Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Cu 29 L_3M45M45 0.914 0.931 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 2.0 0. 1.59938 2.0 10. 1.60046 2.0 20. 1.59884 2.0 30. 1.59409 2.0 40. 1.58089 2.0 45. 1.56830 2.0 50. 1.54630 2.0 60. 1.46199 2.0 70. 1.26776 2.0 75. 1.09474 2.0 80. 0.83544 2.0 81. 0.76986 2.0 82. 0.70155 2.0 83. 0.62657 2.0 84. 0.54756 2.0 85. 0.46362 2.0 86. 0.37590 2.0 87. 0.28593 2.0 88. 0.19301 2.0 89. 0.10836 2.2 0. 1.63371 2.2 10. 1.63322 2.2 20. 1.63282 2.2 30. 1.63110 2.2 40. 1.62156 2.2 45. 1.61113 2.2 50. 1.59445 2.2 60. 1.51317 2.2 70. 1.32441 2.2 75. 1.14926 2.2 80. 0.88012 2.2 81. 0.81542 2.2 82. 0.74292 2.2 83. 0.66465 2.2 84. 0.58183 2.2 85. 0.49259 2.2 86. 0.40012 2.2 87. 0.30325 2.2 88. 0.20628 2.2 89. 0.11361 2.4 0. 1.66005 2.4 10. 1.65685 2.4 20. 1.65862 2.4 30. 1.65940 2.4 40. 1.65148 2.4 45. 1.64356 2.4 50. 1.62771 2.4 60. 1.55442 2.4 70. 1.36248 2.4 75. 1.19523 2.4 80. 0.92389 2.4 81. 0.85542 2.4 82. 0.78008 2.4 83. 0.69978 2.4 84. 0.61286 2.4 85. 0.51952 2.4 86. 0.42203 2.4 87. 0.32016 2.4 88. 0.21742 2.4 89. 0.11861 2.6 0. 1.67595 2.6 10. 1.67668 2.6 20. 1.67879 2.6 30. 1.67855 2.6 40. 1.67766 2.6 45. 1.66951 2.6 50. 1.65455 2.6 60. 1.58418 2.6 70. 1.40862 2.6 75. 1.23602 2.6 80. 0.94884 2.6 81. 0.89170 2.6 82. 0.81437 2.6 83. 0.73067 2.6 84. 0.64142 2.6 85. 0.54474 2.6 86. 0.44253 2.6 87. 0.33576 2.6 88. 0.22803 2.6 89. 0.12338 2.8 0. 1.68911 2.8 10. 1.69064 2.8 20. 1.69302 2.8 30. 1.69410 2.8 40. 1.69329 2.8 45. 1.68758 2.8 50. 1.67476 2.8 60. 1.61325 2.8 70. 1.44043 2.8 75. 1.27091 2.8 80. 0.99637 2.8 81. 0.92419 2.8 82. 0.84548 2.8 83. 0.76038 2.8 84. 0.66736 2.8 85. 0.56754 2.8 86. 0.46120 2.8 87. 0.35056 2.8 88. 0.23775 2.8 89. 0.10557 3.0 0. 1.69928 3.0 10. 1.70248 3.0 20. 1.70468 3.0 30. 1.70291 3.0 40. 1.70688 3.0 45. 1.70137 3.0 50. 1.69255 3.0 60. 1.63401 3.0 70. 1.46933 3.0 75. 1.30006 3.0 80. 1.02618 3.0 81. 0.95380 3.0 82. 0.87460 3.0 83. 0.78720 3.0 84. 0.69256 3.0 85. 0.59046 3.0 86. 0.48020 3.0 87. 0.36473 3.0 88. 0.24721 3.0 89. 0.13231 3.2 0. 1.70958 3.2 10. 1.70690 3.2 20. 1.71328 3.2 30. 1.71378 3.2 40. 1.71704 3.2 45. 1.71372 3.2 50. 1.70423 3.2 60. 1.65186 3.2 70. 1.49378 3.2 75. 