Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Au 79 M_5N67N6 2.015 2.206 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) _____________________________________________________ Primary energy Incident angle (keV) (deg) Backscattering factor _____________________________________________________ 2.4 0. 1.18064 2.4 10. 1.14845 2.4 20. 1.10907 2.4 30. 1.06207 2.4 40. 0.99843 2.4 45. 0.95939 2.4 50. 0.91306 2.4 60. 0.79453 2.4 70. 0.61920 2.4 75. 0.49917 2.4 80. 0.35344 2.4 81. 0.32107 2.4 82. 0.28732 2.4 83. 0.25242 2.4 84. 0.21698 2.4 85. 0.18043 2.4 86. 0.14380 2.4 87. 0.10755 2.4 88. 0.07250 2.4 89. 0.04026 2.8 0. 1.45635 2.8 10. 1.44873 2.8 20. 1.43151 2.8 30. 1.39708 2.8 40. 1.34576 2.8 45. 1.30603 2.8 50. 1.26128 2.8 60. 1.12083 2.8 70. 0.88804 2.8 75. 0.71918 2.8 80. 0.50700 2.8 81. 0.45891 2.8 82. 0.41012 2.8 83. 0.35898 2.8 84. 0.30709 2.8 85. 0.25443 2.8 86. 0.20141 2.8 87. 0.14917 2.8 88. 0.09920 2.8 89. 0.05346 3.0 0. 1.53701 3.0 10. 1.53406 3.0 20. 1.52221 3.0 30. 1.49590 3.0 40. 1.44668 3.0 45. 1.41111 3.0 50. 1.36315 3.0 60. 1.22005 3.0 70. 0.97053 3.0 75. 0.78809 3.0 80. 0.55513 3.0 81. 0.50295 3.0 82. 0.44962 3.0 83. 0.39271 3.0 84. 0.33559 3.0 85. 0.27805 3.0 86. 0.21985 3.0 87. 0.16227 3.0 88. 0.10732 3.0 89. 0.05751 3.2 0. 1.59973 3.2 10. 1.60361 3.2 20. 1.59376 3.2 30. 1.57310 3.2 40. 1.52715 3.2 45. 1.48434 3.2 50. 1.44580 3.2 60. 1.29709 3.2 70. 1.03789 3.2 75. 0.84263 3.2 80. 0.59547 3.2 81. 0.53979 3.2 82. 0.48136 3.2 83. 0.42141 3.2 84. 0.36048 3.2 85. 0.29827 3.2 86. 0.23549 3.2 87. 0.17378 3.2 88. 0.11461 3.2 89. 0.06074 3.6 0. 1.69218 3.6 10. 1.70588 3.6 20. 1.70433 3.6 30. 1.68834 3.6 40. 1.64772 3.6 45. 1.61439 3.6 50. 1.56810 3.6 60. 1.41820 3.6 70. 1.14297 3.6 75. 0.93325 3.6 80. 0.66165 3.6 81. 0.59972 3.6 82. 0.53513 3.6 83. 0.46867 3.6 84. 0.40040 3.6 85. 0.33111 3.6 86. 0.26120 3.6 87. 0.19218 3.6 88. 0.12616 3.6 89. 0.06619 4.0 0. 1.76138 4.0 10. 1.77508 4.0 20. 1.78136 4.0 30. 1.76965 4.0 40. 1.73364 4.0 45. 1.69806 4.0 50. 1.64859 4.0 60. 1.50560 4.0 70. 1.22334 4.0 75. 1.00376 4.0 80. 0.71459 4.0 81. 0.64742 4.0 82. 0.57909 4.0 83. 0.50690 4.0 84. 0.43383 4.0 85. 0.35871 4.0 86. 