Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Li 3 LVV 0.053 0.055 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 0.1 0. 0.69780 0.1 10. 1.05150 0.1 20. 1.03409 0.1 30. 1.01146 0.1 40. 0.97840 0.1 45. 0.95697 0.1 50. 0.93044 0.1 60. 0.85176 0.1 70. 0.71842 0.1 75. 0.61178 0.1 80. 0.47133 0.1 81. 0.43759 0.1 82. 0.39992 0.1 83. 0.36120 0.1 84. 0.31928 0.1 85. 0.27478 0.1 86. 0.22815 0.1 87. 0.17950 0.1 88. 0.12991 0.1 89. 0.08194 0.2 0. 1.16733 0.2 10. 1.17652 0.2 20. 1.18941 0.2 30. 1.20552 0.2 40. 1.22025 0.2 45. 1.22824 0.2 50. 1.23293 0.2 60. 1.22738 0.2 70. 1.15890 0.2 75. 1.05841 0.2 80. 0.87014 0.2 81. 0.81688 0.2 82. 0.75767 0.2 83. 0.69034 0.2 84. 0.61495 0.2 85. 0.53309 0.2 86. 0.44231 0.2 87. 0.34494 0.2 88. 0.24182 0.2 89. 0.13803 0.3 0. 1.17251 0.3 10. 1.18292 0.3 20. 1.20161 0.3 30. 1.22698 0.3 40. 1.25825 0.3 45. 1.27870 0.3 50. 1.29686 0.3 60. 1.33794 0.3 70. 1.33954 0.3 75. 1.27937 0.3 80. 1.10999 0.3 81. 1.05517 0.3 82. 0.98960 0.3 83. 0.88642 0.3 84. 0.82535 0.3 85. 0.72326 0.3 86. 0.60657 0.3 87. 0.46433 0.3 88. 0.33322 0.3 89. 0.18288 0.4 0. 1.16318 0.4 10. 1.17471 0.4 20. 1.19153 0.4 30. 1.22155 0.4 40. 1.25787 0.4 45. 1.28126 0.4 50. 1.31011 0.4 60. 1.37209 0.4 70. 1.41994 0.4 75. 1.39446 0.4 80. 1.26109 0.4 81. 1.21006 0.4 82. 1.14865 0.4 83. 1.07268 0.4 84. 0.98046 0.4 85. 0.86925 0.4 86. 0.73878 0.4 87. 0.58603 0.4 88. 0.41208 0.4 89. 0.22292 0.6 0. 1.14724 0.6 10. 1.15944 0.6 20. 1.17666 0.6 30. 1.20402 0.6 40. 1.24227 0.6 45. 1.26649 0.6 50. 1.29799 0.6 60. 1.38041 0.6 70. 1.47437 0.6 75. 1.49570 0.6 80. 1.41869 0.6 81. 1.39018 0.6 82. 1.33883 0.6 83. 1.27314 0.6 84. 1.18622 0.6 85. 1.07718 0.6 86. 0.93680 0.6 87. 0.76181 0.6 88. 0.54588 0.6 89. 0.29282 0.8 0. 1.13819 0.8 10. 1.14787 0.8 20. 1.16524 0.8 30. 1.19089 0.8 40. 1.22935 0.8 45. 1.25577 0.8 50. 1.28729 0.8 60. 1.37349 0.8 70. 1.48413 0.8 75. 1.52890 0.8 80. 1.50501 0.8 81. 1.47988 0.8 82. 1.44225 0.8 83. 1.38837 0.8 84. 1.31457 0.8 85. 1.21321 0.8 86. 1.07693 0.8 87. 0.89590 0.8 88. 0.65717 0.8 89. 0.35985 1.0 0. 1.13266 1.0 10. 1.13959 1.0 20. 1.15484 1.0 30. 1.18143 1.0 40. 1.22030 1.0 45. 1.24390 1.0 50. 1.27500 1.0 60. 1.36273 1.0 70. 1.48541 1.0 75. 1.54035 1.0 80. 1.54536 1.0 81. 1.52749 1.0 82. 1.50256 1.0 83. 1.45798 1.0 84. 1.39579 1.0 85. 1.30887 1.0 86. 1.18058 1.0 87. 1.00141 1.0 88. 0.75200 1.0 89. 0.41891 1.5 0. 1.12196 1.5 10. 1.13111 1.5 20. 1.14598 1.5 30. 1.16700 1.5 40. 1.20258 1.5 45. 