1.32765 3.2 80. 1.05585 3.2 81. 0.98215 3.2 82. 0.90161 3.2 83. 0.81276 3.2 84. 0.71705 3.2 85. 0.61104 3.2 86. 0.49804 3.2 87. 0.37919 3.2 88. 0.25648 3.2 89. 0.13637 3.6 0. 1.71700 3.6 10. 1.71712 3.6 20. 1.72229 3.6 30. 1.72575 3.6 40. 1.73131 3.6 45. 1.73039 3.6 50. 1.72359 3.6 60. 1.67636 3.6 70. 1.53185 3.6 75. 1.37705 3.6 80. 1.10729 3.6 81. 1.03266 3.6 82. 0.95107 3.6 83. 0.86028 3.6 84. 0.75971 3.6 85. 0.65023 3.6 86. 0.53166 3.6 87. 0.40534 3.6 88. 0.27393 3.6 89. 0.14473 4.0 0. 1.72122 4.0 10. 1.72218 4.0 20. 1.72569 4.0 30. 1.73265 4.0 40. 1.74042 4.0 45. 1.74065 4.0 50. 1.73551 4.0 60. 1.69532 4.0 70. 1.56336 4.0 75. 1.41569 4.0 80. 1.15044 4.0 81. 1.07769 4.0 82. 0.99566 4.0 83. 0.90221 4.0 84. 0.80038 4.0 85. 0.68641 4.0 86. 0.56290 4.0 87. 0.42931 4.0 88. 0.29085 4.0 89. 0.15238 4.2 0. 1.72364 4.2 10. 1.72269 4.2 20. 1.72817 4.2 30. 1.74003 4.2 40. 1.74059 4.2 45. 1.74442 4.2 50. 1.73914 4.2 60. 1.70102 4.2 70. 1.57500 4.2 75. 1.43186 4.2 80. 1.17053 4.2 81. 1.09689 4.2 82. 1.01511 4.2 83. 0.92161 4.2 84. 0.81850 4.2 85. 0.70393 4.2 86. 0.57755 4.2 87. 0.44126 4.2 88. 0.29849 4.2 89. 0.15593 4.4 0. 1.72276 4.4 10. 1.72544 4.4 20. 1.72723 4.4 30. 1.73944 4.4 40. 1.74215 4.4 45. 1.74576 4.4 50. 1.74226 4.4 60. 1.70770 4.4 70. 1.58677 4.4 75. 1.44613 4.4 80. 1.19080 4.4 81. 1.11770 4.4 82. 1.03466 4.4 83. 0.94032 4.4 84. 0.83621 4.4 85. 0.72023 4.4 86. 0.59132 4.4 87. 0.45204 4.4 88. 0.30619 4.4 89. 0.15998 4.8 0. 1.72265 4.8 10. 1.72448 4.8 20. 1.73297 4.8 30. 1.74017 4.8 40. 1.74576 4.8 45. 1.74947 4.8 50. 1.74811 4.8 60. 1.71721 4.8 70. 1.60604 4.8 75. 1.47530 4.8 80. 1.22558 4.8 81. 1.15283 4.8 82. 1.06817 4.8 83. 0.97574 4.8 84. 0.86981 4.8 85. 0.75086 4.8 86. 0.61889 4.8 87. 0.47434 4.8 88. 0.32135 4.8 89. 0.16712 5.0 0. 1.72428 5.0 10. 1.73033 5.0 20. 1.73213 5.0 30. 1.73801 5.0 40. 1.74805 5.0 45. 1.74926 5.0 50. 1.74937 5.0 60. 1.71931 5.0 70. 1.61484 5.0 75. 1.48767 5.0 80. 1.24131 5.0 81. 1.17072 5.0 82. 1.08694 5.0 83. 0.99321 5.0 84. 0.88625 5.0 85. 0.76685 5.0 86. 0.63169 5.0 87. 0.48515 5.0 88. 0.32871 5.0 89. 0.17060 5.2 0. 1.72326 5.2 10. 1.72683 5.2 20. 1.73580 5.2 30. 1.73953 5.2 40. 1.74892 5.2 45. 1.75153 5.2 50. 1.74933 5.2 60. 