Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Cr 24 L3M23V 0.527 0.574 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 0.7 0. 1.09418 0.7 10. 1.09157 0.7 20. 1.08252 0.7 30. 1.06510 0.7 40. 1.03378 0.7 45. 1.00779 0.7 50. 0.97567 0.7 60. 0.89044 0.7 70. 0.75015 0.7 75. 0.64125 0.7 80. 0.49016 0.7 81. 0.45347 0.7 82. 0.41424 0.7 83. 0.37304 0.7 84. 0.32892 0.7 85. 0.28298 0.7 86. 0.23442 0.7 87. 0.18461 0.7 88. 0.13401 0.7 89. 0.08559 1.0 0. 1.41995 1.0 10. 1.41833 1.0 20. 1.41405 1.0 30. 1.40607 1.0 40. 1.39131 1.0 45. 1.37585 1.0 50. 1.35635 1.0 60. 1.27913 1.0 70. 1.11500 1.0 75. 0.96800 1.0 80. 0.74753 1.0 81. 0.68708 1.0 82. 0.63201 1.0 83. 0.56750 1.0 84. 0.49915 1.0 85. 0.42743 1.0 86. 0.35081 1.0 87. 0.27234 1.0 88. 0.19257 1.0 89. 0.11611 1.5 0. 1.58871 1.5 10. 1.58873 1.5 20. 1.59102 1.5 30. 1.59129 1.5 40. 1.59170 1.5 45. 1.58411 1.5 50. 1.57523 1.5 60. 1.52065 1.5 70. 1.36891 1.5 75. 1.21280 1.5 80. 0.95866 1.5 81. 0.89463 1.5 82. 0.82144 1.5 83. 0.73549 1.5 84. 0.65430 1.5 85. 0.55295 1.5 86. 0.46100 1.5 87. 0.35603 1.5 88. 0.24804 1.5 89. 0.14212 2.0 0. 1.63989 2.0 10. 1.64274 2.0 20. 1.64544 2.0 30. 1.65077 2.0 40. 1.65349 2.0 45. 1.65370 2.0 50. 1.65130 2.0 60. 1.61231 2.0 70. 1.48445 2.0 75. 1.33990 2.0 80. 1.08872 2.0 81. 1.01907 2.0 82. 0.92862 2.0 83. 0.85519 2.0 84. 0.76045 2.0 85. 0.65472 2.0 86. 0.50924 2.0 87. 0.41856 2.0 88. 0.29008 2.0 89. 0.16185 2.5 0. 1.65864 2.5 10. 1.65972 2.5 20. 1.66152 2.5 30. 1.67364 2.5 40. 1.68157 2.5 45. 1.68374 2.5 50. 1.68251 2.5 60. 1.65517 2.5 70. 1.54778 2.5 75. 1.42187 2.5 80. 1.18104 2.5 81. 1.11132 2.5 82. 1.03315 2.5 83. 0.94349 2.5 84. 0.84210 2.5 85. 0.73053 2.5 86. 0.60570 2.5 87. 0.46953 2.5 88. 0.32579 2.5 89. 0.17890 3.0 0. 1.66091 3.0 10. 1.66418 3.0 20. 1.67124 3.0 30. 1.68060 3.0 40. 1.69275 3.0 45. 1.69511 3.0 50. 1.69520 3.0 60. 1.67761 3.0 70. 1.58845 3.0 75. 1.47623 3.0 80. 1.25074 3.0 81. 1.18283 3.0 82. 1.09965 3.0 83. 1.01571 3.0 84. 0.91315 3.0 85. 0.77340 3.0 86. 0.66382 3.0 87. 0.51675 3.0 88. 0.35911 3.0 89. 0.19467 3.5 0. 1.66176 3.5 10. 1.66514 3.5 20. 1.66665 3.5 30. 1.68544 3.5 40. 1.69404 3.5 45. 1.69949 3.5 50. 1.70242 3.5 60. 1.68785 3.5 70. 1.61458 3.5 75. 1.51640 3.5 80. 1.30680 3.5 81. 1.24119 3.5 82. 1.16516 3.5 83. 