Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Au 79 M_5N67N67 2.015 2.206 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor ____________________________________________________ 2.4 0. 1.13193 2.4 10. 1.12778 2.4 20. 1.11579 2.4 30. 1.09546 2.4 40. 1.05634 2.4 45. 1.02780 2.4 50. 0.99201 2.4 60. 0.90002 2.4 70. 0.75108 2.4 75. 0.63681 2.4 80. 0.48152 2.4 81. 0.44407 2.4 82. 0.40409 2.4 83. 0.36120 2.4 84. 0.31623 2.4 85. 0.26806 2.4 86. 0.21797 2.4 87. 0.16646 2.4 88. 0.11470 2.4 89. 0.06511 2.8 0. 1.44574 2.8 10. 1.44228 2.8 20. 1.43222 2.8 30. 1.40896 2.8 40. 1.37450 2.8 45. 1.34532 2.8 50. 1.31346 2.8 60. 1.20674 2.8 70. 1.01613 2.8 75. 0.86308 2.8 80. 0.64912 2.8 81. 0.59682 2.8 82. 0.54228 2.8 83. 0.48318 2.8 84. 0.42113 2.8 85. 0.35577 2.8 86. 0.28754 2.8 87. 0.21767 2.8 88. 0.14801 2.8 89. 0.08170 3.0 0. 1.53705 3.0 10. 1.53199 3.0 20. 1.52137 3.0 30. 1.50140 3.0 40. 1.46540 3.0 45. 1.44006 3.0 50. 1.40488 3.0 60. 1.29711 3.0 70. 1.09394 3.0 75. 0.93066 3.0 80. 0.69919 3.0 81. 0.64365 3.0 82. 0.58487 3.0 83. 0.52011 3.0 84. 0.45305 3.0 85. 0.38288 3.0 86. 0.30922 3.0 87. 0.23336 3.0 88. 0.15799 3.0 89. 0.08666 3.2 0. 1.60865 3.2 10. 1.60503 3.2 20. 1.59164 3.2 30. 1.57363 3.2 40. 1.53871 3.2 45. 1.50356 3.2 50. 1.47895 3.2 60. 1.36569 3.2 70. 1.15618 3.2 75. 0.98253 3.2 80. 0.74079 3.2 81. 0.68230 3.2 82. 0.61851 3.2 83. 0.55143 3.2 84. 0.48081 3.2 85. 0.40603 3.2 86. 0.32757 3.2 87. 0.24724 3.2 88. 0.16694 3.2 89. 0.09066 3.6 0. 1.71367 3.6 10. 1.71254 3.6 20. 1.70057 3.6 30. 1.68121 3.6 40. 1.64733 3.6 45. 1.62248 3.6 50. 1.58782 3.6 60. 1.47278 3.6 70. 1.25148 3.6 75. 1.06847 3.6 80. 0.80797 3.6 81. 0.74385 3.6 82. 0.67517 3.6 83. 0.60229 3.6 84. 0.52488 3.6 85. 0.44317 3.6 86. 0.35743 3.6 87. 0.26945 3.6 88. 0.18118 3.6 89. 0.09752 4.0 0. 1.79147 4.0 10. 1.78505 4.0 20. 1.77660 4.0 30. 1.75780 4.0 40. 1.72511 4.0 45. 1.69649 4.0 50. 1.65765 4.0 60. 1.54874 4.0 70. 1.32239 4.0 75. 1.13333 4.0 80. 0.86063 4.0 81. 0.79217 4.0 82. 0.72097 4.0 83. 0.64309 4.0 84. 0.56164 4.0 85. 0.47437 4.0 86. 0.38290 4.0 87. 0.28809 4.0 88. 0.19321 4.0 89. 0.10282 4.4 0. 1.84435 4.4 10. 1.84314 4.4 20. 