Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Ni 28 M_3V__V__ 0.059 0.067 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 2.51270 1.0 10. 2.54429 1.0 20. 2.57541 1.0 30. 2.59462 1.0 40. 2.59010 1.0 45. 2.56969 1.0 50. 2.53362 1.0 60. 2.37883 1.0 70. 2.02610 1.0 75. 1.71915 1.0 80. 1.27323 1.0 81. 1.17157 1.0 82. 1.05682 1.0 83. 0.93850 1.0 84. 0.81565 1.0 85. 0.68773 1.0 86. 0.55596 1.0 87. 0.42638 1.0 88. 0.29810 1.0 89. 0.18016 2.0 0. 2.47360 2.0 10. 2.50501 2.0 20. 2.53297 2.0 30. 2.54824 2.0 40. 2.55089 2.0 45. 2.53967 2.0 50. 2.51969 2.0 60. 2.42649 2.0 70. 2.19353 2.0 75. 1.95565 2.0 80. 1.56232 2.0 81. 1.45485 2.0 82. 1.33717 2.0 83. 1.20448 2.0 84. 1.06317 2.0 85. 0.90763 2.0 86. 0.74147 2.0 87. 0.56791 2.0 88. 0.38962 2.0 89. 0.21736 3.0 0. 2.40872 3.0 10. 2.43567 3.0 20. 2.45698 3.0 30. 2.47251 3.0 40. 2.47679 3.0 45. 2.46925 3.0 50. 2.45492 3.0 60. 2.38563 3.0 70. 2.21323 3.0 75. 2.04216 3.0 80. 1.70853 3.0 81. 1.61085 3.0 82. 1.50075 3.0 83. 1.37260 3.0 84. 1.22542 3.0 85. 1.01093 3.0 86. 0.87764 3.0 87. 0.67671 3.0 88. 0.46383 3.0 89. 0.25077 4.0 0. 2.35135 4.0 10. 2.37286 4.0 20. 2.39481 4.0 30. 2.40959 4.0 40. 2.41782 4.0 45. 2.41326 4.0 50. 2.39541 4.0 60. 2.34440 4.0 70. 2.19839 4.0 75. 2.07512 4.0 80. 1.79880 4.0 81. 1.71093 4.0 82. 1.60984 4.0 83. 1.48974 4.0 84. 1.34515 4.0 85. 1.18155 4.0 86. 0.98828 4.0 87. 0.72185 4.0 88. 0.53151 4.0 89. 0.28301 5.0 0. 2.30692 5.0 10. 2.32893 5.0 20. 2.35121 5.0 30. 2.36462 5.0 40. 2.37101 5.0 45. 2.36167 5.0 50. 2.36097 5.0 60. 2.30614 5.0 70. 2.20201 5.0 75. 2.08689 5.0 80. 1.85691 5.0 81. 1.77941 5.0 82. 1.68690 5.0 83. 1.57212 5.0 84. 1.43685 5.0 85. 1.27423 5.0 86. 1.07803 5.0 87. 0.84931 5.0 88. 0.58898 5.0 89. 0.26654 6.0 0. 2.27262 6.0 10. 2.28737 6.0 20. 2.31314 6.0 30. 2.32681 6.0 40. 2.33319 6.0 45. 2.33268 6.0 50. 2.32070 6.0 60. 2.27470 6.0 70. 2.17563 6.0 75. 2.08396 6.0 80. 1.89366 6.0 81. 1.82252 6.0 82. 1.74129 6.0 83. 1.63787 6.0 84. 1.51108 6.0 85. 1.35283 6.0 86. 1.15649 6.0 87. 0.90708 6.0 88. 0.64303 6.0 89. 0.31617 7.0 0. 2.24384 7.0 10. 2.26281 7.0 20. 2.27746 7.0 30. 2.29206 7.0 40. 2.30485 7.0 45. 2.29615 7.0 50. 2.28705 7.0 60. 2.24630 7.0 70. 2.16155 7.0 75. 2.07916 7.0 80. 1.91447 7.0 81. 1.85441 7.0 82. 1.78117 7.0 83. 1.68687 7.0 84. 1.56743 7.0 85. 1.41544 7.0 86. 1.22248 7.0 87. 0.98157 7.0 88. 0.69234 7.0 89. 0.36720 8.0 0. 2.21081 8.0 10. 2.22634 8.0 20. 2.24928 8.0 30. 2.26220 8.0 40. 2.27102 8.0 45. 2.26394 8.0 50. 2.26299 8.0 60. 2.21854 8.0 70. 2.14300 8.0 75. 2.07119 8.0 80. 1.92596 8.0 81. 1.87006 8.0 82. 1.81055 8.0 83. 1.72614 8.0 84. 1.61168 8.0 85. 1.46886 8.0 86. 1.28072 8.0 87. 1.03760 8.0 88. 0.73990 8.0 89. 0.39265 9.0 0. 2.18940 9.0 10. 2.20617 9.0 20. 