Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Li 3 LVV 0.053 0.055 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 0.1 0. 0.71787 0.1 10. 1.04231 0.1 20. 1.03685 0.1 30. 1.02684 0.1 40. 1.00692 0.1 45. 0.99192 0.1 50. 0.97305 0.1 60. 0.91479 0.1 70. 0.80674 0.1 75. 0.71156 0.1 80. 0.57277 0.1 81. 0.53739 0.1 82. 0.49684 0.1 83. 0.45407 0.1 84. 0.40661 0.1 85. 0.35472 0.1 86. 0.29884 0.1 87. 0.23867 0.1 88. 0.17553 0.1 89. 0.11236 0.2 0. 1.17747 0.2 10. 1.18018 0.2 20. 1.18788 0.2 30. 1.20097 0.2 40. 1.21602 0.2 45. 1.22583 0.2 50. 1.23379 0.2 60. 1.24154 0.2 70. 1.20580 0.2 75. 1.13204 0.2 80. 0.97334 0.2 81. 0.92463 0.2 82. 0.86894 0.2 83. 0.80322 0.2 84. 0.72695 0.2 85. 0.64131 0.2 86. 0.54262 0.2 87. 0.43204 0.2 88. 0.31001 0.2 89. 0.18125 0.3 0. 1.18539 0.3 10. 1.18801 0.3 20. 1.19975 0.3 30. 1.21972 0.3 40. 1.24790 0.3 45. 1.26805 0.3 50. 1.28654 0.3 60. 1.33163 0.3 70. 1.35487 0.3 75. 1.32090 0.3 80. 1.19105 0.3 81. 1.14499 0.3 82. 1.08806 0.3 83. 0.98562 0.3 84. 0.93622 0.3 85. 0.83642 0.3 86. 0.71703 0.3 87. 0.56274 0.3 88. 0.41552 0.3 89. 0.23529 0.4 0. 1.17529 0.4 10. 1.17952 0.4 20. 1.18981 0.4 30. 1.21466 0.4 40. 1.24741 0.4 45. 1.26964 0.4 50. 1.29735 0.4 60. 1.35912 0.4 70. 1.41880 0.4 75. 1.41367 0.4 80. 1.32006 0.4 81. 1.27962 0.4 82. 1.22935 0.4 83. 1.16438 0.4 84. 1.08218 0.4 85. 0.97848 0.4 86. 0.85133 0.4 87. 0.69411 0.4 88. 0.50417 0.4 89. 0.28325 0.6 0. 1.15736 0.6 10. 1.16332 0.6 20. 1.17524 0.6 30. 1.19836 0.6 40. 1.23339 0.6 45. 1.25636 0.6 50. 1.28632 0.6 60. 1.36556 0.6 70. 1.46058 0.6 75. 1.49234 0.6 80. 1.44869 0.6 81. 1.42782 0.6 82. 1.38894 0.6 83. 1.33654 0.6 84. 1.26435 0.6 85. 1.17003 0.6 86. 1.04233 0.6 87. 0.87334 0.6 88. 0.65034 0.6 89. 0.36619 0.8 0. 1.14674 0.8 10. 1.15118 0.8 20. 1.16406 0.8 30. 1.18617 0.8 40. 1.22188 0.8 45. 1.24722 0.8 50. 1.27743 0.8 60. 1.35979 0.8 70. 1.46748 0.8 75. 1.51667 0.8 80. 1.51409 0.8 81. 1.49778 0.8 82. 1.47079 0.8 83. 1.42971 0.8 84. 1.37139 0.8 85. 1.28780 0.8 86. 1.16977 0.8 87. 1.00361 0.8 88. 0.76702 0.8 89. 0.44355 1.0 0. 1.14041 1.0 10. 1.14250 1.0 20. 1.15378 1.0 30. 1.17730 1.0 40. 1.21379 1.0 45. 1.23645 1.0 50. 1.26652 1.0 60. 1.35064 1.0 70. 1.46894 1.0 75. 1.52492 1.0 80. 1.54386 1.0 81. 1.53304 1.0 82. 1.51700 1.0 83. 1.48387 1.0 84. 1.43614 1.0 85. 1.36736 1.0 86. 1.26004 1.0 87. 1.10131 1.0 88. 0.86301 1.0 89. 0.51067 1.5 0. 1.12834 1.5 10. 1.13352 1.5 20. 1.14513 1.5 30. 1.16376 1.5 40. 1.19746 1.5 45. 