1.83318 4.4 30. 1.81341 4.4 40. 1.78294 4.4 45. 1.75753 4.4 50. 1.72434 4.4 60. 1.60550 4.4 70. 1.37717 4.4 75. 1.18504 4.4 80. 0.90459 4.4 81. 0.83402 4.4 82. 0.75937 4.4 83. 0.67907 4.4 84. 0.59275 4.4 85. 0.50141 4.4 86. 0.40474 4.4 87. 0.30440 4.4 88. 0.20279 4.4 89. 0.10774 4.8 0. 1.88695 4.8 10. 1.88327 4.8 20. 1.87280 4.8 30. 1.85534 4.8 40. 1.82569 4.8 45. 1.80022 4.8 50. 1.76537 4.8 60. 1.65049 4.8 70. 1.42299 4.8 75. 1.22789 4.8 80. 0.94267 4.8 81. 0.87084 4.8 82. 0.79336 4.8 83. 0.71113 4.8 84. 0.62168 4.8 85. 0.52568 4.8 86. 0.42506 4.8 87. 0.32000 4.8 88. 0.21390 4.8 89. 0.11239 5.0 0. 1.90074 5.0 10. 1.89806 5.0 20. 1.89350 5.0 30. 1.87248 5.0 40. 1.84217 5.0 45. 1.81793 5.0 50. 1.78666 5.0 60. 1.66943 5.0 70. 1.44079 5.0 75. 1.24691 5.0 80. 0.96024 5.0 81. 0.88699 5.0 82. 0.80835 5.0 83. 0.72475 5.0 84. 0.63426 5.0 85. 0.53733 5.0 86. 0.43436 5.0 87. 0.32668 5.0 88. 0.21842 5.0 89. 0.11426 5.2 0. 1.91818 5.2 10. 1.91422 5.2 20. 1.90614 5.2 30. 1.88752 5.2 40. 1.85869 5.2 45. 1.83392 5.2 50. 1.79949 5.2 60. 1.68702 5.2 70. 1.45769 5.2 75. 1.26612 5.2 80. 0.97722 5.2 81. 0.90395 5.2 82. 0.82477 5.2 83. 0.73845 5.2 84. 0.64689 5.2 85. 0.54610 5.2 86. 0.44391 5.2 87. 0.33400 5.2 88. 0.22299 5.2 89. 0.11635 5.6 0. 1.94377 5.6 10. 1.94203 5.6 20. 1.93343 5.6 30. 1.91624 5.6 40. 1.88412 5.6 45. 1.86185 5.6 50. 1.82789 5.6 60. 1.71449 5.6 70. 1.48964 5.6 75. 1.29710 5.6 80. 1.00755 5.6 81. 0.93284 5.6 82. 0.85248 5.6 83. 0.76563 5.6 84. 0.67064 5.6 85. 0.56896 5.6 86. 0.46053 5.6 87. 0.34681 5.6 88. 0.23207 5.6 89. 0.12037 6.0 0. 1.96394 6.0 10. 1.96004 6.0 20. 1.95283 6.0 30. 1.93599 6.0 40. 1.90602 6.0 45. 1.88052 6.0 50. 1.84910 6.0 60. 1.73602 6.0 70. 1.51651 6.0 75. 1.32469 6.0 80. 1.03350 6.0 81. 0.96038 6.0 82. 0.87812 6.0 83. 0.78951 6.0 84. 0.69233 6.0 85. 0.58957 6.0 86. 0.47788 6.0 87. 0.36001 6.0 88. 0.24029 6.0 89. 0.12408 6.5 0. 1.98200 6.5 10. 1.98291 6.5 20. 1.97303 6.5 30. 1.95457 6.5 40. 1.92509 6.5 45. 1.90350 6.5 50. 1.87124 6.5 60. 1.76127 6.5 70. 1.54687 6.5 75. 1.35661 6.5 80. 1.06648 6.5 81. 0.99147 6.5 82. 0.90753 6.5 83. 0.81686 6.5 84. 0.71916 6.5 85. 0.61266 6.5 86. 