Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Cu 29 L_3M45M45 0.914 0.931 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 2.0 0. 1.57481 2.0 10. 1.59182 2.0 20. 1.60284 2.0 30. 1.60499 2.0 40. 1.58947 2.0 45. 1.57045 2.0 50. 1.53920 2.0 60. 1.42172 2.0 70. 1.17160 2.0 75. 0.96756 2.0 80. 0.69255 2.0 81. 0.62827 2.0 82. 0.56295 2.0 83. 0.49362 2.0 84. 0.42320 2.0 85. 0.35098 2.0 86. 0.27846 2.0 87. 0.20699 2.0 88. 0.13646 2.0 89. 0.07469 2.2 0. 1.60476 2.2 10. 1.62274 2.2 20. 1.63730 2.2 30. 1.64503 2.2 40. 1.63512 2.2 45. 1.62018 2.2 50. 1.59519 2.2 60. 1.48227 2.2 70. 1.23612 2.2 75. 1.02733 2.2 80. 0.73720 2.2 81. 0.67271 2.2 82. 0.60253 2.2 83. 0.52919 2.2 84. 0.45407 2.2 85. 0.37633 2.2 86. 0.29895 2.2 87. 0.22116 2.2 88. 0.14657 2.2 89. 0.07871 2.4 0. 1.62836 2.4 10. 1.64533 2.4 20. 1.66340 2.4 30. 1.67501 2.4 40. 1.66920 2.4 45. 1.65748 2.4 50. 1.63406 2.4 60. 1.53118 2.4 70. 1.28223 2.4 75. 1.07831 2.4 80. 0.78191 2.4 81. 0.71248 2.4 82. 0.63834 2.4 83. 0.56195 2.4 84. 0.48220 2.4 85. 0.40000 2.4 86. 0.31753 2.4 87. 0.23492 2.4 88. 0.15545 2.4 89. 0.08251 2.6 0. 1.64330 2.6 10. 1.66430 2.6 20. 1.68373 2.6 30. 1.69562 2.6 40. 1.69803 2.6 45. 1.68703 2.6 50. 1.66517 2.6 60. 1.56851 2.6 70. 1.33558 2.6 75. 1.12429 2.6 80. 0.81171 2.6 81. 0.74861 2.6 82. 0.67158 2.6 83. 0.59109 2.6 84. 0.50837 2.6 85. 0.42230 2.6 86. 0.33493 2.6 87. 0.24775 2.6 88. 0.16373 2.6 89. 0.08612 2.8 0. 1.65495 2.8 10. 1.67786 2.8 20. 1.69797 2.8 30. 1.71206 2.8 40. 1.71571 2.8 45. 1.70748 2.8 50. 1.68942 2.8 60. 1.60329 2.8 70. 1.37344 2.8 75. 1.16421 2.8 80. 0.85644 2.8 81. 0.78128 2.8 82. 0.70206 2.8 83. 0.61924 2.8 84. 0.53224 2.8 85. 0.44217 2.8 86. 0.35072 2.8 87. 0.25972 2.8 88. 0.17122 2.8 89. 0.07726 3.0 0. 1.66473 3.0 10. 1.68947 3.0 20. 1.70967 3.0 30. 1.72125 3.0 40. 1.73058 3.0 45. 1.72330 3.0 50. 1.70974 3.0 60. 1.62901 3.0 70. 1.40905 3.0 75. 1.19825 3.0 80. 0.88773 3.0 81. 0.81153 3.0 82. 0.73107 3.0 83. 0.64496 3.0 84. 0.55532 3.0 85. 0.46262 3.0 86. 0.36693 3.0 87. 0.27123 3.0 88. 0.17858 3.0 89. 0.09273 3.2 0. 1.67525 3.2 10. 1.69399 3.2 20. 1.71826 3.2 30. 1.73243 3.2 40. 1.74170 3.2 45. 1.73748 3.2 50. 1.72358 3.2 60. 1.65057 3.2 70. 1.43906 3.2 75. 