0.28293 4.0 87. 0.20777 4.0 88. 0.13584 4.0 89. 0.07037 4.4 0. 1.80887 4.4 10. 1.83074 4.4 20. 1.83865 4.4 30. 1.82899 4.4 40. 1.79704 4.4 45. 1.76632 4.4 50. 1.72329 4.4 60. 1.57183 4.4 70. 1.28642 4.4 75. 1.06081 4.4 80. 0.75928 4.4 81. 0.68862 4.4 82. 0.61619 4.4 83. 0.54062 4.4 84. 0.46231 4.4 85. 0.38248 4.4 86. 0.30147 4.4 87. 0.22116 4.4 88. 0.14351 4.4 89. 0.07416 4.8 0. 1.84797 4.8 10. 1.86921 4.8 20. 1.87876 4.8 30. 1.87342 4.8 40. 1.84482 4.8 45. 1.81414 4.8 50. 1.77093 4.8 60. 1.62507 4.8 70. 1.33989 4.8 75. 1.10894 4.8 80. 0.79811 4.8 81. 0.72531 4.8 82. 0.64929 4.8 83. 0.57079 4.8 84. 0.48871 4.8 85. 0.40389 4.8 86. 0.31865 4.8 87. 0.23379 4.8 88. 0.15208 4.8 89. 0.07766 5.0 0. 1.86037 5.0 10. 1.88351 5.0 20. 1.89958 5.0 30. 1.89152 5.0 40. 1.86309 5.0 45. 1.83415 5.0 50. 1.79460 5.0 60. 1.64741 5.0 70. 1.36096 5.0 75. 1.13030 5.0 80. 0.81641 5.0 81. 0.74170 5.0 82. 0.66396 5.0 83. 0.58392 5.0 84. 0.50025 5.0 85. 0.41421 5.0 86. 0.32658 5.0 87. 0.23929 5.0 88. 0.15562 5.0 89. 0.07908 5.2 0. 1.87659 5.2 10. 1.89907 5.2 20. 1.91239 5.2 30. 1.90747 5.2 40. 1.88138 5.2 45. 1.85227 5.2 50. 1.80966 5.2 60. 1.66829 5.2 70. 1.38116 5.2 75. 1.15176 5.2 80. 0.83363 5.2 81. 0.75872 5.2 82. 0.67988 5.2 83. 0.59685 5.2 84. 0.51180 5.2 85. 0.42194 5.2 86. 0.33466 5.2 87. 0.24520 5.2 88. 0.15910 5.2 89. 0.08061 5.6 0. 1.90156 5.6 10. 1.92607 5.6 20. 1.93975 5.6 30. 1.93730 5.6 40. 1.90922 5.6 45. 1.88320 5.6 50. 1.84219 5.6 60. 1.70130 5.6 70. 1.41983 5.6 75. 1.18765 5.6 80. 0.86567 5.6 81. 0.78797 5.6 82. 0.70717 5.6 83. 0.62260 5.6 84. 0.53333 5.6 85. 0.44211 5.6 86. 0.34879 5.6 87. 0.25554 5.6 88. 0.16615 5.6 89. 0.08358 6.0 0. 1.92009 6.0 10. 1.94362 6.0 20. 1.95934 6.0 30. 1.95797 6.0 40. 1.93251 6.0 45. 1.90412 6.0 50. 1.86625 6.0 60. 1.72788 6.0 70. 1.45227 6.0 75. 1.22008 6.0 80. 0.89288 6.0 81. 0.81605 6.0 82. 0.73241 6.0 83. 0.64530 6.0 84. 0.55355 6.0 85. 0.46033 6.0 86. 0.36341 6.0 87. 0.26628 6.0 88. 0.17243 6.0 89. 0.08628 6.5 0. 1.93751 6.5 10. 1.96643 6.5 20. 1.97958 6.5 30. 1.97728 6.5 40. 1.95322 6.5 45. 1.92950 6.5 50. 1.89139 6.5 60. 1.75832 6.5 70. 1.48907 6.5 75. 1.25696 6.5 80. 0.92750 6.5 81. 0.84790 6.5 82. 