1.72036 5.2 70. 1.62029 5.2 75. 1.49909 5.2 80. 1.25637 5.2 81. 1.18569 5.2 82. 1.10263 5.2 83. 1.00890 5.2 84. 0.90216 5.2 85. 0.78116 5.2 86. 0.64504 5.2 87. 0.49526 5.2 88. 0.33620 5.2 89. 0.17406 5.6 0. 1.71959 5.6 10. 1.72523 5.6 20. 1.73340 5.6 30. 1.73985 5.6 40. 1.75053 5.6 45. 1.75441 5.6 50. 1.75100 5.6 60. 1.72603 5.6 70. 1.63491 5.6 75. 1.51867 5.6 80. 1.28567 5.6 81. 1.21474 5.6 82. 1.13394 5.6 83. 1.03909 5.6 84. 0.93183 5.6 85. 0.80907 5.6 86. 0.66964 5.6 87. 0.51547 5.6 88. 0.35008 5.6 89. 0.18064 6.0 0. 1.71907 6.0 10. 1.72391 6.0 20. 1.73113 6.0 30. 1.73990 6.0 40. 1.74626 6.0 45. 1.75274 6.0 50. 1.75293 6.0 60. 1.73020 6.0 70. 1.64601 6.0 75. 1.53761 6.0 80. 1.31006 6.0 81. 1.24147 6.0 82. 1.16130 6.0 83. 1.06718 6.0 84. 0.95912 6.0 85. 0.82777 6.0 86. 0.69359 6.0 87. 0.53518 6.0 88. 0.36377 6.0 89. 0.18756 6.4 0. 1.71824 6.4 10. 1.71970 6.4 20. 1.72893 6.4 30. 1.73755 6.4 40. 1.74750 6.4 45. 1.74973 6.4 50. 1.74902 6.4 60. 1.73211 6.4 70. 1.65445 6.4 75. 1.55069 6.4 80. 1.33376 6.4 81. 1.26530 6.4 82. 1.18558 6.4 83. 1.09367 6.4 84. 0.98473 6.4 85. 0.85966 6.4 86. 0.71551 6.4 87. 0.55361 6.4 88. 0.37739 6.4 89. 0.19408 6.8 0. 1.71584 6.8 10. 1.71795 6.8 20. 1.72564 6.8 30. 1.73761 6.8 40. 1.74880 6.8 45. 1.75032 6.8 50. 1.75029 6.8 60. 1.73159 6.8 70. 1.66003 6.8 75. 1.56551 6.8 80. 1.35530 6.8 81. 1.28960 6.8 82. 1.21117 6.8 83. 1.11704 6.8 84. 1.01051 6.8 85. 0.88352 6.8 86. 0.73877 6.8 87. 0.57147 6.8 88. 0.39049 6.8 89. 0.20093 7.0 0. 1.70990 7.0 10. 1.71725 7.0 20. 1.72476 7.0 30. 1.73642 7.0 40. 1.74855 7.0 45. 1.75047 7.0 50. 1.74855 7.0 60. 1.73069 7.0 70. 1.66144 7.0 75. 1.56968 7.0 80. 1.36542 7.0 81. 1.29943 7.0 82. 1.22031 7.0 83. 1.12955 7.0 84. 1.02201 7.0 85. 0.89685 7.0 86. 0.74947 7.0 87. 0.58157 7.0 88. 0.39712 7.0 89. 0.20400 7.2 0. 1.71241 7.2 10. 1.71777 7.2 20. 1.72456 7.2 30. 1.73564 7.2 40. 1.74497 7.2 45. 1.74526 7.2 50. 1.74907 7.2 60. 1.73283 7.2 70. 1.66560 7.2 75. 1.57607 7.2 80. 1.37546 7.2 81. 1.31000 7.2 82. 1.23110 7.2 83. 1.14193 7.2 84. 1.03339 7.2 85. 0.90322 7.2 86. 0.75953 7.2 87. 0.59121 7.2 88. 0.40330 7.2 89. 0.20730 7.6 0. 1.71408 7.6 10. 1.71472 7.6 20. 1.72392 7.6 30. 1.73666 7.6 40. 1.74359 7.6 45. 