1.23051 3.2 80. 0.91900 3.2 81. 0.84065 3.2 82. 0.75770 3.2 83. 0.66953 3.2 84. 0.57772 3.2 85. 0.48074 3.2 86. 0.38213 3.2 87. 0.28288 3.2 88. 0.18571 3.2 89. 0.09570 3.6 0. 1.68326 3.6 10. 1.70402 3.6 20. 1.72714 3.6 30. 1.74424 3.6 40. 1.75699 3.6 45. 1.75581 3.6 50. 1.74617 3.6 60. 1.68166 3.6 70. 1.48719 3.6 75. 1.28952 3.6 80. 0.97420 3.6 81. 0.89297 3.6 82. 0.80760 3.6 83. 0.71580 3.6 84. 0.61806 3.6 85. 0.51576 3.6 86. 0.41092 3.6 87. 0.30417 3.6 88. 0.19919 3.6 89. 0.10176 4.0 0. 1.68893 4.0 10. 1.70966 4.0 20. 1.73040 4.0 30. 1.75098 4.0 40. 1.76656 4.0 45. 1.76674 4.0 50. 1.75938 4.0 60. 1.70577 4.0 70. 1.52759 4.0 75. 1.33597 4.0 80. 1.02130 4.0 81. 0.94059 4.0 82. 0.85316 4.0 83. 0.75704 4.0 84. 0.65666 4.0 85. 0.54899 4.0 86. 0.43799 4.0 87. 0.32397 4.0 88. 0.21233 4.0 89. 0.10741 4.2 0. 1.69171 4.2 10. 1.71040 4.2 20. 1.73275 4.2 30. 1.75804 4.2 40. 1.76641 4.2 45. 1.77054 4.2 50. 1.76382 4.2 60. 1.71272 4.2 70. 1.54312 4.2 75. 1.35609 4.2 80. 1.04330 4.2 81. 0.96156 4.2 82. 0.87335 4.2 83. 0.77668 4.2 84. 0.67399 4.2 85. 0.56498 4.2 86. 0.45055 4.2 87. 0.33375 4.2 88. 0.21829 4.2 89. 0.10993 4.4 0. 1.69143 4.4 10. 1.71327 4.4 20. 1.73169 4.4 30. 1.75702 4.4 40. 1.76765 4.4 45. 1.77219 4.4 50. 1.76729 4.4 60. 1.72144 4.4 70. 1.55830 4.4 75. 1.37451 4.4 80. 1.06600 4.4 81. 0.98359 4.4 82. 0.89374 4.4 83. 0.79544 4.4 84. 0.69096 4.4 85. 0.57988 4.4 86. 0.46261 4.4 87. 0.34273 4.4 88. 0.22432 4.4 89. 0.11295 4.8 0. 1.69260 4.8 10. 1.71280 4.8 20. 1.73723 4.8 30. 1.75753 4.8 40. 1.77075 4.8 45. 1.77565 4.8 50. 1.77347 4.8 60. 1.73425 4.8 70. 1.58424 4.8 75. 1.41085 4.8 80. 1.10493 4.8 81. 1.02203 4.8 82. 0.92873 4.8 83. 0.83151 4.8 84. 0.72386 4.8 85. 0.60839 4.8 86. 0.48697 4.8 87. 0.36140 4.8 88. 0.23625 4.8 89. 0.11813 5.0 0. 1.69500 5.0 10. 1.71885 5.0 20. 1.73630 5.0 30. 1.75473 5.0 40. 1.77274 5.0 45. 1.77523 5.0 50. 1.77510 5.0 60. 1.73728 5.0 70. 1.59578 5.0 75. 1.42648 5.0 80. 1.12326 5.0 81. 1.04183 5.0 82. 0.94906 5.0 83. 0.84921 5.0 84. 0.73990 5.0 85. 0.62345 5.0 86. 0.49842 5.0 87. 0.37043 5.0 88. 0.24191 5.0 89. 0.12075 5.2 0. 1.69464 5.2 10. 1.71569 5.2 20. 1.73987 5.2 30. 1.75604 5.2 40. 1.77341 5.2 45. 1.77733 5.2 50. 1.77498 5.2 60. 