1.22887 1.5 50. 1.25839 1.5 60. 1.34642 1.5 70. 1.47119 1.5 75. 1.53960 1.5 80. 1.57744 1.5 81. 1.57512 1.5 82. 1.56474 1.5 83. 1.54188 1.5 84. 1.50212 1.5 85. 1.44190 1.5 86. 1.34203 1.5 87. 1.18582 1.5 88. 0.93595 1.5 89. 0.54854 2.0 0. 1.11589 2.0 10. 1.12361 2.0 20. 1.13832 2.0 30. 1.16001 2.0 40. 1.19213 2.0 45. 1.21789 2.0 50. 1.24869 2.0 60. 1.33542 2.0 70. 1.45838 2.0 75. 1.53171 2.0 80. 1.58321 2.0 81. 1.58429 2.0 82. 1.58345 2.0 83. 1.57203 2.0 84. 1.54964 2.0 85. 1.50602 2.0 86. 1.43027 2.0 87. 1.29738 2.0 88. 1.06605 2.0 89. 0.65651 2.5 0. 1.11357 2.5 10. 1.11885 2.5 20. 1.13244 2.5 30. 1.15338 2.5 40. 1.18679 2.5 45. 1.20947 2.5 50. 1.24202 2.5 60. 1.32680 2.5 70. 1.45122 2.5 75. 1.52139 2.5 80. 1.57661 2.5 81. 1.58481 2.5 82. 1.58837 2.5 83. 1.58379 2.5 84. 1.57005 2.5 85. 1.54066 2.5 86. 1.48037 2.5 87. 1.37130 2.5 88. 1.16126 2.5 89. 0.74777 3.0 0. 1.11071 3.0 10. 1.11403 3.0 20. 1.12831 3.0 30. 1.14827 3.0 40. 1.18127 3.0 45. 1.20369 3.0 50. 1.23454 3.0 60. 1.32200 3.0 70. 1.44555 3.0 75. 1.51559 3.0 80. 1.57399 3.0 81. 1.58061 3.0 82. 1.58681 3.0 83. 1.58753 3.0 84. 1.57889 3.0 85. 1.55780 3.0 86. 1.51173 3.0 87. 1.41985 3.0 88. 1.23233 3.0 89. 0.82711 3.5 0. 1.10797 3.5 10. 1.11341 3.5 20. 1.12455 3.5 30. 1.14381 3.5 40. 1.17777 3.5 45. 1.20109 3.5 50. 1.23114 3.5 60. 1.31681 3.5 70. 1.43956 3.5 75. 1.50904 3.5 80. 1.56893 3.5 81. 1.57759 3.5 82. 1.58317 3.5 83. 1.58461 3.5 84. 1.58132 3.5 85. 1.56631 3.5 86. 1.53058 3.5 87. 1.45470 3.5 88. 1.28672 3.5 89. 0.89451 4.0 0. 1.10344 4.0 10. 1.11119 4.0 20. 1.12252 4.0 30. 1.14234 4.0 40. 1.17360 4.0 45. 1.19745 4.0 50. 1.22605 4.0 60. 1.31294 4.0 70. 1.43687 4.0 75. 1.50361 4.0 80. 1.56534 4.0 81. 1.57202 4.0 82. 1.57806 4.0 83. 1.58217 4.0 84. 1.58481 4.0 85. 1.57250 4.0 86. 1.54389 4.0 87. 1.47828 4.0 88. 1.32945 4.0 89. 0.95162 4.5 0. 1.10539 4.5 10. 1.10977 4.5 20. 1.11847 4.5 30. 1.13848 4.5 40. 1.16979 4.5 45. 1.19100 4.5 50. 1.22289 4.5 60. 1.31042 4.5 70. 1.43247 4.5 75. 1.49768 4.5 80. 1.56006 4.5 81. 1.56780 4.5 82. 1.57660 4.5 83. 1.58175 4.5 84. 1.58367 4.5 85. 1.57469 4.5 86. 1.55387 4.5 87. 1.49622 4.5 88. 1.36189 4.5 89. 1.00225 5.0 0. 1.10038 5.0 10. 1.10533 5.0 20. 1.11704 5.0 30. 1.13562 5.0 40. 1.16842 5.0 45. 1.19057 5.0 50. 1.22003 5.0 60. 1.30491 5.0 70. 1.42947 5.0 75. 1.49595 5.0 80. 1.55313 5.0 81. 1.56243 5.0 82. 1.57341 5.0 83. 1.57827 5.0 84. 1.57951 5.0 85. 1.57665 5.0 86. 1.55873 5.0 87. 1.50976 5.0 88. 1.38913 5.0 89. 