 0.55343 2.5 85. 0.45925 2.5 86. 0.36365 2.5 87. 0.26846 2.5 88. 0.17580 2.5 89. 0.09047 3.0 0. 1.78590 3.0 10. 1.80617 3.0 20. 1.83125 3.0 30. 1.84441 3.0 40. 1.84814 3.0 45. 1.83746 3.0 50. 1.81994 3.0 60. 1.73936 3.0 70. 1.51197 3.0 75. 1.29526 3.0 80. 0.97491 3.0 81. 0.89337 3.0 82. 0.80535 3.0 83. 0.71213 3.0 84. 0.61422 3.0 85. 0.51151 3.0 86. 0.40613 3.0 87. 0.29907 3.0 88. 0.19566 3.0 89. 0.09899 3.5 0. 1.78484 3.5 10. 1.80596 3.5 20. 1.82760 3.5 30. 1.84317 3.5 40. 1.85219 3.5 45. 1.84642 3.5 50. 1.83311 3.5 60. 1.76483 3.5 70. 1.56954 3.5 75. 1.36898 3.5 80. 1.04393 3.5 81. 0.95487 3.5 82. 0.86936 3.5 83. 0.77220 3.5 84. 0.66803 3.5 85. 0.55754 3.5 86. 0.44424 3.5 87. 0.32834 3.5 88. 0.20369 3.5 89. 0.10739 3.8 0. 1.78292 3.8 10. 1.80224 3.8 20. 1.82587 3.8 30. 1.83859 3.8 40. 1.84609 3.8 45. 1.84641 3.8 50. 1.83677 3.8 60. 1.77513 3.8 70. 1.58904 3.8 75. 1.40140 3.8 80. 1.08071 3.8 81. 0.99242 3.8 82. 0.90492 3.8 83. 0.80490 3.8 84. 0.69830 3.8 85. 0.58491 3.8 86. 0.46673 3.8 87. 0.34552 3.8 88. 0.22507 3.8 89. 0.11231 4.0 0. 1.78131 4.0 10. 1.80109 4.0 20. 1.82083 4.0 30. 1.83840 4.0 40. 1.84244 4.0 45. 1.84566 4.0 50. 1.83517 4.0 60. 1.78039 4.0 70. 1.60843 4.0 75. 1.42187 4.0 80. 1.10288 4.0 81. 1.01903 4.0 82. 0.92616 4.0 83. 0.82521 4.0 84. 0.71804 4.0 85. 0.60222 4.0 86. 0.48086 4.0 87. 0.35583 4.0 88. 0.23174 4.0 89. 0.11512 4.5 0. 1.77234 4.5 10. 1.79707 4.5 20. 1.81807 4.5 30. 1.83140 4.5 40. 1.84217 4.5 45. 1.84167 4.5 50. 1.83595 4.5 60. 1.78873 4.5 70. 1.63804 4.5 75. 1.46591 4.5 80. 1.15716 4.5 81. 1.07112 4.5 82. 0.97760 4.5 83. 0.87400 4.5 84. 0.76295 4.5 85. 0.64178 4.5 86. 0.51362 4.5 87. 0.38122 4.5 88. 0.24849 4.5 89. 0.12265 5.0 0. 1.76976 5.0 10. 1.78652 5.0 20. 1.80806 5.0 30. 1.82515 5.0 40. 1.83575 5.0 45. 1.83672 5.0 50. 1.82821 5.0 60. 1.79130 5.0 70. 1.66108 5.0 75. 1.50079 5.0 80. 1.20220 5.0 81. 1.11726 5.0 82. 1.01853 5.0 83. 0.92023 5.0 84. 0.80518 5.0 85. 0.67971 5.0 86. 0.54579 5.0 87. 0.40616 5.0 88. 0.26480 5.0 89. 0.13000 5.5 0. 1.76131 5.5 10. 1.78460 5.5 20. 1.80138 5.5 30. 1.81761 5.5 40. 1.82869 5.5 45. 1.83014 5.5 50. 1.82653 5.5 60. 1.79295 5.5 70. 1.67843 5.5 75. 1.53061 5.5 80. 1.24361 5.5 81. 1.15886 5.5 82. 1.06668 5.5 83. 0.96142 5.5 84. 0.84331 5.5 85. 0.71571 5.5 86. 0.57673 5.5 87. 0.43057 5.5 88. 0.28018 5.5 89. 0.13698 6.0 0. 