1.73945 5.2 70. 1.60404 5.2 75. 1.44122 5.2 80. 1.14060 5.2 81. 1.05833 5.2 82. 0.96607 5.2 83. 0.86527 5.2 84. 0.75551 5.2 85. 0.63679 5.2 86. 0.51013 5.2 87. 0.37889 5.2 88. 0.24786 5.2 89. 0.12326 5.6 0. 1.69226 5.6 10. 1.71442 5.6 20. 1.73736 5.6 30. 1.75601 5.6 40. 1.77414 5.6 45. 1.77975 5.6 50. 1.77625 5.6 60. 1.74610 5.6 70. 1.62359 5.6 75. 1.46683 5.6 80. 1.17396 5.6 81. 1.09121 5.6 82. 0.99968 5.6 83. 0.89694 5.6 84. 0.78502 5.6 85. 0.66318 5.6 86. 0.53238 5.6 87. 0.39600 5.6 88. 0.25883 5.6 89. 0.12792 6.0 0. 1.69265 6.0 10. 1.71365 6.0 20. 1.73482 6.0 30. 1.75523 6.0 40. 1.76910 6.0 45. 1.77718 6.0 50. 1.77822 6.0 60. 1.75186 6.0 70. 1.63867 6.0 75. 1.49176 6.0 80. 1.20324 6.0 81. 1.12184 6.0 82. 1.02997 6.0 83. 0.92642 6.0 84. 0.81260 6.0 85. 0.68212 6.0 86. 0.55408 6.0 87. 0.41256 6.0 88. 0.26968 6.0 89. 0.13310 6.4 0. 1.69294 6.4 10. 1.70989 6.4 20. 1.73249 6.4 30. 1.75239 6.4 40. 1.76987 6.4 45. 1.77346 6.4 50. 1.77364 6.4 60. 1.75444 6.4 70. 1.65099 6.4 75. 1.51011 6.4 80. 1.23153 6.4 81. 1.14956 6.4 82. 1.05723 6.4 83. 0.95487 6.4 84. 0.83866 6.4 85. 0.71229 6.4 86. 0.57408 6.4 87. 0.42868 6.4 88. 0.28052 6.4 89. 0.13793 6.8 0. 1.69198 6.8 10. 1.70856 6.8 20. 1.72909 6.8 30. 1.75180 6.8 40. 1.77018 6.8 45. 1.77343 6.8 50. 1.77489 6.8 60. 1.75433 6.8 70. 1.66003 6.8 75. 1.52955 6.8 80. 1.25759 6.8 81. 1.17803 6.8 82. 1.08585 6.8 83. 0.98064 6.8 84. 0.86541 6.8 85. 0.73561 6.8 86. 0.59542 6.8 87. 0.44372 6.8 88. 0.29101 6.8 89. 0.14295 7.0 0. 1.68634 7.0 10. 1.70802 7.0 20. 1.72814 7.0 30. 1.75020 7.0 40. 1.76946 7.0 45. 1.77341 7.0 50. 1.77248 7.0 60. 1.75383 7.0 70. 1.66169 7.0 75. 1.53654 7.0 80. 1.27003 7.0 81. 1.18975 7.0 82. 1.09685 7.0 83. 0.99380 7.0 84. 0.87730 7.0 85. 0.74849 7.0 86. 0.60526 7.0 87. 0.45275 7.0 88. 0.29636 7.0 89. 0.14522 7.2 0. 1.68929 7.2 10. 1.70881 7.2 20. 1.72781 7.2 30. 1.74922 7.2 40. 1.76567 7.2 45. 1.76787 7.2 50. 1.77275 7.2 60. 1.75618 7.2 70. 1.66864 7.2 75. 1.54475 7.2 80. 1.28254 7.2 81. 1.20224 7.2 82. 1.10936 7.2 83. 1.00744 7.2 84. 0.88939 7.2 85. 0.75497 7.2 86. 0.61484 7.2 87. 0.46103 7.2 88. 0.30132 7.2 89. 0.14769 7.6 0. 1.69180 7.6 10. 1.70606 7.6 20. 1.72703 7.6 30. 1.74992 7.6 40. 1.76372 7.6 45. 