1.74694 7.6 50. 1.74754 7.6 60. 1.73097 7.6 70. 1.67193 7.6 75. 1.58583 7.6 80. 1.39305 7.6 81. 1.32864 7.6 82. 1.25263 7.6 83. 1.16254 7.6 84. 1.05584 7.6 85. 0.92840 7.6 86. 0.77926 7.6 87. 0.60875 7.6 88. 0.41568 7.6 89. 0.21366 8.0 0. 1.71139 8.0 10. 1.71315 8.0 20. 1.72028 8.0 30. 1.73227 8.0 40. 1.74363 8.0 45. 1.74365 8.0 50. 1.74668 8.0 60. 1.73138 8.0 70. 1.67396 8.0 75. 1.59180 8.0 80. 1.40929 8.0 81. 1.34731 8.0 82. 1.27180 8.0 83. 1.18366 8.0 84. 1.07413 8.0 85. 0.94890 8.0 86. 0.79937 8.0 87. 0.62482 8.0 88. 0.42939 8.0 89. 0.22019 8.4 0. 1.70698 8.4 10. 1.71019 8.4 20. 1.71990 8.4 30. 1.73000 8.4 40. 1.73933 8.4 45. 1.74141 8.4 50. 1.74359 8.4 60. 1.73169 8.4 70. 1.67576 8.4 75. 1.60191 8.4 80. 1.42271 8.4 81. 1.36284 8.4 82. 1.29106 8.4 83. 1.20249 8.4 84. 1.09601 8.4 85. 0.96949 8.4 86. 0.81834 8.4 87. 0.64153 8.4 88. 0.44121 8.4 89. 0.22583 8.8 0. 1.70650 8.8 10. 1.70963 8.8 20. 1.71524 8.8 30. 1.72916 8.8 40. 1.73824 8.8 45. 1.74313 8.8 50. 1.74249 8.8 60. 1.72905 8.8 70. 1.67933 8.8 75. 1.60873 8.8 80. 1.43747 8.8 81. 1.37945 8.8 82. 1.30849 8.8 83. 1.22076 8.8 84. 1.11508 8.8 85. 0.98896 8.8 86. 0.83647 8.8 87. 0.65722 8.8 88. 0.45297 8.8 89. 0.23240 9.0 0. 1.70024 9.0 10. 1.70757 9.0 20. 1.71762 9.0 30. 1.72755 9.0 40. 1.73744 9.0 45. 1.74025 9.0 50. 1.74282 9.0 60. 1.72890 9.0 70. 1.67882 9.0 75. 1.61157 9.0 80. 1.44383 9.0 81. 1.38621 9.0 82. 1.31586 9.0 83. 1.23010 9.0 84. 1.12557 9.0 85. 0.99864 9.0 86. 0.84512 9.0 87. 0.66600 9.0 88. 0.45895 9.0 89. 0.23566 9.2 0. 1.70513 9.2 10. 1.70655 9.2 20. 1.71344 9.2 30. 1.72601 9.2 40. 1.73225 9.2 45. 1.73954 9.2 50. 1.73946 9.2 60. 1.72705 9.2 70. 1.67968 9.2 75. 1.61359 9.2 80. 1.45178 9.2 81. 1.39334 9.2 82. 1.32434 9.2 83. 1.23708 9.2 84. 1.13462 9.2 85. 1.00728 9.2 86. 0.85484 9.2 87. 0.67340 9.2 88. 0.46532 9.2 89. 0.23883 9.6 0. 1.70029 9.6 10. 1.70299 9.6 20. 1.71085 9.6 30. 1.72258 9.6 40. 1.73261 9.6 45. 1.73515 9.6 50. 1.73790 9.6 60. 1.72596 9.6 70. 1.68141 9.6 75. 1.62052 9.6 80. 1.46208 9.6 81. 1.40669 9.6 82. 1.33892 9.6 83. 1.25341 9.6 84. 1.15136 9.6 85. 1.02379 9.6 86. 0.87135 9.6 87. 0.68883 9.6 88. 0.47677 9.6 89. 0.24455 10.0 0. 1.69960 10.0 10. 1.70272 10.0 20. 1.71079 10.0 30. 