1.07641 3.5 84. 0.97250 3.5 85. 0.85354 3.5 86. 0.71536 3.5 87. 0.56087 3.5 88. 0.38976 3.5 89. 0.21038 4.0 0. 1.65763 4.0 10. 1.65870 4.0 20. 1.66911 4.0 30. 1.68475 4.0 40. 1.69525 4.0 45. 1.70151 4.0 50. 1.70827 4.0 60. 1.69584 4.0 70. 1.63223 4.0 75. 1.54389 4.0 80. 1.35176 4.0 81. 1.28936 4.0 82. 1.21526 4.0 83. 1.12827 4.0 84. 1.02552 4.0 85. 0.90466 4.0 86. 0.76258 4.0 87. 0.59978 4.0 88. 0.41798 4.0 89. 0.22491 4.4 0. 1.65919 4.4 10. 1.66064 4.4 20. 1.67025 4.4 30. 1.68210 4.4 40. 1.69592 4.4 45. 1.70221 4.4 50. 1.70521 4.4 60. 1.69714 4.4 70. 1.64362 4.4 75. 1.56402 4.4 80. 1.38249 4.4 81. 1.32269 4.4 82. 1.25063 4.4 83. 1.16491 4.4 84. 1.06215 4.4 85. 0.87169 4.4 86. 0.79701 4.4 87. 0.62954 4.4 88. 0.43824 4.4 89. 0.23597 4.8 0. 1.65277 4.8 10. 1.65647 4.8 20. 1.66615 4.8 30. 1.67926 4.8 40. 1.69501 4.8 45. 1.70275 4.8 50. 1.70555 4.8 60. 1.69833 4.8 70. 1.64927 4.8 75. 1.57774 4.8 80. 1.40712 4.8 81. 1.31705 4.8 82. 1.24997 4.8 83. 1.19796 4.8 84. 1.09576 4.8 85. 0.97423 4.8 86. 0.82880 4.8 87. 0.65678 4.8 88. 0.46026 4.8 89. 0.24658 5.0 0. 1.65336 5.0 10. 1.65876 5.0 20. 1.66579 5.0 30. 1.67905 5.0 40. 1.69584 5.0 45. 1.70093 5.0 50. 1.70564 5.0 60. 1.69794 5.0 70. 1.65289 5.0 75. 1.58333 5.0 80. 1.42016 5.0 81. 1.36456 5.0 82. 1.29527 5.0 83. 1.21333 5.0 84. 1.11175 5.0 85. 0.99011 5.0 86. 0.84340 5.0 87. 0.67007 5.0 88. 0.47079 5.0 89. 0.25195 5.2 0. 1.65074 5.2 10. 1.65447 5.2 20. 1.66616 5.2 30. 1.67758 5.2 40. 1.69335 5.2 45. 1.70044 5.2 50. 1.70465 5.2 60. 1.69814 5.2 70. 1.65501 5.2 75. 1.59095 5.2 80. 1.42825 5.2 81. 1.37592 5.2 82. 1.30804 5.2 83. 1.22615 5.2 84. 1.12701 5.2 85. 1.00481 5.2 86. 0.85801 5.2 87. 0.68377 5.2 88. 0.46208 5.2 89. 0.25724 5.6 0. 1.64814 5.6 10. 1.65583 5.6 20. 1.66219 5.6 30. 1.67489 5.6 40. 1.69498 5.6 45. 1.69970 5.6 50. 1.70083 5.6 60. 1.69729 5.6 70. 1.65717 5.6 75. 1.60063 5.6 80. 1.45036 5.6 81. 1.39716 5.6 82. 1.33237 5.6 83. 1.25488 5.6 84. 1.13257 5.6 85. 1.03492 5.6 86. 0.88618 5.6 87. 0.70852 5.6 88. 0.49937 5.6 89. 0.26770 6.0 0. 1.64588 6.0 10. 1.65019 6.0 20. 1.66315 6.0 30. 1.67371 6.0 40. 1.69271 6.0 45. 1.69718 6.0 50. 1.70019 6.0 60. 1.69556 6.0 70. 1.66154 6.0 75. 1.60624 6.0 80. 1.46779 6.0 81. 1.41674 6.0 82. 1.35559 6.0 83. 1.27891 6.0 84. 