Cylindrical mirror analyzer(CMA) with concentric electron gun Table 1 Auger transitions and values of parameters used in calculations of the backscattering factor _____________________________________________________________________________________ Kinetic energy Ionization energy Pure element Atomic number Auger transition (keV) (keV) _____________________________________________________________________________________ Au 79 N67VV 0.072 0.085 _____________________________________________________________________________________ Table 2 The backscattering factors for quantitative analysis by auger electron spectroscopy(AES) ____________________________________________________ Primary energy Tilt angle (keV) (deg) Backscattering factor ____________________________________________________ 1.0 0. 2.32936 1.0 10. 2.31063 1.0 20. 2.32234 1.0 30. 2.30397 1.0 40. 2.25839 1.0 45. 2.22091 1.0 50. 2.17184 1.0 60. 2.01860 1.0 70. 1.71605 1.0 75. 1.50436 1.0 80. 1.16643 1.0 81. 1.08320 1.0 82. 0.99067 1.0 83. 0.89235 1.0 84. 0.78676 1.0 85. 0.67526 1.0 86. 0.55791 1.0 87. 0.43626 1.0 88. 0.31431 1.0 89. 0.19753 2.0 0. 2.47062 2.0 10. 2.47511 2.0 20. 2.46054 2.0 30. 2.43215 2.0 40. 2.39151 2.0 45. 2.36518 2.0 50. 2.32517 2.0 60. 2.19978 2.0 70. 1.96126 2.0 75. 1.75551 2.0 80. 1.42587 2.0 81. 1.33889 2.0 82. 1.24041 2.0 83. 1.13263 2.0 84. 0.98588 2.0 85. 0.87662 2.0 86. 0.72874 2.0 87. 0.57032 2.0 88. 0.40314 2.0 89. 0.23651 3.0 0. 2.50366 3.0 10. 2.49908 3.0 20. 2.47729 3.0 30. 2.45191 3.0 40. 2.41235 3.0 45. 2.37649 3.0 50. 2.33794 3.0 60. 2.22185 3.0 70. 2.00343 3.0 75. 1.82553 3.0 80. 1.53315 3.0 81. 1.45046 3.0 82. 1.35746 3.0 83. 1.25065 3.0 84. 1.12514 3.0 85. 0.99104 3.0 86. 0.83376 3.0 87. 0.65645 3.0 88. 0.46400 3.0 89. 0.26427 4.0 0. 2.48256 4.0 10. 2.48715 4.0 20. 2.47445 4.0 30. 2.44253 4.0 40. 2.40379 4.0 45. 2.37124 4.0 50. 2.32573 4.0 60. 2.20905 4.0 70. 2.01141 4.0 75. 1.84806 4.0 80. 1.59090 4.0 81. 1.51690 4.0 82. 1.42945 4.0 83. 1.32812 4.0 84. 1.21197 4.0 85. 1.07277 4.0 86. 0.91052 4.0 87. 0.72533 4.0 88. 0.51389 4.0 89. 0.25955 5.0 0. 2.47632 5.0 10. 2.47496 5.0 20. 2.45674 5.0 30. 2.43163 5.0 40. 2.38341 5.0 45. 2.35529 5.0 50. 2.31322 5.0 60. 2.18855 5.0 70. 2.00147 5.0 75. 1.85922 5.0 80. 1.63022 5.0 81. 1.56042 5.0 82. 1.48066 5.0 83. 1.38769 5.0 84. 1.27353 5.0 85. 1.13746 5.0 86. 0.97457 5.0 87. 0.77961 5.0 88. 0.55642 5.0 89. 0.31069 6.0 0. 2.46521 6.0 10. 2.46254 6.0 20. 2.44664 6.0 30. 2.42182 6.0 40. 2.37004 6.0 45. 2.33584 6.0 50. 2.29203 6.0 60. 2.16980 6.0 70. 1.99394 6.0 75. 1.86469 6.0 80. 1.65393 6.0 81. 1.59305 6.0 82. 1.51934 6.0 83. 1.42902 6.0 84. 1.32416 6.0 85. 1.19041 6.0 86. 1.02858 6.0 87. 0.83145 6.0 88. 0.59603 6.0 89. 0.33154 7.0 0. 2.44240 7.0 10. 2.43985 7.0 20. 2.42920 7.0 30. 2.39950 7.0 40. 2.34764 7.0 45. 2.31949 7.0 50. 2.27425 7.0 60. 2.15750 7.0 70. 1.98492 7.0 75. 1.86396 7.0 80. 1.67320 7.0 81. 1.61604 7.0 82. 1.54823 7.0 83. 1.46658 7.0 84. 1.36259 7.0 85. 1.23568 7.0 86. 1.07491 7.0 87. 0.87415 7.0 88. 0.63283 7.0 89. 0.35144 8.0 0. 2.44308 8.0 10. 