Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Ni 28 M_3V__V__ 0.059 0.067 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 2.56841 1.0 10. 2.56730 1.0 20. 2.56880 1.0 30. 2.56603 1.0 40. 2.55106 1.0 45. 2.52999 1.0 50. 2.49576 1.0 60. 2.35426 1.0 70. 2.04019 1.0 75. 1.76302 1.0 80. 1.34675 1.0 81. 1.24731 1.0 82. 1.13482 1.0 83. 1.01724 1.0 84. 0.89263 1.0 85. 0.76066 1.0 86. 0.62243 1.0 87. 0.48293 1.0 88. 0.34203 1.0 89. 0.20939 2.0 0. 2.52260 2.0 10. 2.52550 2.0 20. 2.52715 2.0 30. 2.52200 2.0 40. 2.51315 2.0 45. 2.49897 2.0 50. 2.47777 2.0 60. 2.38624 2.0 70. 2.17529 2.0 75. 1.96530 2.0 80. 1.61189 2.0 81. 1.51301 2.0 82. 1.40309 2.0 83. 1.27698 2.0 84. 1.14016 2.0 85. 0.98610 2.0 86. 0.81745 2.0 87. 0.63632 2.0 88. 0.44464 2.0 89. 0.25292 3.0 0. 2.45074 3.0 10. 2.45315 3.0 20. 2.45202 3.0 30. 2.44974 3.0 40. 2.44348 3.0 45. 2.43282 3.0 50. 2.41669 3.0 60. 2.34570 3.0 70. 2.18497 3.0 75. 2.03385 3.0 80. 1.74003 3.0 81. 1.65247 3.0 82. 1.55277 3.0 83. 1.43476 3.0 84. 1.29632 3.0 85. 1.07180 3.0 86. 0.95668 3.0 87. 0.75166 3.0 88. 0.52653 3.0 89. 0.29168 4.0 0. 2.38880 4.0 10. 2.38839 4.0 20. 2.39038 4.0 30. 2.38942 4.0 40. 2.38801 4.0 45. 2.38076 4.0 50. 2.36068 4.0 60. 2.30605 4.0 70. 2.16863 4.0 75. 2.05723 4.0 80. 1.81603 4.0 81. 1.73831 4.0 82. 1.64890 4.0 83. 1.54044 4.0 84. 1.40719 4.0 85. 1.25384 4.0 86. 1.06691 4.0 87. 0.78396 4.0 88. 0.59993 4.0 89. 0.32866 5.0 0. 2.34048 5.0 10. 2.34299 5.0 20. 2.34715 5.0 30. 2.34605 5.0 40. 2.34361 5.0 45. 2.33245 5.0 50. 2.32915 5.0 60. 2.26997 5.0 70. 2.16788 5.0 75. 2.06311 5.0 80. 1.86360 5.0 81. 1.79597 5.0 82. 1.71486 5.0 83. 1.61240 5.0 84. 1.49078 5.0 85. 1.34042 5.0 86. 1.15403 5.0 87. 0.92861 5.0 88. 0.66107 5.0 89. 0.30092 6.0 0. 2.30370 6.0 10. 2.30040 6.0 20. 2.30938 6.0 30. 2.30982 6.0 40. 2.30797 6.0 45. 2.30497 6.0 50. 2.29101 6.0 60. 2.24052 6.0 70. 2.14198 6.0 75. 2.05846 6.0 80. 1.89199 6.0 81. 1.83041 6.0 82. 1.75983 6.0 83. 1.66957 6.0 84. 1.55688 6.0 85. 1.41284 6.0 86. 1.22870 6.0 87. 0.98674 6.0 88. 0.71803 6.0 89. 0.36248 7.0 0. 2.27282 7.0 10. 2.27509 7.0 20. 2.27393 7.0 30. 2.27594 7.0 40. 2.28136 7.0 45. 2.27040 7.0 50. 2.25945 7.0 60. 2.21410 7.0 70. 2.12791 7.0 75. 2.05104 7.0 80. 1.90717 7.0 81. 1.85522 7.0 82. 1.79225 7.0 83. 1.71046 7.0 84. 1.60522 7.0 85. 1.46879 7.0 86. 1.29065 7.0 87. 1.05948 7.0 88. 0.76934 7.0 89. 0.42338 8.0 0. 2.23767 8.0 10. 2.23784 8.0 20. 2.24600 8.0 30. 2.24720 8.0 40. 2.24907 8.0 45. 2.23977 8.0 50. 2.23675 8.0 60. 2.18848 8.0 70. 2.11064 8.0 75. 2.04153 8.0 80. 1.91412 8.0 81. 1.86743 8.0 82. 1.81527 8.0 83. 1.74290 8.0 84. 1.64301 8.0 85. 1.51613 8.0 86. 1.34427 8.0 87. 1.11405 8.0 88. 0.81811 8.0 89. 0.45162 9.0 0. 2.21481 9.0 10. 2.21712 9.0 20. 