1.18150 6.0 85. 1.06128 6.0 86. 0.91367 6.0 87. 0.73260 6.0 88. 0.50462 6.0 89. 0.27755 6.5 0. 1.64449 6.5 10. 1.64556 6.5 20. 1.65975 6.5 30. 1.67445 6.5 40. 1.68633 6.5 45. 1.69490 6.5 50. 1.70003 6.5 60. 1.69496 6.5 70. 1.66219 6.5 75. 1.61477 6.5 80. 1.48504 6.5 81. 1.43795 6.5 82. 1.37934 6.5 83. 1.30601 6.5 84. 1.21245 6.5 85. 1.09275 6.5 86. 0.94331 6.5 87. 0.76026 6.5 88. 0.54098 6.5 89. 0.28996 7.0 0. 1.64385 7.0 10. 1.64657 7.0 20. 1.65502 7.0 30. 1.66936 7.0 40. 1.68492 7.0 45. 1.69074 7.0 50. 1.69418 7.0 60. 1.69302 7.0 70. 1.66555 7.0 75. 1.61863 7.0 80. 1.50181 7.0 81. 1.45817 7.0 82. 1.39635 7.0 83. 1.31139 7.0 84. 1.23879 7.0 85. 1.12176 7.0 86. 0.97346 7.0 87. 0.78840 7.0 88. 0.56252 7.0 89. 0.30184 7.5 0. 1.64074 7.5 10. 1.64394 7.5 20. 1.65179 7.5 30. 1.67011 7.5 40. 1.68451 7.5 45. 1.68990 7.5 50. 1.69370 7.5 60. 1.68844 7.5 70. 1.66558 7.5 75. 1.62355 7.5 80. 1.51479 7.5 81. 1.47495 7.5 82. 1.42146 7.5 83. 1.35114 7.5 84. 1.26242 7.5 85. 1.14874 7.5 86. 1.00132 7.5 87. 0.81392 7.5 88. 0.58384 7.5 89. 0.31352 8.0 0. 1.63773 8.0 10. 1.64098 8.0 20. 1.65113 8.0 30. 1.66442 8.0 40. 1.68201 8.0 45. 1.68697 8.0 50. 1.69159 8.0 60. 1.68842 8.0 70. 1.66180 8.0 75. 1.62791 8.0 80. 1.52840 8.0 81. 1.48848 8.0 82. 1.43814 8.0 83. 1.37118 8.0 84. 1.28495 8.0 85. 1.17255 8.0 86. 1.02619 8.0 87. 0.83932 8.0 88. 0.60407 8.0 89. 0.32551 8.5 0. 1.63715 8.5 10. 1.63929 8.5 20. 1.65077 8.5 30. 1.66358 8.5 40. 1.68271 8.5 45. 1.68372 8.5 50. 1.69000 8.5 60. 1.68707 8.5 70. 1.66300 8.5 75. 1.63006 8.5 80. 1.53697 8.5 81. 1.50150 8.5 82. 1.45216 8.5 83. 1.38889 8.5 84. 1.30612 8.5 85. 1.19627 8.5 86. 1.05173 8.5 87. 0.86280 8.5 88. 0.62469 8.5 89. 0.33774 9.0 0. 1.62996 9.0 10. 1.63699 9.0 20. 1.64947 9.0 30. 1.66247 9.0 40. 1.67985 9.0 45. 1.68422 9.0 50. 1.68797 9.0 60. 1.68392 9.0 70. 1.66034 9.0 75. 1.63227 9.0 80. 1.54250 9.0 81. 1.51003 9.0 82. 1.46398 9.0 83. 1.40438 9.0 84. 1.32426 9.0 85. 1.21669 9.0 86. 1.07410 9.0 87. 0.88668 9.0 88. 0.64381 9.0 89. 0.34905 9.5 0. 1.63111 9.5 10. 1.63342 9.5 20. 1.64524 9.5 30. 1.66135 9.5 40. 1.67141 9.5 45. 1.68081 9.5 50. 1.68568 9.5 60. 1.68128 9.5 70. 1.66143 9.5 75. 1.63167 9.5 80. 1.55294 9.5 81. 1.52178 9.5 82. 1.47718 9.5 83. 1.41874 9.5 84. 1.34177 9.5 85. 1.23551 9.5 86. 