1.76051 6.0 10. 1.77651 6.0 20. 1.79699 6.0 30. 1.81088 6.0 40. 1.82270 6.0 45. 1.82615 6.0 50. 1.82097 6.0 60. 1.79494 6.0 70. 1.68853 6.0 75. 1.55563 6.0 80. 1.28088 6.0 81. 1.19876 6.0 82. 1.10430 6.0 83. 0.99918 6.0 84. 0.88090 6.0 85. 0.74924 6.0 86. 0.60550 6.0 87. 0.45326 6.0 88. 0.29565 6.0 89. 0.14392 6.5 0. 1.75198 6.5 10. 1.77062 6.5 20. 1.78746 6.5 30. 1.80522 6.5 40. 1.81786 6.5 45. 1.81608 6.5 50. 1.81602 6.5 60. 1.79287 6.5 70. 1.69859 6.5 75. 1.57707 6.5 80. 1.31321 6.5 81. 1.23222 6.5 82. 1.14050 6.5 83. 1.03469 6.5 84. 0.91622 6.5 85. 0.77769 6.5 86. 0.63378 6.5 87. 0.47562 6.5 88. 0.31081 6.5 89. 0.15121 7.0 0. 1.75195 7.0 10. 1.76496 7.0 20. 1.78182 7.0 30. 1.80400 7.0 40. 1.81252 7.0 45. 1.81538 7.0 50. 1.80874 7.0 60. 1.78903 7.0 70. 1.70821 7.0 75. 1.59345 7.0 80. 1.33685 7.0 81. 1.26430 7.0 82. 1.17422 7.0 83. 1.06865 7.0 84. 0.93698 7.0 85. 0.81273 7.0 86. 0.66098 7.0 87. 0.49664 7.0 88. 0.32539 7.0 89. 0.15790 7.5 0. 1.74963 7.5 10. 1.76030 7.5 20. 1.77894 7.5 30. 1.79419 7.5 40. 1.80978 7.5 45. 1.80713 7.5 50. 1.80683 7.5 60. 1.78655 7.5 70. 1.71182 7.5 75. 1.60849 7.5 80. 1.37004 7.5 81. 1.29329 7.5 82. 1.20299 7.5 83. 1.10022 7.5 84. 0.97939 7.5 85. 0.84022 7.5 86. 0.68659 7.5 87. 0.51833 7.5 88. 0.34023 7.5 89. 0.16479 8.0 0. 1.74369 8.0 10. 1.75842 8.0 20. 1.77513 8.0 30. 1.78832 8.0 40. 1.80264 8.0 45. 1.80280 8.0 50. 1.79956 8.0 60. 1.78304 8.0 70. 1.71972 8.0 75. 1.61868 8.0 80. 1.39397 8.0 81. 1.31972 8.0 82. 1.23202 8.0 83. 1.12805 8.0 84. 1.00793 8.0 85. 0.86889 8.0 86. 0.71329 8.0 87. 0.53849 8.0 88. 0.35413 8.0 89. 0.17154 8.5 0. 1.74032 8.5 10. 1.75180 8.5 20. 1.77456 8.5 30. 1.78509 8.5 40. 1.79625 8.5 45. 1.79908 8.5 50. 1.79469 8.5 60. 1.78196 8.5 70. 1.71824 8.5 75. 1.63121 8.5 80. 1.41345 8.5 81. 1.34336 8.5 82. 1.25791 8.5 83. 1.15490 8.5 84. 1.03574 8.5 85. 0.89596 8.5 86. 0.73668 8.5 87. 0.55909 8.5 88. 0.36794 8.5 89. 0.17846 9.0 0. 1.73390 9.0 10. 1.74971 9.0 20. 1.76628 9.0 30. 1.77827 9.0 40. 1.79103 9.0 45. 1.79202 9.0 50. 1.79205 9.0 60. 1.77673 9.0 70. 1.71971 9.0 75. 1.63993 9.0 80. 1.43371 9.0 81. 1.36514 9.0 82. 1.28232 9.0 83. 1.18016 9.0 84. 1.06086 9.0 85. 0.92133 9.0 86. 0.76038 9.0 87. 0.57923 9.0 88. 0.38194 9.0 89. 0.18475 9.5 0. 1.73327 9.5 10. 1.74747 9.5 20. 1.76126 9.5 30. 1.77708 9.5 40. 1.78449 9.5 45. 1.79043 9.5 50. 1.78826 9.5 60. 