0.49743 6.5 87. 0.37545 6.5 88. 0.25027 6.5 89. 0.12878 7.0 0. 2.00064 7.0 10. 1.99807 7.0 20. 1.99187 7.0 30. 1.97271 7.0 40. 1.94122 7.0 45. 1.91782 7.0 50. 1.88518 7.0 60. 1.78065 7.0 70. 1.56781 7.0 75. 1.38457 7.0 80. 1.09355 7.0 81. 1.01812 7.0 82. 0.93499 7.0 83. 0.84297 7.0 84. 0.74323 7.0 85. 0.63431 7.0 86. 0.51593 7.0 87. 0.38988 7.0 88. 0.25967 7.0 89. 0.13313 7.5 0. 2.01235 7.5 10. 2.00867 7.5 20. 2.00057 7.5 30. 1.98459 7.5 40. 1.95378 7.5 45. 1.93018 7.5 50. 1.90079 7.5 60. 1.79499 7.5 70. 1.59066 7.5 75. 1.40825 7.5 80. 1.12117 7.5 81. 1.04585 7.5 82. 0.96004 7.5 83. 0.86787 7.5 84. 0.76627 7.5 85. 0.65455 7.5 86. 0.53307 7.5 87. 0.40394 7.5 88. 0.26954 7.5 89. 0.13753 8.0 0. 2.02319 8.0 10. 2.02020 8.0 20. 2.01114 8.0 30. 1.99479 8.0 40. 1.96113 8.0 45. 1.94000 8.0 50. 1.90810 8.0 60. 1.80727 8.0 70. 1.60561 8.0 75. 1.42718 8.0 80. 1.14556 8.0 81. 1.06812 8.0 82. 0.96900 8.0 83. 0.89080 8.0 84. 0.78794 8.0 85. 0.67421 8.0 86. 0.55036 8.0 87. 0.41705 8.0 88. 0.27833 8.0 89. 0.13560 8.5 0. 2.03067 8.5 10. 2.02943 8.5 20. 2.01912 8.5 30. 2.00313 8.5 40. 1.97258 8.5 45. 1.94921 8.5 50. 1.91764 8.5 60. 1.81495 8.5 70. 1.62141 8.5 75. 1.44928 8.5 80. 1.16787 8.5 81. 1.08219 8.5 82. 1.00745 8.5 83. 0.91230 8.5 84. 0.80782 8.5 85. 0.69332 8.5 86. 0.56663 8.5 87. 0.43037 8.5 88. 0.28776 8.5 89. 0.14577 9.0 0. 2.03720 9.0 10. 2.03354 9.0 20. 2.02600 9.0 30. 2.00463 9.0 40. 1.97618 9.0 45. 1.95439 9.0 50. 1.92285 9.0 60. 1.82220 9.0 70. 1.63459 9.0 75. 1.46436 9.0 80. 1.18643 9.0 81. 1.11163 9.0 82. 1.02626 9.0 83. 0.93263 9.0 84. 0.82745 9.0 85. 0.71095 9.0 86. 0.58192 9.0 87. 0.44240 9.0 88. 0.28695 9.0 89. 0.14982 9.5 0. 2.04283 9.5 10. 2.04056 9.5 20. 2.02827 9.5 30. 2.01258 9.5 40. 1.98054 9.5 45. 1.95730 9.5 50. 1.92598 9.5 60. 1.82844 9.5 70. 1.64646 9.5 75. 1.48048 9.5 80. 1.20258 9.5 81. 1.13231 9.5 82. 1.04759 9.5 83. 0.95129 9.5 84. 0.84649 9.5 85. 0.72777 9.5 86. 0.59629 9.5 87. 0.45497 9.5 88. 0.30417 9.5 89. 0.15348 10.0 0. 2.04693 10.0 10. 2.04386 10.0 20. 2.03702 10.0 30. 2.01663 10.0 40. 1.98346 10.0 45. 1.95779 10.0 50. 1.93008 10.0 60. 1.83561 10.0 70. 1.65554 10.0 75. 1.49324 10.0 80. 