1.76885 7.6 50. 1.77062 7.6 60. 1.75444 7.6 70. 1.67730 7.6 75. 1.55922 7.6 80. 1.30441 7.6 81. 1.22524 7.6 82. 1.13417 7.6 83. 1.03059 7.6 84. 0.91305 7.6 85. 0.78002 7.6 86. 0.63333 7.6 87. 0.47633 7.6 88. 0.31133 7.6 89. 0.15238 8.0 0. 1.69052 8.0 10. 1.70472 8.0 20. 1.72331 8.0 30. 1.74507 8.0 40. 1.76313 8.0 45. 1.76501 8.0 50. 1.76937 8.0 60. 1.75485 8.0 70. 1.68174 8.0 75. 1.56820 8.0 80. 1.32522 8.0 81. 1.24760 8.0 82. 1.15674 8.0 83. 1.05444 8.0 84. 0.93265 8.0 85. 0.80072 8.0 86. 0.65224 8.0 87. 0.49071 8.0 88. 0.32252 8.0 89. 0.15722 8.4 0. 1.68652 8.4 10. 1.70207 8.4 20. 1.72280 8.4 30. 1.74206 8.4 40. 1.75803 8.4 45. 1.76199 8.4 50. 1.76561 8.4 60. 1.75508 8.4 70. 1.68548 8.4 75. 1.58277 8.4 80. 1.34296 8.4 81. 1.26700 8.4 82. 1.17894 8.4 83. 1.07520 8.4 84. 0.95617 8.4 85. 0.82173 8.4 86. 0.67036 8.4 87. 0.50539 8.4 88. 0.33213 8.4 89. 0.16138 8.8 0. 1.68725 8.8 10. 1.70194 8.8 20. 1.71804 8.8 30. 1.74096 8.8 40. 1.75633 8.8 45. 1.76337 8.8 50. 1.76377 8.8 60. 1.75263 8.8 70. 1.69123 8.8 75. 1.59288 8.8 80. 1.36126 8.8 81. 1.28751 8.8 82. 1.20039 8.8 83. 1.09682 8.8 84. 0.97700 8.8 85. 0.84181 8.8 86. 0.68822 8.8 87. 0.51947 8.8 88. 0.34175 8.8 89. 0.16632 9.0 0. 1.68066 9.0 10. 1.69987 9.0 20. 1.72043 9.0 30. 1.73911 9.0 40. 1.75519 9.0 45. 1.75990 9.0 50. 1.76397 9.0 60. 1.75186 9.0 70. 1.69099 9.0 75. 1.59679 9.0 80. 1.37011 9.0 81. 1.29632 9.0 82. 1.20929 9.0 83. 1.10715 9.0 84. 0.98862 9.0 85. 0.85147 9.0 86. 0.69638 9.0 87. 0.52715 9.0 88. 0.34676 9.0 89. 0.16877 9.2 0. 1.68615 9.2 10. 1.69898 9.2 20. 1.71625 9.2 30. 1.73743 9.2 40. 1.74991 9.2 45. 1.75878 9.2 50. 1.76044 9.2 60. 1.74998 9.2 70. 1.69249 9.2 75. 1.60052 9.2 80. 1.38008 9.2 81. 1.30522 9.2 82. 1.21923 9.2 83. 1.11574 9.2 84. 0.99808 9.2 85. 0.86080 9.2 86. 0.70568 9.2 87. 0.53390 9.2 88. 0.35192 9.2 89. 0.17109 9.6 0. 1.68146 9.6 10. 1.69575 9.6 20. 1.71352 9.6 30. 1.73355 9.6 40. 1.74970 9.6 45. 1.75426 9.6 50. 1.75849 9.6 60. 1.74864 9.6 70. 1.69415 9.6 75. 1.61038 9.6 80. 1.39407 9.6 81. 1.32259 9.6 82. 1.23729 9.6 83. 1.13485 9.6 84. 1.01706 9.6 85. 0.87831 9.6 86. 0.72210 9.6 87. 0.54780 9.6 88. 0.36146 9.6 89. 0.17537 10.0 0. 1.68123 10.0 10. 1.69581 10.0 20. 1.71341 10.0 30. 