Concentric Hemispherical Analyzer (CHA) (also know as an HDA) the axis of which is 60 deg. away from the electron beam Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Cu 29 M3VV 0.061 0.075 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 2.35383 1.0 10. 2.38994 1.0 20. 2.41812 1.0 30. 2.43330 1.0 40. 2.42529 1.0 45. 2.40568 1.0 50. 2.36088 1.0 60. 2.22479 1.0 70. 1.89437 1.0 75. 1.59492 1.0 80. 1.19029 1.0 81. 1.09986 1.0 82. 0.99417 1.0 83. 0.88556 1.0 84. 0.76744 1.0 85. 0.64727 1.0 86. 0.52539 1.0 87. 0.40114 1.0 88. 0.28032 1.0 89. 0.16753 2.0 0. 2.33264 2.0 10. 2.36419 2.0 20. 2.39003 2.0 30. 2.40273 2.0 40. 2.40176 2.0 45. 2.39264 2.0 50. 2.37725 2.0 60. 2.28185 2.0 70. 2.06186 2.0 75. 1.84377 2.0 80. 1.45814 2.0 81. 1.37466 2.0 82. 1.26361 2.0 83. 1.14005 2.0 84. 1.00655 2.0 85. 0.85976 2.0 86. 0.70340 2.0 87. 0.53790 2.0 88. 0.36895 2.0 89. 0.20487 3.0 0. 2.27391 3.0 10. 2.30029 3.0 20. 2.31938 3.0 30. 2.34245 3.0 40. 2.34062 3.0 45. 2.33628 3.0 50. 2.28267 3.0 60. 2.25086 3.0 70. 2.09171 3.0 75. 1.92356 3.0 80. 1.61525 3.0 81. 1.52377 3.0 82. 1.41766 3.0 83. 1.29827 3.0 84. 1.16112 3.0 85. 1.00530 3.0 86. 0.83200 3.0 87. 0.64213 3.0 88. 0.44068 3.0 89. 0.23784 4.0 0. 2.22875 4.0 10. 2.24936 4.0 20. 2.27532 4.0 30. 2.28759 4.0 40. 2.29081 4.0 45. 2.28813 4.0 50. 2.27594 4.0 60. 2.21875 4.0 70. 2.09275 4.0 75. 1.96357 4.0 80. 1.70059 4.0 81. 1.62084 4.0 82. 1.52379 4.0 83. 1.41187 4.0 84. 1.26728 4.0 85. 1.12086 4.0 86. 0.93057 4.0 87. 0.73075 4.0 88. 0.50490 4.0 89. 0.26852 5.0 0. 2.19686 5.0 10. 2.21767 5.0 20. 2.23292 5.0 30. 2.24728 5.0 40. 2.25214 5.0 45. 2.24868 5.0 50. 2.22016 5.0 60. 2.18755 5.0 70. 2.08281 5.0 75. 1.97819 5.0 80. 1.75819 5.0 81. 1.68611 5.0 82. 1.59779 5.0 83. 1.49318 5.0 84. 1.36375 5.0 85. 1.20946 5.0 86. 1.02396 5.0 87. 0.80802 5.0 88. 0.56076 5.0 89. 0.29668 6.0 0. 2.16327 6.0 10. 2.18198 6.0 20. 2.20126 6.0 30. 2.21445 6.0 40. 2.22095 6.0 45. 2.21617 6.0 50. 2.20766 6.0 60. 2.16619 6.0 70. 2.06911 6.0 75. 1.97999 6.0 80. 1.79561 6.0 81. 1.73068 6.0 82. 1.65442 6.0 83. 1.55723 6.0 84. 1.43547 6.0 85. 1.27863 6.0 86. 1.10016 6.0 87. 0.87449 6.0 88. 0.61216 6.0 89. 0.32315 7.0 0. 2.13297 7.0 10. 2.15564 7.0 20. 2.16659 7.0 30. 2.19021 7.0 40. 2.19603 7.0 45. 2.19232 7.0 50. 2.18275 7.0 60. 2.14098 7.0 70. 2.05608 7.0 75. 1.98009 7.0 80. 1.82079 7.0 81. 1.76153 7.0 82. 1.69388 7.0 83. 1.60567 7.0 84. 1.49229 7.0 85. 1.34613 7.0 86. 1.16239 7.0 87. 0.93581 7.0 88. 0.66048 7.0 89. 0.34978 8.0 0. 2.11240 8.0 10. 2.12950 8.0 20. 2.14640 8.0 30. 2.16626 8.0 40. 2.16758 8.0 45. 2.16319 8.0 50. 2.16154 8.0 60. 2.11946 8.0 70. 2.04577 8.0 75. 1.97427 8.0 80. 1.83557 8.0 81. 1.78585 8.0 82. 1.72343 8.0 83. 1.64177 8.0 84. 1.53479 8.0 85. 1.39802 8.0 86. 1.22085 8.0 87. 0.99075 8.0 88. 