1.09522 9.5 87. 0.90784 9.5 88. 0.66135 9.5 89. 0.35998 10.0 0. 1.63019 10.0 10. 1.63663 10.0 20. 1.64496 10.0 30. 1.66139 10.0 40. 1.67333 10.0 45. 1.67932 10.0 50. 1.68660 10.0 60. 1.68121 10.0 70. 1.65972 10.0 75. 1.63222 10.0 80. 1.56110 10.0 81. 1.52988 10.0 82. 1.48793 10.0 83. 1.43235 10.0 84. 1.35844 10.0 85. 1.25581 10.0 86. 1.11515 10.0 87. 0.92691 10.0 88. 0.67945 10.0 89. 0.37065 11.0 0. 1.62385 11.0 10. 1.63173 11.0 20. 1.64156 11.0 30. 1.66031 11.0 40. 1.66883 11.0 45. 1.67870 11.0 50. 1.67953 11.0 60. 1.67530 11.0 70. 1.65594 11.0 75. 1.63165 11.0 80. 1.56979 11.0 81. 1.54212 11.0 82. 1.50632 11.0 83. 1.45540 11.0 84. 1.38607 11.0 85. 1.28769 11.0 86. 1.15189 11.0 87. 0.96500 11.0 88. 0.71252 11.0 89. 0.39101 12.0 0. 1.62447 12.0 10. 1.62782 12.0 20. 1.63834 12.0 30. 1.65309 12.0 40. 1.66682 12.0 45. 1.67277 12.0 50. 1.67561 12.0 60. 1.67318 12.0 70. 1.65374 12.0 75. 1.63323 12.0 80. 1.57773 12.0 81. 1.55428 12.0 82. 1.52163 12.0 83. 1.47394 12.0 84. 1.40772 12.0 85. 1.30210 12.0 86. 1.18546 12.0 87. 0.99940 12.0 88. 0.74312 12.0 89. 0.41066 13.0 0. 1.62339 13.0 10. 1.62502 13.0 20. 1.63792 13.0 30. 1.65148 13.0 40. 1.66424 13.0 45. 1.67100 13.0 50. 1.67528 13.0 60. 1.67224 13.0 70. 1.64943 13.0 75. 1.63130 13.0 80. 1.58408 13.0 81. 1.56147 13.0 82. 1.53339 13.0 83. 1.49136 13.0 84. 1.42938 13.0 85. 1.34298 13.0 86. 1.19834 13.0 87. 1.03060 13.0 88. 0.77385 13.0 89. 0.42935 14.0 0. 1.61733 14.0 10. 1.62521 14.0 20. 1.63319 14.0 30. 1.64600 14.0 40. 1.66462 14.0 45. 1.66810 14.0 50. 1.67149 14.0 60. 1.66591 14.0 70. 1.64575 14.0 75. 1.62962 14.0 80. 1.58752 14.0 81. 1.56878 14.0 82. 1.54297 14.0 83. 1.50417 14.0 84. 1.44760 14.0 85. 1.36349 14.0 86. 1.24119 14.0 87. 1.06053 14.0 88. 0.80062 14.0 89. 0.44765 15.0 0. 1.61799 15.0 10. 1.61981 15.0 20. 1.63348 15.0 30. 1.64581 15.0 40. 1.66362 15.0 45. 1.66638 15.0 50. 1.66806 15.0 60. 1.66121 15.0 70. 1.64506 15.0 75. 1.62925 15.0 80. 1.58916 15.0 81. 1.57447 15.0 82. 1.55000 15.0 83. 1.51651 15.0 84. 1.46233 15.0 85. 1.38482 15.0 86. 1.26554 15.0 87. 1.08942 15.0 88. 0.82740 15.0 89. 0.46577 16.0 0. 1.61766 16.0 10. 1.62035 16.0 20. 1.62838 16.0 30. 1.64407 16.0 40. 1.65844 16.0 45. 1.66472 16.0 50. 1.66490 16.0 60. 1.66214 16.0 70. 1.64073 16.0 75. 