1.73271 10.0 40. 1.74654 10.0 45. 1.75457 10.0 50. 1.75421 10.0 60. 1.74859 10.0 70. 1.69956 10.0 75. 1.61788 10.0 80. 1.40845 10.0 81. 1.33829 10.0 82. 1.25357 10.0 83. 1.15434 10.0 84. 1.03507 10.0 85. 0.89680 10.0 86. 0.73731 10.0 87. 0.56084 10.0 88. 0.37080 10.0 89. 0.17959 11.0 0. 1.67989 11.0 10. 1.69064 11.0 20. 1.70857 11.0 30. 1.72578 11.0 40. 1.74137 11.0 45. 1.74903 11.0 50. 1.75181 11.0 60. 1.74334 11.0 70. 1.70264 11.0 75. 1.62960 11.0 80. 1.44105 11.0 81. 1.37387 11.0 82. 1.29306 11.0 83. 1.19433 11.0 84. 1.07285 11.0 85. 0.93769 11.0 86. 0.77059 11.0 87. 0.59233 11.0 88. 0.39238 11.0 89. 0.19041 12.0 0. 1.67740 12.0 10. 1.68587 12.0 20. 1.70338 12.0 30. 1.72252 12.0 40. 1.73954 12.0 45. 1.74245 12.0 50. 1.74436 12.0 60. 1.74016 12.0 70. 1.70341 12.0 75. 1.64196 12.0 80. 1.46887 12.0 81. 1.40600 12.0 82. 1.32117 12.0 83. 1.23315 12.0 84. 1.11565 12.0 85. 0.97637 12.0 86. 0.81154 12.0 87. 0.62243 12.0 88. 0.41364 12.0 89. 0.20074 13.0 0. 1.67260 13.0 10. 1.68381 13.0 20. 1.70048 13.0 30. 1.71903 13.0 40. 1.73327 13.0 45. 1.73798 13.0 50. 1.74130 13.0 60. 1.73453 13.0 70. 1.70465 13.0 75. 1.65196 13.0 80. 1.49290 13.0 81. 1.43277 13.0 82. 1.34621 13.0 83. 1.26608 13.0 84. 1.15215 13.0 85. 1.00305 13.0 86. 0.84599 13.0 87. 0.65111 13.0 88. 0.43536 13.0 89. 0.21071 14.0 0. 1.66951 14.0 10. 1.68062 14.0 20. 1.69552 14.0 30. 1.71344 14.0 40. 1.72833 14.0 45. 1.73351 14.0 50. 1.73558 14.0 60. 1.72937 14.0 70. 1.70229 14.0 75. 1.65735 14.0 80. 1.51206 14.0 81. 1.45671 14.0 82. 1.38430 14.0 83. 1.29662 14.0 84. 1.18366 14.0 85. 1.04561 14.0 86. 0.87773 14.0 87. 0.67877 14.0 88. 0.45521 14.0 89. 0.22038 15.0 0. 1.66695 15.0 10. 1.67786 15.0 20. 1.69271 15.0 30. 1.71158 15.0 40. 1.72541 15.0 45. 1.73204 15.0 50. 1.73223 15.0 60. 1.72454 15.0 70. 1.70203 15.0 75. 1.66094 15.0 80. 1.52872 15.0 81. 1.47553 15.0 82. 1.40959 15.0 83. 1.32256 15.0 84. 1.21405 15.0 85. 1.07636 15.0 86. 0.90798 15.0 87. 0.70607 15.0 88. 0.47487 15.0 89. 0.23034 16.0 0. 1.66572 16.0 10. 1.67279 16.0 20. 1.69068 16.0 30. 1.70617 16.0 40. 1.72105 16.0 45. 1.72714 16.0 50. 1.72722 16.0 60. 1.72143 16.0 70. 1.69940 16.0 75. 1.66336 16.0 80. 1.54283 16.0 81. 1.49512 16.0 82. 1.42694 16.0 83. 