1.72192 10.0 40. 1.73012 10.0 45. 1.73608 10.0 50. 1.73429 10.0 60. 1.72599 10.0 70. 1.68439 10.0 75. 1.62592 10.0 80. 1.47265 10.0 81. 1.41886 10.0 82. 1.35166 10.0 83. 1.27031 10.0 84. 1.16716 10.0 85. 1.04127 10.0 86. 0.88690 10.0 87. 0.70315 10.0 88. 0.48788 10.0 89. 0.25017 11.0 0. 1.69626 11.0 10. 1.69710 11.0 20. 1.70616 11.0 30. 1.71589 11.0 40. 1.72586 11.0 45. 1.73176 11.0 50. 1.73334 11.0 60. 1.72156 11.0 70. 1.68545 11.0 75. 1.63162 11.0 80. 1.49692 11.0 81. 1.44617 11.0 82. 1.38351 11.0 83. 1.30349 11.0 84. 1.20070 11.0 85. 1.07979 11.0 86. 0.91931 11.0 87. 0.73703 11.0 88. 0.51350 11.0 89. 0.26449 12.0 0. 1.69279 12.0 10. 1.69192 12.0 20. 1.70119 12.0 30. 1.71337 12.0 40. 1.72491 12.0 45. 1.72651 12.0 50. 1.72680 12.0 60. 1.71897 12.0 70. 1.68461 12.0 75. 1.63977 12.0 80. 1.51668 12.0 81. 1.47002 12.0 82. 1.40408 12.0 83. 1.33556 12.0 84. 1.23791 12.0 85. 1.11541 12.0 86. 0.96080 12.0 87. 0.76938 12.0 88. 0.53850 12.0 89. 0.27795 13.0 0. 1.68690 13.0 10. 1.68956 13.0 20. 1.69836 13.0 30. 1.71031 13.0 40. 1.71996 13.0 45. 1.72308 13.0 50. 1.72461 13.0 60. 1.71456 13.0 70. 1.68458 13.0 75. 1.64529 13.0 80. 1.53374 13.0 81. 1.48977 13.0 82. 1.41360 13.0 83. 1.36223 13.0 84. 1.26914 13.0 85. 1.13581 13.0 86. 0.99449 13.0 87. 0.79989 13.0 88. 0.56357 13.0 89. 0.29101 14.0 0. 1.68328 14.0 10. 1.68602 14.0 20. 1.69358 14.0 30. 1.70543 14.0 40. 1.71555 14.0 45. 1.71937 14.0 50. 1.71972 14.0 60. 1.70978 14.0 70. 1.68186 14.0 75. 1.64829 14.0 80. 1.54666 14.0 81. 1.50694 14.0 82. 1.45301 14.0 83. 1.38608 14.0 84. 1.29498 14.0 85. 1.17749 14.0 86. 1.02428 14.0 87. 0.82829 14.0 88. 0.58656 14.0 89. 0.30356 15.0 0. 1.68009 15.0 10. 1.68294 15.0 20. 1.69088 15.0 30. 1.70391 15.0 40. 1.71354 15.0 45. 1.71850 15.0 50. 1.71756 15.0 60. 1.70598 15.0 70. 1.68114 15.0 75. 1.64934 15.0 80. 1.55718 15.0 81. 1.51951 15.0 82. 1.47207 15.0 83. 1.40557 15.0 84. 1.32001 15.0 85. 1.20450 15.0 86. 1.05314 15.0 87. 0.85671 15.0 88. 0.60897 15.0 89. 0.31631 16.0 0. 1.67831 16.0 10. 1.67756 16.0 20. 1.68893 16.0 30. 1.69888 16.0 40. 1.70968 16.0 45. 1.71463 16.0 50. 1.71323 16.0 60. 1.70386 16.0 70. 1.67862 16.0 75. 1.64974 16.0 80. 1.56649 16.0 81. 1.53371 16.0 82. 1.48399 16.0 83. 