1.04577 5.5 0. 1.09723 5.5 10. 1.10356 5.5 20. 1.11606 5.5 30. 1.13384 5.5 40. 1.16565 5.5 45. 1.18717 5.5 50. 1.21636 5.5 60. 1.30299 5.5 70. 1.42735 5.5 75. 1.49062 5.5 80. 1.55100 5.5 81. 1.56058 5.5 82. 1.57088 5.5 83. 1.57681 5.5 84. 1.57607 5.5 85. 1.57488 5.5 86. 1.56032 5.5 87. 1.51974 5.5 88. 1.40934 5.5 89. 1.08699 6.0 0. 1.09797 6.0 10. 1.10400 6.0 20. 1.11244 6.0 30. 1.12984 6.0 40. 1.16175 6.0 45. 1.18456 6.0 50. 1.21423 6.0 60. 1.30244 6.0 70. 1.42470 6.0 75. 1.48960 6.0 80. 1.54783 6.0 81. 1.55837 6.0 82. 1.56692 6.0 83. 1.57154 6.0 84. 1.57678 6.0 85. 1.57540 6.0 86. 1.56354 6.0 87. 1.52452 6.0 88. 1.42823 6.0 89. 1.11983 6.5 0. 1.09658 6.5 10. 1.10147 6.5 20. 1.11211 6.5 30. 1.12877 6.5 40. 1.15951 6.5 45. 1.18309 6.5 50. 1.21186 6.5 60. 1.29937 6.5 70. 1.42236 6.5 75. 1.48522 6.5 80. 1.54412 6.5 81. 1.55431 6.5 82. 1.56475 6.5 83. 1.57085 6.5 84. 1.57519 6.5 85. 1.57333 6.5 86. 1.56267 6.5 87. 1.53222 6.5 88. 1.44265 6.5 89. 1.15224 7.0 0. 1.09424 7.0 10. 1.09875 7.0 20. 1.11120 7.0 30. 1.12939 7.0 40. 1.15648 7.0 45. 1.18227 7.0 50. 1.21147 7.0 60. 1.29571 7.0 70. 1.41775 7.0 75. 1.48508 7.0 80. 1.54290 7.0 81. 1.55092 7.0 82. 1.56013 7.0 83. 1.56746 7.0 84. 1.57363 7.0 85. 1.57247 7.0 86. 1.56463 7.0 87. 1.53686 7.0 88. 1.45698 7.0 89. 1.17910 7.5 0. 1.09199 7.5 10. 1.09910 7.5 20. 1.10737 7.5 30. 1.12555 7.5 40. 1.15715 7.5 45. 1.17800 7.5 50. 1.21087 7.5 60. 1.29722 7.5 70. 1.41513 7.5 75. 1.48236 7.5 80. 1.53988 7.5 81. 1.54610 7.5 82. 1.55608 7.5 83. 1.56448 7.5 84. 1.56965 7.5 85. 1.56945 7.5 86. 1.56351 7.5 87. 1.53840 7.5 88. 1.46496 7.5 89. 1.20343 8.0 0. 1.09238 8.0 10. 1.09728 8.0 20. 1.10733 8.0 30. 1.12632 8.0 40. 1.15533 8.0 45. 1.17961 8.0 50. 1.20816 8.0 60. 1.29272 8.0 70. 1.41440 8.0 75. 1.48004 8.0 80. 1.53703 8.0 81. 1.54750 8.0 82. 1.55526 8.0 83. 1.56145 8.0 84. 1.56631 8.0 85. 1.56911 8.0 86. 1.56179 8.0 87. 1.54019 8.0 88. 1.47390 8.0 89. 1.22615 8.5 0. 1.08931 8.5 10. 1.09396 8.5 20. 1.10495 8.5 30. 1.12374 8.5 40. 1.15286 8.5 45. 1.17601 8.5 50. 1.20457 8.5 60. 1.29195 8.5 70. 1.41413 8.5 75. 1.47861 8.5 80. 1.53510 8.5 81. 1.54556 8.5 82. 1.55187 8.5 83. 1.56286 8.5 84. 1.56584 8.5 85. 1.56704 8.5 86. 1.56261 8.5 87. 1.54320 8.5 88. 1.48047 8.5 89. 1.24387 9.0 0. 1.09041 9.0 10. 1.09379 9.0 20. 1.10262 9.0 30. 1.12039 9.0 40. 1.15238 9.0 45. 1.17551 9.0 50. 1.20520 9.0 60. 1.29101 9.0 70. 1.41142 9.0 75. 1.47664 9.0 80. 1.53359 9.0 81. 1.54232 9.0 82. 