The database of backscattering factor    

 for quantitative analysis by Auger electron spectroscopy(AES)

Material  

Mo              

Auger Transition

L3M45M45

 

    Backscattering Factor    

for emission angle of Auger electrons 

for tilt angle of CMA axis

for special  CMA  with coaxial electron gun 

for tilt angle of CHA entrance lens axis

for special  CHA  the entrance lens axis of which is 60 deg away from  the electron beam 

 

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