1.42608 16.0 84. 1.34245 16.0 85. 1.22961 16.0 86. 1.07937 16.0 87. 0.88286 16.0 88. 0.62985 16.0 89. 0.32927 17.0 0. 1.67379 17.0 10. 1.67921 17.0 20. 1.68375 17.0 30. 1.69827 17.0 40. 1.70280 17.0 45. 1.70932 17.0 50. 1.70986 17.0 60. 1.70092 17.0 70. 1.67654 17.0 75. 1.65009 17.0 80. 1.57524 17.0 81. 1.54257 17.0 82. 1.50016 17.0 83. 1.44182 17.0 84. 1.36134 17.0 85. 1.25240 17.0 86. 1.10466 17.0 87. 0.90788 17.0 88. 0.65103 17.0 89. 0.34088 18.0 0. 1.67197 18.0 10. 1.67352 18.0 20. 1.68202 18.0 30. 1.69366 18.0 40. 1.70629 18.0 45. 1.70557 18.0 50. 1.70684 18.0 60. 1.69847 18.0 70. 1.67267 18.0 75. 1.65018 18.0 80. 1.58464 18.0 81. 1.55346 18.0 82. 1.51333 18.0 83. 1.45866 18.0 84. 1.38127 18.0 85. 1.27427 18.0 86. 1.12829 18.0 87. 0.93137 18.0 88. 0.67058 18.0 89. 0.35295 19.0 0. 1.66985 19.0 10. 1.67038 19.0 20. 1.67741 19.0 30. 1.68826 19.0 40. 1.70171 19.0 45. 1.70428 19.0 50. 1.70579 19.0 60. 1.69382 19.0 70. 1.67186 19.0 75. 1.64730 19.0 80. 1.58793 19.0 81. 1.56028 19.0 82. 1.52230 19.0 83. 1.46965 19.0 84. 1.39744 19.0 85. 1.29502 19.0 86. 1.15017 19.0 87. 0.95384 19.0 88. 0.69034 19.0 89. 0.36448 20.0 0. 1.66626 20.0 10. 1.66731 20.0 20. 1.67680 20.0 30. 1.68879 20.0 40. 1.69407 20.0 45. 1.70081 20.0 50. 1.70294 20.0 60. 1.69064 20.0 70. 1.67072 20.0 75. 1.64845 20.0 80. 1.59239 20.0 81. 1.56707 20.0 82. 1.53038 20.0 83. 1.48213 20.0 84. 1.41173 20.0 85. 1.31131 20.0 86. 1.17043 20.0 87. 0.97462 20.0 88. 0.68956 20.0 89. 0.37573 25.0 0. 1.65063 25.0 10. 1.65332 25.0 20. 1.66428 25.0 30. 1.67291 25.0 40. 1.68747 25.0 45. 1.68728 25.0 50. 1.68878 25.0 60. 1.67977 25.0 70. 1.65738 25.0 75. 1.64125 25.0 80. 1.60534 25.0 81. 1.58957 25.0 82. 1.56291 25.0 83. 1.52523 25.0 84. 1.46870 25.0 85. 1.38474 25.0 86. 1.25622 25.0 87. 1.06836 25.0 88. 0.79675 25.0 89. 0.43057 30.0 0. 1.64231 30.0 10. 1.64794 30.0 20. 1.65793 30.0 30. 1.66411 30.0 40. 1.67445 30.0 45. 1.68191 30.0 50. 1.68159 30.0 60. 1.67516 30.0 70. 1.64822 30.0 75. 1.63519 30.0 80. 1.60966 30.0 81. 1.59596 30.0 82. 1.58114 30.0 83. 1.55074 30.0 84. 1.50644 30.0 85. 1.43592 30.0 86. 1.32236 30.0 87. 1.14360 30.0 88. 0.87214 30.0 89. 0.48173 ____________________________________________________