1.54964 9.0 83. 1.55982 9.0 84. 1.56170 9.0 85. 1.56501 9.0 86. 1.56264 9.0 87. 1.54400 9.0 88. 1.48630 9.0 89. 1.26236 9.5 0. 1.08786 9.5 10. 1.09362 9.5 20. 1.10279 9.5 30. 1.11875 9.5 40. 1.14959 9.5 45. 1.17273 9.5 50. 1.20354 9.5 60. 1.28927 9.5 70. 1.41047 9.5 75. 1.47495 9.5 80. 1.53088 9.5 81. 1.54066 9.5 82. 1.54780 9.5 83. 1.55622 9.5 84. 1.55964 9.5 85. 1.56270 9.5 86. 1.56146 9.5 87. 1.54561 9.5 88. 1.49038 9.5 89. 1.27690 10.0 0. 1.08593 10.0 10. 1.09061 10.0 20. 1.10169 10.0 30. 1.11875 10.0 40. 1.14982 10.0 45. 1.17155 10.0 50. 1.20024 10.0 60. 1.28933 10.0 70. 1.40625 10.0 75. 1.47203 10.0 80. 1.52804 10.0 81. 1.54041 10.0 82. 1.54632 10.0 83. 1.55274 10.0 84. 1.55891 10.0 85. 1.56483 10.0 86. 1.56269 10.0 87. 1.54712 10.0 88. 1.49489 10.0 89. 1.29155 11.0 0. 1.08653 11.0 10. 1.09180 11.0 20. 1.10058 11.0 30. 1.11726 11.0 40. 1.14860 11.0 45. 1.16830 11.0 50. 1.19787 11.0 60. 1.28613 11.0 70. 1.40524 11.0 75. 1.46981 11.0 80. 1.52704 11.0 81. 1.53640 11.0 82. 1.54385 11.0 83. 1.55079 11.0 84. 1.55537 11.0 85. 1.55949 11.0 86. 1.55797 11.0 87. 1.54666 11.0 88. 1.50183 11.0 89. 1.31568 12.0 0. 1.08226 12.0 10. 1.08681 12.0 20. 1.09955 12.0 30. 1.11606 12.0 40. 1.14401 12.0 45. 1.16688 12.0 50. 1.19571 12.0 60. 1.28343 12.0 70. 1.40518 12.0 75. 1.46861 12.0 80. 1.52456 12.0 81. 1.53339 12.0 82. 1.54203 12.0 83. 1.54815 12.0 84. 1.55357 12.0 85. 1.55728 12.0 86. 1.55544 12.0 87. 1.54754 12.0 88. 1.50573 12.0 89. 1.33851 13.0 0. 1.08224 13.0 10. 1.08410 13.0 20. 1.09470 13.0 30. 1.11206 13.0 40. 1.14460 13.0 45. 1.16515 13.0 50. 1.19589 13.0 60. 1.28322 13.0 70. 1.40513 13.0 75. 1.46324 13.0 80. 1.51860 13.0 81. 1.53006 13.0 82. 1.53911 13.0 83. 1.54405 13.0 84. 1.55031 13.0 85. 1.55462 13.0 86. 1.55508 13.0 87. 1.54660 13.0 88. 1.50950 13.0 89. 1.35507 14.0 0. 1.08269 14.0 10. 1.08576 14.0 20. 1.09467 14.0 30. 1.11138 14.0 40. 1.13976 14.0 45. 1.16423 14.0 50. 1.19140 14.0 60. 1.28198 14.0 70. 1.39851 14.0 75. 1.46218 14.0 80. 1.51793 14.0 81. 1.52815 14.0 82. 1.53462 14.0 83. 1.54167 14.0 84. 1.54850 14.0 85. 1.55118 14.0 86. 1.55282 14.0 87. 1.54498 14.0 88. 1.51218 14.0 89. 1.36885 15.0 0. 1.07797 15.0 10. 1.08226 15.0 20. 1.09111 15.0 30. 1.10989 15.0 40. 1.14110 15.0 45. 1.16155 15.0 50. 1.19372 15.0 60. 1.27882 15.0 70. 1.39663 15.0 75. 1.46332 15.0 80. 1.51625 15.0 81. 1.52487 15.0 82. 1.53376 15.0 83. 1.54205 15.0 84. 1.54449 15.0 85. 1.55103 15.0 86. 1.55200 15.0 87. 1.54587 15.0 88. 