1.34870 16.0 84. 1.24193 16.0 85. 1.10566 16.0 86. 0.93625 16.0 87. 0.73179 16.0 88. 0.49330 16.0 89. 0.24036 17.0 0. 1.66173 17.0 10. 1.67452 17.0 20. 1.68546 17.0 30. 1.70525 17.0 40. 1.71352 17.0 45. 1.72156 17.0 50. 1.72331 17.0 60. 1.71785 17.0 70. 1.69723 17.0 75. 1.66495 17.0 80. 1.55642 17.0 81. 1.50951 17.0 82. 1.44970 17.0 83. 1.37065 17.0 84. 1.26592 17.0 85. 1.13258 17.0 86. 0.96374 17.0 87. 0.75668 17.0 88. 0.51235 17.0 89. 0.24940 18.0 0. 1.66021 18.0 10. 1.66922 18.0 20. 1.68362 18.0 30. 1.70015 18.0 40. 1.71655 18.0 45. 1.71694 18.0 50. 1.71930 18.0 60. 1.71489 18.0 70. 1.69300 18.0 75. 1.66658 18.0 80. 1.56998 18.0 81. 1.52538 18.0 82. 1.46778 18.0 83. 1.39236 18.0 84. 1.29096 18.0 85. 1.15874 18.0 86. 0.98983 18.0 87. 0.78063 18.0 88. 0.52990 18.0 89. 0.25896 19.0 0. 1.65869 19.0 10. 1.66633 19.0 20. 1.67892 19.0 30. 1.69461 19.0 40. 1.71153 19.0 45. 1.71529 19.0 50. 1.71809 19.0 60. 1.70962 19.0 70. 1.69196 19.0 75. 1.66447 19.0 80. 1.57712 19.0 81. 1.53659 19.0 82. 1.48158 19.0 83. 1.40868 19.0 84. 1.31220 19.0 85. 1.18342 19.0 86. 1.01429 19.0 87. 0.80315 19.0 88. 0.54780 19.0 89. 0.26814 20.0 0. 1.65619 20.0 10. 1.66340 20.0 20. 1.67826 20.0 30. 1.69481 20.0 40. 1.70358 20.0 45. 1.71137 20.0 50. 1.71434 20.0 60. 1.70597 20.0 70. 1.69090 20.0 75. 1.66636 20.0 80. 1.58510 20.0 81. 1.54736 20.0 82. 1.49463 20.0 83. 1.42618 20.0 84. 1.33155 20.0 85. 1.20374 20.0 86. 1.03742 20.0 87. 0.82463 20.0 88. 0.55388 20.0 89. 0.27704 25.0 0. 1.64191 25.0 10. 1.64994 25.0 20. 1.66553 25.0 30. 1.67768 25.0 40. 1.69539 25.0 45. 1.69579 25.0 50. 1.69843 25.0 60. 1.69244 25.0 70. 1.67533 25.0 75. 1.66033 25.0 80. 1.60997 25.0 81. 1.58490 25.0 82. 1.54552 25.0 83. 1.49002 25.0 84. 1.40991 25.0 85. 1.29783 25.0 86. 1.13795 25.0 87. 0.92416 25.0 88. 0.64728 25.0 89. 0.32127 30.0 0. 1.63497 30.0 10. 1.64513 30.0 20. 1.65899 30.0 30. 1.66838 30.0 40. 1.68095 30.0 45. 1.68908 30.0 50. 1.68967 30.0 60. 1.68567 30.0 70. 1.66416 30.0 75. 1.65433 30.0 80. 1.62117 30.0 81. 1.60154 30.0 82. 1.57602 30.0 83. 1.53071 30.0 84. 1.46582 30.0 85. 1.36686 30.0 86. 1.21946 30.0 87. 1.00778 30.0 88. 0.72079 30.0 89. 0.36359 ____________________________________________________