1.77278 9.5 70. 1.71920 9.5 75. 1.64795 9.5 80. 1.45389 9.5 81. 1.38587 9.5 82. 1.30442 9.5 83. 1.20556 9.5 84. 1.08545 9.5 85. 0.94548 9.5 86. 0.78256 9.5 87. 0.59774 9.5 88. 0.39555 9.5 89. 0.19094 10.0 0. 1.72841 10.0 10. 1.74501 10.0 20. 1.75803 10.0 30. 1.77221 10.0 40. 1.78249 10.0 45. 1.78584 10.0 50. 1.78229 10.0 60. 1.76776 10.0 70. 1.72205 10.0 75. 1.65155 10.0 80. 1.46792 10.0 81. 1.40401 10.0 82. 1.32538 10.0 83. 1.22702 10.0 84. 1.10960 10.0 85. 0.96808 10.0 86. 0.80431 10.0 87. 0.61601 10.0 88. 0.40832 10.0 89. 0.19713 11.0 0. 1.72445 11.0 10. 1.73539 11.0 20. 1.75040 11.0 30. 1.76923 11.0 40. 1.77635 11.0 45. 1.77747 11.0 50. 1.77723 11.0 60. 1.76337 11.0 70. 1.72012 11.0 75. 1.66209 11.0 80. 1.49763 11.0 81. 1.43770 11.0 82. 1.36245 11.0 83. 1.26695 11.0 84. 1.15207 11.0 85. 1.01240 11.0 86. 0.84429 11.0 87. 0.64930 11.0 88. 0.43353 11.0 89. 0.20939 12.0 0. 1.72258 12.0 10. 1.73085 12.0 20. 1.74638 12.0 30. 1.76058 12.0 40. 1.76928 12.0 45. 1.77042 12.0 50. 1.76759 12.0 60. 1.75698 12.0 70. 1.71973 12.0 75. 1.66723 12.0 80. 1.52271 12.0 81. 1.46356 12.0 82. 1.38792 12.0 83. 1.30276 12.0 84. 1.18984 12.0 85. 1.05143 12.0 86. 0.88295 12.0 87. 0.68284 12.0 88. 0.45839 12.0 89. 0.22155 13.0 0. 1.71595 13.0 10. 1.72636 13.0 20. 1.73888 13.0 30. 1.75533 13.0 40. 1.76577 13.0 45. 1.76635 13.0 50. 1.76486 13.0 60. 1.74858 13.0 70. 1.71811 13.0 75. 1.67252 13.0 80. 1.54217 13.0 81. 1.48767 13.0 82. 1.42111 13.0 83. 1.33473 13.0 84. 1.22408 13.0 85. 1.08817 13.0 86. 0.91814 13.0 87. 0.71448 13.0 88. 0.48080 13.0 89. 0.23331 14.0 0. 1.71561 14.0 10. 1.72469 14.0 20. 1.73627 14.0 30. 1.75012 14.0 40. 1.76216 14.0 45. 1.75836 14.0 50. 1.76120 14.0 60. 1.74460 14.0 70. 1.71226 14.0 75. 1.67736 14.0 80. 1.55782 14.0 81. 1.50912 14.0 82. 1.44494 14.0 83. 1.36143 14.0 84. 1.25712 14.0 85. 1.12081 14.0 86. 0.95146 14.0 87. 0.74517 14.0 88. 0.50323 14.0 89. 0.23594 15.0 0. 1.70944 15.0 10. 1.71785 15.0 20. 1.72962 15.0 30. 1.74451 15.0 40. 1.75611 15.0 45. 1.75541 15.0 50. 1.75107 15.0 60. 1.73939 15.0 70. 1.70946 15.0 75. 1.67684 15.0 80. 1.56966 15.0 81. 1.52441 15.0 82. 1.46576 15.0 83. 1.38870 15.0 84. 1.28439 15.0 85. 1.15243 15.0 86. 0.98305 15.0 87. 0.77464 15.0 88. 0.52528 15.0 89. 0.25607 16.0 0. 1.70793 16.0 10. 1.71874 16.0 20. 1.72527 16.0 30. 1.73997 16.0 40. 1.74981 16.0 45. 