0.70509 8.0 89. 0.37451 9.0 0. 2.09385 9.0 10. 2.11317 9.0 20. 2.12066 9.0 30. 2.14407 9.0 40. 2.14432 9.0 45. 2.14563 9.0 50. 2.13934 9.0 60. 2.10316 9.0 70. 2.02805 9.0 75. 1.97019 9.0 80. 1.84682 9.0 81. 1.80421 9.0 82. 1.74509 9.0 83. 1.67378 9.0 84. 1.57364 9.0 85. 1.44262 9.0 86. 1.26946 9.0 87. 1.03998 9.0 88. 0.74821 9.0 89. 0.39939 10.0 0. 2.07466 10.0 10. 2.09498 10.0 20. 2.10772 10.0 30. 2.12414 10.0 40. 2.13474 10.0 45. 2.12909 10.0 50. 2.12164 10.0 60. 2.08638 10.0 70. 2.01760 10.0 75. 1.96455 10.0 80. 1.84440 10.0 81. 1.81379 10.0 82. 1.76330 10.0 83. 1.69804 10.0 84. 1.60594 10.0 85. 1.48142 10.0 86. 1.31150 10.0 87. 1.08379 10.0 88. 0.78662 10.0 89. 0.41397 12.0 0. 2.05640 12.0 10. 2.06835 12.0 20. 2.08173 12.0 30. 2.09984 12.0 40. 2.10475 12.0 45. 2.10167 12.0 50. 2.09246 12.0 60. 2.06267 12.0 70. 1.99871 12.0 75. 1.94741 12.0 80. 1.86077 12.0 81. 1.82734 12.0 82. 1.78805 12.0 83. 1.73020 12.0 84. 1.65239 12.0 85. 1.53997 12.0 86. 1.38210 12.0 87. 1.16006 12.0 88. 0.85487 12.0 89. 0.46403 15.0 0. 2.01639 15.0 10. 2.02986 15.0 20. 2.04290 15.0 30. 2.05573 15.0 40. 2.06949 15.0 45. 2.05979 15.0 50. 2.05802 15.0 60. 2.02574 15.0 70. 1.96558 15.0 75. 1.92831 15.0 80. 1.85845 15.0 81. 1.83465 15.0 82. 1.80340 15.0 83. 1.76027 15.0 84. 1.69271 15.0 85. 1.60208 15.0 86. 1.46182 15.0 87. 1.25143 15.0 88. 0.94373 15.0 89. 0.52104 18.0 0. 1.98807 18.0 10. 1.99625 18.0 20. 2.00824 18.0 30. 2.02912 18.0 40. 2.03246 18.0 45. 2.03746 18.0 50. 2.02964 18.0 60. 1.99667 18.0 70. 1.94332 18.0 75. 1.90624 18.0 80. 1.85042 18.0 81. 1.83388 18.0 82. 1.80648 18.0 83. 1.77113 18.0 84. 1.72488 18.0 85. 1.64435 18.0 86. 1.52122 18.0 87. 1.32459 18.0 88. 1.01917 18.0 89. 0.57465 20.0 0. 1.96759 20.0 10. 1.98212 20.0 20. 2.00083 20.0 30. 2.01245 20.0 40. 2.01994 20.0 45. 2.01938 20.0 50. 2.01088 20.0 60. 1.98413 20.0 70. 1.92907 20.0 75. 1.89044 20.0 80. 1.83954 20.0 81. 1.82691 20.0 82. 1.80618 20.0 83. 1.77542 20.0 84. 1.73239 20.0 85. 1.66112 20.0 86. 1.55141 20.0 87. 1.36533 20.0 88. 1.06342 20.0 89. 0.60871 25.0 0. 1.93262 25.0 10. 1.94616 25.0 20. 1.95974 25.0 30. 1.97885 25.0 40. 1.98610 25.0 45. 1.98209 25.0 50. 1.97916 25.0 60. 1.95330 25.0 70. 1.89943 25.0 75. 1.86565 25.0 80. 1.82560 25.0 81. 1.81211 25.0 82. 1.80038 25.0 83. 1.77869 25.0 84. 1.74755 25.0 85. 1.69480 25.0 86. 1.60380 25.0 87. 1.44227 25.0 88. 1.15719 25.0 89. 0.68385 30.0 0. 1.90407 30.0 10. 1.91810 30.0 20. 1.93596 30.0 30. 1.94710 30.0 40. 1.95877 30.0 45. 1.95466 30.0 50. 1.95104 30.0 60. 1.92142 30.0 70. 1.87439 30.0 75. 1.84330 30.0 80. 1.80715 30.0 81. 1.80137 30.0 82. 1.78747 30.0 83. 1.77194 30.0 84. 1.74886 30.0 85. 1.70771 30.0 86. 1.63633 30.0 87. 1.49694 30.0 88. 1.23333 30.0 89. 0.75321 ____________________________________________________