1.62547 16.0 80. 1.59185 16.0 81. 1.57854 16.0 82. 1.55529 16.0 83. 1.52509 16.0 84. 1.47715 16.0 85. 1.40086 16.0 86. 1.28805 16.0 87. 1.11299 16.0 88. 0.85299 16.0 89. 0.48290 17.0 0. 1.61561 17.0 10. 1.61643 17.0 20. 1.62607 17.0 30. 1.64047 17.0 40. 1.65486 17.0 45. 1.66008 17.0 50. 1.66380 17.0 60. 1.65860 17.0 70. 1.63899 17.0 75. 1.62468 17.0 80. 1.59349 17.0 81. 1.58183 17.0 82. 1.56058 17.0 83. 1.53222 17.0 84. 1.48702 17.0 85. 1.41753 17.0 86. 1.31008 17.0 87. 1.13827 17.0 88. 0.87726 17.0 89. 0.49960 18.0 0. 1.61034 18.0 10. 1.61441 18.0 20. 1.62620 18.0 30. 1.64063 18.0 40. 1.65337 18.0 45. 1.65722 18.0 50. 1.66328 18.0 60. 1.65581 18.0 70. 1.63606 18.0 75. 1.62197 18.0 80. 1.59370 18.0 81. 1.58336 18.0 82. 1.56629 18.0 83. 1.53742 18.0 84. 1.49585 18.0 85. 1.43152 18.0 86. 1.32730 18.0 87. 1.15978 18.0 88. 0.89959 18.0 89. 0.51633 19.0 0. 1.60833 19.0 10. 1.61335 19.0 20. 1.62209 19.0 30. 1.63753 19.0 40. 1.65135 19.0 45. 1.65511 19.0 50. 1.65963 19.0 60. 1.65412 19.0 70. 1.63471 19.0 75. 1.62100 19.0 80. 1.59732 19.0 81. 1.58715 19.0 82. 1.57066 19.0 83. 1.54561 19.0 84. 1.50686 19.0 85. 1.44353 19.0 86. 1.34240 19.0 87. 1.18095 19.0 88. 0.92234 19.0 89. 0.53249 20.0 0. 1.60736 20.0 10. 1.60681 20.0 20. 1.62444 20.0 30. 1.63481 20.0 40. 1.65068 20.0 45. 1.65587 20.0 50. 1.65608 20.0 60. 1.65246 20.0 70. 1.63022 20.0 75. 1.61954 20.0 80. 1.59580 20.0 81. 1.58660 20.0 82. 1.57214 20.0 83. 1.54891 20.0 84. 1.51333 20.0 85. 1.45399 20.0 86. 1.35952 20.0 87. 1.20132 20.0 88. 0.94163 20.0 89. 0.54763 25.0 0. 1.59601 25.0 10. 1.60299 25.0 20. 1.61311 25.0 30. 1.62979 25.0 40. 1.64499 25.0 45. 1.64800 25.0 50. 1.65030 25.0 60. 1.64199 25.0 70. 1.62224 25.0 75. 1.60955 25.0 80. 1.59231 25.0 81. 1.58571 25.0 82. 1.57995 25.0 83. 1.56351 25.0 84. 1.53985 25.0 85. 1.49666 25.0 86. 1.41892 25.0 87. 1.27887 25.0 88. 1.03290 25.0 89. 0.62058 30.0 0. 1.59277 30.0 10. 1.59667 30.0 20. 1.60741 30.0 30. 1.62340 30.0 40. 1.63709 30.0 45. 1.64278 30.0 50. 1.64466 30.0 60. 1.63768 30.0 70. 1.61619 30.0 75. 1.60124 30.0 80. 1.58847 30.0 81. 1.58347 30.0 82. 1.57612 30.0 83. 1.56815 30.0 84. 1.55130 30.0 85. 1.51744 30.0 86. 1.45693 30.0 87. 1.33623 30.0 88. 1.10668 30.0 89. 0.68503 ____________________________________________________