1.22530 10.0 81. 1.15018 10.0 82. 1.06557 10.0 83. 0.97048 10.0 84. 0.86324 10.0 85. 0.74373 10.0 86. 0.61162 10.0 87. 0.46592 10.0 88. 0.31202 10.0 89. 0.15728 11.0 0. 2.05388 11.0 10. 2.05046 11.0 20. 2.04035 11.0 30. 2.02070 11.0 40. 1.98442 11.0 45. 1.96573 11.0 50. 1.93632 11.0 60. 1.84453 11.0 70. 1.67473 11.0 75. 1.51974 11.0 80. 1.25768 11.0 81. 1.18368 11.0 82. 1.09919 11.0 83. 1.00384 11.0 84. 0.89617 11.0 85. 0.77395 11.0 86. 0.63810 11.0 87. 0.48817 11.0 88. 0.32725 11.0 89. 0.16441 12.0 0. 2.05840 12.0 10. 2.05798 12.0 20. 2.04625 12.0 30. 2.02780 12.0 40. 1.98945 12.0 45. 1.96689 12.0 50. 1.93731 12.0 60. 1.85086 12.0 70. 1.68645 12.0 75. 1.54171 12.0 80. 1.28706 12.0 81. 1.21418 12.0 82. 1.13193 12.0 83. 1.03521 12.0 84. 0.92694 12.0 85. 0.80380 12.0 86. 0.66385 12.0 87. 0.50897 12.0 88. 0.34100 12.0 89. 0.17137 13.0 0. 2.06301 13.0 10. 2.06093 13.0 20. 2.04951 13.0 30. 2.02661 13.0 40. 1.99270 13.0 45. 1.97069 13.0 50. 1.94000 13.0 60. 1.85349 13.0 70. 1.69783 13.0 75. 1.55973 13.0 80. 1.31353 13.0 81. 1.24151 13.0 82. 1.15806 13.0 83. 1.06470 13.0 84. 0.95540 13.0 85. 0.83009 13.0 86. 0.68780 13.0 87. 0.52869 13.0 88. 0.35547 13.0 89. 0.17798 14.0 0. 2.06392 14.0 10. 2.06366 14.0 20. 2.04536 14.0 30. 2.02703 14.0 40. 1.99276 14.0 45. 1.96918 14.0 50. 1.94168 14.0 60. 1.85479 14.0 70. 1.70725 14.0 75. 1.57543 14.0 80. 1.33826 14.0 81. 1.26738 14.0 82. 1.18502 14.0 83. 1.08963 14.0 84. 0.98181 14.0 85. 0.85611 14.0 86. 0.71046 14.0 87. 0.54813 14.0 88. 0.36888 14.0 89. 0.18420 15.0 0. 2.07108 15.0 10. 2.06239 15.0 20. 2.05170 15.0 30. 2.02684 15.0 40. 1.99144 15.0 45. 1.97020 15.0 50. 1.93900 15.0 60. 1.85554 15.0 70. 1.71486 15.0 75. 1.58889 15.0 80. 1.35780 15.0 81. 1.28953 15.0 82. 1.20982 15.0 83. 1.11600 15.0 84. 1.00669 15.0 85. 0.88033 15.0 86. 0.73302 15.0 87. 0.56572 15.0 88. 0.38177 15.0 89. 0.19059 16.0 0. 2.07350 16.0 10. 2.06503 16.0 20. 2.05416 16.0 30. 2.02807 16.0 40. 1.99177 16.0 45. 1.96873 16.0 50. 1.94004 16.0 60. 1.85691 16.0 70. 1.72224 16.0 75. 1.60085 16.0 80. 1.37881 16.0 81. 1.31065 16.0 82. 1.23176 16.0 83. 1.13956 16.0 84. 1.03047 16.0 85. 0.90235 16.0 86. 