0.76169 6.5 83. 0.67169 6.5 84. 0.57842 6.5 85. 0.48073 6.5 86. 0.38006 6.5 87. 0.27859 6.5 88. 0.18011 6.5 89. 0.08967 7.0 0. 1.95659 7.0 10. 1.98125 7.0 20. 1.99825 7.0 30. 1.99546 7.0 40. 1.97007 7.0 45. 1.94547 7.0 50. 1.90772 7.0 60. 1.78172 7.0 70. 1.51615 7.0 75. 1.28981 7.0 80. 0.95643 7.0 81. 0.87555 7.0 82. 0.78920 7.0 83. 0.69702 7.0 84. 0.60074 7.0 85. 0.49995 7.0 86. 0.39559 7.0 87. 0.29029 7.0 88. 0.18731 7.0 89. 0.09282 7.5 0. 1.96842 7.5 10. 1.99221 7.5 20. 2.00685 7.5 30. 2.00731 7.5 40. 1.98349 7.5 45. 1.95839 7.5 50. 1.92514 7.5 60. 1.79946 7.5 70. 1.54398 7.5 75. 1.31866 7.5 80. 0.98570 7.5 81. 0.90464 7.5 82. 0.81468 7.5 83. 0.72103 7.5 84. 0.62233 7.5 85. 0.51811 7.5 86. 0.41031 7.5 87. 0.30164 7.5 88. 0.19471 7.5 89. 0.09598 8.0 0. 1.98026 8.0 10. 2.00383 8.0 20. 2.01732 8.0 30. 2.01748 8.0 40. 1.99146 8.0 45. 1.96947 8.0 50. 1.93362 8.0 60. 1.81486 8.0 70. 1.56361 8.0 75. 1.34239 8.0 80. 1.01264 8.0 81. 0.92814 8.0 82. 0.83076 8.0 83. 0.74377 8.0 84. 0.64267 8.0 85. 0.53569 8.0 86. 0.42515 8.0 87. 0.31220 8.0 88. 0.20147 8.0 89. 0.09563 8.5 0. 1.98828 8.5 10. 2.01339 8.5 20. 2.02522 8.5 30. 2.02590 8.5 40. 2.00304 8.5 45. 1.97894 8.5 50. 1.94418 8.5 60. 1.82510 8.5 70. 1.58398 8.5 75. 1.36843 8.5 80. 1.03710 8.5 81. 0.94624 8.5 82. 0.86310 8.5 83. 0.76519 8.5 84. 0.66161 8.5 85. 0.55304 8.5 86. 0.43893 8.5 87. 0.32306 8.5 88. 0.20863 8.5 89. 0.10185 9.0 0. 1.99587 9.0 10. 2.01776 9.0 20. 2.03195 9.0 30. 2.02697 9.0 40. 2.00633 9.0 45. 1.98460 9.0 50. 1.94999 9.0 60. 1.83436 9.0 70. 1.60119 9.0 75. 1.38788 9.0 80. 1.05812 9.0 81. 0.97476 9.0 82. 0.88320 9.0 83. 0.78541 9.0 84. 0.68037 9.0 85. 0.56923 9.0 86. 0.45211 9.0 87. 0.33285 9.0 88. 0.20983 9.0 89. 0.10477 9.5 0. 2.00231 9.5 10. 2.02506 9.5 20. 2.03410 9.5 30. 2.03475 9.5 40. 2.01060 9.5 45. 1.98732 9.5 50. 1.95355 9.5 60. 1.84267 9.5 70. 1.61694 9.5 75. 1.40773 9.5 80. 1.07634 9.5 81. 0.99680 9.5 82. 0.90475 9.5 83. 0.80406 9.5 84. 0.69875 9.5 85. 0.58457 9.5 86. 0.46467 9.5 87. 0.34328 9.5 88. 0.22121 9.5 89. 0.10734 10.0 0. 2.00716 10.0 10. 2.02879 10.0 20. 2.04274 10.0 30. 2.03832 10.0 40. 2.01334 10.0 45. 1.98778 10.0 50. 1.95797 10.0 60. 