2.42681 8.0 20. 2.41825 8.0 30. 2.38419 8.0 40. 2.33858 8.0 45. 2.29765 8.0 50. 2.25798 8.0 60. 2.14418 8.0 70. 1.97712 8.0 75. 1.86304 8.0 80. 1.68752 8.0 81. 1.63493 8.0 82. 1.57000 8.0 83. 1.49470 8.0 84. 1.39667 8.0 85. 1.27331 8.0 86. 1.11620 8.0 87. 0.91656 8.0 88. 0.66572 8.0 89. 0.37017 9.0 0. 2.42665 9.0 10. 2.41996 9.0 20. 2.40336 9.0 30. 2.37120 9.0 40. 2.32109 9.0 45. 2.28461 9.0 50. 2.24156 9.0 60. 2.12908 9.0 70. 1.97018 9.0 75. 1.86015 9.0 80. 1.69710 9.0 81. 1.64914 9.0 82. 1.59011 9.0 83. 1.51812 9.0 84. 1.42581 9.0 85. 1.30655 9.0 86. 1.15221 9.0 87. 0.95338 9.0 88. 0.69752 9.0 89. 0.38854 10.0 0. 2.41835 10.0 10. 2.40608 10.0 20. 2.39399 10.0 30. 2.36300 10.0 40. 2.30921 10.0 45. 2.27352 10.0 50. 2.23040 10.0 60. 2.11934 10.0 70. 1.96261 10.0 75. 1.86066 10.0 80. 1.70751 10.0 81. 1.66218 10.0 82. 1.60847 10.0 83. 1.53746 10.0 84. 1.44971 10.0 85. 1.33515 10.0 86. 1.18424 10.0 87. 0.98547 10.0 88. 0.72517 10.0 89. 0.40478 12.0 0. 2.39628 12.0 10. 2.39165 12.0 20. 2.37763 12.0 30. 2.34431 12.0 40. 2.28954 12.0 45. 2.25652 12.0 50. 2.21281 12.0 60. 2.10205 12.0 70. 1.94991 12.0 75. 1.85337 12.0 80. 1.72134 12.0 81. 1.67941 12.0 82. 1.63239 12.0 83. 1.56959 12.0 84. 1.48957 12.0 85. 1.38338 12.0 86. 1.23787 12.0 87. 1.04179 12.0 88. 0.77465 12.0 89. 0.43510 15.0 0. 2.37790 15.0 10. 2.37284 15.0 20. 2.35207 15.0 30. 2.31643 15.0 40. 2.26259 15.0 45. 2.22814 15.0 50. 2.18417 15.0 60. 2.07817 15.0 70. 1.93624 15.0 75. 1.84495 15.0 80. 1.73152 15.0 81. 1.69751 15.0 82. 1.65582 15.0 83. 1.60228 15.0 84. 1.53293 15.0 85. 1.43727 15.0 86. 1.29946 15.0 87. 1.11018 15.0 88. 0.83928 15.0 89. 0.47568 18.0 0. 2.36433 18.0 10. 2.35417 18.0 20. 2.34028 18.0 30. 2.29631 18.0 40. 2.24614 18.0 45. 2.20626 18.0 50. 2.16192 18.0 60. 2.05561 18.0 70. 1.91959 18.0 75. 1.83624 18.0 80. 1.73421 18.0 81. 1.70547 18.0 82. 1.66987 18.0 83. 1.62623 18.0 84. 1.56362 18.0 85. 1.47716 18.0 86. 1.35366 18.0 87. 1.16717 18.0 88. 0.89433 18.0 89. 0.51223 20.0 0. 2.35156 20.0 10. 2.34724 20.0 20. 2.33015 20.0 30. 2.29384 20.0 40. 2.23146 20.0 45. 2.19290 20.0 50. 2.15445 20.0 60. 2.04383 20.0 70. 1.90677 20.0 75. 1.83210 20.0 80. 1.73601 20.0 81. 1.70770 20.0 82. 1.67486 20.0 83. 1.63430 20.0 84. 1.58011 20.0 85. 1.49884 20.0 86. 1.36712 20.0 87. 1.20108 20.0 88. 0.92722 20.0 89. 0.53526 25.0 0. 2.33756 25.0 10. 2.32522 25.0 20. 2.29779 25.0 30. 2.26390 25.0 40. 2.20807 25.0 45. 2.17223 25.0 50. 2.12850 25.0 60. 2.02215 25.0 70. 1.88962 25.0 75. 1.81394 25.0 80. 1.73250 25.0 81. 1.71040 25.0 82. 1.68785 25.0 83. 1.63532 25.0 84. 1.60454 25.0 85. 1.53820 25.0 86. 1.43349 25.0 87. 1.26823 25.0 88. 0.99931 25.0 89. 0.58742 30.0 0. 2.31637 30.0 10. 2.30230 30.0 20. 2.28510 30.0 30. 2.24606 30.0 40. 2.18854 30.0 45. 2.15244 30.0 50. 2.10914 30.0 60. 2.00358 30.0 70. 1.87578 30.0 75. 1.80467 30.0 80. 1.72698 30.0 81. 1.71275 30.0 82. 1.68810 30.0 83. 1.66008 30.0 84. 1.62045 30.0 85. 1.56483 30.0 86. 1.47192 30.0 87. 1.31829 30.0 88. 1.05906 30.0 89. 0.63510 ____________________________________________________