1.22301 1.5 50. 1.25178 1.5 60. 1.33706 1.5 70. 1.45714 1.5 75. 1.52339 1.5 80. 1.56501 1.5 81. 1.56607 1.5 82. 1.56057 1.5 83. 1.54519 1.5 84. 1.51614 1.5 85. 1.47153 1.5 86. 1.39258 1.5 87. 1.26321 1.5 88. 1.04002 1.5 89. 0.65284 2.0 0. 1.12146 2.0 10. 1.12576 2.0 20. 1.13759 2.0 30. 1.15712 2.0 40. 1.18765 2.0 45. 1.21298 2.0 50. 1.24300 2.0 60. 1.32751 2.0 70. 1.44622 2.0 75. 1.51694 2.0 80. 1.56867 2.0 81. 1.57087 2.0 82. 1.57232 2.0 83. 1.56582 2.0 84. 1.55052 2.0 85. 1.51852 2.0 86. 1.46053 2.0 87. 1.35438 2.0 88. 1.15741 2.0 89. 0.76586 2.5 0. 1.11854 2.5 10. 1.12077 2.5 20. 1.13178 2.5 30. 1.15081 2.5 40. 1.18281 2.5 45. 1.20498 2.5 50. 1.23706 2.5 60. 1.32012 2.5 70. 1.44068 2.5 75. 1.50798 2.5 80. 1.56145 2.5 81. 1.57000 2.5 82. 1.57515 2.5 83. 1.57310 2.5 84. 1.56439 2.5 85. 1.54339 2.5 86. 1.49732 2.5 87. 1.41290 2.5 88. 1.23931 2.5 89. 0.85772 3.0 0. 1.11544 3.0 10. 1.11588 3.0 20. 1.12767 3.0 30. 1.14579 3.0 40. 1.17759 3.0 45. 1.19971 3.0 50. 1.23011 3.0 60. 1.31571 3.0 70. 1.43632 3.0 75. 1.50373 3.0 80. 1.55960 3.0 81. 1.56616 3.0 82. 1.57274 3.0 83. 1.57512 3.0 84. 1.56966 3.0 85. 1.55420 3.0 86. 1.51993 3.0 87. 1.44922 3.0 88. 1.29821 3.0 89. 0.93490 3.5 0. 1.11250 3.5 10. 1.11508 3.5 20. 1.12395 3.5 30. 1.14142 3.5 40. 1.17446 3.5 45. 1.19738 3.5 50. 1.22695 3.5 60. 1.31112 3.5 70. 1.43103 3.5 75. 1.49820 3.5 80. 1.55543 3.5 81. 1.56359 3.5 82. 1.56940 3.5 83. 1.57136 3.5 84. 1.56991 3.5 85. 1.55908 3.5 86. 1.53272 3.5 87. 1.47494 3.5 88. 1.34186 3.5 89. 0.99855 4.0 0. 1.10762 4.0 10. 1.11286 4.0 20. 1.12193 4.0 30. 1.14018 4.0 40. 1.17024 4.0 45. 1.19396 4.0 50. 1.22214 4.0 60. 1.30770 4.0 70. 1.42900 4.0 75. 1.49347 4.0 80. 1.55274 4.0 81. 1.55867 4.0 82. 1.56447 4.0 83. 1.56889 4.0 84. 1.57242 4.0 85. 1.56361 4.0 86. 1.54197 4.0 87. 1.49172 4.0 88. 1.37526 4.0 89. 1.05089 4.5 0. 1.10951 4.5 10. 1.11131 4.5 20. 1.11793 4.5 30. 1.13635 4.5 40. 1.16682 4.5 45. 1.18762 4.5 50. 1.21917 4.5 60. 1.30527 4.5 70. 1.42534 4.5 75. 1.48851 4.5 80. 1.54801 4.5 81. 1.55485 4.5 82. 1.56344 4.5 83. 1.56850 4.5 84. 1.57098 4.5 85. 1.56431 4.5 86. 1.54911 4.5 87. 1.50479 4.5 88. 1.39972 4.5 89. 1.09609 5.0 0. 1.10420 5.0 10. 1.10676 5.0 20. 1.11646 5.0 30. 1.13372 5.0 40. 1.16564 5.0 45. 1.18728 5.0 50. 1.21644 5.0 60. 1.30024 5.0 70. 1.42261 5.0 75. 1.48744 5.0 80. 1.54249 5.0 81. 1.55026 5.0 82. 1.56095 5.0 83. 1.56577 5.0 84. 1.56685 5.0 85. 1.56538 5.0 86. 1.55214 5.0 87. 1.51428 5.0 88. 1.42046 5.0 89. 