1.85116 10.0 70. 1.62953 10.0 75. 1.42442 10.0 80. 1.10164 10.0 81. 1.01641 10.0 82. 0.92397 10.0 83. 0.82343 10.0 84. 0.71484 10.0 85. 0.59932 10.0 86. 0.47810 10.0 87. 0.35206 10.0 88. 0.22733 10.0 89. 0.11013 11.0 0. 2.01591 11.0 10. 2.03577 11.0 20. 2.04579 11.0 30. 2.04148 11.0 40. 2.01362 11.0 45. 1.99565 11.0 50. 1.96456 11.0 60. 1.86229 11.0 70. 1.65473 11.0 75. 1.45717 11.0 80. 1.13855 11.0 81. 1.05349 11.0 82. 0.95974 11.0 83. 0.85760 11.0 84. 0.74704 11.0 85. 0.62715 11.0 86. 0.50144 11.0 87. 0.37066 11.0 88. 0.23921 11.0 89. 0.11527 12.0 0. 2.02193 12.0 10. 2.04397 12.0 20. 2.05146 12.0 30. 2.04793 12.0 40. 2.01765 12.0 45. 1.99609 12.0 50. 1.96597 12.0 60. 1.87124 12.0 70. 1.67164 12.0 75. 1.48633 12.0 80. 1.17224 12.0 81. 1.08750 12.0 82. 0.99467 12.0 83. 0.89027 12.0 84. 0.77726 12.0 85. 0.65529 12.0 86. 0.52434 12.0 87. 0.38803 12.0 88. 0.24988 12.0 89. 0.12033 13.0 0. 2.02846 13.0 10. 2.04767 13.0 20. 2.05454 13.0 30. 2.04594 13.0 40. 2.01997 13.0 45. 1.99931 13.0 50. 1.96804 13.0 60. 1.87485 13.0 70. 1.68754 13.0 75. 1.51000 13.0 80. 1.20369 13.0 81. 1.11869 13.0 82. 1.02398 13.0 83. 0.92117 13.0 84. 0.80592 13.0 85. 0.68055 13.0 86. 0.54577 13.0 87. 0.40460 13.0 88. 0.26130 13.0 89. 0.12506 14.0 0. 2.03060 14.0 10. 2.05085 14.0 20. 2.05008 14.0 30. 2.04551 14.0 40. 2.01957 14.0 45. 1.99713 14.0 50. 1.96925 14.0 60. 1.87717 14.0 70. 1.70085 14.0 75. 1.53154 14.0 80. 1.23277 14.0 81. 1.14851 14.0 82. 1.05381 14.0 83. 0.94761 14.0 84. 0.83284 14.0 85. 0.70555 14.0 86. 0.56613 14.0 87. 0.42115 14.0 88. 0.27174 14.0 89. 0.12962 15.0 0. 2.03966 15.0 10. 2.04996 15.0 20. 2.05622 15.0 30. 2.04466 15.0 40. 2.01688 15.0 45. 1.99724 15.0 50. 1.96633 15.0 60. 1.87865 15.0 70. 1.71214 15.0 75. 1.54953 15.0 80. 1.25693 15.0 81. 1.17466 15.0 82. 1.08119 15.0 83. 0.97616 15.0 84. 0.85845 15.0 85. 0.72877 15.0 86. 0.58691 15.0 87. 0.43617 15.0 88. 0.28218 15.0 89. 0.13428 16.0 0. 2.04290 16.0 10. 2.05329 16.0 20. 2.05850 16.0 30. 2.04540 16.0 40. 2.01643 16.0 45. 1.99510 16.0 50. 1.96650 16.0 60. 1.88036 16.0 70. 1.72258 16.0 75. 1.56662 16.0 80. 1.28218 16.0 81. 1.19945 16.0 82. 1.10630 16.0 83. 1.00125 16.0 84. 0.88275 16.0 85. 