0.75348 16.0 87. 0.58341 16.0 88. 0.39466 16.0 89. 0.19704 17.0 0. 2.07297 17.0 10. 2.06737 17.0 20. 2.05510 17.0 30. 2.02906 17.0 40. 1.99004 17.0 45. 1.96832 17.0 50. 1.93790 17.0 60. 1.85693 17.0 70. 1.72563 17.0 75. 1.61098 17.0 80. 1.39593 17.0 81. 1.33022 17.0 82. 1.25134 17.0 83. 1.16000 17.0 84. 1.05187 17.0 85. 0.92393 17.0 86. 0.77391 17.0 87. 0.58694 17.0 88. 0.40690 17.0 89. 0.20279 18.0 0. 2.07133 18.0 10. 2.06639 18.0 20. 2.04981 18.0 30. 2.03112 18.0 40. 1.98916 18.0 45. 1.96652 18.0 50. 1.93773 18.0 60. 1.85576 18.0 70. 1.72933 18.0 75. 1.62084 18.0 80. 1.41322 18.0 81. 1.34818 18.0 82. 1.27175 18.0 83. 1.18168 18.0 84. 1.07134 18.0 85. 0.94417 18.0 86. 0.79242 18.0 87. 0.61730 18.0 88. 0.41821 18.0 89. 0.20868 19.0 0. 2.07046 19.0 10. 2.06719 19.0 20. 2.05346 19.0 30. 2.02890 19.0 40. 1.98972 19.0 45. 1.96376 19.0 50. 1.93719 19.0 60. 1.85619 19.0 70. 1.73261 19.0 75. 1.62634 19.0 80. 1.42693 19.0 81. 1.36372 19.0 82. 1.28857 19.0 83. 1.19931 19.0 84. 1.09156 19.0 85. 0.96329 19.0 86. 0.81183 19.0 87. 0.63286 19.0 88. 0.43009 19.0 89. 0.21457 20.0 0. 2.07443 20.0 10. 2.06411 20.0 20. 2.05400 20.0 30. 2.02612 20.0 40. 1.98621 20.0 45. 1.96399 20.0 50. 1.93060 20.0 60. 1.85485 20.0 70. 1.73492 20.0 75. 1.63084 20.0 80. 1.43916 20.0 81. 1.38073 20.0 82. 1.30576 20.0 83. 1.21708 20.0 84. 1.11171 20.0 85. 0.97477 20.0 86. 0.82979 20.0 87. 0.64838 20.0 88. 0.44211 20.0 89. 0.22021 25.0 0. 2.07256 25.0 10. 2.06975 25.0 20. 2.05197 25.0 30. 2.02502 25.0 40. 1.98346 25.0 45. 1.95865 25.0 50. 1.92626 25.0 60. 1.84840 25.0 70. 1.74163 25.0 75. 1.65878 25.0 80. 1.49458 25.0 81. 1.44116 25.0 82. 1.37478 25.0 83. 1.29242 25.0 84. 1.19073 25.0 85. 1.06374 25.0 86. 0.90908 25.0 87. 0.71875 25.0 88. 0.49483 25.0 89. 0.24738 30.0 0. 2.07176 30.0 10. 2.07103 30.0 20. 2.05092 30.0 30. 2.02147 30.0 40. 1.97925 30.0 45. 1.95199 30.0 50. 1.91996 30.0 60. 1.84149 30.0 70. 1.74161 30.0 75. 1.66921 30.0 80. 1.53264 30.0 81. 1.48502 30.0 82. 1.42487 30.0 83. 1.34963 30.0 84. 1.25312 30.0 85. 1.13182 30.0 86. 0.97612 30.0 87. 0.78003 30.0 88. 0.54221 30.0 89. 0.27259 ____________________________________________________