1.13444 5.5 0. 1.10091 5.5 10. 1.10500 5.5 20. 1.11555 5.5 30. 1.13182 5.5 40. 1.16278 5.5 45. 1.18407 5.5 50. 1.21293 5.5 60. 1.29833 5.5 70. 1.42080 5.5 75. 1.48232 5.5 80. 1.54033 5.5 81. 1.54934 5.5 82. 1.55897 5.5 83. 1.56432 5.5 84. 1.56346 5.5 85. 1.56354 5.5 86. 1.55226 5.5 87. 1.52128 5.5 88. 1.43504 5.5 89. 1.17028 6.0 0. 1.10172 6.0 10. 1.10539 6.0 20. 1.11194 6.0 30. 1.12794 6.0 40. 1.15929 6.0 45. 1.18161 6.0 50. 1.21090 6.0 60. 1.29784 6.0 70. 1.41852 6.0 75. 1.48173 6.0 80. 1.53757 6.0 81. 1.54733 6.0 82. 1.55544 6.0 83. 1.55948 6.0 84. 1.56435 6.0 85. 1.56337 6.0 86. 1.55440 6.0 87. 1.52315 6.0 88. 1.44918 6.0 89. 1.19744 6.5 0. 1.10014 6.5 10. 1.10284 6.5 20. 1.11163 6.5 30. 1.12692 6.5 40. 1.15701 6.5 45. 1.18026 6.5 50. 1.20870 6.5 60. 1.29517 6.5 70. 1.41632 6.5 75. 1.47803 6.5 80. 1.53436 6.5 81. 1.54399 6.5 82. 1.55374 6.5 83. 1.55924 6.5 84. 1.56292 6.5 85. 1.56162 6.5 86. 1.55265 6.5 87. 1.52904 6.5 88. 1.45933 6.5 89. 1.22490 7.0 0. 1.09767 7.0 10. 1.09998 7.0 20. 1.11072 7.0 30. 1.12769 7.0 40. 1.15398 7.0 45. 1.17948 7.0 50. 1.20839 7.0 60. 1.29147 7.0 70. 1.41214 7.0 75. 1.47808 7.0 80. 1.53354 7.0 81. 1.54099 7.0 82. 1.54967 7.0 83. 1.55638 7.0 84. 1.56155 7.0 85. 1.56102 7.0 86. 1.55429 7.0 87. 1.53242 7.0 88. 1.47047 7.0 89. 1.24684 7.5 0. 1.09536 7.5 10. 1.10032 7.5 20. 1.10688 7.5 30. 1.12367 7.5 40. 1.15467 7.5 45. 1.17526 7.5 50. 1.20798 7.5 60. 1.29338 7.5 70. 1.40964 7.5 75. 1.47557 7.5 80. 1.53096 7.5 81. 1.53669 7.5 82. 1.54574 7.5 83. 1.55371 7.5 84. 1.55817 7.5 85. 1.55779 7.5 86. 1.55315 7.5 87. 1.53274 7.5 88. 1.47528 7.5 89. 1.26664 8.0 0. 1.09553 8.0 10. 1.09842 8.0 20. 1.10687 8.0 30. 1.12459 8.0 40. 1.15289 8.0 45. 1.17697 8.0 50. 1.20532 8.0 60. 1.28883 8.0 70. 1.40905 8.0 75. 1.47360 8.0 80. 1.52840 8.0 81. 1.53867 8.0 82. 1.54551 8.0 83. 1.55105 8.0 84. 1.55524 8.0 85. 1.55756 8.0 86. 1.55110 8.0 87. 1.53436 8.0 88. 1.48205 8.0 89. 1.28507 8.5 0. 1.09252 8.5 10. 1.09515 8.5 20. 1.10451 8.5 30. 1.12209 8.5 40. 1.15035 8.5 45. 1.17328 8.5 50. 1.20180 8.5 60. 1.28818 8.5 70. 1.40886 8.5 75. 1.47218 8.5 80. 1.52686 8.5 81. 1.53669 8.5 82. 1.54231 8.5 83. 1.55268 8.5 84. 1.55520 8.5 85. 1.55572 8.5 86. 1.55161 8.5 87. 1.53564 8.5 88. 1.48614 8.5 89. 1.29865 9.0 0. 1.09364 9.0 10. 1.09500 9.0 20. 1.10218 9.0 30. 1.11875 9.0 40. 1.15008 9.0 45. 1.17303 9.0 50. 1.20223 9.0 60. 1.28740 9.0 70. 1.40626 9.0 75. 1.47065 9.0 80. 1.52580 9.0 81. 1.53393 9.0 82. 