0.75056 16.0 86. 0.60595 16.0 87. 0.45121 16.0 88. 0.29227 16.0 89. 0.13895 17.0 0. 2.04309 17.0 10. 2.05594 17.0 20. 2.05924 17.0 30. 2.04558 17.0 40. 2.01391 17.0 45. 1.99388 17.0 50. 1.96394 17.0 60. 1.88021 17.0 70. 1.72905 17.0 75. 1.58070 17.0 80. 1.30372 17.0 81. 1.22286 17.0 82. 1.12935 17.0 83. 1.02371 17.0 84. 0.90499 17.0 85. 0.77186 17.0 86. 0.62467 17.0 87. 0.45832 17.0 88. 0.30201 17.0 89. 0.14318 18.0 0. 2.04277 18.0 10. 2.05571 18.0 20. 2.05388 18.0 30. 2.04706 18.0 40. 2.01202 18.0 45. 1.99092 18.0 50. 1.96262 18.0 60. 1.87961 18.0 70. 1.73444 18.0 75. 1.59457 18.0 80. 1.32516 18.0 81. 1.24431 18.0 82. 1.15267 18.0 83. 1.04795 18.0 84. 0.92539 18.0 85. 0.79229 18.0 86. 0.64227 18.0 87. 0.48062 18.0 88. 0.31115 18.0 89. 0.14751 19.0 0. 2.04353 19.0 10. 2.05674 19.0 20. 2.05728 19.0 30. 2.04431 19.0 40. 2.01196 19.0 45. 1.98764 19.0 50. 1.96191 19.0 60. 1.88016 19.0 70. 1.73953 19.0 75. 1.60384 19.0 80. 1.34288 19.0 81. 1.26389 19.0 82. 1.17266 19.0 83. 1.06793 19.0 84. 0.94772 19.0 85. 0.81146 19.0 86. 0.66033 19.0 87. 0.49438 19.0 88. 0.32079 19.0 89. 0.15192 20.0 0. 2.04827 20.0 10. 2.05422 20.0 20. 2.05780 20.0 30. 2.04085 20.0 40. 2.00781 20.0 45. 1.98752 20.0 50. 1.95466 20.0 60. 1.87858 20.0 70. 1.74417 20.0 75. 1.61093 20.0 80. 1.35898 20.0 81. 1.28481 20.0 82. 1.19317 20.0 83. 1.08852 20.0 84. 0.96908 20.0 85. 0.82531 20.0 86. 0.67748 20.0 87. 0.50822 20.0 88. 0.33054 20.0 89. 0.15609 25.0 0. 2.05000 25.0 10. 2.06110 25.0 20. 2.05512 25.0 30. 2.03756 25.0 40. 2.00199 25.0 45. 1.97862 25.0 50. 1.94710 25.0 60. 1.87118 25.0 70. 1.75618 25.0 75. 1.65256 25.0 80. 1.43283 25.0 81. 1.36236 25.0 82. 1.27778 25.0 83. 1.17675 25.0 84. 1.05673 25.0 85. 0.91558 25.0 86. 0.75453 25.0 87. 0.57112 25.0 88. 0.37396 25.0 89. 0.17625 30.0 0. 2.05158 30.0 10. 2.06343 30.0 20. 2.05376 30.0 30. 2.03252 30.0 40. 1.99544 30.0 45. 1.96936 30.0 50. 1.93859 30.0 60. 1.86273 30.0 70. 1.75940 30.0 75. 1.67163 30.0 80. 1.48543 30.0 81. 1.42149 30.0 82. 1.34209 30.0 83. 1.24623 30.0 84. 1.12915 30.0 85. 0.98945 30.0 86. 0.82189 30.0 87. 0.62816 30.0 88. 0.41362 30.0 89. 0.19521 ____________________________________________________