Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Cu 29 M3VV 0.061 0.075 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 2.41009 1.0 10. 2.41274 1.0 20. 2.41120 1.0 30. 2.40459 1.0 40. 2.38655 1.0 45. 2.36684 1.0 50. 2.32730 1.0 60. 2.20417 1.0 70. 1.91509 1.0 75. 1.65109 1.0 80. 1.27632 1.0 81. 1.18836 1.0 82. 1.08496 1.0 83. 0.97714 1.0 84. 0.85692 1.0 85. 0.73232 1.0 86. 0.60295 1.0 87. 0.46752 1.0 88. 0.33214 1.0 89. 0.20188 2.0 0. 2.38208 2.0 10. 2.38454 2.0 20. 2.38400 2.0 30. 2.37592 2.0 40. 2.36334 2.0 45. 2.35211 2.0 50. 2.33538 2.0 60. 2.24338 2.0 70. 2.04859 2.0 75. 1.85944 2.0 80. 1.51999 2.0 81. 1.44347 2.0 82. 1.34119 2.0 83. 1.22482 2.0 84. 1.09634 2.0 85. 0.95106 2.0 86. 0.79215 2.0 87. 0.61789 2.0 88. 0.43356 2.0 89. 0.24675 3.0 0. 2.31643 3.0 10. 2.31771 3.0 20. 2.31418 3.0 30. 2.31947 3.0 40. 2.30687 3.0 45. 2.30029 3.0 50. 2.24614 3.0 60. 2.21226 3.0 70. 2.06571 3.0 75. 1.92006 3.0 80. 1.65495 3.0 81. 1.57452 3.0 82. 1.48003 3.0 83. 1.37139 3.0 84. 1.24420 3.0 85. 1.09503 3.0 86. 0.92408 3.0 87. 0.72955 3.0 88. 0.51422 3.0 89. 0.28601 4.0 0. 2.26577 4.0 10. 2.26462 4.0 20. 2.27068 4.0 30. 2.26740 4.0 40. 2.26105 4.0 45. 2.25590 4.0 50. 2.24161 4.0 60. 2.18176 4.0 70. 2.06258 4.0 75. 1.94917 4.0 80. 1.72474 4.0 81. 1.65658 4.0 82. 1.57182 4.0 83. 1.47280 4.0 84. 1.34289 4.0 85. 1.20554 4.0 86. 1.02306 4.0 87. 0.82179 4.0 88. 0.58477 4.0 89. 0.32210 5.0 0. 2.23007 5.0 10. 2.23148 5.0 20. 2.22876 5.0 30. 2.22898 5.0 40. 2.22496 5.0 45. 2.21918 5.0 50. 2.19159 5.0 60. 2.15262 5.0 70. 2.05053 5.0 75. 1.95741 5.0 80. 1.77064 5.0 81. 1.70954 5.0 82. 1.63372 5.0 83. 1.54299 5.0 84. 1.42810 5.0 85. 1.28750 5.0 86. 1.11284 5.0 87. 0.90047 5.0 88. 0.64490 5.0 89. 0.35480 6.0 0. 2.19386 6.0 10. 2.19464 6.0 20. 2.19742 6.0 30. 2.19755 6.0 40. 2.19621 6.0 45. 2.18906 6.0 50. 2.17833 6.0 60. 2.13289 6.0 70. 2.03689 6.0 75. 1.95574 6.0 80. 1.79902 6.0 81. 1.74439 6.0 82. 1.68027 6.0 83. 1.59728 6.0 84. 1.49068 6.0 85. 1.35116 6.0 86. 1.18512 6.0 87. 0.96688 6.0 88. 0.69946 6.0 89. 0.38522 7.0 0. 2.16171 7.0 10. 2.16722 7.0 20. 2.16301 7.0 30. 2.17446 7.0 40. 2.17289 7.0 45. 2.16728 7.0 50. 2.15557 7.0 60. 2.11013 7.0 70. 2.02378 7.0 75. 1.95368 7.0 80. 1.81759 7.0 81. 1.76755 7.0 82. 1.71077 7.0 83. 1.63664 7.0 84. 1.53926 7.0 85. 1.41017 7.0 86. 1.24272 7.0 87. 1.02697 7.0 88. 0.75009 7.0 89. 0.41556 8.0 0. 2.13951 8.0 10. 2.14040 8.0 20. 2.14304 8.0 30. 2.15145 8.0 40. 2.14538 8.0 45. 2.13936 8.0 50. 2.13588 8.0 60. 2.08969 8.0 70. 2.01426 8.0 75. 1.94644 8.0 80. 1.82718 8.0 81. 1.78584 8.0 82. 1.73345 8.0 83. 1.66576 8.0 84. 1.57352 8.0 85. 1.45503 8.0 86. 1.29611 8.0 87. 1.08001 8.0 88. 0.79654 8.0 89. 0.44347 9.0 0. 2.11924 9.0 10. 2.12350 9.0 20. 