1.51513 15.0 89. 1.38093 16.0 0. 1.07687 16.0 10. 1.08103 16.0 20. 1.09135 16.0 30. 1.11016 16.0 40. 1.13821 16.0 45. 1.16233 16.0 50. 1.18977 16.0 60. 1.27751 16.0 70. 1.39663 16.0 75. 1.45879 16.0 80. 1.51510 16.0 81. 1.52371 16.0 82. 1.52966 16.0 83. 1.53823 16.0 84. 1.54477 16.0 85. 1.54823 16.0 86. 1.54976 16.0 87. 1.54593 16.0 88. 1.51727 16.0 89. 1.39129 17.0 0. 1.07506 17.0 10. 1.07901 17.0 20. 1.08935 17.0 30. 1.10549 17.0 40. 1.13548 17.0 45. 1.15907 17.0 50. 1.18927 17.0 60. 1.27656 17.0 70. 1.39437 17.0 75. 1.46039 17.0 80. 1.51230 17.0 81. 1.52273 17.0 82. 1.53148 17.0 83. 1.53683 17.0 84. 1.54357 17.0 85. 1.54636 17.0 86. 1.54622 17.0 87. 1.54618 17.0 88. 1.51776 17.0 89. 1.40195 18.0 0. 1.07558 18.0 10. 1.07833 18.0 20. 1.08832 18.0 30. 1.10783 18.0 40. 1.13665 18.0 45. 1.16169 18.0 50. 1.18845 18.0 60. 1.27471 18.0 70. 1.39192 18.0 75. 1.45723 18.0 80. 1.51159 18.0 81. 1.52025 18.0 82. 1.52738 18.0 83. 1.53542 18.0 84. 1.54022 18.0 85. 1.54310 18.0 86. 1.54653 18.0 87. 1.54306 18.0 88. 1.51731 18.0 89. 1.40829 19.0 0. 1.07449 19.0 10. 1.07639 19.0 20. 1.08761 19.0 30. 1.10320 19.0 40. 1.13378 19.0 45. 1.15677 19.0 50. 1.18588 19.0 60. 1.27243 19.0 70. 1.39140 19.0 75. 1.45446 19.0 80. 1.50959 19.0 81. 1.51692 19.0 82. 1.52414 19.0 83. 1.53292 19.0 84. 1.53743 19.0 85. 1.54181 19.0 86. 1.54641 19.0 87. 1.54198 19.0 88. 1.51950 19.0 89. 1.41440 20.0 0. 1.07317 20.0 10. 1.07667 20.0 20. 1.08693 20.0 30. 1.10147 20.0 40. 1.13193 20.0 45. 1.15853 20.0 50. 1.18495 20.0 60. 1.27063 20.0 70. 1.38956 20.0 75. 1.45498 20.0 80. 1.50790 20.0 81. 1.51840 20.0 82. 1.52485 20.0 83. 1.53174 20.0 84. 1.53631 20.0 85. 1.54141 20.0 86. 1.54436 20.0 87. 1.54119 20.0 88. 1.52173 20.0 89. 1.42092 25.0 0. 1.06735 25.0 10. 1.07280 25.0 20. 1.07982 25.0 30. 1.09881 25.0 40. 1.12676 25.0 45. 1.15138 25.0 50. 1.18268 25.0 60. 1.26582 25.0 70. 1.38649 25.0 75. 1.44809 25.0 80. 1.50157 25.0 81. 1.51088 25.0 82. 1.52019 25.0 83. 1.52606 25.0 84. 1.52979 25.0 85. 1.53486 25.0 86. 1.53822 25.0 87. 1.53738 25.0 88. 1.51917 25.0 89. 1.44039 30.0 0. 1.06131 30.0 10. 1.06402 30.0 20. 1.07513 30.0 30. 1.09460 30.0 40. 1.12158 30.0 45. 1.14567 30.0 50. 1.17723 30.0 60. 1.26409 30.0 70. 1.38394 30.0 75. 1.44492 30.0 80. 1.49716 30.0 81. 1.50671 30.0 82. 1.51458 30.0 83. 1.52136 30.0 84. 1.52782 30.0 85. 1.52967 30.0 86. 1.53151 30.0 87. 1.53354 30.0 88. 1.51822 30.0 89. 1.45065 ____________________________________________________