1.54058 9.0 83. 1.55010 9.0 84. 1.55113 9.0 85. 1.55403 9.0 86. 1.55142 9.0 87. 1.53605 9.0 88. 1.49024 9.0 89. 1.31332 9.5 0. 1.09102 9.5 10. 1.09479 9.5 20. 1.10236 9.5 30. 1.11715 9.5 40. 1.14741 9.5 45. 1.17022 9.5 50. 1.20084 9.5 60. 1.28594 9.5 70. 1.40566 9.5 75. 1.46894 9.5 80. 1.52299 9.5 81. 1.53228 9.5 82. 1.53904 9.5 83. 1.54673 9.5 84. 1.54920 9.5 85. 1.55187 9.5 86. 1.55069 9.5 87. 1.53707 9.5 88. 1.49274 9.5 89. 1.32421 10.0 0. 1.08923 10.0 10. 1.09177 10.0 20. 1.10125 10.0 30. 1.11714 10.0 40. 1.14763 10.0 45. 1.16923 10.0 50. 1.19751 10.0 60. 1.28588 10.0 70. 1.40154 10.0 75. 1.46643 10.0 80. 1.52061 10.0 81. 1.53266 10.0 82. 1.53771 10.0 83. 1.54348 10.0 84. 1.54904 10.0 85. 1.55420 10.0 86. 1.55160 10.0 87. 1.53812 10.0 88. 1.49584 10.0 89. 1.33541 11.0 0. 1.08913 11.0 10. 1.09288 11.0 20. 1.10018 11.0 30. 1.11570 11.0 40. 1.14640 11.0 45. 1.16608 11.0 50. 1.19531 11.0 60. 1.28254 11.0 70. 1.40075 11.0 75. 1.46441 11.0 80. 1.52022 11.0 81. 1.52896 11.0 82. 1.53580 11.0 83. 1.54203 11.0 84. 1.54561 11.0 85. 1.54932 11.0 86. 1.54715 11.0 87. 1.53724 11.0 88. 1.50047 11.0 89. 1.35387 12.0 0. 1.08528 12.0 10. 1.08787 12.0 20. 1.09918 12.0 30. 1.11464 12.0 40. 1.14198 12.0 45. 1.16471 12.0 50. 1.19323 12.0 60. 1.28013 12.0 70. 1.40082 12.0 75. 1.46327 12.0 80. 1.51803 12.0 81. 1.52652 12.0 82. 1.53417 12.0 83. 1.54010 12.0 84. 1.54451 12.0 85. 1.54774 12.0 86. 1.54501 12.0 87. 1.53797 12.0 88. 1.50310 12.0 89. 1.37152 13.0 0. 1.08478 13.0 10. 1.08509 13.0 20. 1.09433 13.0 30. 1.11067 13.0 40. 1.14267 13.0 45. 1.16292 13.0 50. 1.19338 13.0 60. 1.27992 13.0 70. 1.40097 13.0 75. 1.45819 13.0 80. 1.51239 13.0 81. 1.52339 13.0 82. 1.53191 13.0 83. 1.53626 13.0 84. 1.54175 13.0 85. 1.54513 13.0 86. 1.54467 13.0 87. 1.53667 13.0 88. 1.50564 13.0 89. 1.38387 14.0 0. 1.08535 14.0 10. 1.08674 14.0 20. 1.09432 14.0 30. 1.11009 14.0 40. 1.13782 14.0 45. 1.16194 14.0 50. 1.18912 14.0 60. 1.27907 14.0 70. 1.39434 14.0 75. 1.45749 14.0 80. 1.51178 14.0 81. 1.52193 14.0 82. 1.52773 14.0 83. 1.53416 14.0 84. 1.54001 14.0 85. 1.54222 14.0 86. 1.54275 14.0 87. 1.53538 14.0 88. 1.50730 14.0 89. 1.39356 15.0 0. 1.08053 15.0 10. 1.08329 15.0 20. 1.09076 15.0 30. 1.10850 15.0 40. 1.13914 15.0 45. 1.15939 15.0 50. 1.19134 15.0 60. 1.27601 15.0 70. 1.39269 15.0 75. 1.45881 15.0 80. 1.51064 15.0 81. 1.51875 15.0 82. 1.52721 15.0 83. 1.53492 15.0 84. 1.53649 15.0 85. 1.54230 15.0 86. 1.54232 15.0 87. 1.53618 15.0 88. 