2.22446 9.0 30. 2.24564 9.0 40. 2.24396 9.0 45. 2.24003 9.0 50. 2.23920 9.0 60. 2.19994 9.0 70. 2.12293 9.0 75. 2.06057 9.0 80. 1.93761 9.0 81. 1.88969 9.0 82. 1.82993 9.0 83. 1.75274 9.0 84. 1.65055 9.0 85. 1.51330 9.0 86. 1.33160 9.0 87. 1.09012 9.0 88. 0.78416 9.0 89. 0.41789 10.0 0. 2.17616 10.0 10. 2.19064 10.0 20. 2.20843 10.0 30. 2.21871 10.0 40. 2.22128 10.0 45. 2.22301 10.0 50. 2.21881 10.0 60. 2.17652 10.0 70. 2.10862 10.0 75. 2.05048 10.0 80. 1.94109 10.0 81. 1.90053 10.0 82. 1.84576 10.0 83. 1.77411 10.0 84. 1.67918 10.0 85. 1.54854 10.0 86. 1.37326 10.0 87. 1.13566 10.0 88. 0.80790 10.0 89. 0.44207 12.0 0. 2.13952 12.0 10. 2.15504 12.0 20. 2.17003 12.0 30. 2.19219 12.0 40. 2.18882 12.0 45. 2.19491 12.0 50. 2.18236 12.0 60. 2.14845 12.0 70. 2.07990 12.0 75. 2.03342 12.0 80. 1.94261 12.0 81. 1.90940 12.0 82. 1.86920 12.0 83. 1.80780 12.0 84. 1.72562 12.0 85. 1.60809 12.0 86. 1.44714 12.0 87. 1.21476 12.0 88. 0.89453 12.0 89. 0.48684 15.0 0. 2.10213 15.0 10. 2.11365 15.0 20. 2.12699 15.0 30. 2.14548 15.0 40. 2.15491 15.0 45. 2.14639 15.0 50. 2.14582 15.0 60. 2.10523 15.0 70. 2.04625 15.0 75. 1.99883 15.0 80. 1.93249 15.0 81. 1.90831 15.0 82. 1.87773 15.0 83. 1.83291 15.0 84. 1.76821 15.0 85. 1.67188 15.0 86. 1.52826 15.0 87. 1.30762 15.0 88. 0.98647 15.0 89. 0.54571 18.0 0. 2.07289 18.0 10. 2.08577 18.0 20. 2.09562 18.0 30. 2.11101 18.0 40. 2.12114 18.0 45. 2.11383 18.0 50. 2.10742 18.0 60. 2.07743 18.0 70. 2.01360 18.0 75. 1.97748 18.0 80. 1.92405 18.0 81. 1.90468 18.0 82. 1.87850 18.0 83. 1.84451 18.0 84. 1.79298 18.0 85. 1.71231 18.0 86. 1.58435 18.0 87. 1.38147 18.0 88. 1.06488 18.0 89. 0.60081 20.0 0. 2.05481 20.0 10. 2.06802 20.0 20. 2.07899 20.0 30. 2.09187 20.0 40. 2.10144 20.0 45. 2.09925 20.0 50. 2.08950 20.0 60. 2.05561 20.0 70. 1.99956 20.0 75. 1.96286 20.0 80. 1.91335 20.0 81. 1.89745 20.0 82. 1.87490 20.0 83. 1.84730 20.0 84. 1.80117 20.0 85. 1.73211 20.0 86. 1.61079 20.0 87. 1.42228 20.0 88. 1.11115 20.0 89. 0.63502 25.0 0. 2.02344 25.0 10. 2.03442 25.0 20. 2.04309 25.0 30. 2.05952 25.0 40. 2.06172 25.0 45. 2.06077 25.0 50. 2.05156 25.0 60. 2.02038 25.0 70. 1.96490 25.0 75. 1.93200 25.0 80. 1.88670 25.0 81. 1.88203 25.0 82. 1.86481 25.0 83. 1.84405 25.0 84. 1.81070 25.0 85. 1.76005 25.0 86. 1.66607 25.0 87. 1.50342 25.0 88. 1.20568 25.0 89. 0.71317 30.0 0. 1.99674 30.0 10. 1.99718 30.0 20. 2.01825 30.0 30. 2.02792 30.0 40. 2.03502 30.0 45. 2.03267 30.0 50. 2.01846 30.0 60. 1.99260 30.0 70. 1.93452 30.0 75. 1.90393 30.0 80. 1.87078 30.0 81. 1.86002 30.0 82. 1.85035 30.0 83. 1.82942 30.0 84. 1.77616 30.0 85. 1.76835 30.0 86. 1.69993 30.0 87. 1.55557 30.0 88. 1.28387 30.0 89. 0.78371 ____________________________________________________