2.11761 9.0 30. 2.13006 9.0 40. 2.12384 9.0 45. 2.12314 9.0 50. 2.11514 9.0 60. 2.07491 9.0 70. 1.99737 9.0 75. 1.94193 9.0 80. 1.83460 9.0 81. 1.79906 9.0 82. 1.74962 9.0 83. 1.69044 9.0 84. 1.60609 9.0 85. 1.49312 9.0 86. 1.33939 9.0 87. 1.12659 9.0 88. 0.84029 9.0 89. 0.47141 10.0 0. 2.09855 10.0 10. 2.10498 10.0 20. 2.10469 10.0 30. 2.11063 10.0 40. 2.11496 10.0 45. 2.10749 10.0 50. 2.09860 10.0 60. 2.05959 10.0 70. 1.98754 10.0 75. 1.93585 10.0 80. 1.83163 10.0 81. 1.80487 10.0 82. 1.76300 10.0 83. 1.70960 10.0 84. 1.63204 10.0 85. 1.52618 10.0 86. 1.37629 10.0 87. 1.16777 10.0 88. 0.87887 10.0 89. 0.48753 12.0 0. 2.07810 12.0 10. 2.07736 12.0 20. 2.07887 12.0 30. 2.08750 12.0 40. 2.08658 12.0 45. 2.08155 12.0 50. 2.07108 12.0 60. 2.03818 12.0 70. 1.96991 12.0 75. 1.91913 12.0 80. 1.84136 12.0 81. 1.81300 12.0 82. 1.78095 12.0 83. 1.73294 12.0 84. 1.66878 12.0 85. 1.57398 12.0 86. 1.43790 12.0 87. 1.23837 12.0 88. 0.94660 12.0 89. 0.54264 15.0 0. 2.03590 15.0 10. 2.03795 15.0 20. 2.04027 15.0 30. 2.04454 15.0 40. 2.05281 15.0 45. 2.04220 15.0 50. 2.03891 15.0 60. 2.00332 15.0 70. 1.94005 15.0 75. 1.90159 15.0 80. 1.83553 15.0 81. 1.81541 15.0 82. 1.78911 15.0 83. 1.75391 15.0 84. 1.69783 15.0 85. 1.62377 15.0 86. 1.50505 15.0 87. 1.32027 15.0 88. 1.03284 15.0 89. 0.60417 18.0 0. 2.00673 18.0 10. 2.00358 18.0 20. 2.00588 18.0 30. 2.01876 18.0 40. 2.01715 18.0 45. 2.02057 18.0 50. 2.01180 18.0 60. 1.97601 18.0 70. 1.91936 18.0 75. 1.88072 18.0 80. 1.82644 18.0 81. 1.81230 18.0 82. 1.78845 18.0 83. 1.75873 18.0 84. 1.72238 18.0 85. 1.65614 18.0 86. 1.55410 18.0 87. 1.38451 18.0 88. 1.10427 18.0 89. 0.66098 20.0 0. 1.98518 20.0 10. 1.98936 20.0 20. 1.99854 20.0 30. 2.00275 20.0 40. 2.00558 20.0 45. 2.00386 20.0 50. 1.99413 20.0 60. 1.96465 20.0 70. 1.90629 20.0 75. 1.86567 20.0 80. 1.81547 20.0 81. 1.80443 20.0 82. 1.78678 20.0 83. 1.76052 20.0 84. 1.72569 20.0 85. 1.66808 20.0 86. 1.57831 20.0 87. 1.41946 20.0 88. 1.14575 20.0 89. 0.69664 25.0 0. 1.94763 25.0 10. 1.95257 25.0 20. 1.95768 25.0 30. 1.96981 25.0 40. 1.97316 25.0 45. 1.96789 25.0 50. 1.96419 25.0 60. 1.93594 25.0 70. 1.87881 25.0 75. 1.84336 25.0 80. 1.80197 25.0 81. 1.78887 25.0 82. 1.77871 25.0 83. 1.76018 25.0 84. 1.73478 25.0 85. 1.69214 25.0 86. 1.61827 25.0 87. 1.48373 25.0 88. 1.23116 25.0 89. 0.77402 30.0 0. 1.91787 30.0 10. 1.92379 30.0 20. 1.93409 30.0 30. 1.93877 30.0 40. 1.94676 30.0 45. 1.94179 30.0 50. 1.93711 30.0 60. 1.90582 30.0 70. 1.85594 30.0 75. 1.82266 30.0 80. 1.78478 30.0 81. 1.77900 30.0 82. 1.76575 30.0 83. 1.75175 30.0 84. 1.73223 30.0 85. 1.69943 30.0 86. 1.64217 30.0 87. 1.52737 30.0 88. 1.29900 30.0 89. 0.84387 ____________________________________________________