2.22132 9.0 30. 2.23151 9.0 40. 2.22309 9.0 45. 2.21721 9.0 50. 2.21433 9.0 60. 2.17094 9.0 70. 2.09155 9.0 75. 2.03088 9.0 80. 1.92202 9.0 81. 1.88081 9.0 82. 1.82950 9.0 83. 1.76355 9.0 84. 1.67543 9.0 85. 1.55433 9.0 86. 1.39060 9.0 87. 1.16398 9.0 88. 0.86306 9.0 89. 0.47941 10.0 0. 2.20081 10.0 10. 2.20098 10.0 20. 2.20548 10.0 30. 2.20509 10.0 40. 2.20103 10.0 45. 2.20104 10.0 50. 2.19516 10.0 60. 2.14876 10.0 70. 2.07784 10.0 75. 2.02062 10.0 80. 1.92283 10.0 81. 1.88800 10.0 82. 1.84129 10.0 83. 1.78020 10.0 84. 1.69864 10.0 85. 1.58459 10.0 86. 1.42752 10.0 87. 1.20689 10.0 88. 0.88674 10.0 89. 0.50587 12.0 0. 2.16188 12.0 10. 2.16449 12.0 20. 2.16728 12.0 30. 2.17971 12.0 40. 2.17062 12.0 45. 2.17477 12.0 50. 2.16067 12.0 60. 2.12277 12.0 70. 2.05103 12.0 75. 2.00436 12.0 80. 1.92130 12.0 81. 1.89230 12.0 82. 1.85834 12.0 83. 1.80598 12.0 84. 1.73616 12.0 85. 1.63460 12.0 86. 1.49287 12.0 87. 1.28079 12.0 88. 0.97309 12.0 89. 0.55429 15.0 0. 2.12262 15.0 10. 2.12228 15.0 20. 2.12448 15.0 30. 2.13387 15.0 40. 2.13824 15.0 45. 2.12807 15.0 50. 2.12580 15.0 60. 2.08227 15.0 70. 2.01996 15.0 75. 1.97272 15.0 80. 1.90826 15.0 81. 1.88741 15.0 82. 1.86116 15.0 83. 1.82346 15.0 84. 1.76906 15.0 85. 1.68732 15.0 86. 1.56339 15.0 87. 1.36523 15.0 88. 1.06272 15.0 89. 0.61695 18.0 0. 2.09221 18.0 10. 2.09361 18.0 20. 2.09330 18.0 30. 2.10062 18.0 40. 2.10565 18.0 45. 2.09701 18.0 50. 2.08898 18.0 60. 2.05630 18.0 70. 1.98918 18.0 75. 1.95099 18.0 80. 1.89920 18.0 81. 1.88157 18.0 82. 1.85855 18.0 83. 1.83002 18.0 84. 1.78686 18.0 85. 1.71893 18.0 86. 1.60983 18.0 87. 1.43103 18.0 88. 1.13731 18.0 89. 0.67495 20.0 0. 2.07286 20.0 10. 2.07541 20.0 20. 2.07677 20.0 30. 2.08184 20.0 40. 2.08676 20.0 45. 2.08308 20.0 50. 2.07230 20.0 60. 2.03516 20.0 70. 1.97636 20.0 75. 1.93771 20.0 80. 1.88829 20.0 81. 1.87380 20.0 82. 1.85374 20.0 83. 1.83041 20.0 84. 1.79182 20.0 85. 1.73445 20.0 86. 1.63221 20.0 87. 1.46660 20.0 88. 1.18097 20.0 89. 0.71037 25.0 0. 2.03968 25.0 10. 2.04128 25.0 20. 2.04108 25.0 30. 2.05052 25.0 40. 2.04849 25.0 45. 2.04626 25.0 50. 2.03612 25.0 60. 2.00213 25.0 70. 1.94398 25.0 75. 1.90887 25.0 80. 1.86244 25.0 81. 1.85803 25.0 82. 1.84221 25.0 83. 1.82410 25.0 84. 1.79569 25.0 85. 1.75379 25.0 86. 1.67564 25.0 87. 1.53643 25.0 88. 1.26803 25.0 89. 0.79041 30.0 0. 2.01182 30.0 10. 2.00359 30.0 20. 2.01637 30.0 30. 2.01944 30.0 40. 2.02271 30.0 45. 2.01929 30.0 50. 2.00435 30.0 60. 1.97611 30.0 70. 1.91522 30.0 75. 1.88311 30.0 80. 1.84784 30.0 81. 1.83702 30.0 82. 1.82750 30.0 83. 1.80849 30.0 84. 1.75641 30.0 85. 1.75737 30.0 86. 1.70154 30.0 87. 1.57892 30.0 88. 1.33837 30.0 89. 0.86126 ____________________________________________________