1.50915 15.0 89. 1.40214 16.0 0. 1.07953 16.0 10. 1.08195 16.0 20. 1.09099 16.0 30. 1.10885 16.0 40. 1.13639 16.0 45. 1.16029 16.0 50. 1.18743 16.0 60. 1.27451 16.0 70. 1.39273 16.0 75. 1.45433 16.0 80. 1.50953 16.0 81. 1.51791 16.0 82. 1.52338 16.0 83. 1.53136 16.0 84. 1.53711 16.0 85. 1.53987 16.0 86. 1.54033 16.0 87. 1.53620 16.0 88. 1.51076 16.0 89. 1.40940 17.0 0. 1.07755 17.0 10. 1.07998 17.0 20. 1.08899 17.0 30. 1.10419 17.0 40. 1.13357 17.0 45. 1.15696 17.0 50. 1.18728 17.0 60. 1.27359 17.0 70. 1.39060 17.0 75. 1.45608 17.0 80. 1.50684 17.0 81. 1.51704 17.0 82. 1.52521 17.0 83. 1.53020 17.0 84. 1.53628 17.0 85. 1.53845 17.0 86. 1.53687 17.0 87. 1.53664 17.0 88. 1.51078 17.0 89. 1.41725 18.0 0. 1.07796 18.0 10. 1.07927 18.0 20. 1.08798 18.0 30. 1.10661 18.0 40. 1.13484 18.0 45. 1.15976 18.0 50. 1.18615 18.0 60. 1.27194 18.0 70. 1.38821 18.0 75. 1.45314 18.0 80. 1.50627 18.0 81. 1.51456 18.0 82. 1.52142 18.0 83. 1.52904 18.0 84. 1.53313 18.0 85. 1.53541 18.0 86. 1.53753 18.0 87. 1.53373 18.0 88. 1.51030 18.0 89. 1.42147 19.0 0. 1.07672 19.0 10. 1.07722 19.0 20. 1.08728 19.0 30. 1.10206 19.0 40. 1.13191 19.0 45. 1.15478 19.0 50. 1.18379 19.0 60. 1.26972 19.0 70. 1.38778 19.0 75. 1.45033 19.0 80. 1.50456 19.0 81. 1.51162 19.0 82. 1.51859 19.0 83. 1.52700 19.0 84. 1.53067 19.0 85. 1.53422 19.0 86. 1.53790 19.0 87. 1.53276 19.0 88. 1.51190 19.0 89. 1.42544 20.0 0. 1.07538 20.0 10. 1.07750 20.0 20. 1.08659 20.0 30. 1.10014 20.0 40. 1.13006 20.0 45. 1.15661 20.0 50. 1.18270 20.0 60. 1.26778 20.0 70. 1.38597 20.0 75. 1.45110 20.0 80. 1.50289 20.0 81. 1.51334 20.0 82. 1.51942 20.0 83. 1.52586 20.0 84. 1.52971 20.0 85. 1.53416 20.0 86. 1.53589 20.0 87. 1.53223 20.0 88. 1.51413 20.0 89. 1.43066 25.0 0. 1.06952 25.0 10. 1.07362 25.0 20. 1.07948 25.0 30. 1.09785 25.0 40. 1.12509 25.0 45. 1.14973 25.0 50. 1.18067 25.0 60. 1.26336 25.0 70. 1.38337 25.0 75. 1.44450 25.0 80. 1.49729 25.0 81. 1.50621 25.0 82. 1.51544 25.0 83. 1.52117 25.0 84. 1.52414 25.0 85. 1.52862 25.0 86. 1.53109 25.0 87. 1.52931 25.0 88. 1.51146 25.0 89. 1.44351 30.0 0. 1.06345 30.0 10. 1.06482 30.0 20. 1.07483 30.0 30. 1.09362 30.0 40. 1.12007 30.0 45. 1.14395 30.0 50. 1.17547 30.0 60. 1.26195 30.0 70. 1.38095 30.0 75. 1.44156 30.0 80. 1.49337 30.0 81. 1.50274 30.0 82. 1.51043 30.0 83. 1.51664 30.0 84. 1.52255 30.0 85. 1.52411 30.0 86. 1.52493 30.0 87. 1.52598 30.0 88. 1.51045 30.0 89. 1.45015 ____________________________________________________