1.75163 16.0 50. 1.74832 16.0 60. 1.73270 16.0 70. 1.70446 16.0 75. 1.67649 16.0 80. 1.58282 16.0 81. 1.54089 16.0 82. 1.48426 16.0 83. 1.41159 16.0 84. 1.31234 16.0 85. 1.18233 16.0 86. 1.01229 16.0 87. 0.80050 16.0 88. 0.54652 16.0 89. 0.26717 17.0 0. 1.70505 17.0 10. 1.71484 17.0 20. 1.72677 17.0 30. 1.73640 17.0 40. 1.74746 17.0 45. 1.74549 17.0 50. 1.74316 17.0 60. 1.72882 17.0 70. 1.70238 17.0 75. 1.67641 17.0 80. 1.59178 17.0 81. 1.55210 17.0 82. 1.50157 17.0 83. 1.43005 17.0 84. 1.33442 17.0 85. 1.20638 17.0 86. 1.03987 17.0 87. 0.82766 17.0 88. 0.56714 17.0 89. 0.27822 18.0 0. 1.70322 18.0 10. 1.70769 18.0 20. 1.72193 18.0 30. 1.73199 18.0 40. 1.74097 18.0 45. 1.74316 18.0 50. 1.73918 18.0 60. 1.72755 18.0 70. 1.69921 18.0 75. 1.67509 18.0 80. 1.60018 18.0 81. 1.56362 18.0 82. 1.51591 18.0 83. 1.44902 18.0 84. 1.35748 18.0 85. 1.23274 18.0 86. 1.06687 18.0 87. 0.85275 18.0 88. 0.58794 18.0 89. 0.28931 19.0 0. 1.69797 19.0 10. 1.70901 19.0 20. 1.71951 19.0 30. 1.72986 19.0 40. 1.73674 19.0 45. 1.73822 19.0 50. 1.73607 19.0 60. 1.72088 19.0 70. 1.69656 19.0 75. 1.67168 19.0 80. 1.60344 19.0 81. 1.57206 19.0 82. 1.52676 19.0 83. 1.46460 19.0 84. 1.37717 19.0 85. 1.25499 19.0 86. 1.09240 19.0 87. 0.87669 19.0 88. 0.60733 19.0 89. 0.29936 20.0 0. 1.69400 20.0 10. 1.70633 20.0 20. 1.71655 20.0 30. 1.72659 20.0 40. 1.73640 20.0 45. 1.73529 20.0 50. 1.73337 20.0 60. 1.71853 20.0 70. 1.69425 20.0 75. 1.67353 20.0 80. 1.61070 20.0 81. 1.58080 20.0 82. 1.53768 20.0 83. 1.47960 20.0 84. 1.39520 20.0 85. 1.27640 20.0 86. 1.11539 20.0 87. 0.88923 20.0 88. 0.62676 20.0 89. 0.31007 25.0 0. 1.68381 25.0 10. 1.69099 25.0 20. 1.70269 25.0 30. 1.71293 25.0 40. 1.72054 25.0 45. 1.72178 25.0 50. 1.71821 25.0 60. 1.70279 25.0 70. 1.67631 25.0 75. 1.66227 25.0 80. 1.62565 25.0 81. 1.60394 25.0 82. 1.57690 25.0 83. 1.53038 25.0 84. 1.46327 25.0 85. 1.36434 25.0 86. 1.21532 25.0 87. 1.00292 25.0 88. 0.71525 25.0 89. 0.36045 30.0 0. 1.67707 30.0 10. 1.68406 30.0 20. 1.69493 30.0 30. 1.70556 30.0 40. 1.71184 30.0 45. 1.71231 30.0 50. 1.70807 30.0 60. 1.69417 30.0 70. 1.66670 30.0 75. 1.65297 30.0 80. 1.62764 30.0 81. 1.61602 30.0 82. 1.59631 30.0 83. 1.56009 30.0 84. 1.50997 30.0 85. 1.42331 30.0 86. 1.29165 30.0 87. 1.08716 30.0 88. 0.79439 30.0 89. 0.40834 ____________________________________________________